C85

1 y q 5A 5B CJ2 CM2 Non-rotating CG1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Rod cross section Built-in magnet Standard 8 MB Component Parts No.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Bore size (mm) Standard stroke 125, 150, 175, 200, 250, 300 32, 40, 50, 63, 80, 100 Caution Manufacture of Intermediate Stroke Snap Ring Installation/Removal Description Spacer is installed in the standard stroke body. Exclusive body (-XB10) Refer to How to Order for the standard model no. on page 7-6-121. Suffix -XB10 to the end of standard model no. on page 7-6-121. 1.

Prevents Micro-Bubbles

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Minimal dead space The diaphragm is supported by a buffer that minimizes deformation, which gives it long life and resistance to backpressure.

Thermo-chiller/Rack Mount Type

VAC) p. 14 qConcentration Meter p. 36 Water-cooled Refrigeration (Single-phase 200 to 230 VAC) p. 14 wParticle Filter Element for Replacement p. 36 Specifications eDI Filter Replacement Cartridge p. 36 Air-cooled Refrigeration (Single-phase 200 to 230 VAC) p. 15 rAnti-quake Bracket p. 36 Water-cooled Refrigeration (Single-phase 200 to 230 VAC) p. 16 tPiping Conversion Fitting

VQ7-6/7-8

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Conforms to ISO standard 5599/I Interface conforms to ISO standard Size 1 (VQ7-6) and Size 2 (VQ7-8).

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

Load weight (kg) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com m1 m2 m3 Moment (Nm) M3 = F3 x L3 F3 M1 = F1 x L1 F1 M2 = F2 x L2 F2 L1 L2 L3 1.

PF2A/PF2W

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Mounting Warning 1. Mount switches using the proper tightening torque. When a switch is tightened beyond the specified tightening torque, the switch may be damaged.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX D-X 20Data 8-8-1 2 Various auto switches available Travelling parallelism: 0.004 mm Parallelism: 0.02 mm High rigidity and high precision Cylinder is built into the rail of the linear guide.

I

230 Ryan Way, South San Francisco, CA 94080-6370 ! Main Office: (650) 588-9200 ! Outside Local Area: (800) 258-9200 !

HRL

x V x C x iT it m x C x (T0 Tt) it Q = = 1 x 250 x 4.186 x 103 x 12 900 = = 13953 [J/s] 14.0 [kW] m x C x (T0 Tt) it x 860 x V x 60 x C x iT it x 860 Q = = Cooling capacity = Considering a safety factor of 20%, 14.0 [kW] x 1.2 = 1 x 250 x 60 x 1.0 x 103 x 12 15 x 860 16.8 [kW] = Thermo-chiller Q x t: Heat capacity [kJ] 13953 [W] = 14.0 [kW] Water bath 20C Cooling capacity = Considering

Lubrication Equipment

Mounting orientation is Upper direction Model Port size Rc(PT) 63 63 80 85 90 100 B C A INA-11-402 INA-11-403 INA-11-404 INA-11-405 INA-11-406 INA-11-407 1/4 141 164.5 170 180 230 251 15 15 15 20 22 22 3/8 1/4, 1/2 3/8, 3/4 3/4, Bracket dimensions Model Port size B C D E A 1 F 345 419.2 K 57 49.6 J 14 14 H 95 120 G 32.5 0 1 1 1 1 2 4, 1 2, 1 175 250 175 250 87.5 125 460 613 135 209 4, 3 ALD600

IC

Note) If the set pressure is 250 kPa and the output pressure on the pressure sensor is 245 kPa, the deviation is 250 245 = 5 kPa. In order to correct the deviation, the controller increases the output signal until the pressure on the pressure sensor converges at 250 kPa. Step 1 Step 2 Step 3 Step 4 . . . . . . . . . . . . .

MK

MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com RHC MK(2) RS Q G Operating pressure (MPa) RS H A Installation and Adjustment/Regarding Clamp Arm Removal and Reinstallation RZQ 2.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

VQZ115-M VQ110-L 4-14-19 20 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4-14-20

5 Port Solenoid Valve, Series VQC

260.5 13 181.5 230 250 260.5 14 192 240.5 262.5 273 15 202.5 251 275 285.5 16 213 261.5 287.5 298 VV5QC21 S Kit (Serial Transmission Kit: EX500) (L3) (L4) L2 L1 38.5 P = 16 34.5 38.5 76.5 1 1 Indicator light Manual override (12) 13 Approx. 10.5 (5.5) SI UNIT 127 Approx. 3.5 Approx. 5.5 105.5 (35) 80 (46.5) Series EX500 Mounting hole for 4-M5 n 1 2 3 4 5 6 7 Stations D-side 8 U-side C10 3

VQC

260.5 13 181.5 230 250 260.5 14 192 240.5 262.5 273 15 202.5 251 275 285.5 16 213 261.5 287.5 298 VV5QC21 S Kit (Serial Transmission Kit: EX500) (L4) (L3) L2 L1 38.5 P = 16 34.5 38.5 76.5 1 1 Indicator light Manual override (12) 13 Approx. 10.5 (5.5) SI UNIT 127 Approx. 3.5 Approx. 5.5 105.5 (35) 80 (46.5) Series EX500 Mounting hole for 4-M5 n 1 2 3 4 5 6 7 Stations D-side 8 U-side C10 3

CJ2X/CUX/CQSX/CQ2X/CM2X

REC 1/8", 5/32", 3/16" 1/4" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" 1/8", 5/32" 5/32" 3/16" Inch size 12 7 Air flow (l/min (ANR)) 38 Controlled flow CX 0.2 0.1 Effective area (mm2) 0.6 CY 100 180 230 260 390 460 Flow rate (l/min (ANR)) Free flow 1.5 2.7 3.5 4 6 7 Effective area (mm2) MQQ M Note) Supply pressure: 0.5 MPa, Temperature: 20C Courtesy of Steven Engineering, Inc.-230 Ryan Way, South

IR1000/2000/3000

AF Recommended Proper Torque (Nm) AR Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com IR1000 IR2000 IR3000 12.5 21 21 IR 4.

ZSE F/ISE

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Helium leakage test Helium leakage test is conducted on the welding parts.

Rotary Cylinder Series MRQ Size: 32, 40 1

CRB2 CRBU2 CRB1 MSU CRJ Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CRA1 CRQ2 MSQ MRQ D20Component Parts No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !