A_HEC-OM-I009

HEC002-A 240 270 300 390 210 393 385 281 436 HEC006-A 270 300 280 370 240 390 382 278 455 Fig.4-3 Outside drawings of Thermo-con HEC002-A/HEC006-A 4-2 Unit Overview 4.5 Outline of operation The unit is operated as explained below. 4.5.1 Electrical diagram The unit is equipped with electrical circuits as shown below.

Clean Gas Filter

(Refer to page 300.)

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Double acting 125, 140 160, 180 200 Double rod CQ2W 7-6-115 10 to 300 Long Stroke 32, 40, 50 63, 80, 100 Single rod CQ2 Double acting 7-6-121 125 to 300 Anti-lateral Load Single rod CQ2S 32, 40, 50 63, 80, 100 Double acting 32 to 40/5 to 100 50 to 100/10 to 100 7-6-132 With End Lock 20, 25, 32 50, 63, 80 100 Single rod CBQ2 Double acting 20 to 63/10 to 100 80, 100/25 to 100 7-6-142 Air-hydro

VP3145/3165/3185

Coil rated voltage 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 1 2 3 Electrical entry 110 to 120 VAC, 50/60 Hz T E H G Grommet (Lead wire: 300 mm) Grommet (Lead wire: 600 mm) 4 220 VAC, 50/60 Hz 5 6 24 VDC 12 VDC Grommet terminal Conduit terminal D With connector DO Without connector L With lead wire LN Without lead wire LO Without connector M With lead wire MN Without lead wire 7 240 VAC, 50/60

VK3000

VK300-82-2-01 VK300-82-2-03 110 VAC 110V 200 VAC 200V VK300-82-2-02 VK300-82-2-04 220 VAC 220V VK300-82-2-07 VK300-82-4-51 VK300-82-4-06 VK300-82-3-05 VK300-82-3-53 240 VAC 240V 6 VDC 6V 12 VDC 12V 24 VDC 24VD 48 VDC 48VD 3-2-11

Stability of suction position,

Qmax 55.5 C = Qmax: Max. suction flow rate [L/min (ANR)] C: Conductance [dm3/(sbar)] 397 Model Selection Vacuum Equipment Selection Example 7 P Transfer of Semiconductor Chips Selection conditions: (1) Workpiece: Semiconductor chips Dimensions: 8 mm x 8 mm x 1 mm, Mass: 1 g (2) Vacuum piping length: 1 m (3) Adsorption response time: 300 msec or less 1.

EX120/121/122

(EX250-SAS7 Max. 240 mA, EX250-SAS9 Max. 120 mA) Note 6) When the SI unit is mounted to the manifold when shipped, accessories are shipped together with it.

Peltier-type Chiller Thermo-con/ Compact Type

Applicable model HEC-S1896 INR-244-831 HEF002-A6 (254) (1200) Power supply connector (47) (116) DC output connector Label Power supply connector IEC60320 C14 (or equivalent) DC output connector JST: J42FSC-02V-KX Specifications L Power supply input 100-240 VAC, Single-phase, 50/60 Hz, Max. 3.9 A DC output 24 VDC, Max. 12.5 A Pin no. Signal contents N 100-240 VAC Pin no.

2/3 Port Valve

240 390 530 240 390 530 390 530 3 0.33 6 Individual pressure 3.0 5.0 4.5 0.61 11 6 1.05 19 Note 1) It is a grommet valve.

Rotary Actuator

mm H: Lead wire length 600 mm M: With lead wire (length 300 mm) L: With lead wire (length 300 mm) Note) S type is not available with AC mode, since a rectifier prevents surge voltage generation.

Electric Actuators

400 500 600 700 800 900 1000 1200 1500 CABLEVEYOR LJ1S101SC 88 128 116 94 to 300 146 LJ1S202SC 90 130 118 96 to 300 LJ1H101SC 6 48 to 500 LJ1H101PB 2 122 110 44 to 600 104 145 LJ1H101NB 4 46 to 600 LJ1H202SC 124 16 112 58 to 500 LJ1S303SC 146 132 92 120 98 to 300 to 300 to 300 LJ1H202PA 8 50 to 500 124 112 106 LJ1H202NA 12 54 to 500 LJ1H303SE 126 114 22 64 to 500 to 500 to 500 LJ1H202PC

SYJ300/500/700

cable L: With lead wire (Length 300 mm) M: With lead wire (Length 300 mm) M: Common exhaust for the pilot and main valve + + + D: Push-turn locking slotted type + R port P, E port H: Lead wire length 600 mm Pilot valve exhaust is centralized to main valve.

Environment

T4 = 0.05 [s] T1 = V/a1 = 300/5000 = 0.06 [s], T3 = V/a2 = 300/5000 = 0.06 [s] T2 = = = 0.94 [s] L 0.5 V (T1 + T3) V 300 0.5 300 (0.06 + 0.06) 300 T4 = 0.05 [s] Therefore, the cycle time can be obtained as follows.

Air Cylinder Series MB

Made to Order For details, refer to page 300.

VQZ1000/2000/3000

Body Ported Bore size Series CJ2 Pressure 0.5 MPa Load factor 50% Stroke 60 mm Series CM2 Pressure 0.5 MPa Load factor 50% Stroke 300 mm Series MB/CA1 Pressure 0.5 MPa Load factor 50% Stroke 500 mm Average speed (mm/s) Series 6 10 16 20 25 32 40 40 50 63 80 100 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation VQZ1121-C6 Courtesy of Steven Engineering,

Integrated Controller

50 100 150 200 250 300 350 400 30 50 100 150 200 250 300 350 400 450 500 Product weight [kg] 1.74 1.81 1.98 2.24 2.42 2.59 2.77 2.94 3.12 2.74 2.85 3.14 3.42 3.82 4.11 4.39 4.68 4.97 5.25 5.54 In-line Motor Series EQY16D Stroke [mm] 30 50 100 150 200 250 300 Product weight [kg] 0.72 0.76 0.87 1.01 1.12 1.23 1.34 Series EQY25D EQY32D Stroke [mm] 30 50 100 150 200 250 300 350 400 30 50 100

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

[87.1] (Lead wire length) 300 57.1 [ ] for AC Other dimensions are the same as the grommet

Valve Single Unit

A: Orange B: Green G: 300 H: 600 (Press and turn for the locking type.)

Air Cylinder Series CS1

125 to 160 Standard CDS1 CS120XA XB5 XB6 XB7 XB9 XB16 XC3 XC4 XC5 XC6 Standard 125 to 300 Built-in magnet 125 to 200 J K With rod boot 125 to 300 Copper and Fluorine-free 125 to 160 Change of rod end shape 125 to 300 Oversized rod cylinder 125 to 200 Heat-resistant cylinder (10 to 150 C) Cold-resistant cylinder 125 to 300 Low-speed cylinder (5 to 50 mm/s) Large-bore air-hydro cylinder 180

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

Standard length is 300 mm, but the following lengths are also available.