5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

SV 44 185 24.5 24.5 181 175 EB EA B RATE 165 MODEL SV (SI No.EX124U-SMJ1) LERR.

Air Cylinder/Low Friction Series MB l Q ø32, ø40, ø50, ø63, ø80, ø100

, 200, 250, 300, 350, 400, 450, 500 C95 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 CA1 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 CS1 80 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 100 25, 50, 75, 100, 125, 150, 175, 200, 250

VZ1000

(Values at the initial period) Option Solenoid Specifications Grommet (G)/(H), L plug connector (L), M plug connector (M), DIN terminal (D) 100, 200, 24, 48, 110, 220 Electrical entry AC 50/60 Hz DC Made to Order Specifications (For details, refer to page 3-3-85.)

energy saving effect

Page 175 Required Cooling Capacity Calculation . Page 184 List of Function . Page 175 Precautions on Cooling Capacity Calculation ... Page 185 Alarm . Page 175 Circulating Fluid Typical Physical Property Values ... Page 185 Communication Function . Page 176 Specific Product Precautions . Page 186 Options With Caster Adjuster-foot . Page 177 With Earth Leakage Breaker .

Manifold Specifications

Internal wiring 1 3 5 6 M5 C4 C6 VZ323MOZApplicable valve model Rated voltage 100 VAC 50/60 Hz, 110 VAC 50/60 Hz, 24 VDC, 12 VDC Note ) Withstand voltage specifications of wiring unit part is equivalent to JIS C 0704 class 1.

Digital Gap Checker

] The distance of switch ON [mm] The distance of switch ON [mm] 0.25 mm 0.05 mm 0.5 mm 0.05 0.25 0.50 0.04 0.20 0.40 0.15 mm 0.3 mm 0.03 mm 0.03 0.15 0.30 0.02 0.10 0.20 0.01 mm 0.01 0.05 0.10 0.05 mm 0.02 mm 0 0 0 Supply pressure [kPa] 75 100 125 150 175 200 225 Supply pressure [kPa] 75 100 125 150 175 200 225 Supply pressure [kPa] 75 100 125 150 175 200 225 10 ISA3 Series Response Time

MGQ

MGQ 12, 16 M L 10, 20, 30, 40, 50, 75, 100 2020, 30, 40, 50, 75, 100 125, 150, 175, 200 Data MGQ 20, 25 M L M L MGQ 32, 40 50, 63 80, 100 25, 50, 75, 100, 125 150, 175, 200 OUT (N) IN (N) Theoretical Output (N) Bore size (mm) Operating pressure (MPa) Rod size (mm) Operating direction Piston area (mm2) 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 Made to Order Specifications (For details, refer to

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

:nu=s,--I _, override ~9' I ",0$' V.NPTF ~3.41(86.5) 5.08(129) 6.50(165) 6.89(175) 0.08(2) 0.47(12) Bottom porting 2.50(63.5 NWSFR3-10( stations )2-~ p=.~~.

CM2

135 160 185 12.5 25 37.5 50 75 100 125 52 65 77 90 115 140 165 32 18.2 36 32 72 185 25 37.5 50 75 100 125 85 97 110 135 160 12.5 52 65 77 90 115 140 165 40 20.2 46 41 77 25 37.5 50 75 100 125 90 102 115 140 165 12.5 54 67 79 92 117 142 167 190 With Rod Boot With Air Cushion Built-in One-touch Fittings Symbol Q P N1 WB G ZZ Bore size (mm) WA Bore size (mm) Stroke Bore size (mm) 20 20 1 to

CM2

With rod boot (mm) Symbol Z h l Stroke f e 1 to 50 1 to 50 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 51 to 100 101 to 150 151 to 200 201 to 300 51 to 100 101 to 150 151 to 200 201 to 300 Bore 68 81 93 106 131 12.5 25 37.5 50 75 160 173 185 198 223 17 36 20 72 85 97 110 135 12.5 25 37.5 50 75 164 177 189 202 227 17 36 25 72 85 97 110 135 12.5 25 37.5 50 75 166 179 191 204 229 17 36

Table of Contents

220 77.5 80 50 40 18 9 88 35 3 9 4.6 74 226 187 38 110 235 93 96 70 50 20 11 115 44.5 3.3 11 6.4 84 303 264 43 110 282 98 96 70 50 20 11 11 6.4 117.5 84 44.5 3.3 318 279 45 110 292 98 101 70 50 20 11 11 6.4 117.5 84 44.5 3.3 318 280 46 110 297 Note 1) For AC20 only, the position of the pressure gauge is above the center of the piping.

CXT

Tube bore size B, #2(#2+#3) 40 125, 150, 175, 200, 250, 300 55 14 14 3.8-9 Series CXT Auto Switch Specifications Refer to p.5.3-2 for details on auto switch.

Compact Guide Cylinder Series MGQ

MGQ 12, 16 M L 10, 20, 30, 40, 50, 75, 100 20, 30, 40, 50, 75, 100 125, 150, 175, 200 M L MGQ 20, 25 MGJ MGQ 32, 40 50, 63 80, 100 25, 50, 75, 100, 125 150, 175, 200 M L MGP MGQ OUT(N) IN(N) Theoretical Output (N) Bore size (mm) MGG Operating pressure (MPa) Rod size (mm) Operating direction Piston area (mm2) 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 MGC Made to Order Specifications (For details

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

1.5 R1 R2 R1 R2 5 3 1 P 5 3 1 P Cross section 0.23mm2 < >: AC < >: AC Dimensions Equation L1=10.5n+9.5 L2=10.5n+17.5 n: Station (Max. 20 stations) L n 2 30.5 38.5 62.5 73 18 198.5 206.5 237.5 248 19 209 217 237.5 248 20 219.5 227.5 250 260.5 15 167 175 200 210.5 16 177.5 185.5 212.5 223 17 188 196 225 235.5 10 114.5 122.5 150 160.5 11 125 133 162.5 173 12 135.5 143.5 175 185.5 13 146 154

Hygienic Design Cylinder Series HY

65 70 75 80 85 90 95 100 105 110 75 80 85 90 95 100 105 110 115 120 145 170 80 85 90 95 100 105 110 115 120 125 150 175 100 105 110 115 120 125 130 135 140 165 190 100 105 110 115 120 125 130 135 140 165 190 10 13.5 9 9 13 9.5 HYDQ/With built-in magnet D C D C D C Mounting bolt part no.

Table of Contents

D(Finger closing port) M5 x 0.8 (Finger closing port) M5 x 0.8 20Auto switch mounting groove (4 locations) 4-M6 x 1 (Piston rod and rack screw) Width across flats 10 (4 locations) Closed E 4-M5 x 0.8 through Open F (Thread for mounting attachment) (mm) A B C D E F G H 40 70 90 J 98 152 192 Model MHL2-16D MHL2-16D1 MHL2-16D2 45 75 95 60 90 110 28 58 78 68 110 130 98 170 210 128 200 240 26

ZP

60 20 120 70 30 130 80 50 175 100 75 50 40 47.5 B5 06 08 N6 U6 A14 4 M14 x 1 19 4 12 M8 x 1.25 10 114 64 51.5 50 20 124 74 30 134 84 50 179 104 75 50 Dimensions Per Vacuum Inlet: Female Thread Model L M N P Vacuum inlet direction q Pad dia.

7.5

Note 2) For manifold dimensions including elbow fitting, refer to page 24. 2 n L L: Dimensions n: Stations 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 L1 L2 L3 L4 223 235.5 248 248 260.5 273 285.5 298 298 310.5 323 335.5 348 348 135.5 135.5 148 160.5 173 185.5 185.5 198 210.5 125 125 137.5 150 162.5 175 175 187.5 200 212.5 225 237.5 237.5 250 262.5 275 287.5 287.5 300 312.5

Proposals for Energy Saving

VP542-D Series VP500 VP544-G Grommet (G), Grommet terminal (E), Conduit terminal (T), DIN terminal (D) 100, 200, 12, 24, 48, 110 to 120, 220, 240 Note 1) Electrical entry VP742-T Series VP700 DC AC (50/60Hz) Rated coil voltage V VP744-E 24, 6, 12, 48, 100, 110 Note 1) 15% to +10% of rated voltage 5.6 (50Hz), 5.0 (60Hz) 3.4 (50Hz), 2.3 (60Hz) 1.8 or 2 (with indicator light) Power consumption

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

Dimensions Formulae L1 = 11n + 15.5 L2 = 11n + 55 n: Stations (max. 16 stations) L n 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 191.5 231 262.5 273 16 L1 L2 (L3 ) (L4 ) 26.5 66 87.5 98 37.5 77 100 110.5 48.5 88 112.5 123 59.5 99 125 135.5 70.5 110 137.5 148 81.5 121 150 160.5 92.5 132 162.5 173 103.5 143 162.5 173 114.5 154 175 185.5 125.5 165 187.5 198 136.5 176 200 210.5 147.5 187 212.5 223 158.5