MNB

100 80 80 200 200 63 63 100 100 50 50 40 40 80 80 100 100 Load weight: m (kg) Load weight: m (kg) CL 63 63 50 40 30 50 40 30 32 32 50 50 40 40 CL1 20 20 32 32 MLGC 10 10 CNG 5 4 3 5 4 3 MNB 2 2 1 100 200 300 400 500 1000 1 100 200 300 400 500 1000 CNA Maximum speed: V (mm/s) Maximum speed: V (mm/s) CNS Graph (6) Graph (3) 0.4 MPa P < 0.5 MPa 0.4 MPa P < 0.5 MPa CLS 1000 1000 100 100 CLQ

MNB

4 3 -X 2 2 201 100 200 300 400 500 1000 1 100 200 300 400 500 1000 Data Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph (7) Graph (4) 0.5 MPa P 0.5 MPa P 1000 1000 100 100 80 80 500 400 300 500 400 300 63 63 100 100 50 50 40 40 80 80 200 200 63 63 100 100 32 32 50 50 40 40 Load weight: m (kg) Load weight: m (kg) 50 40 30 50 40 30 32 32 20 20 10 10 5 4 3 5 4 3 2 2 1 100 200 300 400

Sine Rodless Cylinder Series REA/REB

Find the distance Lo (cm) from the point of the load where driving force is applied, to the center of the cylinder shaft. 300 Recommended driving force Fn (N) Recommended driving force Fn (N) 200 200 100 100 3.

Floating Joint

Model Order no. d: Thread nominal size d: Thread nominal size H H B C B C JA6-3-050 JA10-4-070 JA15-5-080 JA15-6-100 JA20-8-100 JA20-8-125 JA32-10-100 JA30-10-125 JA25-10-150 JA40-12-125 JA40-12-150 JA40-12-175 JA40-14-150 JA50-16-150 JAH40-16-150 JA63-16-200 JA63-18-150 JAH50-20-150 JA80-20-250 JA80-22-150 JAH63-24-150 JAH63-24-200 JA100-24-300 JA100-26-150 JA100-27-150 JA125-27-200 JA140

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

Bore size Series MB, CA2 Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CS1/CS2 Pressure 0.5 MPa Load factor 50% Cylinder stroke 1000 mm Average speed (mm/s) System 40 50 63 80 100 125 140 160 180 200 1000 Perpendicular, upward actuation Horizontal actuation 900 800 700 600 500 400 300 200 100 0 A 1000 900 800 700 600 500 400 300 200 100 0 B System Components It is when the cylinder

C95

200 200 50 40 50 50 100 100 C95 63 Load weight: m [kg] Load weight: m [kg] 32 50 40 50 40 30 50 40 30 C92 32 20 20 CA1 [Example] 10 10 CS1 5 4 3 5 4 3 2 2 1 100 200 300 400 500 1000 1 100 200 300 400 500 1000 s] Maximum speed: V [m m/ s] Maximum speed: V [m m/ Graph 7 Graph 4 0.5MPaP 0.5MPaP 1000 1000 100 80 500 400 300 500 400 300 63 100 80 50 40 200 200 63 100 100 Load weight: m [kg] 32

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

, 200, 300 10 -X 100, 200, 300, 400, 500 750 15 1 axis 100, 200, 300, 400, 500, 600 1000 20 20100, 200, 300, 400, 500, 600, 800 25 1200 100, 200, 300, 400, 500, 600, 800, 1000 25 Data 2 axes 1500 32 Note) Please contact SMC if it is used by exceeding the maximum stroke length.

REA/REB

Model selected 10-2-8 8 Series REA Model Selection 2 Caution on Design 1 Selection Method RE A B 25 40 32 500 500 REC 200 300 400 300 200 300 200 Recommended driving force Fn (N) Recommended driving force Fn (N) CX Recommended driving force Fn (N) 100 100 100 CY 50 40 20 30 40 50 20 30 40 50 20 30 MQQ M Usable range

REA/REB

Model selected 10-2-8 8 Series REA Model Selection 2 Caution on Design 1 Selection Method RE A B 25 40 32 500 500 REC 200 300 400 300 200 300 200 Recommended driving force Fn (N) Recommended driving force Fn (N) CX Recommended driving force Fn (N) 100 100 100 CY 50 40 20 30 40 50 20 30 40 50 20 30 MQQ M Courtesy of

IDU/IDF

/100 to 110VAC (50/60Hz) Single phase, 200/200 to 220VAC (50/60Hz) Single phase, 220, 240/200 to 240VAC (50Hz) Power source 225 275 205 240 182 189 250 350 220 280 265 275 305 380 300 350 280 295 340 415 325 375 332 50Hz 60Hz 50Hz 60Hz 50Hz 50Hz 50Hz 100 VAC 200 VAC Power consumption (W) 220 to 240VAC 220VAC 240VAC JIS Symbol 10 (for 100VAC), 5 (for 200VAC) Air cooled R134a Circuit breaker

Vacuum System Peripherals:

C1 Model (Stock item) Pressure range Note) Model Unit Connecting Note (kPa) GZ46-K-01 to 02 100 to 0 1 8 1 8 1 4 kPa R , kPa With covering assembly GZ46-K-01 to 02-C, C1 100 to 0 R ,1 4 1 8 1 4 kPa GZ46-K-01 to 02M 100 to 0 GZ46-K2K-01 to 02 100 to 200 R , M5 (Female thread) kPa GZ46E-K-01 to 02M 100 to 0 1 8 1 4 R , M5 (Female thread) R , 1 8 1 4 kPa Note) Do not apply pressure that exceeds

e

1 1 100 200 300 400 500 1000 1500 1 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 Speed (mm/s) Speed (mm/s) Speed (mm/s) 1121 Model Selection Maximum Allowable Moment/Maximum Load Mass Moment: E-MY2HT (Double Axis) E-MY2HT/M1 E-MY2HT/M3 E-MY2HT/M2 300 300 300 200 200 200 100 100 100 Moment (NNm) Moment (NNm) Moment (NNm) 50 50 50 40 40 40 E-MY2HT25 E-MY2HT25 E-MY2HT25 30 30

IDG

(Because barrel nipples are used for equipment connections.) 100 Standard dew point temperature and air flow rate Outlet air flow rate Purge air flow rate (l/min(ANR)) Flow rate by size Symbol Standard dew point (C) 5 50/12 50/6 3 25/6 25/3 10 100/2 20 200/5 30 300/7 50 60 75 100 Nil H 20 15 500/12 600/12 750/15 1000/19 Drain discharge method 500/6 600/6 750/8 100/1 200/2 300/3 1000/11

Mechanically Jointed Rodless Cylinder Series MY2

200 1003 5 10 20 30 1003 5 10 20 30 50 100 200 60 50 100 200 Horizontal Vertical (downward) Vertical (upward) m2 max. m1 max. m3 max. m1, m2, m3 max.

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

200 1003 5 10 20 30 1003 5 10 20 30 50 100 200 60 50 100 200 Horizontal Vertical (downward) Vertical (upward) m2 max. m1 max. m3 max. m1, m2, m3 max.

VFS

Bore size Series CM Pressure 0.5 MPa Load factor 50% Stroke 300 mm Series MB Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CS1 Pressure 0.5 MPa Load factor 50% Cylinder stroke 1000 mm Average speed (mm/s) System 20 25 32 40 40 50 63 80 100 125 140 160 VK 800 700 600 500 400 300 200 100 Perpendicular, upward actuation Horizontal actuation VZ A VF 0 VFR 800 700 600 500 400 300 200 100

5 Port Solenoid Valve Series SV1000/2000/3000/4000

1.0 1.2 1.4 1.6 1.8 2.0 400 MB 50 10% 30% 70% 300 Stroke (mm) Stroke (mm) Stroke (mm) Stroke (mm) 50% AS2201F -02-10 200 100 50% 30% 10% 70% 0 400 MB 63 300 AS3201F -03-10 200 100 0 SV300 ANA1 -C12 T1075 400 MB 80 300 AS4000-03 200 100 0 400 MB 100 300 200 AS4000-04 100 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200 Speed at the end (mm/s

LEY-OM007

150 200 250 300 30 50 100 150 200 250 300 350 400 30 50 100 150 200 250 300 350 400 450 500 (kg) 0.580.62 0.73 0.87 0.98 1.09 1.20 1.181.25 1.42 1.68 1.86 2.03 2.21 2.382.56 2.09 2.20 2.49 2.77 3.17 3.46 3.74 4.03 4.32 4.60 4.89 LEY 16 D LEY 25 D LEY 32 D [mm] 1) 30 50 100 150 200 250 300 30 50 100 150 200 250 300 350 400 30 50 100 150 200 250 300 350 400 450 500 (kg) 0.580.62 0.73 0.87

CL

Standard Stroke Bore size (mm) Standard stroke (mm) 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50, 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80, 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 Max.

1.1 LINEAR ACTUATORS: AIR CYLINDERS SERIES NCJ2 SERIES NCJ2 BORE SIZES Ø6•10•16 Double Acting Single Rod / Double Rod Single Spring Return / Extend Compact and Lightweight Auto Switch Sensing Optional M A D E I N USA Non Rotating Piston Rod Optional High

, 150, 200 10 (3/8) 050. 100. 150, 200, 300, 400, 500, 600 16 (5/8) 050, 100, 150, 200, 300, 400, 500, 600, 700, 800 MaxImum Operating Pressure 0.7MPa / 100 PSI 6 0.1MPa / 17 PSI Minimum Operating Pressure 10, 16 0.05MPa / 8.5 PSI Ambient and Fluid Temperature -10C~+70C / 14~158F P O R T L O C AT I O N O N H E A D C O V E R Cushion Rubber Cushion (Standard) Symbol Bore Size: 6 10, 16 R In-Line