VFS

pilot External pilot Nil Option How to Order Pilot Valve Assembly Option SF4 F 1 22 Coil rated voltage 1 100 VAC, 50/60 Hz 2 200 VAC, 50/60 Hz 3110 to 120 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz 5 24 VDC 6 12 VDC 7 240 VAC, 50/60 Hz 9 Other Option Refer to page 3-8-5 for voltage conversion. 3-8-100 101 5 Port Pilot Operated Solenoid Valve Metal Seal, Plug-in/Non Plug-in Series VFS6000 Cylinder

Free Mount Cylinder

25 30 38 48 5 6 8 10 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1.0 M8 x 1.25 M10 x 1.25 4 9 9 13.5 2 4.5 4.5 4.5 3.5 5 5 5 With auto switch S Without auto switch Bore size (mm) 5 st 38 41 45 41 45 47 S Z Z 10 st 43 46 50 46 50 52 15 st 48 56 60 56 60 62 5 st 56 62 66 65 73 79 10 st 66 72 76 75 83 89 15 st 76 87 91 90 98 104 5 st 38 41 45 51 55 57 10 st 43 46 50 56 60 62 15 st 48 56 60 66 70 72 5

High Vacuum Angle Valve

VAC, 50/60 Hz XLA 3 110 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz U XL XL 5 24 VDC 6 12 VDC S type: Not available for AC.

Compact Cylinder Series CQS

M4 x 0.7 M4 x 0.7 M6 x 1.0 M6 x 1.0 6.5 6.5 9 9 12.5 12.5 14 16 7 7 10 10 4 4 7 7 0.5 0.5 1 1 5 to 30 5 to 30 5 to 50 5 to 50 Note 1) For basic style 20 and 25 with 5 stroke, through-hole is threaded over the entire length.

Basic type / Direct mount type Series CY3B/CY3R

CY3B15 CY3B50 1000 500 50 40 30 20 300 200 10 5 100 Usable range Usable range 20 30 40 50 1 0 1 2 3 4 5 6 10 0 1 2 3 4 5 6 Distance from cylinder shaft center Lo (cm) 7 8 9 10 11 7 8 9 10 11 12 13 14 15 Distance from cylinder shaft center Lo (cm) CY3B63 CY3B20 200 1000 100 500 400 50 300 200 100 10 5 Usable range 20 30 40 50 Usable range 1 0 1 2 3 4 5 6 10 0 1 2 3 4 5 6 Distance from cylinder

Electric Actuator with Integrated Guide

The tables above show the definition for each symbol only and cannot be used for actual model selection. 1 5 Standard Motor Series LTF6 Motor Output Ground Ball Screw 100W 10mm/6mm lead Horizontal Mount How to Order Stroke LTF6E PF 1 R 2 Motor/switch entry direction Left entry Power supply voltage Cable length 1 2 100V/110V AC(50/60Hz) 200V/220V AC(50/60Hz) 2 3 4 5 2m 3m 4m 5m Motor/switch

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

P)(EB) 5 1 3 3 2 1 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz VQC 3 position closed center 110 to 120 VAC, 50/60 Hz (B) (A) 4 2 4 220 VAC, 50/60 Hz VQZ 5 6 24 VDC 12 VDC 3 SQ (EA)(P)(EB) 5 1 3 7 240 VAC, 50/60 Hz 9 Other 3 position exhaust center VFS Option (B) (A) 4 2 4 VFR (EA)(P)(EB) 5 1 3 VQ7 3 position pressure center (B) (A) 4 2 5 (EA)(P)(EB) 5 1 3 How to Order Pilot Valve Assembly SF4

ZP

5 10 102.5 52.5 16.5 20 112.5 62.5 (Rotating angle) 40 19.5 13.5 50 40, 50 50 12 30 122.5 72.5 50 167.5 92.5 75 Vacuum inlet: One-touch fitting Applicable tubing O.D.

CATALOG VC10

Burst Pressure: Series 20, 30, 50 5000 PSI Series 70 4000 PSI Leakage: Bubble tight for standard valves Vacuum: To 5 Microns Consult factory .88 .44 (11.2) (22.4) ADD .165 (4.2) FOR SPADE TERMINAL COIL OPTION * ELECTRICAL CHARACTERISTICS Coil Voltage: Series 20 5 to 825 VAC 50-60 HZ. 1.8 to 265V DC Series 30 5.2 to 650 VAC 50-60 HZ. 2 to 240V DC Series 50 5.4 to 575 VAC 50-60 HZ. 3.0 to

TABLE OF CONTENTS

SERIES 15 FLOW CHARTS 400 400 1/32 1/32 3/64 3/64 1/16 1/16 3/32 3/32 1/8 1/8 ORIFICE-INCH ORIFICE-INCH 100 100 50 50 PRESSURE PRESSURE DROP ROP PSI PSI 10 10 5 01 01 02 02 05 05 1 2 5 WATER FLOW-GPM SERIES 50 FLOW CHARTS COAST PNEUMATICS 8055 E.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

Models suitable to satisfy the requirement of 100 (N) are CY332 or CY340. 50 100 20 30 40 50 10 Usable range 10 5 5 Usable range 1 0 1 2 3 4 5 6 1 0 1 2 3 4 5 6 7 8 9 10111213 7 8 9 1 01 11 21 3 1 41 5 Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CY3B25 500 300 200 100 20 30 40 50 10 Usable range 5 1 0 1 2 3 4 5 6 7 8 9 10111213 Distance from cylinder

CA2

1 Air Cylinder Series CA2 40, 50, 63, 80, 100 CJ1 CJP 4 1 CJ2 Able to absorb 30% more kinetic energy at the maximum. 5 to 15% reduction in weight By the adoption of die-cast cover, this model is 5 to 15% lighter than Series CA1.

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

SB) 7 5 5 5 3 7.5 5 3 5 3 90 90 5 90 5 A MHZ 20 20 20 20 (3 x SA) 20 20 MHF Section SD SD MHL MHSJ3-63D MHSJ3-80D MHR MHK 4 MHS 10 4 11 MHC 3 5 3 5 90 90 MHT 5 MHY 20 20 20 20 MHW -X (mm) L 2H9 3H9 4H9 6H9 8H9 J 20 21 24 28 32 HB 65 75 88 106 130 HA 76 86 103 125 158 FX 22 26 32 40 50 EO 15.5 19 24 31 41 EC 11.5 15 18 23 31 DO 35.5 40 48 59 73 DC 31.5 36 42 51 63 AE 36 37 46 50 57 CA 9.5

VFR

2 4 (EA) (P)(EB) 5 1 3 3 position pressure center (B) (A) 4 2 5 (EA) (P)(EB) 5 1 3 How to Order Pilot Valve Assembly SF4 22 F 1 Coil rated voltage Symbol Rated voltage 1 100 VAC, 50/60 Hz 2 200 VAC, 50/60 Hz 3 110 to 120 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz 5 24 VDC 6 12 VDC 7 240 VAC, 50/60 Hz 9 Other Option 3-5-94 95 5 Port Pilot Operated Solenoid Valve Rubber Seal, Plug-in/Non Plug-in

Table of Contents

) 200 VAC (50/60 Hz) 110 to 120 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Other VY1 G Option D: Type D DIN terminal Nil G None PPA With pressure gauge AL How to Order Pilot Valve Assembly SF4 1 G 80 Y: Type Y DIN terminal Rated coil voltage 1 2 3 4 5 6 9 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 to 120 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Other Soft start-up valve Note) The

Pneumatics Best 2 Auto Switch Guide Applicable Cylinder Series 1 CDA2-X1184 MDB-X1184 CDQ2-XB14 CDG5·S CDJ5·S Cylinder series CDJP2 MDU-Z CDQM CDQS HYDQ CDJ2 CDM2 CDM3 MDB1 HYDB CDG1 CDG3 CDQ2 CDUJ CDA2 CDS1 CDS2 MDB RDQ CQU CDU ø125 to ø200 ø125 to ø160

After wiring, confirm that tightening gland and all screws are tightened. 100 VAC 24 VDC 200 VAC Load voltage 5 to 25 mA 5 to 50 mA 5 to 12.5 mA Load current range (2) Built-in Contact protection circuit 2.4 V or less (to 20 mA)/3.5 V or less (to 50 mA) Internal voltage drop Indicator light Red LED illuminates when turned ON.

10

5 5.5 5.5 10.5 10.5 0 0 3 3 0 0 2.5 2.5 4.5 4.5 2 2 50 10 9 6 5 6.5 5.5 11.5 10.5 0 0 4 3 0 0 3.5 2.5 5.5 4.5 3 2 63 10 9 6 5 6.5 5.5 11.5 10.5 0 0 4 3 0 0 3.5 2.5 5.5 4.5 3 2 80 14.5 11.5 10.5 7.5 11 8 16 13 4.5 1.5 8.5 5.5 4.5 1.5 8 5 10 7 7.5 4.5 100 14 12 10 8 10.5 8.5 15.5 13.5 4 2 8 6 4 2 7.5 5.5 9.5 7.5 7 5 125 16 16 12 12 12.5 12.5 17.5 17.5 6 6 10 10 6 6 9.5 9.5 11.5 11.5 9 9 Models

CQS

32.5 A 32 32 41 44 12 16 20 25 17 17 19.5 22.5 40.5 41.5 51 57.5 35 to 100 35 to 100 75 to 200 75 to 300 5 to 30 5 to 30 5 to 50 5 to 50 Bore (mm) 12 16 20 25 RR CZ CX CW CU CT CD 6 6 9 10 10 12 16 20 5 6.5 8 10 14 15 18 20 7 10 12 14 4 4 5 5 5 5 8 10 * Refer to P.2.3-18 for detail of the rod end nut and mounting brackets.

Environment

15 20 0 10 5 15 20 30 25 0 10 40 50 20 30 0 10 40 50 20 30 60 70 80 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 2000 2000 1000 1000 800 800 1500 1500 m Me L8 [mm] L8 [mm] L8 [mm] L8 [mm] 600 600 L8 Wall 1000 1000 Y 400 400 500 500 200 200 0 0 0 0 0 10 5 15 20 0 10 5 15 20 30 25 0 10 40 50 20 30 0 10 40 50 20 30 60 70 80 Work load [kg] Work load [kg] Work load [kg] Work load

SY

Note Manifold type Manifold block assembly part no. 45(N)F (D-sub connector type) SX 000-50-3A3 5 : For SY3000 C4: 4 One-touch fitting C6: 6 One-touch fitting For SY5000 C4: 4 One-touch fitting C6: 6 One-touch fitting C8: 8 One-touch fitting P PG PH 45(N) (Flat ribbon cable type) 3 5 SX 000-50-5A45G PC wiring compatible 45 (Terminal block type) T T1 3 5 SX 000-50-7A143 Type45 Base Mounted