Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

200 1003 5 10 20 30 1003 5 10 20 30 50 100 200 60 50 100 200 Horizontal Vertical (downward) Vertical (upward) m2 max. m1 max. m3 max. m1, m2, m3 max.

MY2

200 1003 5 10 20 30 1003 5 10 20 30 50 100 200 60 50 100 200 Horizontal Vertical (downward) Vertical (upward) m2 max. m1 max. m3 max. m1, m2, m3 max.

Cylinder with Lock

Bore size B TA TL TU TC TX TZ TO TR TT TS TH TF TY1 TY2 Z TDH10 32 151 40 169 50 187 63 199 80 247 100 266 MB-S03 32 46 62 45 8.5 62 50 74 12 7 13 10 35 47 49 71 148 12+0.070 0 MB-S04 40 52 80 60 10 80 63 97 17 9 17 12 45 60 58 77.5 166 16+0.070 0 50 65 80 60 10 92 75 109 17 9 17 12 45 60 71 91 183 16+0.070 0 MB-S06 63 75 100 70 15 110 90 130 20 11 22 14 60 80 87 103 195 20+0.084 0 80 95

0.4

Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Note 1) Refer to page 16 for power consumption of AC type.

CL

(The lock-up cylinder can operate at 50 to 200 mm/s.)

Non-standard Motor/Horizontal Mount Specification Series LJ1H10

Transfer load m (kg) 600 L2 400 Mer L2 (mm) Rolling Yawing m 200 L2 Mer 0 20 40 60 m Transfer load m (kg) 2000 a = 1000 L3 (mm) L3 1000 a = 2000 m a = 3000 Mey a 0 20 40 60 Transfer load m (kg) Refer to page 145 for deflection data. 60 Non-standard Motor/Horizontal Mount Specification Series LJ1H30 Dimensions/LJ1H303PD(X10) Scale: 10% 8H10 depth 10 4-M8 x 1.25 thread depth 10 120 4-M12

IDU/IDF

(315) 600 (60) 220 (141) (445) (85) Illuminated switch Evaporation thermometer (68) [200 to 240 VAC specification] Power cord outlet Ventilation air outlet Ventilation air inlet (B) [200 to 240VAC specification] Terminal block A D (159) 250 4-13 C Drain port Rc 1/4 278 450 65 [100VAC specification] Power cord Auto drain is packed together with air dryer.

53

VAC (50 Hz), 3-phase 200 to 230 VAC (60 Hz) 3-phase 380 to 415 VAC (50/60 Hz) HRS (400 V as standard) HRS 090 (Only 200 V as an option) Water-cooled refrigeration 11.0 kW HRS 100/150 HRSH 090 HRSH 090 Circuit diagram HRSH HRSH090-W-m (Water-cooled refrigeration) HRSH090-A-m (Air-cooled refrigeration) * This circuit construction of the position of the parts may be different from actual product

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

800 800 Mey L5 [mm] L5 [mm] L5 [mm] 600 600 600 m Wall L5 Y 400 400 400 200 200 200 0 0 0 0 10 20 30 40 50 0 10 20 30 40 50 60 70 0 5 10 15 20 25 30 35 Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 800 800 800 L6 L6 [mm] L6 [mm] L6 [mm] 600 600 600 Z 400 400 400 200 200 200 0 0 0 0 10 20 30 40 50 0 5 10 15 20 25 30 35 0 10 20 30 40 50 60 70 Work load [kg] Work load [kg] Work

LG1H

(S2) 200 to 230 VAC encoder) Absolute Power supply voltage 50/60 Hz AC servo motor (S7) AC servo motor (S3) 1 2 100 to 120 VAC, 50/60 Hz 200 to 230 VAC, 50/60 Hz AC servo motor (S6) 100 to 120 VAC Pulse input type 50/60 Hz AC servo motor (S7) (For absolute AC servo motor (S6) 200 to 230 VAC encoder) 50/60 Hz AC servo motor (S7) Dimensions LECSA 2 x 6 Mounting hole 40 135 (Bearing surface

10

Add 10 g for conduit type, 60 g for conduit terminal type respectively.

HRL

3-phase 200 to 230 VAC (60 Hz) Casters and adjuster feet Earth leakage breaker HRL300 26 kW 319 Circulating Fluid Temperature Controller Thermo-chiller Dual Channel Refrigerated Thermo-chiller for Lasers HRL Series Options in demand are standardized.

REA/REB

Inclined Operation (at a right angle to operating direction) 32 25 105 4.2 + Lo 60 3.4 + Lo 40 200 5.1 + Lo Bore size (mm) Allowable load weight WA (kg) RZQ MI W S 8.

REA/REB

Inclined Operation (at a right angle to operating direction) 32 25 105 4.2 + Lo 60 3.4 + Lo 40 200 5.1 + Lo Bore size (mm) Allowable load weight WA (kg) RZQ MI W S 8.

0.4

K Note 2) Negative common N Note 3) Coil voltage CE-compliant External pilot R Note 3) Note 5) 1 2 3 4 5 6 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Note 1) Refer to page 381 for power consumption of AC type.

Lightweight and Compact

Note) 200 V type only. 400 V type is provided with an earth leakage breaker as standard. 20 3-phase 200 VAC (50 Hz) 3-phase 200 to 230 VAC (60 Hz) 40 3-phase 380 to 415 VAC (50/60 Hz) HRZ Specifications HRZD Model HRS090-Wl-20-l HRS090-Wl-40-l Cooling method Water-cooled refrigeration Refrigerant R410A (HFC) Refrigerant charge kg 1.15 Control method PID control Ambient temperature1 C 5 to

JXCx-OMT0023

To rotate the servo motor at 3000r/min in the open collector system (200kpulse/s), set the electronic gear as follows. f CMX CDV = N0 60 10 f : Input pulse frequency [pulse/s] N0 : Servo motor speed [r/min] 200 103 CMX CDV = 3000 60 10 CMX CDV = 3000 60 10 200 103 = 3000 10 60 20 = 15 6 4 11 4.

AC Servo Motor Driver (CC-Link Type ）

5.8.3 Battery installation procedure . 5 -60 6.

Air Cylinder

10 15, 30, 45, 60, 75, 100, 125, 150 16 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 CG3 JMB : Manufacture of intermediate strokes in 1 mm increments is possible.

CG1

CP95 C95 C92 CA1 CS1 Trunnion (mm) Stroke range Bore (mm) B TDe8 TE TF TH TR TS TT TV Front Rear 0.025 0.047 0.025 0.047 0.032 0.059 0.032 0.059 0.032 0.059 0.032 0.059 20 25 32 40 50 63 Up to 200 Up to 200 35.8 39.8 49.4 58.4 72.4 90.4 38 45.5 54 63.5 79 96 10 10 10 10 20 20 8 10 12 14 16 18 5.5 5.5 6.6 6.6 9 11 25 30 35 40 50 60 39 43 54.5 65.5 80 98 28 33 40 49 60 74 3.2 3.2 4.5 4.5 6