V100 mA), Holding 0.5 VA (5 mA) 100 VAC Inrush 0.55 VA (5 mA), Holding 0.55 VA (5 mA) 110 VAC Inrush 1.0 VA (5 mA), Holding 1.0 VA (5 mA) 200 VAC Inrush 1.1 VA (5 mA), Holding 1.1 VA (5 mA) 220 VAC Note 1) Use dry air to prevent condensation when operating at low temperatures.
(L)-X12 25 43.5 B C MXQ-AT16(L) 5 24.5 MXQ16(L) J M10 x 1 M5 x 12 MXQ-AT16(L)-X11 15 33.5 35.5 20 12 17 14 5 34.5 MXQ-AT16(L)-X12 25 44.5 A K MXQ-AT20(L) 5 27.5 MXQ20(L) MXQ-AT20(L)-X11 M5 x 14 15 M12 x 1.25 41 44.5 25 13 37.5 23 17 6 MXQ-AT20(L)-X12 25 47.5 MXQ-AT25(L) 5 32.5 MXQ25(L) M14 x 1.5 M6 x 18 MXQ-AT25(L)-X11 15 42.5 49 53.5 31 15 28 19 6 MXQ-AT25(L)-X12 25 52.5 1) Size of hexagon
5 5 26.5 44.1 69.1 25 M5 x 0.8/ Effective thread depth 5 23 40.6 65.6 25 5 5 M5 x 0.8/ Effective thread depth 5 21 38.6 63.6 25 5 5 M10 x 1 M10 x 1 M10 x 1 Seal washer Seal washer A A A A A A Seal washer 31 40 31 34.5 7 38 32.5 10 5 35 32 23.3 6 Width across flats 6 44 40 29.4 6 54 50 37 6 Width across flats 6 Width across flats 6 A-A A-A A-A 22 22 22 19 19 19 34.6 61.1 86.1 25 9.5 9.5 9.5
A 15 3 () 3 4 5 6 7 8 9 10 11 12 13 Station 5 16 17 18 19 20 21 22 23 24 25 SOL. B 16 () SOL. A 4 () Station 6 SOL. B 17 () SOL. A 5 () Station 7 SOL. B 18 () SOL. A 6 () Station 8 SOL.
39.5 20 25 32 40 50 63 80 100 30.5 (40.5) 40.5 36 (46) 46 43.5 (53.5) 53.5 53 (63) 63 Bore size (mm) L1 O N Q Th9 L G1 4.5 5 6.5 7 8 8 10 12 19 (20.5) 21 20.5 Note 3) 9.5 10 12 17 18 18 20 22 5 5 5 5 5 20 25 32 40 50 63 80 100 9 depth 7 9 depth 7 9 depth 7 9 depth 7 11 depth 8 14 depth 10.5 17.5 depth 13.5 17.5 depth 13.5 5.5 5.5 5.5 5.5 6.6 9 11 11 11 0 0.052 0 0.062 0 0.062 0 0.062
D-sub connector cable assembly terminal numbers Terminal no. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 COM.
LJ1 LG1 LC1 LX LC6D/LC6C Switches 2.5 5H9 +0.030 0 depth 5 (12) D-M4 x 0.7 (for work place mounting) (27) 5H9 +0.030 0 depth 5 (8) (10.5) (5.5) 10 31 2-M4 x 0.7 thread depth 9 6 58 13.5 (28) 50 x B (3.5) 6 (9) (5) Cable length 2000 2-M3 x 0.5 depth 5 17.5 18.5 10 20 (5) 62 72 (15) 8 5 22 1 0.2 35 25 22 Home position switch Cable length 200 Connector 1.5 [5.5] 25 (4) Refer to page 100 for
Size Symbol 2 2 2 3 3 4 4 5 5 6 6 A B C A B A B A B A B 2 2 3 3 3 4 4 5 5 6 6 1 2 1 2 3 1 2 1 2 1 2 6 x 4 4 x 3 10 x 8 8 x 6 6 x 4 12 x 10 10 x 8 19 x 16 12 x 10 25 x 22 19 x 16 1/4" x 5/32" 3/16" x 1/8" 1/8" x 0.086" 3/8" x 1/4" 1/4" x 5/32" 1/2" x 3/8" 3/8" x 1/4" 3/4" x 5/8" 1/2" x 3/8" 1" x 7/8" 3/4" x 5/8" LVC LVA LVH LVD With reducer Basic size LVQ Note 1) Select a fitting the same
VF VP4 Cylinder port SUP port EXH VQ 1/2 2, 4 (A, B) 1, 3 (P, R) VQ 4/5 VQC 1/2 VQC 1/2 25-core cable 26 pins VQC 4/5 25 pins 26 pins 20 pins IP67 compliant IP67 compliant IP67 compliant VQZ SQ VFS VFR VQ7 C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) C8 (8) N9 (5/16") N1 (1/8") N3 (5/32") N7 (1/4") C10 (10) C4 (4) C6 (6) C8 (8) N11 (3/8") In case of branch type C12 (12) N13 (1/2") N3 (5/32") N7
25 32 36 40 1/4 Stroke 1/4 Stroke 1/4 Stroke 1/4 Stroke 1/4 Stroke 1/5 Stroke 1/5 Stroke 1/5 Stroke 368.5 377 415 391.5 400 436 3.1-62 World Wide QS\E Support...
25 18 Standard motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room specification 104 Dust seal specification 110 TSUBAKI CABLEVEYOR specification 122 Construction 134 Mounting 140 Non-standard
(5) Cable length 2000 2-M3 x 0.5 depth 5 17.5 18.5 10 20 (5) 62 72 (15) 8 5 22 1 0.2 35 25 22 Home position switch Cable length 200 Connector 1.5 [5.5] 25 (4) Refer to page 100 for connection cables.
5 6 6 6 6 No. 1 2 2 2 2 2 2 3 3 3 3 4 4 4 4 5 5 5 5 6 6 6 6 Class Applicable tubing size (mm) 4 x 3 3 x 2 6 x 4 4 x 3 6 x 4 4 x 3 10 x 8 8 x 6 6 x 4 10 x 8 8 x 6 6 x 4 12 x 10 10 x 8 12 x 10 10 x 8 19 x 16 12 x 10 19 x 16 12 x 10 25 x 22 19 x 16 25 x 22 19 x 16 Tubing O.D.
MHZL2-25 K 25f8 96.2 24 15 25 D1 Applicable Tubing Max. 5 B 5 A E2 F Note 2) Nylon tubing coil tubing Soft nylon tubing Polyurethane Polyurethane Description/ Model Specifications Auto switch mounting groove (Both sides) tubing T0425 TS0425 TU0425 TCU0425B1 Outside diameter (mm) 4 0.5 20 to 60 4 1.0 13 20 to 60 Nylon 12 4 0.8 12 20 to 60 Nylon 12 4 0.5 10 20 to 60 Refer to the dimension
Note Option mounting diagram Single valve AXT632-25-4 (M4 x 50) 4 Valve 0 Blanking plate (VVQ5000-10A1 5) AXT632-25-8 (M4 x 17) 4 For manifold Blanking plate Valve + Individual SUP spacer (VVQ5000-P1 5 -03 04) q AXT632-25-5 (M4 x 82) 4 For manifold w AXT632-25-10 (M4 x 34) 2 Valve + Individual EXH spacer (VVQ5000-R1 5 03 04) q AXT632-25-5 (M4 x 82) 4 For manifold w AXT632-25-10 (M4 x 34)
10 15 0 5 10 15 20 25 0 1 2 3 4 5 6 Vertical L7 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 800 800 800 800 L8 [mm] L8 [mm] L8 [mm] L8 [mm] 600 600 600 600 Z 400 400 400 400 Mep m 200 200 200 200 0 0 0 5 10 15 0 0 0 5 10 15 0 5 10 15 20 25 0 1 2 3 4 5 6 L8 Work load [kg] Work load [kg] Work load [kg] Work load [kg] Calculation of Guide Load Factor Mounting
ZPR10D 10 16 12 18 15 16 24 25 32.9 33.9 49 50 5 6 6 7 ZPR16D Applicable Tubing Applicable tubing O.D.
Load Weight Allowable Moment MY3A, MY3B/m1 MY3A, MY3B/M1 MY3A, MY3B/M2 MY3A, MY3B/M3 40 30 80 200 200 50 100 40 30 20 100 10 50 40 30 50 40 30 20 5 4 3 10 20 20 Load weight (kg) 63 q Moment (Nm) Moment (Nm) Moment (Nm) 5 4 3 63 50 40 63 63 10 10 2 50 50 50 t w e r 5 4 3 2 5 4 3 1 32 40 40 40 0.5 0.4 0.3 1 25 2 2 32 32 32 20 0.5 0.4 0.3 1 0.2 1 25 16 25 25 20 0.5 0.4 0.3 0.1 0.5 0.4 0.3 0.2
to 80 16 6 3 to 8 LEHZ 20 10 LEHZ Page 1 11 to 28 16 to 40 5 to 100 25 14 32 22 52 to 130 Series LECP6 5 to 120 40 30 84 to 210 10 4 3 to 6 Series LECP1 5 to 80 6 to 14 16 6 4 to 8 LEHZJ Page 15 LEHZJ With dust cover 20 10 Series LECPA 5 to 100 16 to 40 11 to 28 25 14 10 16 (32) Note) 3 to 7 5 to 80 20 24 (48) Note) 11 to 28 LEHF Page 27 32 32 (64) Note) 48 to 120 5 to 100 40 LEHF 40 (80
M3 x 0.5 through 25 0.2 4 ST 5 + ST 9 + ST 32 + ST 42 + ST Part no.