Metal Seal/Rubber Seal Series VQ Body Ported

170 225 235.5 10 139.5 159.5 225 232.5 9 129 149 212.5 223 8 118.5 138.5 200 210.5 7 108 128 187.5 198 6 97.5 117.5 175 185.5 5 87 107 162.5 173 4 76.5 96.5 150 160.5 3 66 86 150 160.5 2 55.5 75.5 137.5 148 L1 L2 L3 L4 34.5 54.5 112.5 123 Dimensions: Side Entry Connector [-FS] n L 1 137.5 148 2 150 160.5 3 162.5 173 4 175 185.5 5 187.5 198 6 200 210.5 7 200 210.5 8 212.5 223 9 225 235.5

17

100 100 80 80 80 100 80 22 (10) 22 (10) 80 11 (5) 10 20 29 30 51 50 300 200 100 11 (5) 10 20 29 30 51 50 300 200 100 Stroke (mm) Stroke (mm) 13 Model Selection Series MGP L L m m Ball Bushing Horizontal Mounting (19) L = 50 mm, V = 400 mm/s (20) L =100 mm, V = 400 mm/s MGPL12 to 25, MGPA12 to 25 MGPL12 to 25, MGPA12 to 25 11 (5) 11 (5) 25 25 25 25 25 25 Load mass m lbs (kg) Load mass m lbs

CJ2

Bore Bore B C d H 10 16 NTJ-015A 10 16 7 8 8.1 9.2 M4 X 0.7 M5 X 0.8 3.2 4 NTJ-010A Dimensions by stroke (mm) Symbol S Z ZZ Stroke Bore 5 to 15 16 to 30 31 to 45 46 to 60 61 to 75 76 to 100 101 to 125 126 to 150 5 to 15 16 to 30 31 to 45 46 to 60 61 to 75 76 to 100 101 to 125 126 to 150 5 to 15 16 to 30 31 to 45 46 to 60 61 to 75 76 to 100 101 to 125 126 to 150 10 16 48.5 56 68 80 84.5 92

Environment

200 40 70 80 Vertical Note 9) 19 38 72 115 19 38 72 Force [N]/Set value Note 3) : 15 to 50% Note 4) 156 to 521 304 to 1012 573 to 1910 1003 to 3343 156 to 521 304 to 1012 573 to 1910 LEF Up to 500 1000 500 250 1000 500 250 505 to 600 800 400 200 800 400 200 605 to 700 600 300 150 600 300 150 705 to 800 500 250 125 500 250 125 Pushing speed [mm/s] Note 6) 30 or less Max. acceleration/deceleration

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

-X1247 75, 100, 125, 150, 175 200, 250, 300 350, 400, 450, 500 600, 700, 800 20, 25 32, 40, 50 63, 80 75, 100, 125, 150, 175 200, 250, 300 350, 400, 450, 500, 600 700, 800, 900,1000 Intermediate strokes and strokes shorter than 75 mm are also available.

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Data 32, 40, 50 63, 80 75, 100, 125, 150, 175 200, 250, 300 350, 400, 450, 500, 600 700, 800, 900,1000 Bore size (mm) 25 20 32 40 Intermediate strokes and strokes shorter than 75mm are also available.

IDG

Purge air flow rate (l/min(ANR))(3) 2.5 12 25 50 75 125 125 150 190 6 Inlet air pressure (MPa) 0.7 Part no.

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

Valves to drive cylinders of sizes 6 to 200 Pressure: 0.5MPa, Load factor: 50% Cylinder bore size mm Series CJ2 Series CM2 Series MB/CA1 6 10 16 20 25 32 40 40 50 63 80 100 Series CS1 Cylinder speed mm/s Base mounted (sub-plate) Nl/min 125 140 160 180 200 150 300 450 600 750 150 300 450 600 750 150 300 450 600 750 294.5 SY3000 687 SY5000 1177.8 SY7000 150 300 450 600 750 SY9000 2748.2 The

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

10 35 40 45 50 60 70 75 80 90 40 45 35 30 25 20 15 100 10 50 60 70 75 80 90 Model CXS10 CXS15 97 92 87 82 102 107 112 117 122 132 142 147 30 40 50 90 85 80 75 70 65 100 105 115 125 130 95 104 55 99 94 45 89 109 114 119 124 129 139 149 154 159 169 179 25 35 45 95 90 85 80 75 70 105 110 120 130 135 140 150 160 100 8-29-8 9 Dual Rod Cylinder: Basic Type Series CXS Dimensions: 20, 25, 32

Compact Manifold Regulator Series ARM5

100 0 50 100 150 Flow rate l/min (ANR) Flow rate l/min (ANR) ARM10F-07 ARM10-07 (One-touch fittings: IN 6, OUT 4) ARM10F-07-1 ARM10-07-1 (One-touch fittings: IN 6, OUT 4) Condition: Inlet pressure 0.5 MPa Condition: Inlet pressure 0.7 MPa 0.35 0.7 0.6 0.30 Outlet pressure (MPa) Outlet pressure (MPa) 0.5 0.25 0.4 0.20 0.3 0.15 0.2 0.10 0.1 0.05 0.0 0.00 0 50 100 150 0 20 40 60 80 100 Flow

CG5-S

57 9 144.5 120 80 291 257 CG-E080SUS 100 22 235 14 23 6 40 80 87.2 57 9 144.5 120 80 292 258 CG-E080SUS Plug bolts are installed before shipment from factory.

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

4 150, 200, 250, 300 3/8 1/2 25, 50, 75, 100, 125, 150, 200 100 Non-lube Double acting, Double rod (40 to 63) 20 25 32 40 50 63 80 100 1/8 25, 50, 75, 100, 125, 1/4 150, 200, 250, 300 3/8 1/2 Suction Flow Rate of Vacuum Suction Type (Reference values) Specifications Bore size (mm) Item 20 25 32 40 50 63 80 100 Size Suction flow rate L/min (ANR) 20/25/32/40 50/63/80/100 1.5 MPa 1.0 MPa

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

Lead wire containment groove 8-15-80

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

NPT finish piping port 150 + 100 (n 2) n = 2, 4, 6, 8 Different sides 35 + 30 (n 2) 110 + 30 (n 2) n = 2, 4, 6, 8 n Double clevis pin and double knuckle pin made of stainless steel -XC27 150 + 30 (n 2) n = 2, 4, 6, 8 Same side 100 + 100 (n 2) 110 + 100 (n 2) n = 2, 4, 6, 8 1 15 35 55 110 110 110 150 150 150 -XC30 Front trunnion Different sides Same side 2 -XC35 With coil scraper 150

Air Cylinder Series CS1

+ 30(n2) (n = 2, 4, 6, 8 ) Same surface 100 + 100(n2) 1 110 150 15 35 55 Different surfaces Same surface 150 110 2 150 + 30(n2) (n = 2, 4, 6, 8 ) 110 + 30(n2) (n = 2, 4, 6, 8 ) 35 + 30(n2) Different surfaces D-A44 n 150 + 50(n2) (n = 2, 4, 6, 8 ) 110 + 50(n2) (n = 2, 4, 6, 8 ) 55 + 55(n2) Same surface 150 1 15 110 D-Z7 D-Z80 D-Y59 D-Y7P D-Y7W 2 (Different surfaces, Same surface) 1 115 110

5 Port Solenoid Valve

Plug Lead Manifold Bar Base Plug Lead Single Unit Dimensions Formula L1 = 8.5n + 38, L2 = 8.5n + 93.7 n: Station (Maximum 32 stations) L n 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 L1 L2 L3 L4 55 63.5 72 80.5 89 97.5 106 114.5 123 131.5 140 148.5 157 165.5 174 182.5 191 110.7 119.2 127.7 136.2 144.7 153.2 161.7 170.2 178.7 187.2 195.7 204.2 212.7 221.2 229.7 238.2 246.7 137.5 150 150 162.5

Compact

LEJ 3 4.7 LEL 80 Stroke (80) Origin When LECP1, LECP6 or LECPMJ is used.

Air Slide Table Series MXQ

175 J 56 56 56 66 90 100 150 205 230 I 16 16 16 16 16 31 20 18 18 NN 2 2 2 2 2 3 4 4 4 H 55 55 55 65 80 44 66 66 G 23 23 23 23 32 44 31 56 N 4 4 4 4 4 6 8 8 8 HA 55 55 55 65 80 65 88 132 132 Model F 55 46 55 65 75 60 48 60 65 GA 23 23 23 23 32 72 88 97 122 KA 170 223 248 NA 4 4 4 4 4 4 8 8 8 MXQ2510 MXQ2520 MXQ2530 MXQ2540 MXQ2550 MXQ2575 MXQ25-100 MXQ25-125 MXQ25-150 Note) Note) Note)

Compact 5-Port Solenoid Valve

Can drive 40*1 bore cylinders Can drive 50*1 bore cylinders Can drive 80*1 bore cylinders JSY1000 JSY3000 JSY5000 6.4 mm 10 mm 15 mm A, B port size: 2, 4, 6 A, B port size: 6, 8 A, B port size: 10, 12 6 One-touch fitting 12 One-touch fitting 8 One-touch fitting 540 550 520 63 25 40 Bore size [mm] Bore size [mm] Bore size [mm] 360 310 430 80 40 50 100 140 110 160 63 100 100 300 500 100 300

EX120/121/122

Hz with a 0.035 mm amplitude or 4.9 m/s2 in each X, Y, Z direction for 2 hrs (De-energized) EX Impact resistance 147 m/s2 in each X, Y, Z direction, 3 times (De-energized) Standard CE marking, UL (CSA) EX510-DX1: 90 g EX510-DX2: 110 g (including accessories) Mass Dimensions EX510-DX1 EX510-DX2 31 19.8 0.2 30 0.2 51 10.5 5.6 DIN rail 5 33.5 13 0.2 40 40 70 0.2 80 80 PWR 2 x M4 Mounting