Base Mounted Metal Seal/Rubber Seal Series VQ

L dimension 31 32 33 34 35 36 37 38 39 40 398 410.5 423 435.5 448 460.5 473 485.5 498 510.5 No.

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Extension end 8 10, 20, 30, 40, 50, 75 Rubber stopper Retraction end Both ends 12 10, 20, 30, 40, 50, 75, 100 16 10, 20, 30, 40, 50, 75, 100, 125 20 10, 20, 30, 40, 50, 75, 100, 125, 150 25 10, 20, 30, 40, 50, 75, 100, 125, 150 Functional option Nil Standard P Note 1) Axial piping Note 1) The combination of axial piping and both ends adjusters or retraction end adjusters is not available.

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

, 50 Long stroke CX CXSW 6 CXSW10 CXSW15 CXSW20 CXSW25 CXWS32 D10, 20, 30, 40, 50 75, 100, 125, 150 -X 10, 20, 30, 40, 50, 75, 100 125, 150, 175, 200 For long strokes, it will be made-to-order.

Electric Slide Tables

0.00 0 10 20 30 40 0.000 0 10 20 30 40 Load [N] Load [N] Load [N] LES25 LES25 LES25 Lr = 100 mm 0.12 0.030 0.60 LES25-150 LES25-150 LES25-30 LES25-125 LES25-125 LES25-50 LES25-100 0.08 0.020 0.40 LES25-75 LES25-75 LES25-75 LES25-100 LES25-50 0.04 0.010 0.20 LES25-100/125/150 LES25-30 LES25-50 LES25-30 0.00 0 20 40 60 80 0.000 0.00 0 20 40 60 80 0 20 40 60 80 Load [N] Load [N] Load [N] 8

Integrated Controller

146.3 Body Bottom Tapped [mm] Size Stroke range [mm] MA MC MD MH ML MO MR XA XB 24 32 15 to 39 50 40 to 100 42 41 101 to 124 25 20 29 M5 x 0.8 6.5 4 5 75 125 to 200 59 49.5 201 to 400 76 58 22 36 20 to 39 50 40 to 100 36 43 101 to 124 32 25 30 M6 x 1 8.5 5 6 80 125 to 200 53 51.5 201 to 500 70 60 50 Easy to Operate EQY H Series Battery-less Absolute (Step Motor 24 VDC) Dimensions H A B C

NCQ8

(1-1/4") to 200 (2") 012 (1/8") to 100 (1") 125 (1-1/4") to 200 (2") 012 (1/8") to 100 (1") 125 (1-1/4") to 200 (2") 012 (1/8") to 100 (1") 125 (1-1/4") to 200 (2") 012 (1/8") to 100 (1") 125 (1-1/4") to 200 (2") 012 (1/8") to 100 (1") 125 (1-1/4") to 200 (2") 0.76 0.67 1.42 1.33 2.50 2.47 056 (9/16") 3.06 075 (3/4") 3.42 106 (1-1/16") 3.73 Single Acting, Spring Extend Unit: lbs 150 (1-1

CG5-S

How to Order J S 32 10-125 Dust cover material Stainless steel type Symbol Nil S Material Fluoro rubber Silicon rubber Applicable bore size (mm) Nominal thread size Applicable cylinder bore size (mm) 10 10, 16 20 25, 32 40 50, 63 Symbol Applicable cylinder nominal thread size M4 x 0.7 M5 x 0.8 M8 x 1.25 M10 x 1.25 M14 x 1.5 M18 x 1.5 Symbol 10 16 20 32 40 63 4-070 5-080 8-125 10-125 14-150

CG5-S

How to Order J S 32 10-125 Dust cover material Stainless steel type Symbol Nil S Material Fluoro rubber Silicon rubber Applicable bore size (mm) Nominal thread size Applicable cylinder bore size (mm) 10 10, 16 20 25, 32 40 50, 63 Symbol Applicable cylinder nominal thread size M4 x 0.7 M5 x 0.8 M8 x 1.25 M10 x 1.25 M14 x 1.5 M18 x 1.5 Symbol 10 16 20 32 40 63 4-070 5-080 8-125 10-125 14-150

CP95

See page 6-13-11 for dimensions. 20Mounting Accessory, Rod Data Rod clevis ISO 8140 Piston rod ball joint ISO 8139 Floating joint GKM KJ JA Bore size (mm) Supplied with bolts and safety devices 32 GKM10-20 KJ10D JA30-10-125 40 GKM12-24 KJ12D JA40-12-125 50 GKM16-32 KJ16D JA50-16-150 63 GKM16-32 KJ16D JA50-16-150 80 GKM20-40 KJ20D JAH50-20-150 100 GKM20-40 KJ20D JAH50-20-150 See page 6-13-

CP95

See page 6-13-11 for dimensions. 20Mounting Accessory, Rod Data Rod clevis ISO 8140 Piston rod ball joint ISO 8139 Floating joint GKM KJ JA Bore size (mm) Supplied with bolts and safety devices 32 GKM10-20 KJ10D JA30-10-125 40 GKM12-24 KJ12D JA40-12-125 50 GKM16-32 KJ16D JA50-16-150 63 GKM16-32 KJ16D JA50-16-150 80 GKM20-40 KJ20D JAH50-20-150 100 GKM20-40 KJ20D JAH50-20-150 See page 6-13-

5 Port Solenoid Valve Series VQZ1000/2000/3000

Unless otherwise indicated, dimensions are the same as L-type plug connector (L). [ ]: AC Max. 16 stations Dimensions 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 L n L1 L2 L3 L4 L5 323 310.5 260.5 273 298 248 185.5 210.5 223 173 135.5 135.5 160.5 135.5 135.5 300 312.5 287.5 237.5 250 262.5 212.5 162.5 175 200 150 125 125 125 125 257 274 291 240 189 206 223 172 121 138 155 104 104 104 104 16 16.5

Profile Design ISO/VDMA Air Cylinder Series CP95

Bore stroke 32 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 450, 500 700 40 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 450, 500 800 50 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 450, 500, 600 1200 63 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 450, 500, 600 1200 80 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 450, 500, 600, 700, 800 1400 100 25, 50, 80, 100, 125, 160, 200,

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

, 200 20 25 32 40 50 63 80 100 20 25 32 40 50 63 80 100 1/8 Relief type Vacuum suction type 25, 50, 75, 100, 125, 1/4 150, 200, 250, 300 3/8 1/2 Non-lube Double acting, Up to 1500 25, 50, 75, 100, 125, 150, 200 Single rod (40 to 63) 1/8 25, 50, 75, 100, 125, 1/4 150, 200, 250, 300 3/8 1/2 Note 1) When exceeding the standard strokes above, the particle generation class may not be satisfied

LEC-OM071xx

125> 100% + (125 0.4) = 50% Therefore, the monitor output voltage is 0.5 time as high. 125> 100% + (125 0.4) =150% Therefore, the monitor output voltage is 1.5 times as high.

Valve Single Unit

(Mounting hole) A: Orange B: Green M5 x 0.8 M5 x 0.8 (Pilot EXH port) (External pilot port) (Light/Surge voltage suppressor) (Lead wire length) G: 300 H: 600 (Piping port) 3 4 5 3 4 5 L plug connector (L): SX3 40(R)-L-01 M plug connector (M): SX3 40(R)-M-01 Manual override (Press and turn for the locking type.)

MXW

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Bore size (Stroke (mm)) 8 12 16 20 25 25, 50, 75, 100, 125, 150 50, 75, 100, 125, 150 75, 100, 125, 150, 175, 200 100, 125, 150, 175, 200, 225, 250 100, 125, 150, 175, 200, 225, 250, 275, 300 Auto switch Nil Without

Air Slide Table Series MXW

S n Auto switch Without auto switch (Built-in magnet) Nil Bore size (Stroke (mm)) For the applicable auto switch model, refer to the table below. 8 12 16 20 25 25, 50, 75, 100, 125, 150 50, 75, 100, 125, 150 75, 100, 125, 150, 175, 200 100, 125, 150, 175, 200, 225, 250 100, 125, 150, 175, 200, 225, 250, 275, 300 Option Nil Standard (with urethane bumper) With shock absorbers 2 pcs.

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW 40, 50, 63, 80, 100, 125, 160 3.5MPa How to Order Bore size 40 50 63 80 100 125 160 40mm 50mm 63mm 80mm 100mm 125mm 160mm Aluminum tube Steel tube Tube material Aluminum alloy Steel tube Nil F Without auto switch Nil Auto switch type CHAW 40 100 L L With Auto Switch Select applicable auto switch models from

ZP

50.5 51 30 111.5 60.5 40 147.5 70.5 77 50 157.5 80.5 J K ZP T D 25 29 10 B5 B01 N01 T01 06 08 N6 U6 105 55 42.5 4 M14 x 1 50 19 4 12 M8 x 1.25 20 115 65 40 A14 30 125 75 50 170 95 75 Dimensions Per Vacuum Inlet: Female Thread Model L M N P Vacuum inlet direction q Pad dia.

JIS Standard Hydraulic Cylinder

Part no. d B C D H 32, 40, 50 32 KP-05 NTH-040 20 0.2 6.5 M6 x 10 L 32 12 4.5 22 25.4 21 10 M16 x 1.5 6 63, 80 40 KP-08 NTH-050 24 0.2 9 M8 x 12 L 44 18 4.5 27 31.2 26 12 M20 x 1.5 9 100 50 KP-10 NTH-060 26 0.2 11.5 M10 x 14 L 44 22 6 32 37 31 14 M24 x 1.5 11 B-series 63 NTH-080 41 47.3 40 17 M30 x 1.5 80 NTH-100 55 63.5 54 20 M39 x 1.5 Double clevis/Double knuckle pin 100 NTH-125 70 80.8