Compact Cylinder Series CQS

, 150, 175, 200 75, 100, 125, 150, 175, 200, 250, 300 12 16 20 25 CQM MU 12 16 5, 10, 15, 20 25, 30 20 25 5, 10, 15, 20, 25 30, 35, 40, 45, 50 Double rod CQSW 560 12 16 20 25 5, 10 Double acting Single acting Return/Extend CQS 567 12, 16 20, 25 Non-rotating Rod Single rod CQSK 575 12 16 5, 10, 15, 20 25, 30 20 25 5, 10, 15, 20, 25 30, 35, 40, 45, 50 Double rod CQSKW 582 Anti-lateral Load

IDU/IDF

(C) IDF 1D 30 35 40 50 25 IDF 2D to 240D 30 35 40 45 50 Outlet air press. dew point (C) Ambient temp.

energy saving effect

Cooling Capacity HRSH300-A-20/4035 Ambient temperature 32C 30 Ambient temperature 43C 28 Cooling capacity [kW] 25 HRS 20 Ambient temperature 45C HRS 090 15 10 HRS 100/150 5 HRSH 090 5 10 15 20 25 30 35 0 HRSH HRSH Circulating fluid temperature [C] HRSE Pump Capacity HRZ HRSH100-A-20/40HRSH100-W-20/40HRSH150/200-A-20/40HRSH150/200/250-W-20/40HRZD HRW 0.6 0.6 60 60 Circulating fluid pressure

Metal Seal/Rubber Seal Series VQ Body Ported

AXT661-12A AXT661-14AN AXT661-14AN-6 AXT661-14AN-10 AXT661-14AN-20 AXT661-14AN-30 AXT661-13AN AXT661-13AN-6 AXT661-13AN-10 AXT661-13AN-20 AXT661-13AN-30 AXT661-13A AXT661-13A-6 AXT661-13A-10 AXT661-13A-20 AXT661-13A-30 Note 1) 100/110 VAC for single: AXT661-31A-; for double: AXT661-32A200/220 VAC for single: AXT661-34A-; for double: AXT661-35Aare in accordance with the above table.

AC Servo Motor Driver

OPTIONS AND AUXILIARY EQUIPMENT (b) Surge protector RAV-781BYZ-2 [Unit: mm] Black 1) 2) 3) Black Black 5.5 1 11 1 4.2 0.2 28.5 1.0 28 1.0 UL-1015AWG16 200 30 0 1 3 2 4.5 0.5 41 1.0 RAV-781BXZ-4 [Unit: mm] 1) 2) 3) 4) 5.5 1 11 1 28.5 1.0 200 30 0 28 1.0 4.2 0.2 UL-1015AWG16 1 3 2 4.5 0.5 41 1.0 12 36 13. COMMUNICATION FUNCTION 13.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

8 @4 CS type snap ring Parallel pin Parallel key Seal washer Plug O-ring Steel balls Shock absorber @5 Size: 10 to 50 Size: 70 to 200 Carbon steel @6 NBR Brass NBR Stainless steel @7 @8 @9 #0 #1 Size: 70 to 200 only Size: 70 to 200 only Replacement Parts Description Kit no. Note 10 P523020-5 30 A set of above numbers r, !2, !3, !7, !

Floating Joint

-30-150 JAH80-30-150 JAH80-30-200 JA160-33-200 JA160-36-150 JAH100-39-150 JAH100-42-300 JAH100-48-150 DA00201 DA00117 DA00118 DA00119 DA00207 DA00169 DA00141 DA00142 DA00140 DA00145 DA00146 DA00143 DA00148 5.5 7 8 10 13 13 17 17 17 19 19 19 22 DA00155 DA00154 DA00156 DA00158 DA00159 DA00157 DA00160 DA00161 DA00162 30 30 32 36 36 36 41 41 41 M30.5 M40.7 M50.8 M61 M81 M81.25 M101 M101.25 M101.5

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

200 1003 5 10 20 30 1003 5 10 20 30 50 100 200 60 50 100 200 Horizontal Vertical (downward) Vertical (upward) m2 max. m1 max. m3 max. m1, m2, m3 max.

CQ2

Spring return Spring extend Model C Mounting bolt D 25 30 25 30 25 30 30 35 30 35 35 40 45 55 Model C Mounting bolt D 25 30 25 30 25 30 30 35 30 35 35 40 45 55 M3 X 25 l X 30 l M3 X 25 l X 30 l M5 X 25 l X 30 l M5 X 30 l X 35 l M5 X 30 l X 35 l M5 X 35 l X 40 l M6 X 45 l X 55 l M3 X 25 l X 30 l M3 X 25 l X 30 l M5 X 25 l X 30 l M5 X 30 l X 35 l M5 X 30 l X 35 l M5 X 35 l X 40 l M6 X 45 l

HRX-OM-X037

Fig. 9-26 Pump capacity(HRL100/200/300-A/W-40 CH2) HRL Series 9.5 Pump Capacity 9-21 HRX-OM-X037 Chapter 9 Documents 9.5.5 HRL100/200/300-A/W-40-T2 CH1 0.6 60 0.5 50 0.4 Usable flow rate 40 Lifting head [m] Pressure[MPa] 0.3 30 Circulating fluid outlet 0.2 20 Circulating fluid return 0.1 10 0 0 0 5 10 15 20 25 30 35 Circulating fluid flow[L/min] Fig. 9-27 Pump capacity(HRL100/200/300-A/W-

CJ2

, 45, 60 15, 30, 45, 60, 75, 100, 125, 150 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Intermediate strokes are available by the 1 mm interval with no stroke adjustment by spacer.

Base Mounted Metal Seal/Rubber Seal Series VQ

AXT661-34A-, for 200/220 VAC.

LEC-OM069xx

ms to 32.00 ms (in 3.00-ms units) 30 30 3.50 ms 3.50 ms to 32.00 ms (in 3.50-ms units) 30 30 4.00 ms 4.00 ms to 32.00 ms (in 4.00-ms units) 30 30 Note: Communications retry stations can be connected as long as the total number of connected stations, including the retry stations, is within the connectable max. number of stations.

Mechanically Jointed Rodless Cylinder Series MY2

200 1003 5 10 20 30 1003 5 10 20 30 50 100 200 60 50 100 200 Horizontal Vertical (downward) Vertical (upward) m2 max. m1 max. m3 max. m1, m2, m3 max.

MY2

200 1003 5 10 20 30 1003 5 10 20 30 50 100 200 60 50 100 200 Horizontal Vertical (downward) Vertical (upward) m2 max. m1 max. m3 max. m1, m2, m3 max.

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

238 263 288 313 40 54 54 36 23 12.5 25 37.5 50 75 100 125 150 175 200 225 250 75 88 100 113 138 163 188 213 238 263 288 313 50 69 64 51 25 12.5 25 37.5 50 75 100 125 150 175 200 225 250 87 100 112 125 150 175 200 225 250 275 300 325 63 69 64 51 25 12.5 25 37.5 50 75 100 125 150 175 200 225 250 87 100 112 125 150 175 200 225 250 275 300 325 80 86 68 56 30 12.5 25 37.5 50 75 100 125 150 175

LG1H

Transfer load m (kg) L2 600 400 L2 (mm) Mer Rolling Yawing m 200 L2 Mer 10 20 30 0 Transfer load m (kg) m a = 1000 4000 a = 2000 L3 (mm) L3 a = 3000 2000 m Mey a 10 20 30 0 Transfer load m (kg) Refer to page 183 for deflection data. 164

Slide Unit Series CX2/CXWM/CXWL

With adjusting bolt 30 to 200 mm/s Piston speed (Non-lube) With shock absorber 30 to 500 mm/s Cushion With shock absorber (Option) Standard stroke: 2 mm Stroke adjustable range CX2N10 CX215 CX225 CX2N10 CX215 CX225 9.8 N Max. load mass (1) 29.4 N 58.8 N 0.1 Non-rotating accuracy Except piston rod deflection ( ) 0.04 0.02 Straight knock pin (2 pcs.), Adjusting bolt (-X138)(2) Accessory (Option

Slide Unit Series CX2/CXWM/CXWL

With adjusting bolt 30 to 200 mm/s Piston speed (Non-lube) With shock absorber 30 to 500 mm/s Cushion With shock absorber (Option) Standard stroke: 2 mm Stroke adjustable range CX2N10 CX215 CX225 CX2N10 CX215 CX225 9.8 N Max. load mass (1) 29.4 N 58.8 N 0.1 Non-rotating accuracy Except piston rod deflection ( ) 0.04 0.02 Straight knock pin (2 pcs.), Adjusting bolt (-X138)(2) Accessory (Option

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

JSX20, 30 JSX20U, 30U The grommet type is only available for the JSX20 and 30.