Base Mounted Metal Seal/Rubber Seal Series VQ

135.5 76 104 125 135.5 86.5 114.5 137.5 148 97 125 150 160.5 107.5 135.5 162.5 173 118 146 175 185.5 128.5 156.5 187.5 198 139 167 187.5 198 149.5 177.5 200 210.5 160 188 212.5 223 170.5 198.5 225 235.5 181 209 237.5 248 191.5 219.5 250 260.5 202 230 250 260.5 212.5 240.5 262.5 273 2-4-156 Base Mounted Series VQ1000/2000 Plug-in Unit VQ2000 L10 = L3 + 50 L11 = L4 + 50 100 L8 = 16n + 118.5

Cylinder with Lock Series CNS

(mm) Bore size Auto switch model Bore size (mm) Auto switch model 125 140 160 125 140 160 D-A9/A9V D-A9/A9V D-M9/M9V D-M9W/M9WV D-M9AL/M9AVL 12 12.5 11.5 D-M9/M9V D-M9W/M9WV D-M9AL/M9AVL BS5-125 BS5-125 BS5-160 7 6.5 6.5 D-A5/A6/A59W D-F5/J5/F5NTL D-F5W/J59W D-F5BAL/F59F D-Z7/Z80 CLJ2 14 14.5 13 BT-12 BT-12 BT-16 D-A3/A44 D-A5/A6 10 10 10 CLM2 D-A3/A44 D-G39/K39 D-A59W 17 17 17 BS1-125 BS1

5 Port Solenoid Valve

133.5 142 150.5 159 167.5 176 184.5 193 201.5 210 112.5 112.5 125 137.5 137.5 150 162.5 162.5 175 187.5 187.5 200 212.5 212.5 225 237.5 123 123 135.5 148 148 160.5 173 173 185.5 198 198 210.5 223 223 235.5 248 40 Series EX260 Specific Product Precautions 1 Be sure to read before handling.

C85

Bore size Stroke Max. stroke (mm) Bore size (mm) Standard stroke (mm) Standard Non-rotating Double rod 8 10 12 16 20 25 10, 25, 40, 50, 80, 100 100 100 400 10, 25, 40, 50, 80, 100, 125, 160, 200 10, 25, 40, 50, 80, 100, 125, 160, 200, 250, 300 200 200 1000 500 1000 Not available with air cushion. Other strokes available on request.

C85

Bore size Stroke Max. stroke (mm) Bore size (mm) Standard stroke (mm) Standard Non-rotating Double rod 8 10 12 16 20 25 10, 25, 40, 50, 80, 100 100 100 400 10, 25, 40, 50, 80, 100, 125, 160, 200 10, 25, 40, 50, 80, 100, 125, 160, 200, 250, 300 200 200 1000 1000 500 Not available with air cushion. Other strokes available on request.

Table of Contents

Purge air flow rate (l/min(ANR))(3) 2.5 12 25 50 75 125 125 150 190 6 Inlet air pressure (MPa) 0.7 Part no.

MNB

2 32 100 80 63 50 40 80, 100 80, 100 Parts list Parts list No. No.

0.4

Dust-protected SI unit: L5 = 10.5n + 97, L6 = L3 + 25, L7 = L4 + 25 Formula L1 = 10.5n + 44.5, L2 = 10.5n + 72.5 n: Station (Maximum 16 stations) 2 L n Dimensions 3 4 5 6 7 8 9 10 11 12 13 14 15 16 L1 L2 (L3) (L4) 65.5 76 86.5 97 107.5 118 128.5 139 149.5 160 170.5 181 191.5 202 212.5 93.5 104 114.5 125 135.5 146 156.5 167 177.5 188 198.5 209 219.5 230 240.5 125 125 137.5 150 162.5 175 187.5

C95Series

Rod du.met.r OpOfmnil Piston...a 'Op WIlting rM8ure (pII) ~ OUT... 25, 50, 75, 100, 125. 150,175.200, 25~ 3OO, 3S0, 40~45~50~600 63' (mm) . 25 (mm) 145 A (Inch') 1" direction 50 54 125 134 '00 107 80 . ' 25. 50,75, 100,125, 150.175,200,250, 300, 350, 400, 450, SO(), 600, 700, 800 32 INOUT 12 27 80 155 1.07 40 16 INOUT 1.64 41 82 123 164 205 237 SO 20 IN-OUT 2.56 64 128 192 256 319 371 100

MLGP

P-80 (JT)

MLGP

P-80 (JT)

LG1H

radius 80 35 8H10 depth 8 85 130 Stroke + 145.7 (table movement range) 77.3 77 107 10 95 Work piece mounting reference plane 55 Body mounting reference plane 52.5 Stroke + 300 1 125 8(4)-M6 x 1 thread depth 10 3(2)-8H10 depth 10 The body mounting reference plane and work piece mounting reference plane should be used as standards when mounting onto equipment.

Programless controller Step motor (servo 24 VDC)

800 60 800 125 800 60 800 7 100 900 70 900 150 900 70 900 8 125 1000 80 1000 175 1000 80 1000 9 150 1200 90 1200 200 1200 90 1200 10 175 1400 100 1400 225 1400 100 1400 11 200 1600 110 1600 250 1600 120 1600 12 225 1800 120 1800 275 1800 140 1800 13 250 2000 130 2000 300 2000 160 2000 14 275 2500 140 2500 325 2500 180 2500 15 300 3000 150 3000 350 3000 200 3000 65 No.

Integrated Controller

70 60 50 40 30 20 10 0 100 200 300 400 500 30 25 Work load: W [kg] Work load: W [kg] 3000 mm/s2 20 15 3000 mm/s2 10 5000 mm/s2 5 10 mm/s2 0 50 100 150 200 250 300 350 450 400 0 0 Speed: V [mm/s] Speed: V [mm/s] EQFS32HC/Ball Screw Drive Horizontal/Lead 4 Vertical/Lead 4 100 90 80 70 60 50 40 30 20 10 0 20 40 60 80 100 120 50 45 40 35 30 25 20 15 10 5 0 140 20 40 60 80 100 120 3000 mm/s2

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

, 200 20 25 32 40 50 63 80 100 20 25 32 40 50 63 80 100 1/8 Relief type Vacuum suction type 25, 50, 75, 100, 125, 1/4 150, 200, 250, 300 3/8 1/2 Non-lube Double acting, Up to 1500 25, 50, 75, 100, 125, 150, 200 Single rod (40 to 63) 1/8 25, 50, 75, 100, 125, 1/4 150, 200, 250, 300 3/8 1/2 Note 1) When exceeding the standard strokes above, the particle generation class may not be satisfied

MLGP

Load weight m (kg) Load weight m (kg) 100 80 80 80 100 100 80 10 10 80 6 10 100 200 200 300 300 25 26 50 51 6 10 100 25 26 50 51 Stroke (mm) Stroke (mm) 9-11-17 17 Series MLGP Operating Range when Used as Stopper Warning 1.

MLGP

Load weight m (kg) Load weight m (kg) 100 80 80 80 100 100 80 10 10 80 6 10 100 200 200 300 300 25 26 50 51 6 10 100 25 26 50 51 Stroke (mm) Stroke (mm) 9-11-17 17 Series MLGP Operating Range when Used as Stopper Warning 1.

58

16A Y-16A 76 11 Air Cylinder, Double Rod Series CS2W 125, 140, 160 How to Order CS2W L 125 100 CDS2W With auto switch L 125 100 M9BW With auto switch (Built-in magnet) Made to Order For details, refer to the next page.

CLS

Bore size Thread type Nil TN Foot style Nil S n 2 pcs. 125 140 160 180 200 250 Rc 125 mm Rod side flange style 1 pc.

Slide Unit Series CX2/CXWM/CXWL

S Bore size/Stroke (mm) n pcs. n (25), 50, 75, 100 10 (25), 50, 75, 100, 125, 150, 175, 200 16 Auto switch (25), 50, 75, 100, 125, 150, 175, 200 20 Nil Without auto switch (25), 50, 75, 100, 125, 150, 175, 200 25 For the applicable auto switch model, refer to the table below. (25), (50), 75, 100, 125, 150, 175, 200 32 Note1) For the strokes indicated in the parentheses of the 10, 16 and 25