Table of Contents

0 50 100 150 200 250 Supply pressure (kPa) Supply pressure (kPa) Detection side piping: 6 x 4 tubing 5 m Detection nozzle: 1.5 Detection side piping: 6 x 4 tubing 5 m Detection nozzle: 1.5 0.6 0.4 0.5 mm 0.25 mm 0.5 Detection distance (mm) Detection distance (mm) 0.3 0.4 0.3 0.2 0.15 mm 0.2 0.15 mm 0.1 0.1 0.03 mm 0.01 mm 0 0 0 50 100 150 200 250 0 50 100 150 200 250 Supply pressure (kPa

JXCx-OMU0004

2] 2] [mm/s] [mm/s [mm/s] [mm/s 0 48 250 48 250 1 75 500 75 500 2 100 1000 100 1000 3 150 1500 150 1500 4 200 2000 200 2000 5 250 2500 300 2500 6 300 3000 400 3000 7 350 4000 500 4000 8 400 5000 600 5000 9 450 6000 800 6000 10 500 7500 1000 7500 11 600 10 1200 10 12 700 12500 1400 12500 13 800 15000 1600 15000 14 900 17500 1800 17500 15 1000 20 2000 20 62 No.JXC-OMU0004-A 11. 11.1 [5m ]

7ND9071en

7 Actuator Total Travel 250 [>=0] 4 Max.

0.4

229 218 207 196 185 163 174 300 287.5 275 262.5 250 250 237.5 225 212.5 200 187.5 187.5 310.5 298 285.5 273 260.5 260.5 248 235.5 223 210.5 198 198 How to Order Double check block VQ1000 FPG F M5 C4 2-position 3-position exhaust center IN side port size OUT side port size Option Nil 3(R2) 1(P) 5(R1) 3(R2) 1(P) 5(R1) 3(R2) 1(P) 5(R1) 3(R2) 1(P) 5(R1) None With bracket M5 C3 C4 C6

5

, 300, 350, 400, 450, 500 1000 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 1000 50 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 1000 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 1000 80 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 1000 100 25, 50, 75, 100, 125, 150, 175, 200

CL

CL-40 CL-50 CL-63 CL-80 CL-100 Standard Stroke Bore size (mm) Standard stroke (mm) 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50, 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80, 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 Maximum Stroke For the maximum stroke of the CA1 series 40 to 100, and CS1 series

MLGP

Data Common Dimensions: MLGPM/MLGPL B C DA FA FB G GA GB H HA IA IB Extension locking Retraction locking IC Standard stroke (mm) Bore size (mm) GC ID IE IF IG IH J JA 80 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350 139.5 56.5 22 25 61 91.5 15.5 14.5 18 202 240 M12 M14 43 1.5 110 137 18.5 23 7.5 11 30 50 5.5 5.5 Rc 1/8 Rc 1/4 7 15 54.2 45.5 38 45 25 30 19 23 50, 75, 100, 125, 150

MLGP

Data Common Dimensions: MLGPM/MLGPL B C DA FA FB G GA GB H HA IA IB Extension locking Retraction locking IC Standard stroke (mm) Bore size (mm) GC ID IE IF IG IH J JA 80 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350 139.5 56.5 22 25 61 91.5 15.5 14.5 18 202 240 M12 M14 43 1.5 110 137 18.5 23 7.5 11 30 50 5.5 5.5 Rc 1/8 Rc 1/4 7 15 54.2 45.5 38 45 25 30 19 23 50, 75, 100, 125, 150

5 Port Solenoid Valve, Series VQC

For each additional input block, add 21mm.) n: Stations (maximum 24 stations) n L L1 L2 L3 L4 1 73 192 212.5 223 2 89 208 237.5 248 3 105 224 250 260.5 4 121 240 262.5 273 5 137 256 275 285.5 6 153 272 287.5 298 7 169 288 312.5 323 8 185 304 325 335.5 9 201 320 337.5 348 10 217 336 362.5 373 11 233 352 375 385.5 12 249 368 387.5 398 13 265 384 400 410.5 14 281 400 425 435.5 15 297 416 437.5

VQC

For each additional input block, add 21mm.) n: Stations (maximum 24 stations) n L L1 L2 L3 L4 1 73 192 212.5 223 2 89 208 237.5 248 3 105 224 250 260.5 4 121 240 262.5 273 5 137 256 275 285.5 6 153 272 287.5 298 7 169 288 312.5 323 8 185 304 325 335.5 9 201 320 337.5 348 10 217 336 362.5 373 11 233 352 375 385.5 12 249 368 387.5 398 13 265 384 400 410.5 14 281 400 425 435.5 15 297 416 437.5

MXW

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Bore size (Stroke (mm)) 8 12 16 20 25 25, 50, 75, 100, 125, 150 50, 75, 100, 125, 150 75, 100, 125, 150, 175, 200 100, 125, 150, 175, 200, 225, 250 100, 125, 150, 175, 200, 225, 250, 275, 300 Auto switch Nil Without

Air Cylinder Series MB

Order Made 50 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 63 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80 Symbol Specifications/Descriptions 1400 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 XA 100 Change of rod end shape 1500 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450,

Rotary Actuator

[mm] 63 15 105 59 130 101 Size H U UU 50 39 114 150 63 45 136 177 80 55 165 215 100 60 190 250 Size H N U UU 50 30 15 105 125 63 33 17 124 146 80 43 20 153 178 100 44 25 174 204 80 18 130 76 160 119 100 18 150 92 180 133 DThe dimensions of shaft key and four chamfers are the same as the basic type.

Process Valve

(mm) Symbol 1 2 3 Note 2) Port size Rc 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz 1 2 3 Note 1) 4 Symbol Nil: Non-locking push type N.C. 1 MPa N.C. 0.5 MPa N.O. 1 MPa C.O. 1 MPa Note) 4 Note 2) A: Non-locking push type A (projecting) 1 6A 8A 10A 1 8 1 4 3 8 5 6 Note 2) 7 Valve size 1 to 4 7 Note 2) 11 15 11 10A 3 8 B: Slotted locking

Clean Gas Filter

( ) IDF FS Cartridge type Disposable type IDFA SFB10 45 0.99 5 to 80 Replaceable P . 302 Straight type IDFB IDH ID IDG Nominal IDK 120 m 400 SFB20 (Strainer) P . 303 Sintered metallic element ( ) AMG AFF AM Straight type AMD AMH SFB30 P . 306 45 0.99 AME AMF 0.01 m Filtering efficiency 99.99% ( ) ZFC Nonreplaceable 5 to 120 Membrane element ( ) Multiple disc type SF SF SFD SFC10 P . 309 240

Direct Operated, 2 Port Solenoid Valve, For Water, Oil, Steam, Air, Series VX

Model VX21 VX22 VX23 2 mm 3 mm Orifice size Orifice size Solenoid Coil 4.5 mm Coil: Class B, Class H 6 mm 8 mm Rated Voltage 100 VAC, 200 VAC, 110 VAC, 220 VAC, 240 VAC, 230 VAC, 48 VAC, 24 VDC, 12 VDC 10 mm 1 2 1 4 3 8 , 1 2 Port size 1 8 1 4 , 1 4 3 8 , Normally Open (N.O.)

IDX-OM-W023

6 IDU8E-23 IDU11E-23 IDU15E1-23 50Hz 1.1 1.5 2.6 3/min (ANR)1 m 60Hz 1.2 1.7 2.8 0.7MPa 55 32 10 580 0.151.0MPa 240 (85%) AC100/100110V10%(4) AC200/200220V 10%(4) (2) A 1.7 3.0 3.2 (2) W 260 425 450 (3) 5A 10A R134a(HFC) AC100V/200V g 2805 2905 35010 Rc3/4 Rc1 10mm 1 2 kg 44 47 71 kW 7.5 11 15 1ANR 2065% 2 3 30mA 4() IDU Series 6-1 6 2 IDX-OM-W023 6 6-2 GWP (GWP)

Air Cylinder

processing equipment (XC85) PTFE grease (X446) Switch holder Visibility of the indicator LED improved with the transparent resin switch bracket (Standard specification) Water resistant compact auto switch now available Solid state auto switch D-M9A(V) Auto switch mounting screw Auto switch mounting band 288 CG1 Series (mm) Stroke Variations Standard stroke Bore size (mm) 75 100 125 150 200 250

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Standard Stroke Long stroke (mm)(2) Standard stroke (mm) (1) Bore size (mm) 20 25, 50, 75, 100, 125, 150, 200 201 to 350 25 301 to 400 32 301 to 450 40 301 to 500 25, 50, 75, 100, 125, 150, 200 250, 300 50, 63 301 to 1000 80 301 to 1000 100 301 to 1000 Note 1) Other intermediate strokes can be manufactured upon receipt of order.

Support Guide/11-LEFG Series

Lx = 400 mm, Ly = 250 mm, Lz = 1500 mm 4.