IDG

100 75/25 110/40 170/57 240/80 300/100 Note) In the case of two or more options, indicate them alphabetically.

SMC

30 55 65 70 ZZ 107 107 107 117 132 182 230 280 M 76 76 76 86 101 151 199 249 Z 75 75 75 85 100 150 198 248 K 29 39 49 59 69 94 119 144 J 40 40 40 50 60 85 118 155 I 10 10 10 10 15 40 55 68 NN 2 2 2 2 3 4 5 7 H 40 40 40 50 30 35 35 35 G 16 16 16 16 21 26 39 19 N 4 4 4 4 6 6 6 8 HA 40 40 40 50 30 70 70 70 NA 2 2 2 2 2 4 4 4 GA 16 16 16 16 51 61 109 159 KA 125 173 223 13-/22-MXS16L-10 13-/22

Clamp Cylinder Series CK1

Nil TN Rc1/4 NPT1/4 S n Bore size 40 50 63 40 mm 50 mm 63 mm Auto switch Cylinder stroke (mm) Nil Without auto switch (built-in magnet) Without switch mounting rod 40 50 63 50, 75, 100, 125, 150 50, 75, 100, 125, 150 50, 75, 100, 125, 150 Without auto switch (built-in magnet) With switch mounting rod P None End bracket Select applicable auto switch models from the table below.

Series IDG

500/60 600/65 750/80 100/11 200/22 300/35 1000/110 Symbol Drain discharge method 60L, 60S 75L, 75S 100L, 100S 60, 60H 75, 75H 100, 100H 40 75/25 110/40 170/57 240/80 300/100 10, 10H 20, 20H 3, 3H 5, 5H 30, 30H, 30L 50, 50H, 50L 60 S 50/27 150/85 100/54 Nil Manual valve Component equipment C Note 2) N.C. auto drain Note 1) Note 2) Micro mist separator with pre-filter Regulator Contents

58

40 133 258 30.5 1/2 98 1/5 stroke 110 235 75 40 133 258 34.5 3/4 106 1/5 stroke 120 256.5 75 40 141 277.5 The minimum stroke with rod boot is 30 mm or more.

Air Slide Table Series MXQ

MXQ 6 MXQ 8 MXQ12 MXQ16 MXQ20 MXQ25 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 10, 20, 30, 40, 50, 75, 100, 125 10, 20, 30, 40, 50, 75, 100, 125, 150 10, 20, 30, 40, 50, 75, 100, 125, 150 2 Series MXQ Theoretical Output IN OUT Application of the dual rod system generates double the output of conventional cylinders.

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Extension end 8 10, 20, 30, 40, 50, 75 Rubber stopper Retraction end Both ends 12 10, 20, 30, 40, 50, 75, 100 16 10, 20, 30, 40, 50, 75, 100, 125 20 10, 20, 30, 40, 50, 75, 100, 125, 150 25 10, 20, 30, 40, 50, 75, 100, 125, 150 Functional option Nil Standard P Note 1) Axial piping Note 1) The combination of axial piping and both ends adjusters or retraction end adjusters is not available.

Cylinder with Lock Series CLS

(Different surfaces, Same surface), 1 pc. 15 100 105 110 D-A9 15 + 40 (n2) 2 (n = 4, 8, 12, 16) 100 + 40 (n4) 2 105 + 40 (n4) 2 110 + 40 (n4) 2 n pcs. (n = 2, 4, 6, 8) (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) 2 pcs. (Different surfaces, Same surface), 1 pc. 10 75 80 85 D-A9V 10 + 30 (n2) 2 75 + 30 (n4) 2 80 + 30 (n4) 2 85 + 30 (n4) 2 n pcs.

•

r1m) 2, :ZZi 125 15 27 65 M30 x 1.5 30.5 11 2 98 35 40 45 29 110 273 302 75 40 133 lJ5 stroke 298 325 140 15 27 75 M30x 1.5 30,S 1 12 98 32 110 283 31So 75 40 ~33 .I stroke 375 40 141 1f.; stroke 327 363 K The mlolmum slroke with rod boot is 30 mm or more.

ZP

43 ZPT50 -B-A14 U C ZPT40D20-B-A14 127 65 124 50 19.5 33 7.5 3.8 50 53 137 5 10 6.2 13 ZPT40D30-B-A14 75 134 Dimensions by Stroke ZPT40D50-B-A14 182 95 179 75 1 8 E G: M5 x 0.8 G: Rc 40 50 H J F 40 50 H J F K Model 40 50 U C ZPT 20-B-A14 U C ZPT 30-B-A14 U C ZPT 50-B-A14 U C ZPT 10-B-A14 44.5 109.5 111 112 45.5 110.5 114.5 50 54.5 113.5 116.5 117.5 55.5 5 10 6.2 13 65.5 124.5 64.5 123.5

IIIIIII

(kg) 11.46 (5.2) P.T. ln(mm) 0.12 (3) O.T. ln(mm) 0.08 (2) T.T.ln(mm) 0.19 (5) '75 PSIG (5 Kgf/cm2) -ffi 2 WaY DIMENSIONS A B c D E F G H J K M 't.57 (40) 1 . 1 8 (30) 2.40 (61) 2.05 (52) o.87 (221 0.51 (13) 0.98 (251 0.63 (16) 1.06 (27\ 0.31 (8) 1 . 2 6 (32) Millimeters in Parentheses HOW TO ORDER NV[f220-N02-40 : 2 way; 2 portr/e" NPT WFoot Pedal NVM23O-NO2-40 : 3 way; 2 poft 1/4" NPT w

Mechanical Valves Series NVM, NVFM, NVZNI

(kg) 11.46 (5.2) P.T. ln(mm) 0.12 (3) O.T. ln(mm) 0.08 (2) T.T.ln(mm) 0.19 (5) '75 PSIG (5 Kgf/cm2) -ffi 2 WaY DIMENSIONS A B c D E F G H J K M 't.57 (40) 1 . 1 8 (30) 2.40 (61) 2.05 (52) o.87 (221 0.51 (13) 0.98 (251 0.63 (16) 1.06 (27\ 0.31 (8) 1 . 2 6 (32) Millimeters in Parentheses HOW TO ORDER NV[f220-N02-40 : 2 way; 2 portr/e" NPT WFoot Pedal NVM23O-NO2-40 : 3 way; 2 poft 1/4" NPT w

Guide Cylinder/Compact Type Series MGC

AE W View A-A' Standard Stroke (mm) A AA AB AC AD AE AF AP B BP Note 3) BZ C D E F G GC Bore size (mm) 20 25 32 40 Stroke range (mm) 75, 100, 125, 150, 200 94 12 13 16.5 70 35 M6 x 1 depth 12 32 135 1/8 73.5 26.5 50 118 6.8 11 depth 8 28 104 16 16 19 75 40 37 160 1/8 86.5 31.5 50 140 8.6 14 depth 10 29 M8 x 1.25 depth 16 75, 100, 125 150, 200, 250 300 104 16 16 19 75 40 37 160 1/8 86.5 31.5

ZPT/ZPX

121 12 ZPT125HBNJ25-B01-A22 50-B01-A22 75-B01-A22 100-B01-A22 +7 +228 22 How to Order ZPT 40 HB N J 25 B01 A18 Mounting thread Pad diameter (mm) 40 50 63 80 100 125 M18 x 1.5 (40 to 80) 40 A18 50 M22 x 1.5 (100, 125) A22 63 80 Vacuum entry 100 B01 Rc 1/8 125 Applicable buffer stroke (Rotating) HB Pad type Material 40 50 63 80 100 125 Stroke 25 50 75 100 Large bellows pad N S U F E NBR Spring

7

Note 2) Only available for clevis width A (16.5 mm) Thread type 40 50 63 40 mm 50 mm 63 mm Nil TN TF Rc1/4 NPT1/4 G1/4 None End bracket Nil Single knuckle joint (M6 without tap) Single knuckle joint (M6 with tap) Double knuckle joint (M6 without tap) Double knuckle joint (M6 with tap) I IA Y YA Cylinder stroke (mm) 40 50 63 50, 75, 100, 125, 150 50, 75, 100, 125, 150, 200 50, 75, 100, 125

Aluminum High Vacuum Angle Valve

Heater: Indicator: 418 A XLA/XLA V Series Aluminum High Vacuum Angle Valve Dimensions XLA/Air operated (b) E C D C E E Fn (KF flange) B (K flange) Fd (a) Heater (Option) (c) Auto switch (Option) H G A A (mm) A B C D Fn Fd G H E Note 1) Model XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 XLA-100 XLA-160 40 17 30 1 38 40 103 39 26 40 12 1 48 50 113 63 41 55 11 2 66 65 158 68 52 75 11 2 79

MQQ

28 10, 20, 30, 40, 50, 75, 100 Note) Available only for MQQL.

MQQ

style Double clevis style B L F G D Note) 10 16 20 25 28 10 mm 16 mm 20 mm 25 mm 28 mm 16 10, 20, 30, 40, 50, 60 20 10, 20, 30, 40, 50, 60 25 10, 20, 30, 40, 50, 75, 100 28 10, 20, 30, 40, 50, 75, 100 Note) Available only for MQQL.

CG1

100 125 150 200 25 50 75 100 125 150 200 All strokes All strokes 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 D-C7 D-C7 55 55 80 80 105 24.5 (27) 45.5 45.5 70.5 70.5 95.5 24.5 (27) 20.5 30 CA1 D-C8 D-C8 55 55 80 80 105 130 130 27 (29.5) 45.5 45.5 70.5 70.5 95.5 27 (29.5) 20.5 30 120.5 120.5

ZP

Buffer Series ZPX Specifications ZX Vacuum entry direction Buffer type Rotating (J) 25 mm, 50 mm, 75 mm Connection Vertical Male thread M18 x 1.5 M18 x 1.5 M22 x 1.5 Mounting 100, 125 40 to 80 25 mm, 50 mm, 75 mm, 100 mm Buffer stroke ZR 40, 50 63, 80 100, 125 Thread dia.