MY1

500 400 300 L-unit Air cushion 200 200 Caution 1002 3 4 5 10 20 50 100 1 2 3 4 5 10 20 30 400 50 1.

Parallel Style Air Gripper Series MHZ

MHW -X Mass MRHQ (g) End boss type (Symbol) MA Model E W K M DDouble acting Single acting MHZL2-10 70 70 80 80 80 MHZL2-16 170 170 180 180 180 MHZL2-20 310 310 330 330 330 MHZL2-25 535 535 580 580 580 423 Parallel Style Air Gripper with Dust Cover Series MHZJ2 How to Order M9BW 16 MHZJ2 D Number of fingers Made to Order Refer to page 425 for details. 2 2 fingers Bore size 6 10 16 20 25 6

Series VQ Metal Seal/Rubber Seal Body Ported

Turn the manual override clockwise by 180 to set the mark to A and press it in the direction indecated by the arrow. It will be locked set in a (Passage: P A) state. Turn the manual override counterclockwise by 180 to set the mark to B and press it in the direction indicated by the arrow. It will be reset in a (Passage: P B) state. (It is reset when shipped.)

Air Cylinder: Standard Type Lube, Non-lube Type, Air-hydro Type Series CS1 Lube, Non-lube: ø180, ø200, ø250, ø300 Air-hydro: ø125, ø140, ø160

Nil N H Port thread type Bore size Nil TN TF Rc NPT G Air-hydro Lube, Non-lube 125 140 160 180 200 250 300 125 140 160 125 mm 140 mm 160 mm 180 mm 200 mm 250 mm 300 mm 125 mm 140 mm 160 mm Mounting Bracket Part No. Bore size (mm) 125 140 160 180 200 250 300 For How to Order with auto switch, refer to page 417.

ChemicalThermo-con

to 242 VAC HED005-HW13 1/2" x 3/8" Black 2 180 to 242 VAC HED005-HW19 3/4" x 5/8" Green/Y ellow PE 0.24 (6) 180 ChemicalThermo-con Series HED Dimensions HED007-W2ll Communication connector The RS-232C uses only upper side connector.

SX

A: Orange B: Green G: 300 H: 600 (Press and turn for the locking type.)

0.

Note) Standard lead wire length: 300 mm 24 Series VQZ100/200/300 Made to Order (For details, refer to page 34.)

Integrated Controller

Dimensions [mm] Stroke [mm] L A B n D E F G H Without lock With lock 50 4 15 80 25 100, 150 40 50 200, 250 6 2 200 180 300, 350 8 3 300 280 400, 450 10 4 400 380 500 12 5 500 480 214 275 6 80 21 Easy to Operate Integrated Controller / Slider Type EQFSH Series Battery-less Absolute (Step Motor 24 VDC) Dimensions: In-line Motor Model Selection EQFS H Series EQY H Series Auto Switch Electric

Air Cylinder

depth 12 6 14 50 Up to 300 301 to 1500 35 32 27 32 20 30 2 14 58 11 58 M8 x 1.25 depth 16 7 18 63 Up to 300 301 to 1500 35 32 27 38 20 32 2 14 58 11 72 M10 x 1.5 depth 16 7 18 80 Up to 300 301 to 1500 40 37 32 50 25 40 3 20 71 13 89 M10 x 1.5 depth 22 10 22 100 Up to 300 301 to 1500 40 37 41 60 30 50 3 20 71 16 110 M12 x 1.75 depth 22 10 26 CG3 JMB MB MB1 * For mounting brackets, refer to

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

500 400 300 200 200 100 1 2 3 4 5 10 20 30 1002 3 4 5 10 20 30 0.5 40 50 100 Load weight (kg) Load weight (kg) 20 Horizontal collision: P = 0.5 MPa 40 Horizontal collision: P = 0.5 MPa 2000 1500 2000 1500 Collision speed (mm/s) Collision speed (mm/s) L unit 1000 1000 Air cushion 500 400 300 500 400 300 L unit Air cushion 200 200 1002 3 4 5 10 20 50 100 1 2 3 4 5 10 20 30 400 50 Caution Load

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

speed (mm/s) Collision speed (mm/s) L unit 1000 1000 Air cushion 500 400 300 500 400 300 L unit Air cushion 200 200 1002 3 4 5 10 20 50 100 1 2 3 4 5 10 20 30 400 50 Caution Load weight (kg) Load weight (kg) 1.

LJ1H

150 200 250 300 350 400 450 500 10kg 8kg 18kg 16kg 14kg Speed (mm/s) Speed (mm/s) Model Mounting orientation LJ1H30 12kg Load movement direction 10kg 600 14kg 400 L1 (mm) L3 (mm) 12kg 20kg 50 100 a = 1000 16kg 18kg 20kg Pitching Yawing Vertical Vertical m a a = 3000 a = 2000 200 100 200 300 400 500 600 0 100 200 300 400 500 600 0 L1 Mep Stroke (mm) Stroke (mm) 0 5 10 20 15 Transfer load

0.55

X505 [IP65 compatible] [IP65 compatible] [IP65 compatible] Manual override Nil: Non-locking push type D: Push-turn locking slotted type E: Push-turn locking lever type G: Lead wire length 300 mm H: Lead wire length 600 mm L: With lead wire (length 300 mm) M: With lead wire (length 300 mm) D: With connector Y: With connector T: Conduit terminal LN: Without lead wire MN: Without lead wire Light

CM2

200 201 to 300 51 to 100 101 to 150 151 to 200 201 to 300 12.5 25 37.5 50 75 142 155 167 180 205 151 164 176 189 214 20 12.5 25 37.5 50 75 146 159 171 184 209 155 168 180 193 218 25 12.5 25 37.5 50 75 151 164 176 189 214 163 176 188 201 226 32 12.5 25 37.5 50 75 180 193 205 218 243 192 205 217 230 255 40 Built-in One-touch fitting With air cushion Pivot bracket (mm) Bore Bore Bore WA N1

VZ3000

Grommet (G), (H) VZ3 20-M5 G H 3 4 5 VZ3420 VK Manual override (Non-locking) VZ3520 VZ (Lead wire length) (Mounting hole for manifold) VF G: 300 mm H: 600 mm VFR VP4 VZS VFS VS4 (Mounting hole) VQ7 2-M5 x 0.8 (PE port) EVS VFN (Piping port) L plug connector (L) VZ3 20-L-M5 M plug connector (M) VZ3 20-M-M5 3 4 5 3 4 5 300 (Lead wire length) 300 (Lead wire length) : With light/surge voltage

Single Axis Electric Actuator Series LJ1H

500 150 200 250 300 350 400 450 500 10kg 8kg 18kg 16kg 14kg Speed (mm/s) Speed (mm/s) Model Mounting orientation LJ1H30 12kg Load movement direction 10kg 600 14kg 400 L1 (mm) L3 (mm) 12kg 20kg 50 100 a = 1000 16kg 18kg 20kg Pitching Yawing Vertical Vertical m a a = 3000 a = 2000 200 100 200 300 400 500 600 0 100 200 300 400 500 600 0 L1 Mep Stroke (mm) Stroke (mm) 0 5 10 20 15 When an actuator

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

override 34 41 3.5 (Lead wire) 38.5 300 Cover diameter 1.6 Cross section 0.34mm2 SMC 35.5 A port PE 16 12 14.5 7 7.5 7.5 7.5 3-Rc(PT)1/8 P/A/R port M5 X 0.8 PE port L plug connector (L): VQZ115(R)-lLl-01 M plug connector (M): VQZ115(R)-lMl-01 60.5(65.5) 300 (Lead wire) Cover diameter 1.5 51.5(52.5) 300 (Lead wire) Cross section 0.23mm2 55.5(59) Indicator light Indicator light Cover dia 1.5

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

Note) Standard lead wire length: 300 mm.

AC Servo Motor Driver (Pulse input type/Positioning type)

PA07 1 12 6 3 12 6 3 20 10 5 16 8 4 Feel length multiplication (STM) (Multiplier) PE02 0 0 (<1000 stroke)/0001 (>1000 stroke) Home position return type PE03 0010 3 (Stopper type) Home position return direction PE03 0010 1 (Motor side) Home position return Speed (rpm) PE04 500 150 300 600 150 300 600 90 180 360 112 225 450 Home position return/JOG operation Accelerationeration/De celeration

IDG

IDG75M IDG100M IDG3HM IDG5HM IDG10HM IDG20HM IDG30HM IDG50HM IDG60HM IDG75HM IDG100HM 25 50 100 200 300 500 600 750 1000 25 50 100 200 300 500 600 750 1000 IDG30LM IDG50LM IDG60LM IDG75LM IDG100LM 75 110 170 240 300 IDG60SM IDG75SM IDG100SM 50 100 150 Type V A regulator combined with the type M IDG3V IDG5V IDG10V IDG20V IDG30V IDG50V IDG60V IDG75V IDG100V IDG3HV IDG5HV IDG10HV IDG20HV IDG30HV