High Vacuum Angle Valve, XL Series

Item XL -25 XL -40 XL -50 XL -63 XL -80 Rated heater voltage 90 to 125VAC 200/10 200/20 400/40 400/60 600/100 Heater power W (nominal value) In-rush/Normal (Option symbol) H1 80C (176F) 200/40 200/60 400/100 600/150 H2 100C (212F) 200/30 400/70 400/80 600/130 800/180 H3 120C (248F) Note) In-rush current will flow to the heater for approximately 30 seconds and will then subside.

MGG

Dimensions 20 to 50 Front mounting flange BM R MH Y + Stroke ZZ + Stroke Front mounting flange 63 BM R MH Y + Stroke ZZ + Stroke (mm) Adjustment 0 to 25mm Adjustment 0 to 50mm Bore size (mm) Y BM R MH ZZ MH ZZ 20 25 32 40 50 63 48 164 73 189 12 86 M6 x 1 48 171 73 196 12 86 M6 x 1 50 175 75 200 12 88 M8 x 1.25 65 208 90 233 13 99 M12 x 1.75 58 227 83 252 14 M12 x 1.75 114 65 236 90 261 14

CNS

700 800 900 160 600 600 140 500 500 125 400 400 300 300 200 200 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V (mm/s) Maximum speed: V (mm/s) 9-8-7 8 Cylinder with Lock Double Acting, Single Rod Series CNS 125, 140, 160 How to Order 125 125 100 100 Y7BW CDNS D CNS D L Without auto switch L With auto switch Number of auto switches Built-in magnet Port thread type Courtesy

Rotary Clamp Cylinders

Example) M5 x 75 L (MK2B) 6 Moment of inertia (kgm2) 4 MK220/25 2 Mounting bolt 103 6 4 Operating range Flat washer 2 104 Note) Be sure to use a flat washer to mount cylinders via through-holes. 50 100 200 66 120 D 75 85 80 90 90 100 80 90 105 135 105 135 Cylinder model C Mounting bolt size M5 x 75 L M5 x 85 L M5 x 80 L M5 x 90 L M5 x 90 L M5 x 100 L M5 x 80 L M5 x 90 L M6 x 105 L M6 x 135

Rotary Actuator/Vane Style Series CRB2

Volume (cm 3) Single vane Double vane Vane type CRB2BW40-S CRB2BW10-D CRB2BW15-D CRB2BW20-D CRB2BW30-D CRB2BW40-D CRB2BW10-S CRB2BW15-S CRB2BW20-S CRB2BW30-S Model 90 180 270 90 180 270 90 180 270 180 270 180 270 90 100 90 100 90 100 90 100 90 100 90 90 Rotation 1 (0.6) 1.5 (1.0) 4.8 (3.6) 11.3 (8.5) 25 (18.7) 31.5 41 33 34 1.2 1.5 2.9 3.7 6.1 7.9 15 20.2 1.0 1.1 2.6 2.7 5.6 5.7 14.4 14.5

CM2

201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 Bore size (mm) 20 18.2 36 30 68 81 93 106 131 156 181 12.5 25 37.5 50 75 100 125 48 61 73 86 111 136 161 25 18.2 36 32 72 85 97 110 135 160 185 12.5 25 37.5 50 75 100 125 52 65 77 90 115 140 165 32 18.2 36 32 72

MGP

120 201 to 300st 200 200 301 to 400st 300 300 20 to 39st 29 29 40 to 124st 39 39 125 to 200st 77 77 201 to 300st 117 117 301 to 400st 167 167 20 25 20 to 400 WA WB Bore size (mm) Standard stroke (mm) 25 to 49st 24 24 24 28 28 48 50 to 124st 48 48 48 52 52 72 125 to 200st 124 124 124 128 128 148 201 to 300st 200 200 200 200 200 220 301 to 400st 300 300 300 300 300 320 25 to 49st 33 34 36 38

ISO Standard Hydraulic Cylinder

-125, BS5-160 BS5-180, BS5-200 When D-F5BA auto switch is shipped mounted on a cylinder, the above stainless steel screws are used.

10

With bracket/Special electrical entry direction Special electrical entry direction Symbol Electrical entry direction Standard Electrical entry direction Symbol Electrical entry direction Symbol Single unit Manifold IN OUT Nil 90 90 90 270 IN OUT A 90 270 90 IN OUT A C 90 IN OUT Individual port 180 180 180 180 180 IN OUT B B 180 IN OUT Individual port (mm) U 46 56 56 W 36 46 46 X 11 13 13

MB1

Moreover, due to the fact that bumpers are installed at each end of the piston, overall length is increased by 6mm for 32 and 40, 8mm for 50 and 63, and by 10mm for 80 and 100. 90 90 102 102 124 124 164 200 200 141 145 164 Width across flats Stroke range Bore size (mm) Effective thread length A D Ee11 F G H MB J K MM N P S V W ZZ C B 32 40 50 63 80 100 19.5 27 32 32 37 37 46 52 65 75 95

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Electrical entry 24, 12 VDC/ 100, 110, 200, 220 VAC 24, 12, 6, 5, 3 VDC 24, 12, 6, 5, 3 VDC/ 100, 110, 200, 220 VAC Gasket assembly part no.

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

Mass (g) CRBU2W10 CRBU2W15 CRBU2W20 CRBU2W30 90 CRBU2W40 90 Model (size) Vane type 180 270 90 180 270 90 180 270 180 270 180 270 90 Rotating angle Single vane Double vane D469 47.1 47.5 47 73 72 72 143 142 263 258 491 480 140 255 Body of rotary actuator Auto switch unit + 2 switches 30 30 50 60 46.5 Angle adjuster 30 47 90 150 203 90 100 90 100 90 100 90 100 90 100 Rotating angle 158 308

Refrigerated Air Dryers Series IDF/IDU

VAC (50 Hz) Note 4) Single-phase/Three-phase: 200/220 VAC (60 Hz) Three-phase: 200 VAC (50 Hz) Three-phase: 200/220 VAC (60 Hz) ID Power consumption (W) 50/60 Hz 810/940 810/940 Single-phase 200 V 850/1070 850/1070 1300/1700 2000/2500 Three-phase 200 V IDG Operating current (A) 50/60 Hz 4.3/4.7 4.3/4.7 Single-phase 200 V 3.3/3.5 3.3/3.5 5.0/5.4 7.2/8.0 Three-phase 200 V AMG Applicable

Table of Contents

Selection ZL112 ZL212 Exhaust Characteristics Exhaust Characteristics ZX 100 90 100 90 Vacuum pressure Vacuum pressure 300 150 Suction flow rate (/min (ANR)) Air consumption (/min (ANR)) Suction flow rate (/min (ANR)) Air consumption (/min (ANR)) 250 125 Vacuum pressure (kPa) Vacuum pressure (kPa) ZR 80 80 Suction flow rate Suction flow rate 70 70 200 100 60 60 ZM Air consumption Air consumption

CRB2/CRBU2/CRB1

180 270 90 180 270 90 180 270 90 180 270 90 180 270 90 100 180 190 270 280 90 100 180 190 270 280 90 100 180 190 270 280 90 100 180 190 270 280 90 100 90 100 90 100 90 100 90 100 90 100 90 100 90 100 90 100 10 1.2 1.5 15 2.9 3.7 20 6.1 7.9 30 15 20.2 21 25 40 31.5 41 30 32 49 51 66 68 70 73 94 97 118 121 88 93 138 143 188 193 186 197 281 292 376 387 1.0 1.1 2.6 2.7 5.6 5.7 14.4 14.5 33 34

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

Setting over 200 rev will be clamped with 200 rev. 0 0 to [rev] 1000 (Note) Note. Setting can be changed in [Pr. PC06].

AC

95 106 106 106 106 106 11 11 11 11 11 25 18 16 35 35 66 66 66 66 66 70 70 70 70 70 210 210 210 210 210 90 90 90 90 90 13 13 13 13 13 3.2 3.2 3.2 3.2 3.2 106 106 106 106 106 AL3000-02 to 03-1 AL4000-02 to 04-1 AL4000-06-1 AL5000-06 to 10-1 AL6000-10-1 1/4, 3/8 1/4, 3/8, 1/2, 3/4 3/4, 1 1 ( ): With float switch 1.17-7 Large Flow Lubricator Series AL800/900 Standard Specifications Individual

Rotary Actuator/Vane Type

Weight [g] Vane type Single vane Double vane Size 10 15 20 30 40 10 15 20 30 40 Rotating angle 90 180 270 90 180 270 90 180 270 90 180 270 90 180 270 90 100 90 100 90 100 90 100 90 100 Rotary actuator body 42 42 42 64 63 62 130 129 127 248 243 238 465 454 443 58 59 71 74 145 168 268 288 478 524 Auto switch unit 15 20 28 38 43 15 20 28 38 43 Angle adjuster unit 30 47 90 150 203 30 47 90 150

NCM

NCDMB075-0400-M9B-X169US NCDMB(075 to 200)Stroke (C)-X169US ZB + STROKE W B-DIA.

C92

9 11 144 163 175 190 215 230 270 320 142 161 170 185 210 220 250 300 32 36 45 50 63 71 90 115 7 9 9 9 12 14 16 18 18 22 22 28 34 40 44 49 73 82.5 90 97.5 110 120 145 170 12 16 16 19 26 26 25 32 12 15 15 18 25 25 25 32 50 85 95 110 140 162 160 200 47 62 74 90 110 130 154 194 64 72 90 100 126 150 180 230 78 90 110 120 154 180 210 265 46 58 68 89 100 114 140 180 32 40 50 63 80 100 125 160 1.12