C95

4)/2 n n = 2, 4, 6, 8 n = 2, 4, 6, 8 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 10 10 60 65 65 75 80 85 1 100 100 90 95 95 100 105 110 2 (Same side) A3 2 (Different sides) 35 35 60 65 65 75 80 85 K3 n (Same side) 100 + 100 (n 2) 100 + 100 (n 2) 90 + 100 (n 2) 95 + 100 (n 2) 95 + 100 (n 2) 100 + 100 (n 2) 105 + 100 (n 2) 110

Cylinder with Lock

E2 TA TC TD TF TH TL TO TR TS TT TU TX TY TZ UW XV Z 32 MB-S03 47 62 62 12 +0.070 0 47 35 45 12 7 10 13 8.5 50 71 74 49 131 153 40 MB-S04 54 80 80 16 +0.070 0 60 45 60 17 9 12 17 10 63 77.5 97 58 150 174 50 66 80 92 16 +0.070 0 60 45 60 17 9 12 17 10 75 91 109 71 166 198 63 MB-S06 77 100 110 20 +0.084 0 80 60 70 20 11 14 22 15 90 103 130 87 179 211 80 99 100 130 20 +0.084 0 80 60 70 20 11

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Applicable size LA1 LA2 LB1 LB2 LC LD LE LF LG LH LJ1 LJ2 LK LM T 50 63 80 100 P411020-5 P411030-5 P411040-5 P411050-5 78 100 111 141 70 90 100 126 45 56 63 80 50 36 44 46 55 25.5 30 32 39.5 10 12 12 14 4.5 5 6 6 45 60 65 80 7.5 9.5 9.5 11.5 34 39 48 60 66 83 94 120 60.5 75.5 88.5 108.5 84 110 120.5 150.5 48 52 60 80 Note 1) The foot bracket (with bolt, nut, and washer) is not mounted on

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Applicable size LA1 LA2 LB1 LB2 LC LD LE LF LG LH LJ1 LJ2 LK LM T 50 63 80 100 P411020-5 P411030-5 P411040-5 P411050-5 78 100 111 141 70 90 100 126 45 56 63 80 50 36 44 46 55 25.5 30 32 39.5 10 12 12 14 4.5 5 6 6 45 60 65 80 7.5 9.5 9.5 11.5 34 39 48 60 66 83 94 120 60.5 75.5 88.5 108.5 84 110 120.5 150.5 48 52 60 80 Note 1) The foot bracket (with bolt, nut, and washer) is not mounted on

Cylinder with Lock

Bore size B TA TL TU TC TX TZ TO TR TT TS TH TF TY1 TY2 Z TDH10 32 151 40 169 50 187 63 199 80 247 100 266 MB-S03 32 46 62 45 8.5 62 50 74 12 7 13 10 35 47 49 71 148 12+0.070 0 MB-S04 40 52 80 60 10 80 63 97 17 9 17 12 45 60 58 77.5 166 16+0.070 0 50 65 80 60 10 92 75 109 17 9 17 12 45 60 71 91 183 16+0.070 0 MB-S06 63 75 100 70 15 110 90 130 20 11 22 14 60 80 87 103 195 20+0.084 0 80 95

CRB2/CRBU2/CRB1

LA1 LA2 LB1 LB2 LC LD LE LF LG LH LJ1 LJ2 LK LM T 50 63 80 100 CRB1 P411020-5 P411030-5 P411040-5 P411050-5 78 100 111 141 70 90 100 126 45 56 63 80 50 36 44 46 55 25.5 30 32 39.5 10 12 12 14 4.5 5 6 6 45 60 65 80 7.5 9.5 9.5 11.5 34 39 48 60 66 83 94 120 60.5 75.5 88.5 108.5 84 110 120.5 150.5 48 52 60 80 Notes) The foot bracket (with bolt, nut, and washer) is not mounted on the actuator

Air Cylinder

-24A 100 93 100 60 130 22d9 0.065 0.117 Material: Carbon steel (mm) Part no.

SYJ300/500/700

SY100-30-3AS Z Without lead wire: (with connector and 2 of sockets only) SY100-30-A Rated voltage R 5 6 V S R 1 2 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz [115 VAC 50/60 Hz] Lead wire length U Nil 6 10 15 20 25 30 50 300 mm 600 mm 1000 mm 1500 mm 2000 mm 2500 mm 3000 mm 5000 mm For AC voltage valves there is no S option.

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

43 112 11 10 9 30 10 73 225 60 28 99 251 1/4 stroke 63 3/8 47 116 11 12 10 37 10 80 243 65 30 106 269 80 1/2 57 127 11 16 13 40 13 90 270 80 32 116 296 100 1/2 66 137 12 20 16 47 13 100 299 100 35 123 322 1/5 stroke 125 1/2 77 137 12 20 16 55 15 100 305 100 35 123 328 160 3/4 94 155 12 24 20 60 20 108 343 120 38 131 366 93 Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single

CY1

, 200, 300 100, 200, 300, 400, 500 750 15 1 axis 100, 200, 300, 400, 500, 600 1000 20 100, 200, 300, 400, 500, 600, 800 25 1200 100, 200, 300, 400, 500, 600, 800, 1000 25 2 axes 1500 32 Note) Contact SMC if the maximum stroke is exceeded.

Compact

400 400 m L3 [mm] L3 [mm] L3 [mm] L3 [mm] 300 300 300 300 L3 Z 200 200 200 200 100 100 100 100 0 0 0 0 0 2 4 6 8 10 0 2 4 6 8 10 0 2 4 6 8 10 0 2 4 6 8 10 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 300 300 300 300 200 200 200 200 L4 L4 [mm] L4 [mm] L4 [mm] L4 [mm] m X 100 100 100 100 0 0 2 4 6 8 10 0 0 2 4 6 8 10 0 0 2 4 6 8 10 0 0 2 4 6 8 10 Work load [kg] Work load [kg]

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

It is already built-in to the rectifier circuit. 50 60 100 VAC Hz 1 2 200 VAC Hz 50 60 50 60 110 VAC Hz [115 VAC Hz] 3 Electrical entry 50 60 50 60 50 60 DIN terminal D With connector 4 220 VAC Hz [230 VAC Hz] DO Without connector DC specifications of type "D" and "DO" is only available with 12 and 24 V DC. Power saving circuit is not available in the case of "D", "DO" type.

33

temperature 40C (200 VAC) Set temperature range 10 to 30C Temperature stability 2.0C 615 Maintenance free Magnet pump Low-noise design 55 dB (A) Power supply 100/200 VAC 50/60 Hz 230 VAC 50/60 Hz 191 Thermo-chiller Basic Type HRSE Series Circulating Fluid Temperature Controller Simple function and performance Cooling capacity 1.2, 1.6, 2.2 kW (60 Hz) Power supply 100/200 VAC (50/60 Hz) 230

LX

D 4 4 6 6 E 60 90 90 90 F 30 60 60 60 G (50) (50) 100 100 Model LXFH5BC-25 LXFH5BC-50 LXFH5BC-75 LXFH5BC-100 Positioning Time Guide (for Horizontal Mount) For transfer load of 2kg For transfer load of 0kg Positioning time (sec) Positioning time (sec) Positioning distance (mm) Positioning distance (mm) 100 100 50 50 10 10 1 1 10 10 10.1 10.1 5.1 5.1 1.1 1.1 0.2 0.2 Speed (mm/s) Speed (mm/s

Aluminum High Vacuum Angle Valve

VAC, 50/60 Hz XLA 3 110 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz U XL XL 5 24 VDC 6 12 VDC S type: Not available for AC.

CXS

) Weight m (kg) 32 32 25 25 0.1 0.1 20 20 15 15 10 10 0.01 0.01 0 20 40 100 60 80 0 20 40 100 60 80 Overhang L (mm) Overhang L (mm) CXSJM CXSJL Graph (15) V = Over 400 mm/s; Up to 100 mm stroke CXSJM CXSJL Graph (14) V = Over 400 mm/s; Up to 75 mm stroke 1 1 Weight m (kg) Weight m (kg) 32 32 0.1 0.1 25 25 20 20 10 15 15 0.01 0.01 0 20 40 100 60 80 0 20 40 100 60 80 Overhang L (mm) Overhang

CXS

80 100 20 40 60 80 100 Overhang l (mm) Overhang l (mm) Graph (15) V = Over 400 mm/s; Up to 50 st Graph (16) V = Over 400 mm/s; Up to 75 st 2 2 CXSM CXSL CXSM CXSL 1 1 0.5 Weight m (kg) Weight m (kg) 32 32 0.1 0.1 25 25 0.05 20 20 15 15 10 0.01 0 0.01 10 20 40 60 80 100 0 20 40 60 80 100 Overhang l (mm) Overhang l (mm) Graph (17) V = Over 400 mm/s; Up to 100 st 1 CXSM CXSL Weight m (kg) 32

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

, 70, 75, 80, 90, 100 30 10 16 20 25 30 35 40 45 50 60 70 80 75 90 100 10 15 20 25 30 35 40 45 50 60 70 80 75 90 100 Model CXS20 CXS25 CXS32 170 160 150 145 140 130 120 115 110 105 100 95 90 85 80 194 184 174 169 164 154 144 139 134 129 124 119 114 109 104 60 40 172 162 152 147 142 132 122 117 112 107 102 97 92 87 82 196 186 176 171 166 156 146 141 136 131 126 121 116 111 106 60 40 30 182

Guide Cylinder Series MGG

) 500st 300st 400st 1 1 0.5 400st 300st 200st 300st 0.5 0.5 200st 100st 200st 100st 100st 75st 75st 0 0 0 0 0 0 10 20 30 40 50 20 40 60 80 100 10 20 30 40 50 60 70 Allowable end load F (N) Allowable end load F (N) Allowable end load F (N) MGGM 40Stroke 3 (Slide bearing type) 2.5 Deflection Y (mm) 800st 2 700st 600st 1.5 500st 1 300st 400st st: Stroke (mm) 0.5 100st 200st 0 0 20 40 60 80 100

CHKD/CHKG

140 145 150 155 160 165 190 215 240 265 290 55 60 65 70 75 80 85 90 95 100 125 150 55 60 65 70 75 80 85 90 95 100 125 150 65 70 75 80 85 90 95 100 105 110 135 160 185 210 75 80 85 90 95 100 105 110 115 120 145 170 195 220 245 12.4 15.5 CHKGB25 CHKGB63 10.4 16 CHKGB32 CHKGB80 10.5 22 CHKGB40 CHKGB100 13.5 26.5 282 Compact Hydraulic Cylinder: 16 MPa CHKG Series Specific Product Precautions