Rotary Actuator

Size: 30, 50, 63, 80, 100 Size: 30, 50, 63, 80, 100 90, 180 90, 180, 100, 190 90, 180 90, 180, 100, 190 30 50 to 100 30 50 to 100 Rotating angle Lightweight body by changing the body and the cover shape.

Aluminum High Vacuum Angle Valve

-1 XLG63-30-1H-1 XLGV63-30-1 50 XLA50-30-1 XLA50A-30-1 XLA50-30-1H XLA50A-30-1H XLAV50-30-1 XLAV50A-30-1 XLC50-30-1-1 XLC50-30-1H-1 XLCV50-30-1-1 XLF50-30-1 XLF50A-30-1 XLF50-30-1H XLF50A-30-1H XLFV50-30-1 XLFV50A-30-1 XLD50-30-1 XLD50-30-1H XLDV50-30-1 XLG50-30-1-1 XLG50-30-1H-1 XLGV50-30-1 XLH50-30-1 40 XLA40-30-1 XLA40A-30-1 XLA40-30-1H XLA40A-30-1H XLAV40-30-1 XLAV40A-30-1 XLC40-30-1

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

assembly 9 10 19 25 9 10 19 25 Auto switch unit + 2 switches 30 46.5 30 50 60 46.5 30 30 50 60 Angle adjuster 30 203 47 90 150 203 30 47 90 150 11-2-7 7 Series CRB2 Rotary Actuator: Replaceable Shaft A shaft can be replaced with a different shaft type except for standard shaft type (W).

Cylinder with Lock

H6 K1 K2 (Max.) l2 S5 32 ES5032 32 10 11 14 15 10.5 21 18 31 10 38 51 8.5 6.6 40 ES5040 36 12 11 16 18 12 24 22 35 10 41 54 8.5 6.6 50 ES5050 45 16 15 21 20 15 33 30 45 12 50 65 10.5 9 63 ES5063 50 16 15 21 23 15 37 35 50 12 52 67 10.5 9 80 ES5080 63 20 18 25 27 18 47 40 60 14 66 86 11.5 11 100 ES5100 71 20 18 25 30 18 55 50 70 15 76 96 12.5 11 21 Accessories CP96N/C96N Series Dimensions:

Table of Contents

YES Hysteresis mode OFF n_1 n_2 Large pressure and vacuum pressure [n] H (Fix hysteresis) = 3 digits H H ON Window comparator mode NO OFF n_1 n_2 Large pressure and vacuum pressure 16-2-30 7 Series ZSE50F/ISE50 High Precision, Digital Pressure Switch for General Fluids Example of Internal Circuit and Wiring ZSE F/ISE --22(L)-(M) 50 60 50 60 ZSE F/ISE --30(L)-(M) 50 60 50 60 With analog

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

assembly 9 10 19 25 25 19 10 9 Auto switch unit + 2 switches 30 46.5 30 50 60 46.5 60 50 30 30 Angle adjuster 30 203 47 90 150 203 150 90 47 30 11-2-7 7 Series CRB2 Rotary Actuator: Replaceable Shaft A shaft can be replaced with a different shaft type except for standard shaft type (W).

Compact Cylinder Series CQS

Grease pack part no.: GR-S-010 (10 g) 578 Series CQSK Compact Cylinder: Non-rotating Rod Type Double Acting, Single Rod Mounting Bolt for CQSK C D 25 30 35 40 45 50 25 30 35 40 45 50 25 30 35 40 45 50 55 60 65 70 30 35 40 45 50 55 60 65 70 75 C' D' 30 35 40 45 50 55 30 35 40 45 50 55 30 35 40 45 50 55 60 65 70 75 35 40 45 50 55 60 65 70 75 80 Mounting method: Mounting bolt for through-hole

LX

) 20 20 5.1 5.1 2.6 2.6 0.6 0.6 0.1 0.1 30 30 3.4 3.4 1.7 1.7 0.4 0.4 0.1 0.1 For transfer load of 3kg For transfer load of 1kg Positioning time (sec) Positioning time (sec) Positioning distance (mm) Positioning distance (mm) 100 100 50 50 10 10 1 1 10 10 10.1 10.1 5.1 5.1 1.1 1.1 0.2 0.2 Speed (mm/s) Speed (mm/s) 20 20 5.1 5.1 2.6 2.6 0.6 0.6 0.1 0.1 30 30 3.4 3.4 1.7 1.7 0.4 0.4 0.1 0.1

LX

) 20 20 5.1 5.1 2.6 2.6 0.6 0.6 0.1 0.1 30 30 3.4 3.4 1.7 1.7 0.4 0.4 0.1 0.1 For transfer load of 1kg For transfer load of 3kg Positioning time (sec) Positioning time (sec) Positioning distance (mm) Positioning distance (mm) 100 100 50 50 10 10 1 1 10 10 10.1 10.1 5.1 5.1 1.1 1.1 0.2 0.2 Speed (mm/s) Speed (mm/s) 20 20 5.1 5.1 2.6 2.6 0.6 0.6 0.1 0.1 30 30 3.4 3.4 1.7 1.7 0.4 0.4 0.1 0.1

10

64 50 28 50 148 148 30 267 295 JMB MB MB MB1 CA2 Model without air cushion is designed to include rubber bumpers.

smcmaintenancepartslist

-30 MI-A2503-50 MI-A3203-30 MI-A3203-50 MI-A0802-10 MI-A0802-20 MI-A1202-10 MI-A1202-20 MI-A1202-30 MI-A2002-10 MI-A2002-20 MI-A2002-30 MI-A2502-30 MI-A2502-50 MI-A3202-30 MI-A3202-50 MI-A0801-10 MI-A0801-20 MI-A1201-10 MI-A1201-20 MI-A1201-30 MI-A2001-10 MI-A2001-20 MI-A2001-30 MI-A2501-30 MI-A2501-50 MI-A3201-30 MI-A3201-50 MIS-A0804 MIS8-PS MIS-A1204 MIS12-PS MH-G01 (contents quantity

Air Cylinder

30 (44) 50 33 (47) Note 1) The values in ( ) are for long stroke.

CXS

Bore sizes 10, 20, 30, 40, 50 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75, 100 Standard strokes (mm) 6 10, 15 20, 25, 32 Applicable auto switches: Refer to pages 40 through 49 for detailed auto switch specifications.

MGP

Load rate 40% or less 16 50% or less 20, 25 60% or less 32 to 100 CL Ball Bushing Bearing MLGC MGPL32 to 63 MGPL80 to 100 CNA Over 50 stroke Under 50 stroke CB 100 100 63 P=0.5MPa P=0.5MPa CV/MVG 50 40 50 80 40 100 Load weight m (kg) Load weight m (kg) 30 CXW 32 20 CXS 50 40 10 30 CXT 5 4 20 MX 3 MXU 10 10 100 200 2 3 4 5 20 30 40 50 10 1 100 20 30 40 50 200 Eccentric distance l (mm) Eccentric

CG1

30 6 32 135 M14 X 1.5 50 Up to 300 17 30 58 62 20 11 108 27 45 64.5 1/4 32 12 18 44 32 35 33 7 41 155 M18 X 1.5 63 Up to 300 19 32 72 64 20 11 114 27 45 76.6 1/4 32 12 18 38 50 35 39 7 46 161 M18 X 1.5 With air cushion (mm) Bore (mm) Stroke range (mm) W P WA WB WC WD WH WH2 30 30 25 20 20 20 20 25 32 40 50 63 M5 M5 Rc(PT)1/8 Rc(PT)1/8 Rc(PT)1/4 Rc(PT)1/4 23 25 28.5 33 40.5 47.5 15 15 15

4/5 Port Solenoid Valve

For other voltages of AC With light/surge voltage suppressor (Non-polar type) U : SY100-30-A Without lead wire (with connector and 2 of sockets only) Lead wire length Nil 6 10 15 20 25 30 50 300 mm 600 mm 1000 mm 1500 mm 2000 mm 2500 mm 3000 mm 5000 mm Rated voltage Electrical entry 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz [115 VAC 50/60 Hz] 5 6 V

Cylinder with Lock

+ 40 (n 4) 2 (n = 4, 8, 12, 16)2 95 + 40 (n 4) 2 (n = 4, 8, 12, 16)2 2 (Different surfaces, same surface) 1 50 55 60 65 70 D-M9V D-M9WV n 50 + 30 (n 4) 2 (n = 4, 8, 12, 16)2 55 + 30 (n 4) 2 (n = 4, 8, 12, 16)2 60 + 30 (n 4) 2 (n = 4, 8, 12, 16)2 65 + 30 (n 4) 2 (n = 4, 8, 12, 16)2 70 + 30 (n 4) 2 (n = 4, 8, 12, 16)2 2 (Different surfaces, same surface) 1 80 85 90 95 100 D-M9A n 80

AC Servo Motor Driver (Pulse input type/Positioning type ）

However, setting "0" will be 50%. Example: When you set "50" to the parameter, the filter will be readjusted at the 50 [%] time of 50% or more oscillation level.

Table of Contents

) 50(63) 50(63) 5 3 38(53) 5 3 38(53) 32(42) 23(30) 32(42) 23(30) 1 1 2-3/8, 1/2, 3/4 2-3/8, 1/2, 3/4 3/8, 1/2, 3/4 R1, R2 port X(PE) port 1/8 3/8, 1/2, 3/4 R1, R2 port X(PE) port 1/8 30(42) 30(42) 30(42) 30(42) P port P port ( ): 3/4 Dimensions inside are for rubber seals. ( ): 3/4 3-10-24 25 ISO Standard Solenoid Valve: Size 2 Metal Seal/Rubber Seal Series VQ7-8 Prewired Connector Type

Air Cylinder

M8 x 1.25 24 M20 x 1.5 1/8 9 14 25 22 19.5 17 9 30 25 10 19 10 26 0 0.033 13 10.5 8 45 6 33.5 5.5 8 30 M10 x 1.25 30 M26 x 1.5 1/8 9 14 32 22 19.5 17 9 30 25 10 19 12 26 0 0.033 13 10.5 8 45 6 37.5 5.5 10 30 M10 x 1.25 34.5 M26 x 1.5 1/8 9 14 40 24 21 22 10 38 41.2 15 30 14 32 0 0.039 16 13.5 11 50 8 46.5 7 12 39 M14 x 1.5 42.5 M32 x 2 1/4 11 18 Dimensions by Stroke (mm) Stroke 1 to 50 51