MK

(mm) Operating direction Piston area (cm2) RHC 1.0 0.7 0.5 0.3 80 56 40 24 0.8 R 12 6 MTS 110 77 55 33 1.1 H 150 105 75 45 1.5 R 16 8 CC 200 140 100 60 2 H 200 139 100 60.8 2 R 20 12 298 208 149 90.2 3 H 370 258 185 112 3.7 R 25 12 490 341 245 149 4.9 H Order Made 600 418 300 182 6 R Made to Order 32 16 800 557 400 243 8 H 1050 731 525 319 10.5 R Refer to the p.5.4-1 regarding made to order

%silltr

50 200 150 r25 100 z .z =:v7z. -4i -2 .44 -.4 5000 4m0 40 30 m 2500 2000 1500 12.5 1 0 ===-rt=='-t {E -.2-_L-2. d r / .zx. :2. 4 6 (mm) Fig.6.14 Theortical Force of pneumatic cylinders, trom 2.5 to 30 mm (left and top scales) and from 32 to 300 mm (right and bottom scales) for 19,.1-a"ng,5 bg!.

Slide Unit Series CX2/CXWM/CXWL

For 15 and 25, strokes up to 300 are available as made-to-order. (-XB11) BS With shock absorber (1 pc.) Applicable Auto Switch/Refer to pages 1719 to 1827 for further information on auto switches. Load voltage Auto switch part no.

Air Preparation Equipment

Element size 65 x L250 65 x L500 65 x L750 65 x L1000 Nominal filtration accuracy (m) 100 200 300 400 Caution Symbol Replacement Seal Nominal filtration accuracy (m) Symbol Bronze element, but may have been discolored by moisture in the atmosphere, the characteristics are not affected. Quantity part no.

Slide Unit Series CX2/CXWM/CXWL

For 15 and 25, strokes up to 300 are available as made-to-order. (-XB11) BS With shock absorber (1 pc.) Applicable Auto Switch/Refer to pages 1719 to 1827 for further information on auto switches. Load voltage Auto switch part no.

MK

Bore size (mm) 20 25 32 40 50 63 Accessory Bore size (mm) Clamp stroke (mm) 20 25 32 40 50 63 MK-A020 Clamp bolt Hexagon socket head cap screw Hexagon nut Spring washer RB 10 20 50 260 295 353 635 MK-A032 300 335 555 680 1170 1620 J 1420 1890 MK-A050 DMounting Bracket Part No./Flange Additional Weight (g) -X Part no.

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

Vertical Mounting L W Mounting orientation W L Maximum speed (mm/s) Up to 100 Up to 200 Up to 300 Up to 400 Up to 500 Up to 600 Up to 800 All strokes Stroke (mm) (1) (2) (3) 8 Selection graph (4) (5) (6) (7) 12 to 40 Horizontal Mounting W W Mounting orientation L Direction for L can be up, down, left, right, or diagonal.

RB/RBL/RBQ

Selection of applicable model 141 247 283 300 459 200.2 Operating pressure other than 0.5 MPa: Multiply by the following coefficient.

IDX-OM-U021

i.2.9 1 2 IDF100F-30 C.RV IDF100F-30-CRV1 IDF 100 F 30 C 1 2 G 3 K 100 125 150 ) 100kW 125kW P 150kW ) R V 30 AC200V(50Hz) AC200/220V(60Hz) 1 C 1 G 2 K 3 P R V 1-1 IDF100150F 1 1 IDX-OM-U021 1 1-2 1-2-1 (C) 1-2-2 G 1-2-3 K 1.6MPa 1-2-4 P 1-2-5 R 30A (IDF100F, IDF125F, IDF150F) 30Ma 1-2-6 V ON 1.5 OFF 0.5 1-2-7 3 2 1 1-2 IDF100150F 1 2 IDX-OM-U021 1 1-3 A 3 300

Mechanically Jointed Rodless Cylinder with Protective Cover Series MY1W

Features 2 Mechanically Jointed Rodless Cylinder with Protective Cover Series MY1W Slide Bearing Guide Type/Cam Follower Guide Type 16, 20, 25, 32, 40, 50, 63 How to Order Y7BW 300 25 MY1 M W K Number of auto switches Guide type Auto switch type 2 pcs. 1pc. "n" pcs.

RB/RBL/RBQ

Selection of applicable model 141 247 283 300 459 200.2 Operating pressure other than 0.5 MPa: Multiply by the following coefficient.

Hydraulic

7539 10052 12565 15078 17591 80 25 4535 IN 4535 6802 9070 11337 13605 15872 7853 OUT 7853 11779 15706 19632 23559 27485 100 30 7147 IN 7147 10720 14294 17867 21441 25014 Theoretical output (N) = Pressure (MPa) x Piston area (mm) Weights Unit: g Cylinder stroke (mm) Male thread additional weight 5 Bore size (mm) 10 15 20 25 30 35 40 45 50 75 100 20 32 40 50 63 80 100 180 200 220 240 260 280 300

CV/MVGQ

seals 110C Heat resistant tarpaulin Double clevis pin and double knuckle pin Maximum ambient temperature for the rod boot itself. 25, 50, 75, 100, 125, 150, 200, 250, 300, 350, 400, 450, 500, 600 -XC27 50, 63 made of stainless steel -XC28 Compact flange made of SS400 25, 50, 75, 100, 125, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700 80, 100 -XC29 Double knuckle joint with spring pin

5 Port Solenoid Valve

Bore size CJ2 series Pressure 0.5 MPa Load ratio 50% Stroke 60 mm CM2 series Pressure 0.5 MPa Load ratio 50% Stroke 300 mm CS1, CS2 series Pressure 0.5 MPa Load ratio 50% Stroke 1000 mm MB, CA2 series Pressure 0.5 MPa Load ratio 50% Stroke 500 mm Average speed [mm/s] 6 10 16 125 140 160 180 200 250 20 25 32 40 40 50 63 80 100 1100 1000 900 800 700 600 500 400 300 200 100 0 Vertically upward

Stability of suction position,

Qmax 55.5 C = Qmax: Max. suction flow rate [L/min (ANR)] C: Conductance [dm3/(sbar)] 397 Model Selection Vacuum Equipment Selection Example 7 P Transfer of Semiconductor Chips Selection conditions: (1) Workpiece: Semiconductor chips Dimensions: 8 mm x 8 mm x 1 mm, Mass: 1 g (2) Vacuum piping length: 1 m (3) Adsorption response time: 300 msec or less 1.

A-HEC-OM-J004

Connected Connection cable DC cable Signal cable Nanaboshi Electric Mfg.co.,Ltd: NJC-245-PF UL CSA Hirose Electric co.,Ltd: CDA-15S(05) Fixed screw M2.6 Female Male Female Male Nanaboshi Electric Mfg.co.,Ltd: NJC-245-PM UL CSA Hirose Electric co.,Ltd: CDA-15P(05) Fixed screw M2.6 Connected Connected Controller connector DC output connector (female) Signal connector (female) Nanaboshi Electric

NCA1

Beltline Suite 119 Carrollton, TX 75006 TEL: (972) 446-9554 FAX: (972) 446-5931 SMC Corporation of America (Rochester) 245 Summit Point Drive Henrietta, NY 14467 TEL: (716) 321-1300 FAX: (716) 321-1865 TAIWAN SMC Pneumatics (Taiwan) Co., Ltd. THAILAND SMC Thailand Ltd. INDIA SMC Pneumatics (India) Pvt., Ltd.

IC

Note) If the set pressure is 250 kPa and the output pressure on the pressure sensor is 245 kPa, the deviation is 250 245 = 5 kPa. In order to correct the deviation, the controller increases the output signal until the pressure on the pressure sensor converges at 250 kPa. Step 1 Step 2 Step 3 Step 4 . . . . . . . . . . . . .

5 Port Air Operated Valve

single Operating pressure range VFA1000 series 101.2 kPa to 1.0 2 position double/3 position Note 2) (MPa) SYA (0.4 x P + 0.1) to 1.0, P: Operating pressure 2 position single Pilot pressure range 0.1 to 1.0 2 position double SYJA (MPa) 0.15 to 1.0 3 position VFA3000 series Ambient and fluid temperature (C) 10 to 50 (No freezing) VZA Not required Lubrication Free Mounting orientation VFA VFA 300

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

Dimensions Formulae L1 = 16n + 53 L2 = 16n + 87 n: Stations (max. 16 stations) L n 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 L1 L2 (L3) (L4) 85 119 150 160.5 101 135 162.5 173 117 151 175 185.5 133 167 187.5 198 149 183 212.5 223 165 199 225 235.5 181 215 237.5 248 197 231 262.5 273 213 247 275 285.5 229 263 287.5 298 245 279 300 310.5 261 295 325 335.5 277 311 337.5 348 293 327 350 360.5 309