0.4

(R1) 3 (R2) 1 (P) 5 (R1) e q w e w q VQ1200 VQ1201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w VQ1301 VQ1401 VQ1300 VQ1400 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) VQ1500 VQ1501 r r (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w VQ1A01 VQ1B01 4

NCM

Graph (5) Max.

Programless controller Step motor (servo 24 VDC)

LEMB25 / LEMB32 LEMC25 / LEMC32 LEMH25 / LEMHT32 LEMH25 / LEMHT32 Speed [mm/s] Acceleration Speed Acceleration [mm/s2] [mm/s] [mm/s2] 0 48 250 48 250 1 75 500 75 500 2 100 1000 100 1000 3 150 1500 150 1500 4 200 2000 200 2000 5 250 2500 300 2500 6 300 3000 400 3000 7 350 4000 500 4000 8 400 5000 600 5000 9 450 6000 800 6000 10 500 7500 1000 7500 11 600 10 1200 10 12 700 12500 1400 12500 13

Square Tube Type Air Cylinder Series MB1

9 11.5 17 84 84 94 94 114 114 1/8 1/4 1/4 3/8 3/8 1/2 26.5 26.5 31 31 37.5 37.5 M10 x 1.25 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 M6 x 1.0 M6 x 1.0 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 4 4 5 5 5 5 to 500 to 500 to 600 to 600 to 750 to 750 19.5 27 32 32 37 37 12.2 14.2 19 19 23 27 18

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

bases with 5 stations.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

5 !

Digital Flow Switch (Integrated display type) ( compatible)

: L Flow range AC_E set value 10(N) value 4 L 16 L 40 L 100 L 250 L -2 10-2 -1 10-1 Minimum Minimum Minimum Minimum Minimum 0 100 1 101 2 102 3 103 4 104 5 105 Maximum Maximum 6 106 Maximum Maximum Maximum : Unit setting: G Flow range AC_E set value 10(N) value 4 L 16 L 40 L 100 L 250 L -2 10-2 Minimum -1 10-1 Minimum Minimum Minimum Minimum 0 100 1 101 2 102 3 103 4 104 Maximum 5 105 Maximum

Non-standard Motor/Horizontal Mount Specification Series LJ1H10

Nil W Actuator cable Axial Right Left Top Bottom Brake cable Left Axial Axial Axial Axial G F R L T B 100/115VAC (50/60Hz) 1 R 200/230VAC (50/60Hz) Without motor Axial entry Right entry 2 Y 0 Bottom entry Specifications Intermediate strokes 100 7.5 200 8.7 300 9.9 400 11.0 500 12.4 600 13.5 5 to 40 (with no condensation) 15 360 250 Standard stroke mm kg C kg N mm/s mm Strokes other than the

Valve Single Unit

SX 000-50-2ANote : SX3000 (Metric size) C4: With One-touch fitting for 4 C6: With One-touch fitting for 6 X5000 (Metric size) C4: With One-touch fitting for 4 C6: With One-touch fitting for 6 C8: With One-touch fitting for 8 (Gasket u supplied as an accessory.) 3 5 3 5 3 5 3 5 3 5 3 5 For 45(N)F (D-sub connector) (Inch size) N3: With One-touch fitting for 5/32" N7: With One-touch fitting

CM2

SCM220A, #5, #19 CM2G25SCM225A, #5 SCM225A, #5, #19 CM2G32SCM232A, #5 SCM232A, #5, #19 CM2G40SCM240A, #5 SCM240A, #5, #19 The data shows auto switch equipped styles.

45

SX 000-50-2ANote : SX3000 (Metric size) C4: With One-touch fitting for 4 C6: With One-touch fitting for 6 X5000 (Metric size) C4: With One-touch fitting for 4 C6: With One-touch fitting for 6 C8: With One-touch fitting for 8 (Gasket u supplied as an accessory.) 3 5 3 5 3 5 3 5 3 5 3 5 For 45(N)F (D-sub connector) (Inch size) N3: With One-touch fitting for 5/32" N7: With One-touch fitting

ITV

32) VAC port (4, 5/32) 13.7 OUTx 13.7 3 5 ATMc 2 5 ATM port (4, 5/32) 3 6 7 3.5 L-bracket (Option) Flat bracket (Option) 19 Port Location No.

JXCx-OMU0004

P.65 5() 7.

Compact Cylinder

L L1 N RR CT CB 12 16 20 25 5 to 30 5 to 30 5 to 50 5 to 50 51.5 55 63 28 12 14 20 24 5 5 8 10 45.5 49 54 4 4 5 5 7 10 12 14 14 15 18 20 5 6.5 8 10 10 12 16 20 3.5 3.5 4.5 5 14 M4 x 0.7 6 6 9 10 CD hole H10 Axis d9 M4 x 0.7 30.5 15.5 M6 x 1.0 31.5 18.5 M6 x 1.0 32.5 22.5 67.5 57.5 Double clevis bracket material: Carbon steel Surface treatment: Nickel plated CU +0.4 +0.2 CZ CX B + Stroke

ZP

Acid resistance > > > > > /5 /5 Tear resistance > > > > > /> /> Flex crack resistance Maximum operation temperature nC Minimum operation temperature nC 120 60 250 100 200 200 0 0 0 0 30 10 104 or less 104 or less Volume resistivity (7cm) > 5 > > > > > > > Heat aging > > > > > > > > > > Weather resistance 5 > > > > 5 > > > > Ozone resistance Gas permeability resistance > > /5 /5 /5 /5 > >

CQ2

Stroke range (mm) 5 to 30 5 to 30 5 to 50 5 to 50 Bore (mm) 12 16 20 25 A L L1 37 3.5 3.5 4.5 5 14 39.5 44 15.5 18.5 22.5 45.5 Double clevis (mm) Bore (mm) 12 16 20 25 Stroke range (mm) 5 to 30 5 to 30 5 to 50 5 to 50 A B CD CT N RR CL CU CW CX CZ L L1 51.5 55 63 45.5 49 54 M4 X 0.7 28 5 5 8 10 4 4 5 5 6 6 9 10 7 10 12 14 14 15 18 20 5 6.5 8 10 10 12 16 20 3.5 3.5 4.5 5 14 M4 X 0.7 30.5 15.5

Table of Contents

Vacuum pressure Suction flow rate 13-5-5 6 Series ZH Box Type (Built-in silencer): ZHB -S L One-touch connection Applicable tubing diameter B Model A 60 6 22 16 12.8 28 5 47 60 6 22 16 12.8 28 5 47 60 6 22 16 12.8 28 5 47 60 6 22 16 12.8 28 5 47 63 6 23 18 12.8 29 5 50 63 6 23 18 12.8 29 5 50 78 8 27.5 23 13.7 35 7 61 78 8 27.5 23 13.7 35 7 61 B C D E F G H ZH05BS-06-06 ZH05BL-06-06 ZH07BS

Industrial Filters

N.C. and N.O. common Noninductive load (A) Inductive load (A) Resistance load Light load Inductive load Motor load Rated voltage (V) Normally Normally Normally Normally Normally Normally Normally Normally closed open closed open closed open closed open AC125 AC250 DC8 DC14 DC30 DC125 DC250 5 5 5 5 5 0.4 0.3 1.5 1 0.7 0.5 4 4 2.5 1.5 1.3 0.8 3 3 3 0.1 0.05 3 3 3 0.1 0.05 5 4 Reset button 4

ZP

) 4 4 5 5 5 5 (10) (10) 1 1 4.1 4.1 10 6 15 10 32 Symbol/Type Heavy-duty Pad H: Heavy-duty (Flat with rib) HT: Heavy-duty (Thin flat with rib) Pad diameter 32, 150, 250, 300, 340 Reinforced pad to prevent deformation when transferring heavy or large work pieces How to Order ZP2 32 H N Pad unit Pad diameter Pad material Symbol Pad diameter 32 150 250 300 340 Symbol Material NBR Silicone rubber

LG1H

Applicable strokes: 150, 250, 350 Example) LG1H2021PA-150-F2-X2 100 5.3 8.3 400 7.7 12.0 5 to 40 (with no condensation) 200 6.1 9.6 300 6.9 10.8 mm kg kg C kg N mm/s mm Standard stroke Aluminum Stainless steel Body weight Operating temperature range Work load Rated thrust Maximum speed Performance 30 180 500 0.02 AC servomotor (100W) Incremental system Ground ball screw 15mm, 10mm lead High