Compact

] 500 500 500 500 400 400 400 400 m L3 [mm] L3 [mm] L3 [mm] L3 [mm] 300 300 300 300 L3 Z 200 200 200 200 100 100 100 100 0 0 0 0 0 2 4 6 8 10 0 2 4 6 8 10 0 2 4 6 8 10 0 2 4 6 8 10 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 300 300 300 300 200 200 200 200 L4 L4 [mm] L4 [mm] L4 [mm] L4 [mm] m X 100 100 100 100 0 0 2 4 6 8 10 0 0 2 4 6 8 10 0 0 2 4 6 8 10 0 0 2 4 6 8 10 Work

Step Motor Controller

[pps] 10 inputs 6 outputs 1 M (when differential receiver), 200 k (when open collector) 0 to 10 (Command pulse unit) 3 rotations Parameter setup or external analog input setup (0 to 10 VDC) USB communication, RS422 communication1 In-position range setting [pulse] Error excessive Torque limit Setting communication Function Operating temperature range Operating humidity range [%RH] Storage

SY

The minimum order quantity is 10 pieces. Order in multiples of 10.

Metal Seal/Rubber Seal Series VQ Body Ported

Note 1) For power consumption of AC type, refer to page 2-4-10. Note 2) Except double (latching). 5 6 Low wattage type Y (2) Note) 200/220 VAC models are applicable to the F and L kits.

JXCx-OMT0023

Rated voltage AC[V] C[ F] R[ ] Test voltage AC[V] Outline drawing [Unit: mm] Vinyl sheath 200 0.5 50(1W) Across 18 1.5 Blue vinyl cord Red vinyl cord T-C 1000 (1 to 5s) 6 10 or less 10 or less 10 3 10 3 4 15 1 31.5 1 200 48 1.5 200 or more or more Note that a diode should be installed to a DC relay, DC valve or the like.

Table of Contents

(Variable) 3% F .S. or less (Fixed) 1 to 10% of set prss. (Variable) 1 to 10% of set press. (Adjustable) Hysteresis Data ON: when output is ON (Red) ON: when output is ON (Red) ON: when output is ON (OUT1: Red, OUT2: Green) Indicator light Trimmer adjustment 3 turns 200 degrees 3 turns 200 degrees 3 turns 200 degrees None 1 to 5 V 5% F .S.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

L (10) 8 Dimensions (24) (35) Applicable fittings size d 4 Model A L D 10-KQ2P-04 16 32 6 6 10-KQ2P-06 18 35 8 8 10-KQ2P-08 20.5 39 10 10 10-KQ2P-10 22 43 12 12 10-KQ2P-12 24 44.5 14 10-KQ2P-01 16 31.5 5 10-KQ2P-03 16 32 6 10-KQ2P-07 18 35 8.5 10-KQ2P-09 20.5 39 10 10-KQ2P-11 22 43 11.5 5.5 Rail mounting pitch 12.5 0 1 2 3 4 5 6 7 8 9 No.

Cylinder with Lock

10 1 100 500 400 300 200 1000 1 100 500 1000 400 300 200 Maximum speed V [mm/s] Maximum speed V [mm/s] Graph n Graph c 0.4 MPa P < 0.5 MPa 0.4 MPa P < 0.5 MPa 1000 1000 80 80 100 100 63 63 50 50 40 40 80 80 100 100 100 100 63 63 50 50 Load mass m [kg] Load mass m [kg] 32 32 [Example] 50 50 40 40 32 32 10 10 1 100 500 1000 1 100 500 1000 400 300 200 400 300 200 Maximum speed V [mm/s] Maximum

MLGP

m (kg) 25 20 20 0.1 10 50 50 100 200 1 10 100 200 Eccentric distance l (mm) Eccentric distance l (mm) MLGPL32 to 100 23 50mm stroke or less V = 400mm/s 24 Over 50mm stroke V = 400mm/s 100 100 100 80 100 80 63 63 10 Load weight m (kg) 50 50 10 40 40 32 1 32 2 10 100 200 0.3 10 50 50 100 200 Eccentric distance l (mm) Eccentric distance l (mm) Features 10 Series MLGP Horizontal Mounting Slide

MLGP

m (kg) 25 20 20 0.1 10 50 50 100 200 1 10 100 200 Eccentric distance l (mm) Eccentric distance l (mm) MLGPL32 to 100 23 50mm stroke or less V = 400mm/s 24 Over 50mm stroke V = 400mm/s 100 100 100 80 100 80 63 63 10 Load weight m (kg) 50 50 10 40 40 32 1 32 2 10 100 200 0.3 10 50 50 100 200 Eccentric distance l (mm) Eccentric distance l (mm) Features 10 Series MLGP Horizontal Mounting Slide

Basic type / Direct mount type Series CY3B/CY3R

CY3B15 CY3B50 1000 500 50 40 30 20 300 200 10 5 100 Usable range Usable range 20 30 40 50 1 0 1 2 3 4 5 6 10 0 1 2 3 4 5 6 Distance from cylinder shaft center Lo (cm) 7 8 9 10 11 7 8 9 10 11 12 13 14 15 Distance from cylinder shaft center Lo (cm) CY3B63 CY3B20 200 1000 100 500 400 50 300 200 100 10 5 Usable range 20 30 40 50 Usable range 1 0 1 2 3 4 5 6 10 0 1 2 3 4 5 6 Distance from cylinder

C95

m (kg) 63 32 50 40 50 40 30 50 40 30 32 20 20 [Example] 10 10 5 4 3 5 4 3 2 2 1 100 300 400 500 1000 1 100 200 300 400 500 1000 200 Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph (7) Graph (4) 0.5 MPa P 0.5 MPa P 1000 1000 100 80 500 400 300 500 400 300 63 100 80 50 40 200 200 63 100 100 Load weight: m (kg) Load weight: m (kg) 32 50 40 50 40 30 50 40 30 32 20 20 10 10 5 4 3 5 4 3

CATALOG VC10

300) 200 (200) 150 (200) 100 (125) 100 35 (40) N.O.

TABLE OF CONTENTS

300) 200 (200) 150 (200) 100 (125) 100 35 (40) N.O.

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

Vacuuming Graphs Top cover Seal separator LJ1H10 Vacuuming flow characteristics Particle concentration (Particles/ft3) Particle concentration (Particles/ft3) 10 Speed: 400mm/s Dust seal 10 Speed: 600mm/s 10 Side cover 200 150 100 50 25 Vacuuming flow (l/min ANR) LJ1H20 Vacuuming flow characteristics 10 Speed: 500mm/s 10 Speed: 1000mm/s 10 200 150 100 50 25 Vacuuming flow (l/min ANR) Particulate

5 Port Solenoid Valve Series SV1000/2000/3000/4000

30% 70% 300 Stroke (mm) Stroke (mm) Stroke (mm) Stroke (mm) 50% AS2201F -02-10 200 100 50% 30% 10% 70% 0 400 MB 63 300 AS3201F -03-10 200 100 0 SV300 ANA1 -C12 T1075 400 MB 80 300 AS4000-03 200 100 0 400 MB 100 300 200 AS4000-04 100 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200 Speed at the end (mm/s) Applicable related components For details

Thermo-chiller/Rack Mount Type

0 0 10 15 25 20 30 40 35 10 15 25 20 30 40 35 Circulating fluid temperature [C] Circulating fluid temperature [C] HRR010-W-20 [50 Hz] [60 Hz] 400 400 35C Heating capacity [W] Heating capacity [W] 35C 300 300 25C 25C 200 200 5C 5C 100 100 Facility water temperature Facility water temperature Facility water temperature Facility water temperature 0 0 10 15 25 20 30 40 35 10 15 25 20 30 40 35

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

0.075 0.062 0.062 0.079 0.084 0.081 0.084 0.024 0.047 0.024 0.024 M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 10-SS5YJ3-32-M5 10-SS5YJ3-32-C4 10-SYJ333 1/8 10-SS5YJ3-S32-M5 10-SS5YJ3-S32-C4 Base mounted for internal pilot 10-SS5YJ3-41-M5 10-SS5YJ3-41-C4 10-SYJ343 1/8 10-SS5YJ3-S41-M5 10-SS5YJ3-S41-C4 10-SS5YJ3-46-M5 1/8 M5 x 0.8 10-SS5YJ3-46-C4 10-SYJ343 10-SS5YJ3

Programless controller Step motor (servo 24 VDC)

LEHS10 LEHS20 LEHS32 LEHS40 speed acceleration speed acceleration speed acceleration speed acceleration [mm/s] [mm/s2] [mm/s] [mm/s2] [mm/s] [mm/s2] [mm/s] [mm/s2] 0 5 100 5 100 5 100 5 100 1 7 150 10 150 10 150 10 150 2 10 200 15 200 15 200 15 200 3 12 300 20 300 20 300 20 300 4 15 400 25 400 25 400 25 400 5 20 500 30 500 30 500 30 500 6 25 600 35 600 35 600 35 600 7 30 700 40 700 40 700

Mechanically Jointed Rodless Cylinders

MY316 300 400 500 500 400 300 950 N Collision deceleration (m/s2) Collision deceleration (m/s2) 200 200 240 N 100 100 30 40 50 50 40 30 20 20 10 10 1 2 3 4 5 10 20 30 10 5 4 3 2 1 0.2 0.4 0.3 m1max m3max m1max m2max m3max m2max Weight (kg) Weight (kg) MY320 MY340 500 400 300 300 400 500 370 N Collision deceleration (m/s2) Collision deceleration (m/s2) 200 200 1500 N 100 100 50 40 30 30 40