VT325

With surge voltage suppressor, with indicator light Body Spool valve Surge Voltage Suppressor AC Grommet (GS) Conduit (CS) DC O-ring Spool spring Red (+) Coil Coil () Black Retainer Operation principle The spool e is pushed upward by the force of the spring r and the air passage between port x and port c is opened and port z is blocked.

VFS

.: VFS2000-CS-(B) (01: Rc , 02: Rc ) 1 8 1 4 01 02 S01 S02 5-bottom ported size (Refer to the below right.) 2-4.5 mounting hole Bottom ported Port Size Port Port size S01 S02 EA, EB Rc Rc P, A, B Rc Rc 1 8 1 4 1 8 1 8 1 (Center) Bottom Ported Size Pilot EXH port M5 x 0.8 5-bottom ported size (Refer to the below right.)

Table of Contents

.: VFS2000-CS-(B) (01: Rc , 02: Rc ) 1 8 1 4 01 02 S01 S02 5-bottom ported size (Refer to the below right.) 2-4.5 mounting hole Bottom ported Port Size Port Port size S01 S02 EA, EB Rc Rc P, A, B Rc Rc 1 8 1 4 1 8 1 8 1 (Center) Bottom Ported Size Pilot EXH port M5 x 0.8 5-bottom ported size (Refer to the below right.)

Size: 5 (50), Body Material: S (Stainless Steel), Seal Material: F (FKM), Port Size: 06 (3/4), Thread Type: N (NPT), Rated Voltage: 3 [120 (110) VAC], Electrical Entry: CS (Conduit, w/Surge Voltage Suppressor)

Bore Size: 25mm, Symmetric Type: Standard, Stroke: 75mm, Adjuster: CS (Adjuster at Forwarding End/Metal Stopper), Function: Standard, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, 0.5M, Lead Wire or Prewired Connector: M (1m)

ø6, ø8, ø12, ø16, ø20, ø25 Series MXQR Air Slide Table/Reversible Type

L Left side Right side Nil Adjuster Adjuster Adjuster options Retraction stroke end Shock absorber RJ Note 1, 2) None Adjuster (Rubber stopper) Shock absorber (RB) Adjuster (Metal stopper) (Short stroke type) AT A BSAT CSAT BT ASBT B CSBT CT ASCT BSCT C JT ASJT BSJT CSJT None Adjuster (Rubber stopper) Shock absorber (RB) Adjuster (Metal stopper) Nil AS BS CS Extension stroke end Table Table

Specification: 13 (Clean Series, Vacuum Suction Type, Special Treatment on Guide), Bore: 8mm, Thread: M Thread: ø6 to ø16 Bore; Rc: ø20, ø25 Bore, Symmetric Type: L (Symmetric Type), Stroke: 10mm, Adjuster: CS (Metal Stopper, Extension End)

Specification: 13 (Clean Series, Vacuum Suction Type, Special Treatment on Guide), Bore: 8mm, Thread: M Thread: ø6 to ø16 Bore; Rc: ø20, ø25 Bore, Symmetric Type: Standard Type, Stroke: 40mm, Adjuster: CS (Metal Stopper, Extension End)

Bore Size: 6mm, Symmetric Type: L (Symmetric), Stroke: 40mm, Adjuster: CS (Adjuster at Forwarding End/Metal Stopper), Function: Standard, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, 0.5M, Lead Wire or Prewired Connector: M (1m)

Size: 3 (30), Body Material: C (Brass), Seal Material: F (FKM), Port Size: 02 (1/4), Thread Type: F (G), Rated Voltage: 3 [120 (110) VAC], Electrical Entry: CS (Conduit, w/Surge Voltage Suppressor)

Size: 6 (60), Valve Type: 2 (Normally Open), Body Material: C (Brass), Seal Material: N (NBR), Port Size: 10 (Thread; 1), Thread Type: N (NPT), Rated Voltage: 5 (24 VDC), Electrical Entry: CS (Conduit, w/Surge Voltage Suppressor)

CS.

Size: 5 (50), Body Material: S (Stainless Steel), Seal Material: E (EPDM), Port Size: 06 (3/4), Thread Type: N (NPT), Rated Voltage: 1 (100 VAC), Electrical Entry: CS (Conduit, w/Surge Voltage Suppressor)

Bore Size: 16mm, Symmetric Type: Standard, Stroke: 10mm, Adjuster: CS (Adjuster at Forwarding End/Metal Stopper), Function: Standard, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, 0.5M, Lead Wire or Prewired Connector: L (3m)

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

IS 1I 5~.tIono{ SOL. 151-1 5 ,1onl {~20 (-) 5 ... tiono {~201-1 ~B(+I CS(+I COM '31+1 COM '31+1 SOL.A2, I _ I SOl.A2, I I ~171-1 So ... lon. { OL. 'S I I ~'71-1 s.totion.{ SOL.

Specification: Standard Type (Not Clean Room), Bore Size: 4.5 mm, Symmetric Type: Standard, Stroke: 5mm, Adjuster: CS (Metal Stopper Extension End), Function: P (Axial Piping Type), Switch Rail: w/Magnet & Switch Rail, Auto Switch: A93V--Reed, DC Volt, AC Volt, LED, Vertical

Rotary Table/Rack & Pinion Style Series MSQ

to 200 Chrome molybdenum steel Steel wire 8 Hexagon socket head set bolt Hexagon socket head set bolt Hexagon socket head set bolt Chrome molybdenum steel Rubber material Aluminium alloy NBR NBR Aluminium alloy Aluminium alloy Resin NBR Stainless steel Stainless steel Carbon steel Spring steel 23 9 10 11 12 13 14 15 16 17 18 Size: 10 to 50 Size: 70 to 200 24 Chromated Nickel plated Type CS

Bore Size: 20mm, Symmetric Type: L (Symmetric), Stroke: 40mm, Adjuster: CS (Adjuster at Forwarding End/Metal Stopper), Function: Standard, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, 0.5M, Lead Wire or Prewired Connector: L (3m)

Rated Flow Range: 03 (30 to 3000 l/min), Thread Type: Rc, Port Size: 10 (1), Output Specifications: CS (Out: NPN; Func: Analog Voltage Output <-> External Input), Lead Wire: w/Lead Wire and M12 Connector, 3m, Unit Specification: M (SI Unit Only)

Rated Flow Range: 03 (30 to 3000 l/min), Thread Type: N (NPT), Port Size: 10 (1), Output Specifications: CS (Out: NPN; Func: Analog Voltage Output <-> External Input)