Guide Cylinder/Compact Type Series MGC

Cutout window AM MGQ View A-A MGG Mounting dimensions MGC (mm) Bore size (mm) Stroke range (mm) MGF A AA AB AG AH AI AJ AK AL AM AN AO AP B I J K M N L 20 25 32 40 50 80 84 75 90 6.6 9 60 75, 100, 125, 150, 200 12 13 105 120 55 110 M6 22 106 25 44 38 25 MGZ 95 89 16 13 120 136 84 100 9 9 65 125 M8 27 120 30 52 70 46 32 105 94 16 13 134 150 92 108 9 9 75 140 M8 32 135 35 60 80 50 32 75, 100

Table of Contents

Order the seal kit, based on each bore size. 8-15-75 75 Series CY1H Construction Double axes type: CY1HT !9 @0 !8 q !5 !4 !7 w Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com #3 !6 e #1 @9 #0 i !0 !3 !1 !

ITV

100 0 25 50 75 100 Input signal [% F.S.]

Low Friction Cylinders Series MQ

, 100 16 15, 30, 45, 60, 75, 100 20 15, 30, 45, 60, 75, 100 25 15, 30, 45, 60, 75, 100 Strokes are available in 1mm increments by installing spacers in standard stroke cylinders.

ZP

134 Dimensions by Stroke ZPT40D50-B-A14 182 95 179 75 1 8 E G: M5 x 0.8 G: Rc 40 50 H J F 40 50 H J F K Model 40 50 U C ZPT 20-B-A14 U C ZPT 30-B-A14 U C ZPT 50-B-A14 U C ZPT 10-B-A14 44.5 109.5 111 112 45.5 110.5 114.5 50 54.5 113.5 116.5 117.5 55.5 5 10 6.2 13 65.5 124.5 64.5 123.5 126.5 127.5 85.5 75 169.5 84.5 168.5 171.5 172.5 13-11-13 14 Series ZPT Connection Female thread (Buffer)

Aluminum High Vacuum Angle Valve

Q1 R1 R2 R3 S1 T1 Kalrez 4079 SS592 SS630 SSE38 1232-70 3310-75 Chemraz Example) XLH-16-XAN1A VMQ FKM for Plasma ULTIC ARMOR U1 UA4640 Produced by Mitsubishi Cable Industries, Ltd.

ZP

ZPX40HBNJ25-B01-A18 50-B01-A18 75-B01-A18 ZPX50HBNJ25-B01-A18 50-B01-A18 75-B01-A18 ZPX63HBNJ25-B01-A18 50-B01-A18 75-B01-A18 ZPX80HBNJ25-B01-A18 ZPX 80HBNJ50-B01-A18 75-B01-A18 ZPX100HBNJ25-B01-A22 50-B01-A22 75-B01-A22 418 268 Misc. 40 50 63 80 100 125 0 +10 +1 1 441 289 0 +19 +1 2 684 312 0 +37 +2 3 723 284 0 +61 +2 6 767 305 100-B01-A22 ZPX125HBNJ25-B01-A22 50-B01-A22 75-B01-A22 1 +121

5 Port Solenoid Valve Series SY3000/5000/7000/9000

Blanking plate assembly D D Connector box mounting position SX3000-75-1A 10-SS5Y3-45-AU-05D-C6 1set (Type 45, 5 stations manifold base part no.) SX3000-75-1A1set (Blanking plate assembly part no.) 10-SY3140-5LOU2sets (Single solenoid part no.) 10-SY3240-5LOU2sets (Double solenoid part no.)

LJ1H

Model Regenerative Absorption Unit Selection Guide Allowable Moment (Nm) LJ1H2021PF-K (Power supply voltage 100VAC) LJ1H2022PF-K (Power supply voltage 200VAC) Allowable static moment Pitching Yawing m : Transfer load (kg) a : Work piece acceleration (mm/s) Me: Dynamic moment L : Overhang to work piece center of gravity (mm) Allowable dynamic moment 71 75 25 50 75 100 125 150 175 200 225 250

ITV

Return 0.4 0.3 0.5 0.5 AV 0.2 0.1 0 2 6 4 8 1.0 0 25 50 75 1.0 AU 0.0 10 0 25 50 75 100 100 Input signal (%F.S.) Repetition Input signal (%F.S.)

CG1

, 100, 125, 150 25, 50, 75, 100, 125, 150, 200 Option Double knuckle joint (with pins) 25, 50, 75, 100, 125, 150, 200, 250, 300 Order Made Made to order 40/50/63 Pins and snap rings for double knuckle joint are included, not mounted.

Electric Actuator

30, 50 75, 100 30, 50, 75 100, 125, 150 50, 75 50, 100 50, 100 150 16 3 25 9 25 5 Miniature Rotary Table Step Motor (Servo/24 VDC) Step Motor (Servo/24 VDC) Rod type Slide table type Series LEPS Basic type Series LER High precision type Series LEPY Series LERH CAT.ES100-94 CAT.ES100-92 Series LER Series LEPY Series LEPS Max. speed (n/s) Rotating torque (Nm) Size Size Max. work load (kg)

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

sides n = 2, 3, 4 n = 2, 4, 6, 8 n = 2, 4, 6, 8 n = 2, 4, 6, 8 100 + 100 (n 2) 100 + 100 (n 2) n = 4, 6, 8 Same side n = 2, 3, 4 10 1 pc. 90 75 80 35 75 Different sides 80 90 55 75 Same side 80 90 35 + 30 (n 2) 75 + 30 (n 2) 80 + 30 (n 2) 90 + 30 (n 2) Different sides D-A44 n = 2, 3, 4 n = 2, 4, 6, 8 n=2, 4, 6, 8 n = 2, 4, 6, 8 55 + 50 (n 2) 75 + 50 (n 2) 80 + 50 (n 2)

Brake mechanism added

55 75 80 90 75 + 35 (n 2) (n = 2, 4, 6, 8, ) Note 1) 80 + 35 (n 2) (n = 2, 4, 6, 8, ) Note 1) 90 + 35 (n 2) (n = 2, 4, 6, 8, ) Note 1) 20 + 35 (n 2) (n = 2, 3, 4, ) (Different surfaces) D-A44C n 75 + 50 (n 2) (n = 2, 4, 6, 8, ) Note 1) 80 + 50 (n 2) (n = 2, 4, 6, 8, ) Note 1) 90 + 50 (n 2) (n = 2, 4, 6, 8, ) Note 1) 55 + 50 (n 2) (n = 2, 3, 4, ) (Same surface) 1 10 75 80 90 2 (Different

39

, 75 , 90 , 105 A photograph shows handle unit L.

IZx-OMX0087

Flow rate : 180L/min 75 50 25 0 25 50 75 Installation distance from ionizer to workpiece [mm] 75 50 25 0 25 50 75 -75 -50 -25 0 25 50 75 -75 -50 -25 0 25 50 75 0 0 mm ionizer to workpiece [mm] Installation distance from mm 200 200 20m/s 400 400 2m/s 20m/s 2m/s 600 600 10m/s 800 800 10m/s 5m/s 1000 1000 1200 5m/s 1400 5-4.

VQZ1000/2000/3000

DXT170-75-1 VQD Attaching and detaching lead wires with sockets Attaching Insert the sockets into the square holes of the connector (with + and indication) and, continue to push the sockets all the way in until the lock by hooking into the seats in the connector. (When they are pushed in, their hooks open and they are locked automatically.)

Free Mount Cylinder

65 80 65 55 75 65 60 65 55 50 55 45 9 8 25 96 81 71 86 71 61 81 71 66 71 61 56 61 51 11 10 32 100 85 75 90 75 65 85 75 70 75 65 60 65 55 13 12 The dimensions other than the table above are the same as those of standard type. 44 46 Related Products For details, refer to the respective catalog. 1011-CDU Clean Series Compliant with clean environment Specifications 10-CDU (Relief type) 11-CDU

CS1

40 0.2 Stroke 258 98 258 235 Lube Non-lube Air-hydro Lube Non-lube Air-hydro to 1000 133 235 40 110 75 0.2 Stroke 258 98 258 235 to 1200 40 141 120 256.5 75 0.2 Stroke 277.5 106 277.5 256.5 to 1200 153 135 85 45 281 0.2 Stroke 299 115 303 285 Lube Non-lube to 998 153 135 281 90 45 0.2 Stroke 299 120 308 290 Lube Non-lube Other dimensions are the same as standard style.

NCM

0.7 and the operating pressure of 75 PSI.