AC Servo Motor Driver (Network card type ）

Take countermeasures device caused it. against its cause. etc. 16.B Encoder initial Check it with the check method for [AL. 16.A]. communication Process error 2 16.C Encoder initial communication Process error 3 16.D Encoder initial communication Process error 4 16.E Encoder initial communication Process error 5 16.F Encoder initial communication Process error 6 Alarm No.: 17 Name: Board

Series VQ Metal Seal/Rubber Seal Body Ported

VS7 S kit (Serial transmission) Kit F kit (D-sub connector) T kit (Terminal block) P kit (Flat cable connector) U S F 15 pin U S P 26 pin U S A S U S P 20 pin U S P 16 pin U S P A B C 10 pin F 25 pin T2 T1 Model Max. number 16(1) 14 8 8 16 16 16(1) 14 16(1) Note 1) Due to the limitation of internal wiring.

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

NCG/CG1

WH Rod End Lock: -R Head End Lock: -H Bore size (mm) Bore size (mm) WH W P WA WB WH W P WA WB 20 M5 x 0.8 16 15(16) 30 M5 x 0.8 16 16 30 23 23 20 25 M5 x 0.8 16 15(16) 30 30 M5 x 0.8 16 16 25 25 25 32 Rc 1/8 16 15(16) 25 Rc 1/8 16 16 25 28.5 28.5 32 40 20 Rc 1/8 16 15(16) Rc 1/8 16 16 20 33 33 40 50 20 Rc 1/4 18 17(18) 40.5 Rc 1/4 18 18 20 40.5 50 63 47.5 20 Rc 1/4 18 17(18) Rc 1/4 18 18

Flow Control Equipment

How to Order 2 1 01 06 2 AS 1 F E S K Hexagonal lock nut Body size 2 3 4 1/8, 1/4 3/8 1/2 Sealant Applicable tube O.D.

HRX-OM-X084

AL.01AL.32 D.OUT1 ALARM CODE No.15 screen Contact output signal 1 maintenance MT.01 MT.01MT.05 D.OUT1 MANT CODE No.16 screen Contact output signal 2 function RMT 1 D.OUT2 SEL No.17 screen Contact output signal 2 operation A A/B D.OUT2 TYPE No.18 scree Contact output signal 2 alarm AL.01 AL.01AL.32 D.OUT2 ALARM CODE No.19 screen Contact output signal 2 maintenance MT.01 MT.01MT.05

Series VQ Base Mounted Metal Seal/Rubber Seal

S kit (Serial transmission) Kit F kit (D-sub connector) T kit (Terminal block) P kit (Flat cable connector) F 25P U S P 26P U S F 15P U S A S U S P 16P U S B P 20P U S C P A 10P Model T1 T2 (1) (1) (1) Max. number 16 14 16 16 14 8 8 16 16 Note 1) Due to the limitation of internal wiring.

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

(For details, refer to catalog on page 22.) 17 Series SYJ500 Construction c f a e b d c f a e b d N.C. N.O.

42

(For cylinder port) Port size Electrical entry VVQ4000 50B 02 1/4 03 3/8 B Bottom ported 1/4 Note 4) F1 F kit Double wiring F2 F kit Single wiring T1 T kit Double wiring T2 T kit Single wiring S1 S kit Double wiring S2 S kit Single wiring L0l L0 kit l: Stations (1 to 16) L1l L1 kit l: Stations (1 to 16) L2l L2 kit l: Stations (1 to 16) C C kit (Plug lead type) Port size C6 Applicable tubing

VQZ1000/2000/3000

VQ2000FPG-FB 01 1 station 0.8 to 1.0 Nm 16 16 stations VVQ2000-FPG-066 stations manifold VQ2000-FPG-C6C6-D: 3 sets VQ2000-FPG-C8C8-D: 3 sets Double check block Note) It is the tightening torque for mounting a bracket for the perfect block.

HRX-OM-X071

AL.01 to AL.32 D.OUT1 ALARM CODE No.15 screen Contact output signal 1 maintenance MT.01 MT.01 to MT.05 D.OUT1 MANT CODE No.16 screen Contact output signal 2 function RMT 1 D.OUT2 SEL No.17 screen Contact output signal 2 operation A A/B D.OUT2 TYPE No.18 screen Contact output signal 2 alarm AL.01 AL.01 to AL.32 D.OUT2 ALARM CODE No.19 screen Contact output signal 2 maintenance MT.01

AIR COMBINATION

ATTACHMENTS / ACCESSORIES OPTIONS PART NUMBER Attachments / Accessories (Options) part number Section Model Descriptio For AC10*-A For AC20*-A For AC25*-A For AC30*-A For AC40*-A For AC40*-06-A Note1) Pressure gauge Standard G27-10-01 G36-10-01 G46-10-01 Round type G27-10-01 Note2) G36-4-01 G46-4-01 0.2 MPa setting Round type Standard G36-10-01-L G46-10-01-L Option G36-4-01-L G46-4-01-L

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

Electrical entry G H L LN LO M MN MO Grommet (Lead wire: 300mm) Grommet (Lead wire: 600mm) With lead wire Without lead wire Without connector With lead wire Without lead wire Without connector L plug connector M plug connector 2.2-36 Series SYJ700 Body Ported Grommet (G), (H): SYJ7l2-l G H ll-01 With bracket: SYJ7l2-l G H ll-01-F Manual override 11 23.5 Depress and turn to operate and lock

modular-press-e

Model Option Bracket assembly Note 1) AR10 AR25(K) AR20(K) AR30(K) AR40(K) AR40(K)-06 AR50(K) AR60(K) AR30P-270AS AR30P-260S AR40P-270AS AR40P-260S AR50P-270AS Note 2) AR20P-270AS AR20P-260S AR10P-270AS AR10P-260S G27-10-R1 AR25P-270AS AR25P-260S G36-10-01 G36-2-01 G36-10-01-L G36-2-01-L AR10P-270AS AR20P-270AS AR25P-270AS AR30P-270AS AR40P-270AS AR50P-270AS Note 3) Note 3) Set nut AR10P

Modular F.R.L. Pressure Control Equipment

Model Option Bracket assembly Note 1) AR10 AR25(K) AR20(K) AR30(K) AR40(K) AR40(K)-06 AR50(K) AR60(K) AR30P-270AS AR30P-260S AR40P-270AS AR40P-260S AR50P-270AS Note 2) AR20P-270AS AR20P-260S AR10P-270AS AR10P-260S G27-10-R1 AR25P-270AS AR25P-260S G36-10-01 G36-2-01 G36-10-01-L G36-2-01-L AR10P-270AS AR20P-270AS AR25P-270AS AR30P-270AS AR40P-270AS AR50P-270AS Note 3) Note 3) Set nut AR10P

VZ5000

Note Platinum silver q Description DXT170-Cu Common with Series VZ 000 1 3 Piston plate Body Resin Resin Black w e O-ring NBR 13 x 11 x 1 i Piston Spool valve r Aluminum, HNBR Black painted t Resin End cover y Stainless steel Spool spring 3-3-56 5 Port Solenoid Valve Body Ported Series VZ5000 2 Position Single Foot bracket VZ5120-01-F VZ5120 Grommet (G), (H) VZ5120-01 G H G H (Mounting hole

Compact Manifold Regulator Series ARM5

IN Fitting Type Inch size Metric size ARP Common supply block (S) Common supply block with pressure switch (P) Fitting type Fitting type Straight 6 8 10 8 6 10 Elbow Straight 1/4 5/16 3/8 5/16 1/4 3/8 Elbow Symbol Symbol IR 5 56 01 02 03 13 14 15 51 52 53 63 64 65 5 56 IRV 0.6 0.2 0.4 MPa 20 24 SMC 24 20 0.5 0.1 0.3 VEX1 SRH 32.5 SRP 4.

Intrinsically Safe Valve

Thread type Nil F N T Rc A, B port size Thread piping G Symbol 01 Port size Applicable series NPT 1/8 53-SY5000 NPTF EB P EA One-touch fitting (Metric size) Symbol C6 C8 Port size Applicable series A B 6 One-touch fitting 53-SY5000 A, B port size 53-SS5Y5-41-05-01 Manifold base (5 stations) 01: 1/8 8 One-touch fitting One-touch fitting (Inch size) Symbol N7 N9 Port size Applicable series

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

Approx. 600 (Lead wire length) 31.5 [38.5] 70.6 [72.8] (Light/surge voltage suppressor) 2-3.2 (For mounting) 23.5 10.9 74.2 [76.4] + 28 25 16.1 21 31.5 [38.5] 18 10 (Bracket) 3.6 1/8 (P, R port) R P 28 8 1.6 (PE port) 14.5 16 L plug connector (L): SYJ72-L-01 (-F) M plug connector (M): SYJ72-M-01 (-F) DIN terminal (D): SYJ72-D-01 (-F) M8 connector (M0): SYJ72-W0-01 (-F) Approx. 300 (Lead wire

7ND9071en

Number of switches Electrical values: According to switch type, check connection diagram from Section 12.11 2-wire, DC voltage proximity switches: I02 P+F NJ2-12GK-SN Ui: 16 V, Ii: 52 mA 2 I09 P+F NCB2-12GM35-N0 Ui: 16 V, Ii: 52 mA 2 I56 IFM IFC2002-ARKG/UP U: 10-36 V DC, Imax: 150 mA 2 I41 P+F NJ4-12GK-SN Ui: 16 V, Ii: 52 mA 4 3-wire, DC voltage proximity switches: I45 P+F NJ3-18GK-S1N Ui