Micro Mechanical Valve Series VM1000

Red VM131-01-35RA VM151-01-35RA VM131U-01-35RA VM151U-01-35RA VM133-M5-35RA VM153-M5-35RA Black VM131-01-35BA VM151-01-35BA VM131U-01-35BA VM151U-01-35BA VM133-M5-35BA VM153-M5-35BA Green VM131-01-35GA VM151-01-35GA VM131U-01-35GA VM151U-01-35GA VM133-M5-35GA VM153-M5-35GA Yellow VM131-01-35YA VM151-01-35YA VM131U-01-35YA VM151U-01-35YA VM133-M5-35YA VM153-M5-35YA Note 1) It is possible

Speed Controller with Indicator

[L/min (ANR)] 06, 07, 08, 09, 10 06, 07, 08, 09, 10 01, 23, 03, 04, 06, 07 01, 23, 03, 04, 06, 07 08, 09, 10, 11 08, 09, 10, 11 03, 04 400 200 06, 07 02 01, 23 300 50 03, 04 200 100 01, 23 100 0 0 0 5 0 10 5 0 10 5 0 10 Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.

AC

(01) Y31-02 (01) Y41-03 (02) Y51-03 (02) T type interface (3) Pressure switch VHS2000-01 02 02 03 VHS302 03 VHS3000VHS402 03 04 Y24-01 02 Y34-01 02 Y34-03 02 Y44-02 03 Y54-03 04 Residual pressure exhaust 3 port valve Cross interface Y30 Y40 Y50 B210T B310T B310T B410T B510T T type brcket Y20 Y30 Interface G46-10-02 G36-10-01 G36-10-01 G36-2-01 G36-10-01 G36-2-01 G36-2-01 G46-2-02 G46-2-02

ZP

01 01 01 01 01 01 01 01 01 01 01 01 01 01 153.5 156.5 189.5 192.5 118.5 123.5 01 153.5 158.5 01 01 01 189.5 194.5 01 55 Series ZP Heavy-duty Pad Dimensions: With Buffer 40 50 01 ZPT HB -A18 01 ZPT HB -A18 63 80 01 ZPT HB -A22 100 125 1/8 (Rc, NPT, NPTF) Width across flat 17 (Hexagon) M22 x 1.5 50 24 1/8 (Rc, NPT, NPTF) Width across flat 14 (Hexagon) 1/8 (Rc, NPT, NPTF) Width across flat

One-touch Fittings

29.9 23 48.3 17 57.4 45.4 9 27.6 3/8 KQ2Y12-03lS 17 18.5 17 23 30.8 23 48.8 17 57.4 45.4 9 28.2 1/2 KQ2Y12-04lS 22 18.5 17 23 34.8 23 51.5 17 57.4 45.4 9 50.7 16 1/4 KQ2Y16-02lS 17 23.8 17 28.6 32.6 28.6 56.5 20.6 57.4 57.4 9 36 3/8 KQ2Y16-03lS 22 23.8 21 28.6 35.4 28.6 58.9 20.6 81 60 11 48.3 1/2 KQ2Y16-04lS 22 23.8 21 28.6 34.1 28.6 56.3 20.6 113 60 13 52 1 Reference dimensions after

2/3 Port Valve

VXD21/22/23 Single unit Single unit VXP21/22/23 VXR21/22/23 Body Single unit N.C.

Tamper Proof and Flat Head Screw

Type Metric sizes Inch sizes Elbow Universal 2 3 3.2 01 23 1/8 5/32 3/16 1/4 5/16 3/8 1/2 04 06 08 10 12 03 05 07 09 11 13 4 6 8 10 12 Control type Meter-out Meter-in 0 1 Use 1/8 tubing.

KR

(mm) (1) Weight (g) D1 D2 L1 L2 A M Nylon Urethane KGL04-M5 KGL04-01 KGL04-02 KGL06-M5 KGL06-01 KGL06-02 KGL06-03 KGL08-01 KGL08-02 KGL08-03 KGL10-01 KGL10-02 KGL10-03 KGL10-04 KGL12-02 KGL12-03 M5 x 0.8 7 9.5 16 13.5 15 13 3.5 3.5 2.7 10 19 4 1 8 1 4 22 26 23 25 10 14 7 11.5 10.4 10 18 16 4.2 4.2 M5 x 0.8 3.1 12 10 33 13 21 35 25 26 14 10 14 17 12 14 17 3.5 3.5 16 14.5 17 23 25.5

Table of Contents

setting trimmer Pressure setting trimmer SET HYS SET HYS L L H H L L H H 15 15 Indicator light (Red) Indicator light (Red) 23 23 SE1-01-16/-17 I Z I Z SE1-01-16C/-17C Pressure setting trimmer 2 Pressure setting trimmer 1 Pressure setting trimmer 2 Pressure setting trimmer 1 SET1 SET2 L L H H 15 SET1 SET2 L L H H 15 Indicator light (Red, Green) 23 Indicator light (Red, Green) 23 600 (3000

Air Fittings & Tubing

D1 D2 L1 L2 M 15 23 15 22 25 17 24 24 27 30 36 31 52 59 58 KQ2F04-01 KQ2F04-02 KQ2F06-01 KQ2F06-02 KQ2F06-03 KQ2F08-01 KQ2F08-02 KQ2F08-03 KQ2F10-02 KQ2F10-03 KQ2F12-02 KQ2F12-03 KQ2F12-04 KQ2F16-03 KQ2F16-04 1 8 1 4 1 8 1 4 3 8 10 27 31 27.5 31 33.5 29 32.5 33.5 34.5 36.5 35 37 41 38 43 11 16 5.6 4 14 17 14 17 19 14 17 19 17 19 4 14 11 13 15 11 13 14 14 15 13.1 10.4 17 12 6 1 8 KQ2F16 26.1

VM

VM130-01-07 VM120-01-07S VM130-01-07S JIS Symbol 2 port Panel mounting hole Polyacetal or hard steel roller Hexagon nut thick 5, across flats 17 3 port R port (3 port only) 0.5 MPa supply SA 2 mm P.T. 23 N F.O.F.

KQ2

(mm) KQ2F04 to 12 Effective area (2) (mm2) Connection thread Rc (1) Mass (g) D1 D2 L1 L2 M Model Nylon Urethane Applicable tubing KQ2F04-01 KQ2F04-02 KQ2F06-01 KQ2F06-02 KQ2F06-03 KQ2F08-01 KQ2F08-02 KQ2F08-03 KQ2F10-02 KQ2F10-03 KQ2F12-02 KQ2F12-03 KQ2F12-04 KQ2F16-03 KQ2F16-04 1 8 1 4 1 8 1 4 3 8 15 23 15 22 25 17 24 24 27 30 36 31 52 59 58 10 27 31 27.5 31 33.5 29 32.5 33.5 34.5 36.5 35

V

39.8 27.4 23.4 19 21 23 ASV310F-02-06S 6 R(PT)1/4 14 16.8 12.8 17.6 71.9 65.9 69.9 63.9 45.8 39.8 31.4 25.4 17 19 30 ASV310F-02-08S 8 R(PT)1/4 14 19.3 15.2 17.6 73.8 67.8 71.8 65.8 45.8 39.8 31.4 25.4 19 21 31 ASV410F-01-08S 8 R(PT)1/8 12 19.3 15.2 24 83.1 75.6 81.1 73.6 52.8 45.3 30.7 26.7 19 21 39 ASV410F-01-10S 10 R(PT)1/8 12 23.3 18.5 24 85.2 77.7 83.2 75.7 52.8 45.3 30.7 26.7 21 23

0.4

7#> 1*&$ 1*&$ 23 23 23 23 23 23 23 :$!&"# 1-#*$ 1*&$ -#*$ :; 1*&$ !"#! $%&!"' !"#! $%&!"' ( )!$*+ % ,-$$-. ( )!$*+ % ,-$$-. ( )!$*+ % ,-$$-. 0 1*&$ *&+#"4 5 5 2$"$-*4 3"-+ 4$"$-*4 T VQC1000/2000/4000 Kit (Terminal block box kit) IP67 compliant This kit has a small terminal block inside a junction box.

SQ1000/2000

A 23 6 () 11 Station 8 SOL.

This is a legacy product, and replaced bySYJ514M-5G-01, VALVE, SOL BASE MOUNTED *LQA, VALVE, VZ300 SOL VALVE 3-PORT, NA, VZ300 BASE MT 1/8, .20412 lb

Super Compact Direct Acting 2/3 Port Solenoid Valve Series S070

Body ported Base mounted Body ported Bar stock type Stacking type Meeting miniaturisation needs of analysers, medical equipment and semiconductor manufacturing equipment Series S070 Extremely light weight 5g (Valve single unit) Coming out in May, 2002 Operation noise 38dB(A) or less Easy to increase or decrease the number of stations.

0.4

C8 N7 N9 One-touch fitting for 6 One-touch fitting for 8 One-touch fitting for 1/4" One-touch fitting for 5/16" Option Wiring Stations Note) Note) S D Single wiring Double wiring 01 For 1 station P PL26: 01 to 24 (P kit, 26P) PL20: 01 to 18 (P kit, 20P) JL20: 01 to 16 (J kit, 20P) kit 24 For 24 stations Nil R S Common exhaust type External pilot Built-in silencer

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type

Metric size Inch size Control 3.2 23 01 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" Meter-out Meter-in 0 1 04 06 08 10 12 03 05 07 09 11 13 4 6 8 10 12 With One-touch fitting Use 1/8" tube. 15-9-92 Tamper Proof Speed Controller With One-touch Fitting, Elbow Type/Universal Type Needle Valve/Flow Characteristics AS121F AS131F AS221F-01 AS231F-01 AS221F-02 AS231F-02 Inlet pressure: 0.5 MPa Inlet

ZP

01 01 01 01 01 01 01 01 01 01 01 01 01 01 153.5 156.5 189.5 192.5 118.5 123.5 01 153.5 158.5 01 01 01 189.5 194.5 01 55 Series ZP Heavy-duty Pad Dimensions: With Buffer 40 50 01 ZPT HB -A18 01 ZPT HB -A18 63 80 01 ZPT HB -A22 100 125 1/8 (Rc, NPT, NPTF) Width across flat 17 (Hexagon) M22 x 1.5 50 24 1/8 (Rc, NPT, NPTF) Width across flat 14 (Hexagon) 1/8 (Rc, NPT, NPTF) Width across flat