5 Port Solenoid Valve Series VQZ1000/2000/3000

16.5 15 R1 5 3 R2 1 P X (Pitch) P = 10.5 16.1 57 32.8 M5 x 0.8 [4(A), 2(B) port] A 33.5 20.5 6.5 20 6 4 B 2 External pilot 3.2 (Pitch) P = 10.5 14.5 M5 The dashed lines indicate the DIN rail mounting [-D].

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

M1 AS131FG-M5-23 AS131FG-U10/32-01 19.8 19.8 3.2 8.4 1/8" 8.4 17.5 28.7 28.7 12.7 17.5 7 12.7 AS131FG-M5-04 AS131FG-U10/32-03 28.6 M5 0.8 25.8 20.3 20.3 4 9.3 5/32" 9.3 9.6 9.3 7 8 25 22.2 10.8 28.6 25.8 10-32 UNF 22.2 25 9.6 9.3 10.8 8 AS131FG-M5-06 AS131FG-U10/32-05 20.6 31.8 34.5 13.5 23.3 21.4 21.3 6 11.6 3/16" 11.4 16.5 8 AS231FG-01-23 AS131FG-U10/32-07 31.9 20.7 24.4 21.6 3.2 8.4 1

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

stations 01 Solenoid on same side of A and B port 1 station Nil P port: Rc 1/8 A port: M5 x 0.8 B port: M5 x 0.8 Thread type R port: Rc 1/8 20 Solenoid on same side of A and B port 20 stations Type S41 Nil F N T Rc S Type VK334 Type VK3140 Port size G M5 M5 x 0.8 C4 4 cassette NPT P port: Rc 1/8 NPTF R port: Rc 1/8 B port: M5 x 0.8 A port: M5 x 0.8 Type 42: Base mounted (A, B port side ported

VEX1

2 (A) No.

VQZ1000/2000/3000

C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread Grommet (G) n 5 Manual override VQC B 4 4 SMC SMC 2 A SQ (L4) (L3) L2 L1 5 18 P = 16 B 4 3 SMC SMC 2 A VQ0 B 4 2 SMC SMC 2 A B 4 VQ4 SMC 1 SMC 2 A VQ5 Stations Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

Nil M5 x 0.8 R1, R2 port 20 20 stations + + + + + + + Nil Rc Applicable solenoid valve 10-SYJ343-(-Q) Single solenoid pilot valve is on same side as the A, B port. P P P S F G A, B port M5 x 0.8, C4 P port 1/8 P port 1/8 A A A, B port size B B B A, B port M5 x 0.8, C4 A N NPT Applicable blanking plate assembly M5 M5 x 0.8 T NPTF C4 4 One-touch fitting Refer to page 302.

AIR COMBINATION

*-A AR30-A AFM30-A AL30-A AR30-A AFM30-A AL30-A AR30-A AF40-A AF40-A AW40-A AF40-A AW40-A AC40*-A AR40-A AFM40-A AL40-A AR40-A AFM40-A AL40-A AR40-A AF40-06-A AF40-06-A AW40-06-A AF40-06-A AW40-06-A AC40*-06-A AR40-06-A AFM40-06-A AL40-06-A AR40-06-A AFM40-06-A AL40-06-A AR40-06-A 10 Option / Semi-standard : Select one each for a to m.

High Purity Chemical Valve

Symbol A R P 4 Metric sizes 03 04 06 3 4 6 Valve type N.C. 0 N.C.

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

Body size Port size M5 M5 x 0.8 U10/32 10-32UNF 1 M5 x 0.8 10-32UNF AS 2 0 F A 1 1 M5 06 G Body size 1 AS 2 0 S F A 1 2 01 06 G Body size 2/3/4 Body size Made to Order Refer to page 678 for details. 2 1/8, 1/4 3 3/8 4 1/2 Push-lock type Type 2 Elbow 3 Universal Seal method Nil Without sealant S With sealant Note) Face seal method is used for the G thread type.

Series VQ Metal Seal/Rubber Seal Body Ported

(Specify a model with 9 to 16 stations by using a manifold specification form.) Manifold Specifications Series Porting specifications Applicable stations Port location Port size P, R A, B C3, C4, M5 C3, C4, C6, M5 C4, C6, C8 C6 C6 C10 VQ0 VQ1000 VQ2000 Side Side Side Max. 16 Max. 16 Max. 16 SA applicable to Series EX300 SB applicable to MELSECNET/MINIS3 Data Link (Mitsubishi Electric.)

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

A A A A 24V 0V +24V 24G DA DB DG FG R4.5 129 STATION NO.

KR

(mm) Connection thread M thread Uni thread <M5, M6> <M5, M6> A Weight (g) L2 D1 D2 M L1 Model Urethane KAL23-M5 15 9.6 16 15.5 M5 x 0.8 M6 x 1 7 6 Applicable tubing 8 8 15.5 19.5 21 3.4 2.9 8 4 5 1 8 KAL23-M6 KAL23-U01 10 3.2 17.5 10 KAL04-M5 15.5 M5 x 0.8 M6 x 1 8 16 3.5 3.5 8 KAL04-M6 16 10.4 16 18 4 1 8 KAL04-U01 20.5 20 8 14 10 10 4.2 4.2 1 4 KAL04-U02 22 21.5 14 KAL06-M5 16 M5 x 0.8

Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS

8 12.7 12.7 7 9.6 17.5 9.3 10.8 28.7 28.6 25.8 25 22.2 17.5 28.7 AS131F-M5-04 AS131F-M5-03 5/32" M5 x 0.8 M5 x 0.8 8 20.3 9.3 20.3 28.6 25.8 25 22.2 7 4 9.6 9.3 10.8 9.3 AS131F-U10/32-04 AS131F-U10/32-03 5/32" 10-32UNF 10-32UNF AS131F-M5-06 AS131F-M5-05 3/16" M5 x 0.8 M5 x 0.8 13.5 11.4 21.3 23.3 34.5 16.5 20.6 21.4 31.8 11.6 6 AS131F-U10/32-06 AS131F-U10/32-05 3/16" 10-32UNF 10-32UNF 8 9.6

Dual Speed Controller with One-touch Fitting Series ASD

Flow Direction Symbols on Body Meter-out type Meter-in type Symbol JIS Symbol 15-9-67 Series ASD-FM How to Order ASD 3 3 0 F M 01 06 S With seal M5 and U10/32 types, as they are not available with seal. Body size 2 3 4 M5 standard 1/8 standard 1/4 standard Type Applicable tubing O.D.

KB

KBV2-06 KBV1-M5 KBV1-M6 KBV2-M5 M5 x 0.8 M6 x 1 M5 x 0.8 M6 x 1 6 KBV2-08 KBV3-08 8 KBV2-M6 KBV2-R1 KBV3-R1 KBV3-R2 KBV4-R2 KBV4-R3 1 8 Branch Elbow Module: KBZ Rc Applicable tubing KBV3-10 10 Applicable tubing O.D. 4 6 KBZ2-08 8 KBZ3-10 10 KBZ3-12 12 KBZ4-12 KBV3-12 12 KBV4-12 KBV4-16 Rc 1 4 Model KBZ1-04 KBZ1-06 16 Rc 3 8 Applicable tubing Bulkhead Female Connector: KBE Female Connector

Series AS-FM/AS-M/ASD-FM

100 200 205 Inch size M5 standard 1/8 standard 1/4 standard 3.2 23 04 06 08 01 03 05 07 09 1/8" 5/32" 3/16" 1/4" 5/16" 4 6 8 Use a 1/8" tube.

Modular F.R.L. Units

For AC30-A For AC30A-A For AC30B-A For AC30C-A For AC30D-A For AC40-A For AC40A-A For AC40B-A For AC40C-A For AC40D-A For AC40-06-A For AC40A-06-A For AC40B-06-A For AC40C-06-A For AC40D-06-A For AC20-A For AC20A-A For AC20B-A For AC20C-A For AC20D-A For AC25-A For AC25B-A For AC25C-A Section Option Model Type G46-10-01 G46-4-01 G46-10-01-L G46-4-01-L Y300-A Y300T-A AKM3000-(01)-A 02-A

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

AS131FM-M5-23 AS131FM-M5-04 AS131FM-M5-06 AS231FM-01-23 AS231FM-01-04 AS231FM-01-06 AS231FM-01-08 AS231FM-02-04 AS231FM-02-06 AS231FM-02-08 AS231FM-02-10 3.2 19.8 8.4 17.5 28.7 12.7 M5 x 0.8 8 8 4 20.3 33.8 28.8 30.1 25.1 9.3 9.6 9.3 10.8 6 21.4 20.6 31.8 13.5 11.6 3.2 24.4 8.4 17 17.5 30.9 12.7 9.3 13.1 4 24.9 9.3 35.2 30.2 32.1 27.1 12 R 1/8 14.2 18 22.9 36.3 13.5 10.9 6 14 26.9 11.6 21

AW

Symbol Body size Description 10 20 30 40 60 Without backflow function With backflow function Nil K Note 1) With backflow function + Metric thread (M5) Rc NPT G Nil Thread type N Note 2) F Note 3) + M5 01 02 03 04 06 10 M5 1/8 1/4 3/8 1/2 3/4 1 Port size + Mounting Without mounting option With bracket With set nut (for panel fitting) a Nil B Note 5) H + Without auto drain Float type auto drain

0.4

4 SMC J kit 55.9 69.8 37.6 53.6 B 2 18.5 T 12 12 kit M5: External pilot port L EXH outlet kit e d i s U e d i s D Stations 1 2 3 4 5 6 7 8 n One-touch fitting [3(R), 1(P) port] Applicable tubing O.D.: 10 S 10 Lead wire length: L0, 0.6 m L1, 1.5 m L2, 3.0 m kit For top ported R 3 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A C 62.1 41.7 25.7 39.4 (58) kit 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 20.9 P 1 How to