High Purity Chemical Valve Symbol A R P 4 Metric sizes 03 04 06 3 4 6 Valve type N.C. 0 N.C.
Type A mounting bracket part no. YA-03 Joint YU-03 Type B Mounting Bracket RS Joint and Mounting Bracket (Type A, Type B) Part No. Bore size (mm) Joint part no.
-04 AS121F-M5-03 5/32" M5 x 0.8 M5 x 0.8 8 17.3 22.2 7 9.3 22.1 9.6 4 25 25.8 22.1 28.6 9.3 17.3 AS121F-U10/32-04 AS121F-U10/32-03 5/32" 10-32UNF 10-32UNF AS121F-M5-06 AS121F-M5-05 3/16" M5 x 0.8 M5 x 0.8 11.4 21.3 26.1 7 16.5 13.5 11.7 22.9 11.6 18.1 6 AS121F-U10/32-06 AS121F-U10/32-05 3/16" 10-32UNF 10-32UNF 8 11.7 28.6 25.8 22.2 25 9.6 AS221F-01-23 AS2 1F-M5-07 20.4 16 9.3 27.5 3.2 1/4
L1 (Non-locking) Manual override A A 20 15 B B 5 48.5 [55] 2 (Pitch) P=10.5 12 2n-One-touch fitting 36.1 29.5 (A, B port) A A 20 15 B B Applicable tube: T0425 5 2 (Pitch) P=10.5 12 2n-M5 X 0.8 (A, B port) Other dimensions are the same as the M5.
Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com B 10 10 A B 14.4 10 With across flats 7 M3: M3 x 0.5 M5: M5 x 0.8 A PSE54-M5 PSE54-M3 PSE54-R06 PSE54-R04 A A 11.5 10.8 6 4 B 3.5 3 B 20 18 Common dimensions PSE54-IM5 18 3000 13 9.6 8.7 9 4 M5 x 0.8 PSE5401 N01 PSE54
Port size M5 x 0.8 SX3000 SX3000-39-2A SX5000 SX5000-39-16 A SX7000 SX7000-39-16 A Series Assembly part no. Port size M5 x 0.8 SX3000 SX3000-38-2A SX5000 SX5000-38-16 A SX7000 SX7000-38-16 A Bolt and gasket part no. 1 8 1 4 Note) The SUP port may be either on the lead wire side or on the end plate side.
(A) 2 (A) 1 (P) 3 (R) 2 (A) 2 (A) 3 (R) Model C[dm3/(s.bar)] b Cv C[dm3/(s.bar)] b Cv C[dm3/(s.bar)] b Cv C[dm3/(s.bar)] b Cv VEX312-01 VEX312-02 VEX332-02 VEX332-03 VEX332-04 VEX350-04 VEX322-01 VEX322-02 VEX342-02 VEX342-03 VEX342-04 1/8 1/4 1/4 3/8 1/2 1/2 1/8 1/4 1/4 3/8 1/2 2.4 3.5 4.1 8.7 9.8 24 3.3 4.1 8.1 12 13 0.19 0.35 0.36 0.29 0.37 0.32 0.34 0.28 0.34 0.26 0.20 0.59 0.89 1.1
port R port B (Bracket) F (Foot) G (Pressure gauge) N (Silencer) 00 M5 00 M5 01 00 01 02 00 02 03 04 Symbol Mounting Without sub-plate M5 Without sub-plate M5 D B 1 8 Without sub-plate Base mounted 1 8 1 4 2 Without sub-plate 1 4 3 8 1 2 4 JIS Symbol Note) A M5 01 02 02 03 04 04 06 10 10 12 14 20 Note) M5 1 8 1 4 1 4 3 8 1 2 1 2 3 4 1 Note) Note) 3 Body ported 5 1 1 11 4 7 1 4 11 2 1 2 2
pilot port) With connector on D side (FD) 12 Base Mounted Type Series VQ5000 Dimensions (mm) 1in 25.4mm Bottom port diagram With connector on U side (FU) 106 46.8 59.2 83.5 9 9 55.5 M5 ground screw 2n-1/2 (ports A, B) 34.5 n U side X 12 B 2 A 4 6 B A B 2 A 4 5 SMC SMC SMC SMC SMC B A B 2 A 4 4 B A P=41 L1 L2 B 2 A 4 3 B A B 2 A 4 2 B A 34.5 46 68.5 P = 41 A 4 B 2 1 B A 58.5 X 12 Stations
A 2 x P through KA B 4 x T counterbore Width across flats L S + Stroke CUJ Z + Stroke CU CQS CQ2 RQ (mm) Port size Bore size (mm) GA H J JA A B A' C CA CB D E GB CQM 20 25 32 29 32.5 35 19 23 27 16 20 24 12 15 19 12 15.5 19.5 14 18 22 26 32 40 42 50 62 20 25 31 22 25 31 9 10 11 27 22.5 25 8 10 12 M5 x 0.8 M5 x 0.8 1/8 MU Bore size (mm) Standard stroke NN T S Z K KA L MM P Q R 20 25 32 M5
Dimensions A B VQD A VQZ1000 VQZ2000 VQZ3000 67 81 93 35 43 52 VZS VFS Individual EXH spacer VVQZ1000-R-5-M5 VVQZ2000-R-5-01 VVQZ3000-R-5-02 VS M5: VQZ1000 Rc(PT)1/8: VQZ2000 Rc(PT)1/4: VQZ3000 VS7 B Used to form a separate exhaust port for an interior manifold station or stations.
Port size M5 x 0.8 SX3000 SX3000-39-2A SX5000 SX5000-39-16 A SX7000 SX7000-39-16 A Series Assembly part no. Port size M5 x 0.8 SX3000 SX3000-38-2A SX5000 SX5000-38-16 A SX7000 SX7000-38-16 A Bolt and gasket part no. 1 8 1 4 Note) The SUP port may be either on the lead wire side or on the end plate side.
Type A mounting bracket YA-03 Joint YU-03 Type B Mounting Bracket RS Joint/Mounting Bracket (Type A/B)/Part No.
17 18.6 20.8 M L Q A D N M O L Q A Note 1) D is maximum diameter.
A type mounting bracket part No.YA-03 Joint YU-03 Joint Part No. Applicable mounting bracket Bore size (mm) Weight (g) Joint part No. B bracket A bracket YB-03 YU-03 YA-03 32, 40 25 YB-05 YU-05 YA-05 50, 63 40 Bore size (mm) YB-08 YU-08 YA-08 80 90 Part No.
21 22.5 13.5 M5 x 0.8 (External pilot port) 99.2 84.9 23.4 M5 x 0.8 (Pilot EXH port)
Symbol 10 20 30 40 50 60 Body size Description Metric thread (M5) Rc NPT G Nil Thread type N Note 1) F Note 2) + M5 01 02 03 04 06 10 M5 1/8 1/4 3/8 1/2 3/4 1 Port size + Nil B Note 3) Mounting a Without mounting option With bracket + Semi-standard Option Nil C D Float type auto drain b Without auto drain Float type auto drain (N.C.)
rail) (4.5) + + + + + (5.5) (66) 59.3 (35) P 1 3 R 3 R P 1 46.5 43.9 13.4 16.3 41.2 35 21.6 19.3 2 A 2 A 2 A 2 A 2 A (8) 1/8 [1(P), 3(R) port] 8 2 x 4.3 (For mounting) L5 6.5 One-touch fitting [2(A) port] Applicable tubing O.D.: 3.2, 1/8" 4, 5/32" 6, 1/4" 15 M5 x 0.8 [2(A) port] L4 L3 39.5 (Station 1) (Station n) C6: 44.1 N7: 47.9 (3.2) (For M5) 45.2 A A 20 (11) (7.5) 2 2 The dashed lines
Port size M5 x 0.8 SX3000 SX3000-39-2A SX5000 SX5000-39-16 A SX7000 SX7000-39-16 A Series Assembly part no. Port size M5 x 0.8 SX3000 SX3000-38-2A SX5000 SX5000-38-16 A SX7000 SX7000-38-16 A Bolt and gasket part no. 1 8 1 4 Note) The SUP port may be either on the lead wire side or on the end plate side.
AMH150-03 AMH250-03 AMH250-03 AMH350-04 AMH350-04 AMH450-06 AMH450-06 AMH550-06 AMH550-10 AMH650-14 AMH850-20 AMH850-20 IDG10-03 IDG20-03 IDG30-03 IDG50-03 IDG75-04 IDG100-04 AME150-03 AMF150-03 AME150-03 AMF150-03 AME250-03 AMF250-03 AME250-03 AMF250-03 AME350-04 AMF350-04 AME350-04 AMF350-04 AME450-06 AMF450-06 AME450-06 AMF450-06 AME550-10 AMF550-10 AME550-10 AMF550-10 AME650-14 AMF650