Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC12V, Specification: Standard / Low Vacuum Compatible, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: 2-Position Normally Closed, Pipe Port Type: M, Port Size: M5, Pressure Rating(MPa): 0 to 1.0, Driving Type: Linear Motion Poppet, Seal Type: Soft Seal

Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC12V, Specification: Standard / Low Vacuum Compatible, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: 2-Position Normally Closed, Pipe Port Type: M, Port Size: M5, Pressure Rating(MPa): 0 to 1.0, Driving Type: Linear Motion Poppet, Seal Type: Soft Seal

Voltage: 24VDC, Electrical Entry: L Plug Connector, Lead Wire: w/o Lead Wire, Orifice Size: 0.8mm, Port Size: w/Sub-Plate M5x0.8, Body/Seal Material: Body C36, Seal FKM

Voltage: 12VDC, Electrical Entry: M Plug Connector, Lead Wire: w/o Lead Wire, Orifice Size: 0.4mm, Port Size: w/Sub-Plate M5x0.8, Body/Seal Material: Body C36, Seal FKM

Sensor Monitor

Caution Caution indicates a hazard with a low level of risk which, if not avoided, could result in minor or moderate injury. Warning Warning indicates a hazard with a medium level of risk which, if not avoided, could result in death or serious injury. Danger Danger indicates a hazard with a high level of risk which, if not avoided, will result in death or serious injury. Warning 1.

Digital Flow Monitor

Caution Caution indicates a hazard with a low level of risk which, if not avoided, could result in minor or moderate injury. Warning Warning indicates a hazard with a medium level of risk which, if not avoided, could result in death or serious injury. Danger Danger indicates a hazard with a high level of risk which, if not avoided, will result in death or serious injury. Warning 1.

2

)-A 03-A Y510-(02)-A 03-A Y610-03-A (04)-A Y610-(03)-A 04-A 02A VHS40-03A 04A VHS40-06A VHS50-06A 10A Pressure relief 3 port valve Note 6) VHS20-01A 02A VHS30-02A 03A Attachment 02-A E400-03-A 04-A 06-A Piping adapter Note 6) E100-M5-A 01-A E200-02-A 03-A 02-A E300-03-A 04-A E500-06-A E600-06 10 02-A IS10E-4003-A 04-A 06-A Pressure switch with piping adapter Note 6) 01-A IS10E-2002-A

ZP

) Width across flat J (Hexagon) (G) (G) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) M5 x 0.8 M5 x 0.8 Width across flat 14 (Hexagon) Width across flat 14 (Hexagon) E 13 E 13 8 3 3 3 3 M10 x 1 M10 x 1 (F) (F) D D M5 x 0.8 M5 x 0.8 6 6 8 Y Y A A a a C C b B 20 21 Dimensions Dimensions a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y Model 04 06

ZP

) Width across flat J (Hexagon) (G) (G) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) M5 x 0.8 M5 x 0.8 Width across flat 14 (Hexagon) Width across flat 14 (Hexagon) E 13 E 13 8 3 3 3 3 M10 x 1 M10 x 1 (F) (F) D D M5 x 0.8 M5 x 0.8 6 6 8 Y Y A A a a C C b B 20 21 Dimensions Dimensions a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y Model 04 06

ZP

or vacuum pad 72 A Bellows Type ZP Series Basic Pad Dimensions/Models With adapter/One-touch fitting 6 to 8 w q ZPR 06 B N 04 B4 r Connection thread (Female thread) D Width across flats 10 Vacuum inlet e (One-touch fitting) B B4 M4 x 0.7 B5 M5 x 0.8 A 04 4 06 6 E Model A B Vacuum inlet direction q Pad dia.

Table of Contents

-06-06 ZH07BL-06-06 ZH10BS-06-06 ZH10BL-06-06 ZH13BS-08-10 ZH13BL-08-10 (Mounting hole) Applicable tubing diameter M I J K L M N O P Model ZH05BS-06-06 ZH05BL-06-06 ZH07BS-06-06 ZH07BL-06-06 ZH10BS-06-06 ZH10BL-06-06 ZH13BS-08-10 ZH13BL-08-10 5.8 2 31 57 12.8 3.2 24 5.8 2 31 57 12.8 3.2 24 5.8 2 31 57 12.8 3.2 24 5.8 2 31 60 12.8 3.2 26 5.8 2 32 60 12.8 3.2 26 5.8 2 32 75 15.3 4.2 28 7.5

Table of Contents

A Note 1) AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

Table of Contents

E100-M5 02 03 04 06 (6) IS1000E-20 01 02 03 IS1000E-30 02 03 04 IS1000E-40 Pressure switch with piping adapter (6) Y14-M5 Y2401 02 Y3401 02 Y4402 03 Y5403 04 Cross interface Note 1) in part numbers for a round pressure gauge indicates a type of connection thread.

AS

Metric size: White Inch size: Orange Port size M5 M5 x 0.8 U10/32 10-32 UNF Note 2) Use 1/8" tubing. 2 0 F A 1 AS 1 M5 06 Body size 1 2 0 S F A 1 AS 2 01 06 Body size 2/3/4 Thread type Body size Nil R M5 x 0.8 1 Push-lock type 10-32 UNF N NPT 2 3 4 1/8, 1/4 3/8 Port size Seal method 1/2 01 02 03 04 Nil Without sealant 1/8 S With sealant 1/4 3/8 Elbow 1/2 Applicable tubing O.D.

ZP

: -U4 ZP3-Y10B: -04 ZP3-Y13B: -04 ZP3-Y16B: -04 10 22 A B Square 8 M5 x 0.8 Buffer Applicable Pad List Width across flat 7 Width across flat 8 4 15 (12.5) (17.8) M-5AU-4-X83 [Weight: 1.6 g] 2 KJH04-M5 [Weight: 2.4 g] 2 Mounting Adapter Part No. 17 16 11.4 1.8 2 ZP3-Y10B: -U6 ZP3-Y13B: -U6 ZP3-Y16B: -U6 ZP3-Y10B: -06 ZP3-Y13B: -06 ZP3-Y16B: -06 Dimensions (per stroke) Weight (g) A B Model

1

Twist selector (3 position) VM133-M5-35 (R, B, G, Y) A VM153-M5-35 (R, B, G, Y) A Panel mounting hole ON 45 T.T.

Vacuum Pad

: -U4 ZP3-Y10B: -04 ZP3-Y13B: -04 ZP3-Y16B: -04 10 22 A B Square 8 M5 x 0.8 Buffer Applicable Pad List Width across flat 7 Width across flat 8 4 15 (12.5) (17.8) M-5AU-4-X83 [Weight: 1.6 g] 2 KJH04-M5 [Weight: 2.4 g] 2 Mounting Adapter Part No. 17 16 11.4 1.8 2 ZP3-Y10B: -U6 ZP3-Y13B: -U6 ZP3-Y16B: -U6 ZP3-Y10B: -06 ZP3-Y13B: -06 ZP3-Y16B: -06 Dimensions (per stroke) Weight (g) A B Model

Vacuum Pad

: -U4 ZP3-Y10B: -04 ZP3-Y13B: -04 ZP3-Y16B: -04 10 22 A B Square 8 M5 x 0.8 Buffer Applicable Pad List Width across flat 7 Width across flat 8 4 15 (12.5) (17.8) M-5AU-4-X83 [Weight: 1.6 g] 2 KJH04-M5 [Weight: 2.4 g] 2 Mounting Adapter Part No. 17 16 11.4 1.8 2 ZP3-Y10B: -U6 ZP3-Y13B: -U6 ZP3-Y16B: -U6 ZP3-Y10B: -06 ZP3-Y13B: -06 ZP3-Y16B: -06 Dimensions (per stroke) Weight (g) A B Model

Vacuum Pad

: -U4 ZP3-Y10B: -04 ZP3-Y13B: -04 ZP3-Y16B: -04 10 22 A B Square 8 M5 x 0.8 Buffer Applicable Pad List Width across flat 7 Width across flat 8 4 15 (12.5) (17.8) M-5AU-4-X83 [Weight: 1.6 g] 2 KJH04-M5 [Weight: 2.4 g] 2 Mounting Adapter Part No. 17 16 11.4 1.8 2 ZP3-Y10B: -U6 ZP3-Y13B: -U6 ZP3-Y16B: -U6 ZP3-Y10B: -06 ZP3-Y13B: -06 ZP3-Y16B: -06 Dimensions (per stroke) Weight (g) A B Model

Modular F.R.L. Unit

Note 3) Without a valve function. Note 4) For a thread type M5 and NPT.