Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

ZH13BL-08-02 I J K L M N O P Model 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 ZH05BS-06-01 ZH05BL-06-01 ZH07BS-06-01 ZH07BL-06-01 ZH10BS-06-01 ZH10BL-06-01 ZH13BS-08-02 ZH13BL-08-02 57 12 3.2 24 Rc 5.8 2 38.5 57 12 3.2 24 5.8 2 38.5 57 12 3.2 24 5.8 2 38.5 57 12 3.2 24 5.8 2 38.5 60 12 3.2 26 5.8 2 39.5 60 12 3.2 26 5.8 2 39.5 75 17 4.2 28 7.5 3 50 75 17 4.2 28 7.5 3 50 Screw-in

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

N02 NPT 1/4 NPT 3/8 Note 2) N03 N04 NPT 3/8 NPT 1/2 NPT 3/8 NPT 1/2 Note 1) AS220-02 Note 2) AS320-02 597 Series AS20-D Construction AS3200-02-D Meter-out M5 type U10/32 type Meter-in M5 type U10/32 type AS3210-02-D Component Parts No.

SZ3000

(Max. 20 stations) Symbol 02 Stations 2 stations Supply/exhaust block assembly mounting position Symbol D U B M Valve stations Layout (for special specifications) wq q w e n m Pilot system Symbol Nil R ... ...

NCQ8

Nil S n 2 pcs. 1 pc. n pcs.

Free Mount Cylinder Series CU

Single Acting, Spring Return (S) Without auto switch: CU-S Single Acting, Spring Extend (T) Without auto switch: CU-T Standard Double Acting, Single Rod Without auto switch: CU-D (N) (N) (N) Model Model Model Stroke (mm) Stroke (mm) Stroke (mm) 5 10 15 20 25 30 40 50 60 70 80 90 100 5 10 15 5 10 15 CU6 CU10 CU16 CU20 CU25 CU32 CU6 CU10 CU16 CU20 CU25 CU32 CU6 CU10 CU16 CU20 CU25 CU32 0.085

Table of Contents

Symbol L Standard dew point (N) 40 Port size Symbol Bore Size Thread type 30 50 60 75 100 Rc NPT G Nil N F 02 1/4 03 3/8 04 1/2 Standard Specifications/Single Unit Type (Standard dew point: 40C) Model Standard dew point: 40C IDG30L IDG50L IDG60L IDG75L IDG100L Compressed air Fluid Range of operating conditions Standard performance conditions Inlet air pressure (MPa) 0.3 to 1.0 IDG30L

Serial Network

, (N)VZS, ISO N Positive IN313-DN1-B VQ1000 N NP420-DN1 32 in, 32 out Positive SEMI & Honeywell EX141-SSD1 16 out N Positive SQ1000/2000, SZ3000/5000 SDS (N)VFR/VFS, (N)VZS, ISO 16 out Negative IN313-PR1 N ?

Pilot Operated

f N B OUT IN 1 E C F H 2-P Port size D 2 x 8.5 a b e Conduit terminal: T d K J (Q) L A (Q) L DIN terminal: D 32 (44) N N G 1/2 G1/2 Cable 6 to 12 E R (R) (mm) Grommet Conduit DIN terminal Conduit terminal Electrical entry (DC, AC) Port size P Model N A B C D E F H J K L M Q 19.5 19.5 22.5 N 64 70.5 84.5 Q 40 40 43 N 63.5 70 84 Q 58.5 58.5 61.5 R 46.5 46.5 49.5 N 64 70.5 84.5 Q 92 92 95 R

VT317

VT/O317-G(-02) VT/O317-GS(-02) VT/O317-H(-02) VT/O317-HS(-02) VT/O317-C(-02) VT/O317-CS(-02) VT/O317-T(-02) VT/O317-TS(-02) VT/O317-TZ(-02) VT/O317-D(-02) VT/O317-DS(-02) VT/O317-DZ(-02) Coil no. PVT317-001GBPVT317-G PVT317-001GB-L06 PVT317-G-06 PVT317-001CBPVT317-C Coil assembly with terminal part no.

Membrane Air Dryer

connection $ $ $ 1/2 30 50 60 75 100 H L H L L S L S L S Nil Nil Symbol Contents Thread type Symbol Type M, V Nil Rc 3 $ $ $ $ Modular connection N F NPT G 15 RoHS Membrane Air Dryer/Unit Type Series IDG Single Unit Type Model Selection Made to Order Specific Product Precautions Unit Type How to Order M 3 IDG 02 10 Made to Order Refer to page 33 to 44 for details.

H/DL/L/LL

N-04 N-06 L-04 L-06 S-04 S-06 LL-04 LL-06 4 6 N-08 8 N-10 10 N-12 12 4 6 L-08 8 L-10 10 L-12 12 4 6 S-08 8 S-10 10 S-12 12 4 6 LL-08 8 LL-10 10 LL-12 12 Precautions Be sure to read before handling.

125

How to Order Sub-plate and Base Gasket Body size 22 42 VEX VEX VEX1 2 9 A VEX4 2A 1 A Port size Thread type Port size Thread type Symbol Port size A 1/8 B 1/4 Symbol Thread type Nil Rc F G N NPT T NPTF Symbol Port size A 1/4 B 3/8 C 1/2 Symbol Thread type Nil Rc F G N NPT T NPTF Sub-plate Base gasket VEX1 11 2 VEX4 4 Options/Part Number Description Part number VEX312-01 02 VEX322-01 02 VEX33202

Manifold Specifications

VV5ZS3 02 06 51F 1 D Thread type VK Series VZS3000 Manifold Standard Nil NPT Rc N T F VZ Plug-in type Stacking type manifold base with D-sub connector NPTF G Option Port size VF Rc 1 8 02 Rc 1 4 01 U side Connector mounting direction VFR Connector mounting position Symbol Applicable stations Embedded type One-touch fitting Applicable tubing O.D.: 6 C6 VP4 U D U side D side 2 to 8 2 to 8 9

Direct Solenoid

(OptionsT& POnly) ParlNo, Portin9 No. of Ports "xx" sP01 'r 1 %,,NPTFSidE 5 4 1 sP0112 %"NPTFSidE 42 sPot 13 /s' NPTF SidLe (5); %" NPTF Ebtlom 1 0 43 sP0114 Ya" N PTF Bottom 5 44 sP0115 3,6" N PTF Side 5 45 MBA4010-02Y." NPTF Side 2 1 2 MBA40r r -02 %" NPTF Sid; 7." Bottom 1 4 MBA4210-02 %" NPTF Side (2); 7."

2-Color Display Digital Flow Switch Series PFM

01/(N)02/F01 98 76 58 48 Width across flats 17 18 OUT1 OUT2 10.2 DC (+) DC () 43 1 51.5 (Max. 58.5) IN OUT (34.2) 13 1 IN 3 18 2 x port size Rc 1/8, 1/4 NPT 1/8, 1/4 G 1/8 2 x 3.4 28 20 8 3 x 2.6 depth 5 PFM7S-(N)01L/(N)02L/F01L 88 58 48 18 OUT2 OUT1 10.2 DC (+) DC () 13 43 1 51.5 (Max. 58.5) (34.2) 1 IN 3 18 2 x 3.4 IN OUT Width across flats 17 68 2 x port size Rc 1/8, 1/4 NPT 1/8, 1/4 G

E-P HYREG ® Series VY1

VVEX2-2-5-02 VY1200-00-G 4 pcs. VEX1-17 1 pc. Nil Rc G F N NPTF NPT In the case of VVEXB, the 2 in the first digit of the valve station number is a dummy part number.

Flow Control Equipment

Air Flow/Effective Area Model AS12l1FM AS13l1FM AS22l1FM-01 AS23l1FM-01 AS22l1FM-02 AS23l1FM-02 6, 8 Tube O.D.

3 Port Air Operated Valve

Type 41/Common exhaust VFA VFRA Series 3 5 7 Thread type VPA300 VPA500 VPA700 Nil F N T Rc G NPT NPTF VPA4 SYJA VZA Port size Stations 02 Symbol Port size Applicable series 1/4 3/8 1/2 VTA 02 03 04 VPA300 VPA500 VPA700 2 stations VGA 20 20 stations VPA VPA VPA3 VV3PA 3 3 42 04 02 Type 42/Individual exhaust Series 3 5 7 Thread type VPA300 VPA500 VPA700 Nil F N T Rc G NPT NPTF Port size

5 Port Solenoid Valve

Note 2) Number of stations, 02 to 16 Thread type Nil Rc F G T NPTF N NPT 640 A Exploded View of Manifold VQC4000 Series List of Valves, Options, and Mounting Bolts Number of options Valve and options Bolt part no. Qty (pcs.)

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

154 164 187.5 198 42 52 75 85.5 L1 L2 L3 L4 4-14-37 Base Mounted 38 Series VQZ100/200/300 Dimensions: VQZ300 VV3QZ35Stations Port size C Grommet (G) (35) (5.5) 2-4.5 mounting hole 43.5 (11) C6: One-touch fitting for 6 n-C6, C8, C10, 02 34 (7.5) (3) DIN rail clamp screw 23.5 C8: One-touch fitting for 8 C10: One-touch fitting for 10 02: Rc1/4 U side n A 2 A 2 5 Manual override 4 (L4) 3 (L3