High performance type Step Motor Controller (Servo/24 VDC)

NPN type PNP type Parallel input/output Parallel input/output Signal power supply Signal power supply Parallel IO connector Parallel IO connector 24VDC 24VDC A1 COM A1 COM A2 COM A2 COM A3 IN0 A3 IN0 A4 IN1 A4 IN1 A5 IN2 A5 IN2 A6 IN3 A6 IN3 A7 IN4 A7 IN4 A8 IN5 A8 IN5 A9 SETUP A9 SETUP A10 HOLD A10 HOLD A11 DRIVE A11 DRIVE A12 RESET A12 RESET A13 SVON A13 SVON Load B1 OUT0 Load B1 OUT0 Load

Step Motor Controller (Servo/24 VDC) Incremental / Battery-Less Absolute Encoder compatible

NPN type PNP type Parallel input/output Parallel input/output Signal power supply Signal power supply Parallel IO connector Parallel IO connector 24VDC 24VDC A1 COM A1 COM A2 COM A2 COM A3 IN0 A3 IN0 A4 IN1 A4 IN1 A5 IN2 A5 IN2 A6 IN3 A6 IN3 A7 IN4 A7 IN4 A8 IN5 A8 IN5 A9 SETUP A9 SETUP A10 HOLD A10 HOLD A11 DRIVE A11 DRIVE A12 RESET A12 RESET A13 SVON A13 SVON Load B1 OUT0 Load B1 OUT0

Air Slide Table

Load Factor of Dynamic Moment 3-3 Pitching Examine Mep. (30 + 10.5) Mep = 1/3 x 16.8 x 9.8 x = 2.2 1000 We = 4/100 x 1 x 420 = 16.8 A2 = 10.5 Meap = 1 x 0.7 x 18 = 12.6 K = 1 = 0.7 Mpmax = 18 3 = 2.2/12.6 = 0.17 (Ln + An) Me = 1/3 We x 9.8 1000 Collision equivalent to impact We = W V : Bumper coefficient Rubber stopper without adjuster = 4/100 Find the dynamic moment Me (Nm).

Air Slide Table Series MXJ

A1 Mp W L1 A1 Mr Static moment Dynamic moment Graph (1) Load Mass: W W W MXJ4 A3 L3 L2 A2 0.10 L3 A3 Rubber stopper Mr Load mass W kg Mp 0.08 My Metal stopper W 0.06 W W 0.04 Mey Mep We 0.02 We L3 L2 A2 0.00 Collision speed V mm/s (Average speed x 1.4) 0 200 100 300 400 500 600 700 A3 MXJ6 Note) Static moment: Moment generated by gravity Dynamic moment: Moment generated by impact when colliding

F/ISE

22 L For positive pressure ZSE60 A2 M F L 22 For compound pressure Piping specifications Option A2 B2 URJ 1/4, Piping in the backward direction None Nil TSJ 1/4, Piping in the backward direction Bracket A URJ 1/4 and TSJ 1/4 are special fittings for semiconductor manufacturing equipment.

MXQ

Find the load factor 2 of the static moment. 3-3 Load Factor of Dynamic Moment Pitching Examine Mep. (30 + 10.5) Mep = 1/3 x 16.8 x 9.8 x = 2.2 1000 We = 4/100 x 10 x 420 = 16.8 A2 = 10.5 Meap = 1 x 0.7 x 18 = 12.6 K = 1 = 0.7 Mpmax = 18 3 = 2.2/12.6 = 0.17 (Ln + An) Me = 1/3 We x 9.8 1000 Collision equivalent to impact We = W V : Bumper coefficient Rubber stopper without adjuster =

90

(K type) V Single unit: ZK2FManifold: ZZK2-A2 Note 1) For silencer common exhaust type, individual exhaust port is provided to each station. Note 2) Silencer common exhaust and individual port exhaust cannot be mixed in the same manifold.

Step Motor Controller (Servo / 24 VDC)

NPN type PNP type I/O signal power I/O signal power A1 COM CN5 24 VDC A1 COM CN5 24 VDC A2 COM A2 COM A3 IN0 A3 IN0 A4 IN1 A4 IN1 A5 IN2 A5 IN2 A6 IN3 A6 IN3 A7 IN4 A7 IN4 A8 IN5 A8 IN5 A9 SETUP A9 SETUP A10 HOLD A10 HOLD A11 DRIVE A11 DRIVE A12 RESET A12 RESET A13 SVON A13 SVON Load B1 OUT0 Load B1 OUT0 B2 OUT1 Load B2 OUT1 Load Load B3 OUT2 B3 OUT2 Load Load B4 OUT3 Load B4 OUT3 B5 OUT4

Compact Manifold Regulator Series ARM5

1361213613VEF VEP Note 1) In the case of A1 and B1, a pressure gauge or a plug is mounted on the body side, while in case of A2 and B2, on the manifold side.

LEC-OM069xx

Battery (Cell) : LEC-JZ-CVBAT Lithium content : 0.31(g) 11 Harmonized Standards European Directives Model European Directives Harmonized Standards Machinery Directive 2006/42/EC EN ISO13849-1: 2008 EN 954-1 LECY-V (SGDV) EN 55011 /A2 group 1, class A EN 61000-6-2 EN 61800-3 DRIVER EMC Directive 2004/108/EC Low Voltage Directive 2006/95/EC EN 50178 EN 61800-5-1 EN 55011 /A2 group 1, class

LEC-OM071xx

Battery (Cell) : LEC-JZ-CVBAT Lithium content : 0.31(g) 11 Harmonized Standards European Directives Model European Directives Harmonized Standards Machinery Directive 2006/42/EC EN ISO13849-1: 2008 EN 954-1 LECY-V (SGDV) EN 55011 /A2 group 1, class A EN 61000-6-2 EN 61800-3 DRIVER EMC Directive 2004/108/EC Low Voltage Directive 2006/95/EC EN 50178 EN 61800-5-1 EN 55011 /A2 group 1, class

OMR0031

NPN type -PNP type Input signal power Input signal power CN5 CN5 supply supply 24 VDC 24 VDC A1 COM A1 COM A2 IN0 A2 IN0 A3 IN1 A3 IN1 A4 IN2 A4 IN2 The power supply can be either polarity. The power supply can be either polarity.

OMR0032

Wire the product while referring to the wiring diagram below. (1) NPN type (2)PNP type Input signal power Input signal power CN5 CN5 supply supply 24 VDC 24 VDC A1 COM A1 COM A2 IN0 A2 IN0 A3 IN1 A3 IN1 A4 IN2 A4 IN2 The power supply can be either polarity. The power supply can be either polarity.

High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

22 L For positive pressure ZSE60 A2 M F L 22 For compound pressure Piping specifications Option A2 B2 URJ 1/4, Piping in the backward direction Nil None TSJ 1/4, Piping in the backward direction Bracket A URJ 1/4 and TSJ 1/4 are special fittings for semiconductor manufacturing equipment.

Servo Motor Controller (24 VDC)

Please wire referring to the following diagram * NPN type * PNP type A1 COM CN5 I/O signal power 24VDC A1 COM CN5 I/O signal power 24VDC A2 COM A2 COM A3 IN0 A3 IN0 A4 IN1 A4 IN1 A5 IN2 A5 IN2 A6 IN3 A6 IN3 A7 IN4 A7 IN4 A8 IN5 A8 IN5 A9 SETUP A9 SETUP A10 HOLD A10 HOLD A11 DRIVE A11 DRIVE A12 RESET A12 RESET A13 SVON A13 SVON Load B1 OUT0 Load B1 OUT0 B2 OUT1 Load B2 OUT1 Load B3 OUT2 Load

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Parallel I/O Connector: CN5 Wiring diagram LEC6N(NPN) LEC6P(PNP) Power supply 24 VDC for I/O signal CN5 Power supply 24 VDC for I/O signal CN5 A1 A1 COM+ COM+ COM COM A2 A2 A3 A3 IN0 IN0 A4 A4 IN1 IN1 A5 A5 IN2 IN2 A6 A6 IN3 IN3 A7 A7 IN4 IN4 A8 A8 IN5 IN5 A9 A9 SETUP SETUP A10 A10 HOLD HOLD A11 A11 DRIVE DRIVE A12 A12 RESET RESET A13 A13 SVON SVON Load Load B1 B1 OUT0 OUT0 Load Load B2 B2

One-touch Fittings

D2 D1 Connection thread H Release button dimensions X Y Male Branch Tee: KQ2T-G (Sealant) Connection thread R Model H (Width across flats) Effective area [mm2] Min. port size Release button dimensions D2 L1 L2 A2 M Applicable tubing O.D.

Thermo-con/Rack Mount Type

A C B Applicable model Dimensions [mm] A B C HECR002-A5-E 14 230 35 HECR004-A5-E 45 HECR006-A5-E HECR008-A5-E 44 HECR010-A2-E HECR008-W5-E 46 HECR012-W2-E 310 13 400 15 Option symbol F With Flow Switch F HECR Applicable model HECR002-A5-F HECR004-A5-F HECR006-A5-F HECR008-A5-F HECR010-A2-F HECR008-W5-F HECR012-W2-F With flow switch This is an ON/OFF switch detecting low levels of the circulating

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

L : Stroke [mm] V : Speed [mm/s] a1: Acceleration [mm/s2] a2: Deceleration [mm/s2] T = T1 + T2 + T3 + T4 [s] Calculation example) T1 to T4 can be calculated as follows. T1 and T3 can be obtained by the following equation.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Combination 4 Types Combination of Applicable Chart C59 -X6 -X16 -X16 -X16 C62 C8 C10 -X6 C30 -X10 C61 A2 A24 A24 C11 C60 C32 A1 A2 A13 A14 A15 A14 Chart 1, 2, 7 Chart 1, 2, 3, 8 Chart 1, 3, 9 Chart 2, 3, 7, 8 Chart 2, 3, 8, 9 Chart 2, 7 Combination is available only when all the conditions are fulfilled in above combination chart.