7.5

4 elbow fitting assembly L6: 6 elbow fitting assembly (SJ3000 only) (Inch size) LN1: 1/8" elbow fitting assembly LN3: 5/32" elbow fitting assembly LN7: 1/4" elbow fitting assembly (SJ3000 only) M: Individual wiring, With lead wire Length 300 mm With switch Manual override Nil: Non-locking push type With linkage printed circuit board Elbow fitting assembly (Downward entry) (Metric size) B2

Nozzle Type Ionizer

Nil None B1 L-bracket IZN10-B1 B2 Pivoting bracket IZN10-B2 B3 DIN rail mounting bracket IZN10-B3 Symbol Type 01 Energy saving static neutralization nozzle 02 High flow rate nozzle 11 Female threads for piping*1 *1 Refer to the cautions when using the female threads for piping shown below. * Refer to page 12. Brackets are the same as those for the current model (IZN10).

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

(Refer to p. 24.) * Not applicable for piping specifications A2(L) and B2(L). * There are cases in which this product will not effectively suppress of the effects of water hammer. It is advised that other measures be taken in such cases.

LEF-OM007xx

200 to 230VAC B2 B1,B2 B1,B2 Without lock Nil Without lock Nil 400 400 40 40 S8 S8 Cable length With lock B With lock B Without cable Without cable Nil Nil Ball screw lead Stroke 2m 2 2m 2 Size Size 100mm 100 100mm 100 5m 5 5m 5 40 32 25 40 32 25 10m 10m A A 1000 1000mm 1000mm 1000 12mm 12mm 16mm 16mm 20mm 20mm A A The length of motor, encoder and lock cables are same.

High performance type Step Motor Controller (Servo/24 VDC)

B2 OUT1 B3 OUT2 Caution B4 OUT3 B5 OUT4 When RESET is turned ON, these terminals are turned OFF. During the alarm, these terminals output the alarm group. B6 OUT5 B7 BUSY This terminal is ON during the movement of the electric actuator. (During the positioning operation, etc.).

LECA6_C

OUT1 B2 OUT1 B3 OUT2 B3 OUT2 B4 OUT3 B4 OUT3 B5 OUT4 B5 OUT4 B6 OUT5 B6 OUT5 B7 BUSY B7 BUSY B8 AREA B8 AREA B9 SETON B9 SETON B10 INP B10 INP B11 SVRE B11 SVRE B12 ESTOP B12 ESTOP B13 ALARM B13 ALARM CN1 DC24V CN5 DC24V 27 - 7

LECP6_C

DRIVE ON B1 OUT0 B2 OUT1 B3 OUT2 RESET ON OFF ()OFF B4 OUT3 B5 OUT4 B6 OUT5 B7 BUSY ON () BUSY OFF BUSY 50ms ON B8 AREA 1~2ON B9 SETON SETON()ON OFF B10 INP INP ON (BUSY OFF) INP ON INP ON INP ON ()INP ON (100 80 401 () INP [ON] 100 80 1 40 SV1.00 25 - B10 INP <> SV1.00 ,INP OFF 100 80 401 () INP [OFF] INP [ON] 100 80 1 40 EMGRESET (BUSY OFF) INP ON B11 SVRE

Step Motor Controller (Servo/24 VDC) Incremental / Battery-Less Absolute Encoder compatible

B2 OUT1 B3 OUT2 Caution B4 OUT3 When RESET is turned ON, these terminals are turned OFF. During the alarm, these terminals output the alarm group. B5 OUT4 B6 OUT5 B7 BUSY This terminal is ON during the movement of the electric actuator. (During the positioning operation, etc.).

3

Thin shaft Position of rotational axis: Perpendicular to the shaft, and attached near one end CKQ = m1 + m2 a12 3 a22 = m1 + m2 4a12 + b2 4a22 + b2 3 12 12 2. Thin shaft Position of rotational axis: Perpendicular to the shaft, and attached at the center of gravity 5.

CG5-S

WH (E1) D B2 BZ MM AL A K Plug bolt (4 pcs. included) KA 8-J (F1) C 0.1 S + Stroke ZZ + Stroke H NA (mm) Stroke range A Bore size (mm) NA AL B1 B2 BM BZ C D E1 F1 GA GB H H1 I J K KA M MM P S 20 29 to 350 18 15.5 13 7 M4 x 0.7 9 16.5 8 15 3 18 12 35 5 31 M4 x 0.7 depth 7 5 6 3 M8 x 1.25 M5 x 0.8 83 25 29 to 400 22 19.5 17 8 M5 x 0.8 9.5 18.5 10 17 3 18 12 40 6 33 M5 x 0.8 depth 8 5.5 8 3.5

CY1F

115.5 D-F9, D-F9V (mm) Mounting patternq Bore size Mounting patternq A1 Mounting patternw A2 Mounting patterne A3 B1 A1 Operating range B1 B2 B3 (mm) 10 15 25 5.5 34 64 22 76 34 76 5 35 70 23 82 35 82 5 40.5 99.5 28.5 111.5 40.5 111.5 Mounting patternw B2 A2 D-F9W, D-F9WV (mm) Bore size Mounting patternq A1 Mounting patternw A2 Mounting patterne A3 Operating range B1 B2 B3 (mm) 10 15 25

Table of Contents

A part z1 m1 = 20 x 3 x 4 x 2.7 x 10-6 = 6.48 x 10-4 (kg) Weight calculation m1 = a x b x c x Relative density IZ1 Inertial moment around Z1 axis IZ1 = {m1 (a2 + b2) / 12} x 10-6 = {6.48 x 10-4 x (202 + 32)/12} x 10-6 = 2.21 x 10-8 (kg.m2) = 2.21 x 10-8 + 6.48 x 10-4 x 16.42 x 10-6 = 0.20 x 10-6 (kg.m2) IA Inertial moment around Z axis IA =IZ1 + m1r12 x 10-6 z f2 z2 B part r2 = 23.5(mm)

Rotary Clamp Cylinders

Thin rectangular plate (Rectangular parallelopiped) Position of rotational axis: Vertical to the plate and through the end = m1 + m2 a12 3 a22 = m1 + m2 4a12 + b2 4a22 + b2 3 12 12 2. Thin shaft Position of rotational axis: Perpendicular to the shaft through the center of gravity 5.

Pin Cylinders Series CJP2/CJP

to 16 Z + Stroke S + Stroke H A' F GB GA 2 x P A F' Mounting nut Width across flats B1 A' Rod end nut Width across flats B2 30 D-1 D E J C MM Without rod end thread NN W B (mm) Symbol A A' B B1 B2 C D E F F' GA GB H J MM NN P S W Z Bore size 6 10 16 7 9 14 14 5.5 2 3 16.5 8 6.5 5.5 6.5 17 6 M3 x 0.5 M10 x 1.0 M3 x 0.5 21 3 38 10 12 15 17 7 2.5 4 19 8 6.5 6 7 20 7 M4 x 0.7 M12 x 1.0 M3 x

Magnetically Coupled Rodless Cylinder

115.5 D-F9n, D-F9nV (mm) Mounting patternq Bore size Mounting patternq A1 Mounting patternw A2 Mounting patterne A3 B1 A1 Operating range B1 B2 B3 (mm) 10 15 25 5.5 34 64 22 76 34 76 5 35 70 23 82 35 82 5 40.5 99.5 28.5 111.5 40.5 111.5 Mounting patternw B2 A2 D-F9nW, D-F9nWV (mm) Bore size Mounting patternq A1 Mounting patternw A2 Mounting patterne A3 Operating range B1 B2 B3 (mm) 10

F/ISE

Series ZSE60F/ISE60 Confirmation of atmospheric pressure of load lock Special fitting types are used in semiconductor production equipment (metal gasket seal fittings) Leak rate: 1 x 10 -10Pa. m3/s ZSE/ ISE60(F)-A2 ZSE/ ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (metal gasket seal fittings) Variations

ZSE F/ISE

ZSM PF2 IF Series ZSE60F/ISE60 Confirmation of atmospheric pressure of load lock Data Special fitting types are used in semiconductor production equipment (Metal gasket seal fittings) Leak rate: 1 x 10 10 Pa.m3/s ZSE/ISE60(F)-A2 ZSE/ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (Metal gasket seal fittings

Rotary Table/

plate) = m 2 r2 = m 5 2r2 = m 4 r2 = m 12 a2 + b2 !

17

G Za2 D2 Ea Ea Eb Eb 4-MM E1 E1 E2 E2 C2 P Q2 Section Za2 detail (Adjustable range) B2 F2 D G Section Z detail (Adjustable range) F B3 B2 B1 C1 Zb2 JJ B F Z H K2 Counter bore depth H H L Thread length A2 Section Za2 detail (Adjustable range) A A 2 x 2 x LD J C Mounting direction (1) Mounting direction (2) C2 (mm) (mm) Adjustable range Applicable cylinder MY1B25 MY1B32 MY1B40 Mounting direction

Step Motor Controller (Servo / 24 VDC)

NPN type PNP type I/O signal power I/O signal power A1 COM CN5 24 VDC A1 COM CN5 24 VDC A2 COM A2 COM A3 IN0 A3 IN0 A4 IN1 A4 IN1 A5 IN2 A5 IN2 A6 IN3 A6 IN3 A7 IN4 A7 IN4 A8 IN5 A8 IN5 A9 SETUP A9 SETUP A10 HOLD A10 HOLD A11 DRIVE A11 DRIVE A12 RESET A12 RESET A13 SVON A13 SVON Load B1 OUT0 Load B1 OUT0 B2 OUT1 Load B2 OUT1 Load Load B3 OUT2 B3 OUT2 Load Load B4 OUT3 Load B4 OUT3 B5 OUT4