CG5-S

40 44 to 800 M14 x 1.5 30 27 19 10 M6 x 1.0 12 26 16 23 3 19 13 50 8 47 M6 x 1.0 depth 12 6 14 4 50 55 to 1200 M18 x 1.5 35 32 27 13 M8 x 1.25 15.5 32 20 28 3 21 14 58 11 58 M8 x 1.25 depth 16 7 18 5.5 63 69 to 1200 M18 x 1.5 35 32 27 17 M10 x 1.5 19 38 20 28 3 21 14 58 11 72 M10 x 1.5 depth 16 7 18 7 80 80 to 1400 M22 x 1.5 40 37 32 17 M10 x 1.5 19 50 25 33 3 28 20 71 13 89 M10 x 1.5 depth

LEC-OM07605CN

B2 B1B2(VAR) (2) (3) (a) R[]:() L[H]:() Vb[V]: DC24V U Vs[V] N () 14.1.2 14 2 14.

Clean Regulator/Fluororesin Type

Model SRF10S-1S07 SRF10S-1S0711 SRF10S-1S11 SRF10S-1S1107 SRF10S-2S07 SRF10S-2S0711 SRF10S-2S11 SRF10S-2S1107 31 48 31 48 OUT IN 28 51 54 26 28 51 28 51 31 48 28 52 28 52 27 55 5.5 27 55 A1 A2 27 55 28 52 B1 B2 Tube extensions 23 Pilot port Rc, NPT 1/8 R 12 32 54 26 48 40 1 2 SMC 4 x 3.5 (Mounting hole) 23 5/32" OUT IN 1/4" 5.5 32 30 30 884 Clean Regulator/Fluororesin Type SRF Series

Hygienic Design Cylinder Series HY

Note 2) Contact SMC for HYQ 20, 25. 887 Options Rod End Nut Plug Bolt Series HYQ, HYC Series HYC Series HYB, HYG d M BM BM M C B2 BZ BZ B2 B H Material: Stainless steel (mm) Material: Stainless steel (mm) Material: Stainless steel (mm) HYB d C B H 20 25 32 40 50, 63 B2 BM 32, 40 50, 63 10 12 M BZ 22 24 6 8 B2 M BZ BM 20 25 32 40 50 63 80 100 Applicable bore size Part no.

SV

With External Pilot Specifications (Pitch) 24 P = 24 48.6 11 25 11.8 20 14.5 13.7 E 3/5 E 3/5 E 3 E 3 4 A A 4 A 4 A 4 A 4 A 4 A 4 A 4 4 A A 4 35.8 40.4 35 58.3 63.9 74.8 B 2 B 2 B 2 B 2 B 2 P 1 P 1 B 2 B 2 B 2 B 2 P 1 P 1 B 2 C2 C2 One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.: 12 3/8" One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 8, 5/16" 10, 3/8" 12 X PE X PE

Fieldbus System

Specify on the manifold specification sheet if plugs are required on the A and B port on base side. 5 4 2 3 B 12 B 12 B 12 B 12 B 12 PCI BUS IN BUS OUT 7 8 1 2 3 4 5 Valve stations I/O Unit stations 1 2 Protective class class # (Mark: ) 28 Series SY3000/5000/7000 Refer to the SY3000/5000/7000 series catalog (CAT.ES11-103) for valve specifications.

CXS

-2 8-28-3 3 Series CXSJ Specific Product Precautions Be sure to read before handling.

CXS

-2 8-28-3 3 Series CXSJ Specific Product Precautions Be sure to read before handling.

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

With external pilot specifications (Pitch) P = 10.5 13.5 46.9 18.3 11.8 14.1 8.4 8.6 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 10 19.7 24.6 23 5 3 E 5 3 E 3 5 E 3 5 E 43.2 43 56.5 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 C2 C2 1 P 1 P 1 P 1 P One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.: 8 5/16" PE PE X X C1 C1 2 x M12 One-touch fitting [PE: Pilot EXH port] Applicable tubing

Rotary Table/

plate) = m 2 r2 = m 5 2r2 = m 4 r2 = m 12 a2 + b2 !

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

= m1 CRBU2 12 4a22 + b2 + m2 CRB1 7.

IZx-OMT0049

Tightening Torque: 1.30 to 1.50 Nm Addition of module Fix with M4 Fix with M4 screws screws Fix with M4 screws (Included) (Included) (Included) IZT40-B1 IZT40-B2 IZT40-B2 DIN rail mounting bracket High voltage power High voltage power for controller supply module supply module DIN rail mounting bracket DIN rail mounting bracket for IZTP40/IZTP41(-L) for IZTP40/IZTP41(-L) c.

High performance type Step Motor Controller (Servo/24 VDC)

Parallel l/O Connector 28 6.1 Parallel I/O specifications 28 6.2 Parallel I/O type (NPN/ PNP type) 28 (1) Parallel I/O input circuit (same for both NPN and PNP type) 28 (2) Parallel I/O output circuit 28 6.3 The parallel I/O signal is detailed 29 6.4 Parallel I/O Wiring Example 36 7. Setting Data Entry 37 7.1 Step data 37 7.2 Basic parameter 40 7.3 Return to origin parameter 43 8.

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

Lead wire with connector 1.5 45 44 1.5 F02 C01 25 8.5 25 8.5 M5 x 0.8 Thread depth 5 G1/4 Rc1/8 17 Piping port Rc1/8 Piping port G1/4 Gasket 1.5 52.7 46.7 1.5 A2 B2 25 8.5 25 8.5 URJ1/4 TSJ1/4 Piping port URJ1/4 Piping port TSJ1/4 28 ZSE20C(F)/ISE20C(H) Series Dimensions ZSE20C(F) ISE20C(H) Piping direction Piping specification 25 41.7 1.5 2 x 2.6 Depth 12 or less 12 11 4.5 02L 30 4.5 R1/

Compact Type

D-F9BAL Bore size (mm) D 18.5 16 -9 -6 -4 -3.5 B 2 9 12 14 14.5 C 0.5 10.5 16.5 24 25 34 A 18.5 28.5 34.5 42 43 52 6 10 15 20 25 32 A C Electrical entry direction: Inward Electrical entry direction: Outward Auto Switch Mounting Dimensions (mm) CXSJ6, 10 C3 Bore size 6, 10 0.4 0.4 7.2 4.8 7.2 4.8 B1 Symbol Auto switch model C2 D2 D1 A1 B1 C1 C2, C3 D1 D2 D-A9 D-F9, D-F9 W,D-M9 C1 A1 D-A9V

Compact Type Dual-Rod Cylinder Series CXSJ

D-F9BAL Bore size (mm) D 18.5 16 -9 -6 -4 -3.5 B 2 9 12 14 14.5 C 0.5 10.5 16.5 24 25 34 A 18.5 28.5 34.5 42 43 52 6 10 15 20 25 32 A C Electrical entry direction: Inward Electrical entry direction: Outward Auto Switch Mounting Dimensions (mm) CXSJ6, 10 C3 Bore size 6, 10 0.4 0.4 7.2 4.8 7.2 4.8 B1 Symbol Auto switch model C2 D2 D1 A1 B1 C1 C2, C3 D1 D2 D-A9 D-F9, D-F9 W,D-M9 C1 A1 D-A9V

LECA6_C

PLC (PLC) 15ms30ms /P.36 8.4 () () (LED()) /P.12 3.2 /P.28 7. /P.28 7. /P.28 7. /P.11 3. (CN1:EMG ) /P.11 3. 65 - No.LEC-OM00901 2009 6 No.LEC-OM00902 2010 4 No.LEC-OM00903 2011 7 No.LEC-OM00904 2012 4 UL 900~1700~ 2012 SMC Corporation All Rights Reserved 66 -

LECP6_C

PLC (PLC) 15ms30ms /P.36 8.4 () () (LED()) /P.12 3.2 /P.28 7. /P.28 7. /P.28 7. /P.11 3.

Step Motor Controller (Servo / 24 VDC)

CN5: Parallel l/O Connector . 28 6.1 Parallel I/O specifications . 28 6.2 Parallel I/O type (NPN/ PNP type) . 28 (1) Parallel I/O input circuit (same for both NPN and PNP type) . 28 (2) Parallel I/O output circuit . 28 6.3 The parallel I/O signal is detailed . 29 6.4 Parallel I/O Wiring Example . 34 7.

Servo Motor Controller (24 VDC)

Setting Data Entry.28 7.1 Step data.28 7.2 Basic parameter.31 7.3 Return to origin parameter .33 8.