HRX-OM-X027

Table 3-4 Piping port size Name Port size*1 Recommended Recommended proof tightening torque pressure for piping Circulating fluid supply Rc1/2 28 to 30Nm 0.8MPa more Circulating fluid return Rc1/2 28 to 30Nm 0.8MPa more 1.0MPa more Automatic water-fill port *2 Rc3/8 22 to 24Nm (Automatic water-fill pressure 0.2 to 0.5MPa) Overflow port *2 Rc3/4 28 to 30Nm Inside diameter 19mm more of piping

HRX-OM-O021

Piping port size Table 3-5 Piping port size Name Port size1 Recommended Recommended proof tightening torque pressure for piping Circulating fluid supply Rc1/2 28 to 30Nm 0.8MPa more Circulating fluid return Rc1/2 28 to 30Nm 0.8MPa more Faiclity water inlet3 Rc1/2 28 to 30Nm 1.0MPa more (Facility water pressure 0.3 to 0.5 MPa) Faiclity water outlet3 Rc1/2 28 to 30Nm 1.0MPa more Automatic water-fill

OMU0023

Instruction to perform the Return to Origin operation 4 01 05 001A FF00 01 05 001A FF00 sent. 5 01 02 004B 0001 01 02 01 Acquires the INP signal information.

C95Series

'H" 'e o :" ;iC:t1 32 164 173.5 :,. 40 ' 184 196 " 50"', 202 21' 9,5 -500 22 12 10'1'" 26 12,%~ -500 12 15 25 28 :, -600 27 12 15 32 ' 21~ 63' 222 238 -600 32 16 16 1~ 20 40 x 80 266 -750 16 1 61~ 36 20 50 250 100. 01~ 290 41 -750 20 25 60 270 -ZZ+Srroke Double rear clevis / (D) U l RR Z+Stroke ZZ...

5 Port Solenoid Valve SY Series

SY3120-C6 SY3140-01 T0604 x 1 m T0806 x 1 m AS3001F-06 T0604 x 1 m T0806 x 1 m AS3001F-08 AS3001F-06 SY5120-01 SY5140-02 AS3001F-08 AN101-01 AN101-01 T1075 x 1 m T0604 x 1 m T0604 x 1 m T1209 x 1 m T1075 x 1 m AS4001F-10 SY7120-02 SY7140-03 AS3001F-06 AS4001F-10 AS3001F-06 AN110-01 AN200-02 T0604 x 1 m T1075 x 1 m T1209 x 1 m T0604 x 1 m T1075 x 1 m T1209 x 1 m AS3001F-06 AS4001F-10 AS4001F

FILTER REGULATOR

G46-10-01 Rc G36-4-01 G46-4-01 1 0.2MPa setting G36-10-N01 G46-10-N01 G36-4-N01 G46-4-N01 1 0.2MPa setting Round type pressure gauge NPT G36-P10-N01-X30 G46-P10-N01-X30 Z Imperial unitMPa, psi 0.2MPa setting 1Z G36-P4-N01-X30 G46-P4-N01-X30 Imperial unitMPa, psi G36-10-01 G46-10-01 G G36-4-01 G46-4-01 1 0.2MPa setting G36-10-01-L G46-10-01-L Rc G36-4-01-L G46-4-01-L 1 0.2MPa setting

SYJA3000

Base mounted (With sub-plate) 8.5 (0.47) 9 (0.5) [6.5 (0.36)] 3 position closed center SYJA7320-01 1/8 M5 X 0.8 3 position exhaust center SYJA7420-01 120 PA, B: 13.5 (0.75) [7 (0.39)] A, BR1, R2: 7 (0.39) 3 position pressure center SYJA7520-01 Base mounted 01 02 01 02 01 02 01 02 12.6 (0.7) 170 (90) 2 position single SYJA714012.6 (0.7) 190 (110) 2 position double SYJA72408.5 (0.47) 3 position

Sensor Range: 0 [For Positive Pressure (0~1MPa)], Port Size: N02 [NPT 1/4 (w/M5 Female Thread)], Output Specification: 28 [Current Output (4~20mA) Type]

Sensor Range: 0 [For Positive Pressure (0~1MPa)], Port Size: B2 (TSJ 1/4), Output Specification: 28 [Current Output (4~20mA) Type]

Sensor Range: 0 [For Positive Pressure (0~1MPa)], Port Size: N01 [NPT 1/8 (w/M5 Female Thread)], Output Specification: 28 [Current Output (4~20mA) Type]

Sensor Range: 0 [For Positive Pressure (0~1MPa)], Port Size: A2 (URJ 1/4), Output Specification: 28 [Current Output (4~20mA) Type]

Sensor Range: 0 [For Positive Pressure (0~1MPa)], Port Size: 02 [R1/4 (M5 Female Thread)], Output Specification: 28 [Current Output (4~20mA) Type]

Sensor Range: 0 [For Positive Pressure (0~1MPa)], Port Size: C01 (Rc 1/8), Output Specification: 28 [Current Output (4~20mA) Type]

Sensor Range: 0 [For Positive Pressure (0~1MPa)], Port Size: N02 [NPT 1/4 (w/M5 Female Thread)], Output Specification: 28 [Current Output (4~20mA) Type], Option: -

Sensor Range: 0 [For Positive Pressure (0~1MPa)], Port Size: TSJ 1/4, Output Specification: 28 [Current Output (4~20mA) Type], Option: -

Sensor Range: 0 [For Positive Pressure (0~1MPa)], Port Size: N01 [NPT 1/8 (w/M5 Female Thread)], Output Specification: 28 [Current Output (4~20mA) Type], Option: -

Sensor Range: 0 [For Positive Pressure (0~1MPa)], Port Size: URJ 1/4, Output Specification: 28 [Current Output (4~20mA) Type], Option: -

Sensor Range: 0 [For Positive Pressure (0~1MPa)], Port Size: Rc 1/8, Output Specification: 28 [Current Output (4~20mA) Type], Option: -

Type: Pressure Sensor, Fluid Type: Air / Water / Lubricant / Nitrogen Gas / Carbonic Acid Gas / Argon, Sensor, Monitor Structure: [Separate Type Connector Connection] Separated sensor, Output Method: Analog, Analog Output Specification: Current, Pipe Port Type: [Threads] Male thread, Plumbing Thread Type: [Rc (R)] R, Plumbing Thread Nominal: [1/4] 1/4, Fluid Characteristics: Noncorrosive,

2/3 Port Valve for Various

Refer to pages 17-3-28 and 17-3-29 for specifications and models.