Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

Direct Solenoid

= Mounted on Stacking lranilold Block 3/8' NPTF Sid Ports (il) 23 = Mounted on Stacking Manifold Block 3/8" NPTF Sld Ports (4), Bottom Pods (a 28= Mounted on Stacklng Manifold Block 3r8" NPTF Side Ports (6), Bottom Ports (5) 4t = Mounted on Slacklng Manifotd Block l/2" NPTF Side Ports (4) ilvs/o34 01 = Mountad on Individual Subplat . 3/8' NPTF Slde Porrs (5) 02 = Mountad on lMi\ridual Subplate

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

A A1 MM U1 L1 RR1 A1 L1 E1 MM RR1 U1 0.4 0.2 + 0.2 + 0 0.2 0.4 0.2 0.4 10 12 16 20 +0.002 0 5 6.4 8 10 0.2 0.4 0.1 0.3 0.2 0.4 0.2 0.4 +0.002 0 5 6.5 8 10 #8-32UNC 10 12 16 20 12 16 20 25 10 12 16 20 14.6 16.6 21 25.6 RCS-01 RCS-015 RCS-02 RCS-025 RCD-01 RCD-015 RCD-02 RCD-025 21.5 32 34 41 6 6 6 8 16 25 25 30 #8-32UNC #8-32UNC #10-32UNF 1/4-28UNF 6.3 12 10.3 18 7 14 11.5 14

PF2A/PF2W

PF2A703H--28 PF2A703H--68 PF2A706H--28 PF2A706H--68 PF2A703H--29 PF2A703H--69 PF2A706H--29 PF2A706H--69 3000 150 3000 150 6000 300 6000 300 PF2A712H--28 PF2A712H--68 PF2A712H--29 PF2A712H--69 12000 600 12000 600 16-11-16 13 For details about certified products conforming to international standards, visit us at www.smcworld.com.

VCW

Proper tightening torque Nm Tightening torque for piping Connection threads 7 to 9 Rc(PT) 1/8 12 to 14 Rc(PT) 1/4 22 to 24 Rc(PT) 3/8 28 to 30 Rc(PT) 1/2 28 to 30 Rc(PT) 3/4 5.

Ionizer Nozzle type IZN10 Series IZS

Maintenance detection signal ON OFF Output Requirement for maintenance detected ON OFF Input External switch signal 1, 2 455 IZN10 Series Dimensions 06 07 06 07 Energy saving static neutralization nozzle/IZN10-01 High flow rate nozzle/IZN10-02 20 Note 1) (110) 16 100 5 5 46 A 3.4 18.5 11 6 5 6 A 8 7 (Tap for ground wiring) M3 x 0.5 depth 4 40 25 12 A 93.6 A-A (mm) A Model 01 02 01 02 IZN1006

Sensor Range: 0 [For Positive Pressure (0~1MPa)], Port Size: N02 [NPT 1/4 (w/M5 Female Thread)], Output Specification: 28 [Current Output (4~20mA) Type]

Sensor Range: 0 [For Positive Pressure (0~1MPa)], Port Size: B2 (TSJ 1/4), Output Specification: 28 [Current Output (4~20mA) Type]

Sensor Range: 0 [For Positive Pressure (0~1MPa)], Port Size: N01 [NPT 1/8 (w/M5 Female Thread)], Output Specification: 28 [Current Output (4~20mA) Type]

Sensor Range: 0 [For Positive Pressure (0~1MPa)], Port Size: A2 (URJ 1/4), Output Specification: 28 [Current Output (4~20mA) Type]

Sensor Range: 0 [For Positive Pressure (0~1MPa)], Port Size: 02 [R1/4 (M5 Female Thread)], Output Specification: 28 [Current Output (4~20mA) Type]

Sensor Range: 0 [For Positive Pressure (0~1MPa)], Port Size: C01 (Rc 1/8), Output Specification: 28 [Current Output (4~20mA) Type]

Type: Pressure Sensor, Fluid Type: Air / Water / Lubricant / Nitrogen Gas / Carbonic Acid Gas / Argon, Sensor, Monitor Structure: [Separate Type Connector Connection] Separated sensor, Output Method: Analog, Analog Output Specification: Current, Pipe Port Type: [Threads] Male thread, Plumbing Thread Type: [Rc (R)] R, Plumbing Thread Nominal: [1/4] 1/4, Fluid Characteristics: Noncorrosive,

Sensor Range: 0 [For Positive Pressure (0~1MPa)], Port Size: N02 [NPT 1/4 (w/M5 Female Thread)], Output Specification: 28 [Current Output (4~20mA) Type], Option: -

Sensor Range: 0 [For Positive Pressure (0~1MPa)], Port Size: TSJ 1/4, Output Specification: 28 [Current Output (4~20mA) Type], Option: -

Sensor Range: 0 [For Positive Pressure (0~1MPa)], Port Size: N01 [NPT 1/8 (w/M5 Female Thread)], Output Specification: 28 [Current Output (4~20mA) Type], Option: -

Sensor Range: 0 [For Positive Pressure (0~1MPa)], Port Size: URJ 1/4, Output Specification: 28 [Current Output (4~20mA) Type], Option: -

Sensor Range: 0 [For Positive Pressure (0~1MPa)], Port Size: Rc 1/8, Output Specification: 28 [Current Output (4~20mA) Type], Option: -

CG1

TU TV TW TX TY TZ 8d9 10d9 12d9 14d9 16d9 18d9 18d9 22d9 18.1 20.7 23.6 27.3 29.7 34.3 35.8 39.8 49.4 58.4 72.4 90.4 42 42 48 56 64 74 72 93 16 20 22 30 36 46 85 100 28 28 28 30 36 46 45 60 38.3 42.1 53.8 64.6 79.2 97.2 110 130 CG-020-24A CG-025-24A CG-032-24A CG-040-24A CG-050-24A CG-063-24A CG-080-24A CG-100-24A 20 25 32 40 50 63 80 100 (mm) Part No.

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

Applicable model D5 L9 L10 L11 L12 L13 L14 L15 L16 L17 t1 AS-10L AS1002FS3.4 14.8 18.3 11 27.5 19.5 3.4 4.9 7.3 12 1 AS-20L AS2002FS 15.6 19.6 12.6 29 21 1.2 AS-25L AS2052FS 19.6 24.6 17 38 28 AS-30L AS3002FS4.5 24.8 29.8 22 43 33 4.5 6.5 9.5 15.5 1.4 AS-40L AS4002FS 25.7 30.7 28 49 39 Part no.