ZP

L J Model A B C D E 2 F G H J K L M N P Vacuum inlet direction q Pad dia.

SX

SX Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com M5 x 0.8 M5 x 0.8 (External pilot port) (Pilot EXH port) (Light/Surge voltage suppressor) (Lead wire length) G: 300 H: 600 (Piping port) L plug connector (L): SX5140(R)-L-02 M

Proposals for Energy Saving

min or l).]

CRBU

The L dimension (maximum) is, as a rule, twice the size of the bolt. (Example: For M5 bolt: L max. = 10mm.) Applicable shaft configuration shaft J Size 10 is not manufacturable. The L dimension (maximum) is, as a rule, twice the size of the bolt. (Example: For M5 bolt: L max. = 10mm.) However, for the short end of shaft T: For M5 bolt: L max. = 7.5mm.

ZP

If the leakage volume is 30 L/min (ANR), the vacuum pressure of the S type is 20 kPa : l @ l ., and for the L type it is 33 kPa :' l @' l .'. If the leakage volume is 5 L/min (ANR), the vacuum pressure of the S type is 80 kPa ; l = l B, and for the L type it is 47 kPa ;' l =' l B'.

Series VQ Base Mounted Metal Seal/Rubber Seal

VP7 VP4 When ordering assemblies incorporated with a manifold, indicate L or B for the manifold port size. Elbow fitting assembly VVQ1000-F-L VQ C3 C4 C6 M5 VQ4 It is used for piping that extends upward or downward from the manifold.

MY1

Non-lube Lubrication 1000 or less+1.8 0 2700 or less+1.8, 2701 to 5000+ 2.8 0 0 1001 to 3000+2.8 0 Stroke length tolerance Symbol Rc 1/4 Rc 3/8 Rc 1/8 Front/Side ports Bottom ports (centralized piping type only) M5 x 0.8 (10-32 nominal) Port size 10 5 6 8 11 4 Stroke adjusting unit specifications 16 20 25 32 40 50 63 Bore size (mm) A L L A H L A H L A H L A H L A H L A H Unit symbol With

Vacuum Pad

If the leakage volume is 30 L/min (ANR), the vacuum pressure of the S type is 20 kPa : l @ l ., and for the L type it is 33 kPa :' l @' l .'. If the leakage volume is 5 L/min (ANR), the vacuum pressure of the S type is 80 kPa ; l = l B, and for the L type it is 47 kPa ;' l =' l B'.

Vacuum Pad

If the leakage volume is 30 L/min (ANR), the vacuum pressure of the S type is 20 kPa : l @ l ., and for the L type it is 33 kPa :' l @' l .'. If the leakage volume is 5 L/min (ANR), the vacuum pressure of the S type is 80 kPa ; l = l B, and for the L type it is 47 kPa ;' l =' l B'.

Vacuum Pad

If the leakage volume is 30 L/min (ANR), the vacuum pressure of the S type is 20 kPa : l @ l ., and for the L type it is 33 kPa :' l @' l .'. If the leakage volume is 5 L/min (ANR), the vacuum pressure of the S type is 80 kPa ; l = l B, and for the L type it is 47 kPa ;' l =' l B'.

0.4

For L dimension, refer to the dimensions of each kit. L 1.25 P=12.5 5.25 7.5 J kit 35 25 T 5.5 kit L Dimension L = 12.5 x n + 10.5 No. L dimension 1 23 2 35.5 3 48 4 60.5 5 73 6 85.5 7 98 8 110.5 9 123 10 135.5 L kit No. L dimension 11 148 12 160.5 13 173 14 185.5 15 198 16 210.5 17 223 18 235.5 19 248 20 260.5 No.

MXQ

10 16 12 4 MXQ-CT12(L)-X11 15 32 G MXQ-CT12(L)-X12 25 42 B C MXQ-CT16(L) 5 23 J MXQ16(L) M10 x 1 M5 x 12 MXQ-CT16(L)-X11 15 33.5 35.5 20 12 17 14 5 33 MXQ-CT16(L)-X12 25 43 A K MXQ-CT20(L) 5 27 MXQ20(L) MXQ-CT20(L)-X11 M5 x 14 M12 x 1.25 15 41 44.5 25 23 37 13 17 6 MXQ-CT20(L)-X12 25 47 MXQ-CT25(L) 5 30 MXQ25(L) M14 x 1.5 M6 x 18 MXQ-CT25(L)-X11 15 40 49 53.5 31 15 28 19 6 MXQ-CT25(L)-X12

F

T O R M A L E/M A L E N I P P L E: 1/8-1/8 H E X 1/4-1/4 H E X 3/8-3/8 H E X 1/2-1/2 H E X F L U S H TA P E R P L U G S: 18, 14, 38, 12, 34 P O R T S I Z E 3 M3 5 M5 01 18 3/4-3/4 H E X C O N F I G U R AT I O N See Product Selectors T U B E S I Z E ( W H E R E A P P L I C A B L E) 3 3.8mm OD 2mm ID 4 4mm OD 2.5mm ID 6 6mm OD 4mm ID H O W T O O R D E R M A L E/M A L E N I P P L E H O W T

Modular F.R.L. Unit

Note 2) For M5 and NPT thread type.

Vacuum Pad

1 1000 V = D 2 x L x (L) For the conductance, the equivalent conductance can be found in 8.

Vacuum Pad

1 1000 V = D 2 x L x (L) For the conductance, the equivalent conductance can be found in 8.

Vacuum Pad

1 1000 V = D 2 x L x (L) For the conductance, the equivalent conductance can be found in 8.

Vacuum Pad

1 1000 V = D 2 x L x (L) For the conductance, the equivalent conductance can be found in 8.

Modular F.R.L. Unit

Note 3) For M5 and NPT thread types.

Electric Actuators

Front mount type l l l Model Bolt Max. tightening torque Nm Max. screw-in depth (l mm) Model Bolt Max. tightening torque Nm Body thickness (l mm) LXP M6 x 1 7.4 10 LXP M6 x 1 7.4 12 2. Through holes Model Bolt Max. tightening torque Nm Body thickness (l mm) LXP M5 x 0.8 4.4 37.5 3.