2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2 2 C43, C6, 1/8 PF2M702 0.05 5 PF2M705 0.01 0.1 10 PF2M710 0.3 25 PF2M725 C6, N7, 1/8 0.5 50 PF2M750 0.1 1 100 PF2M711 C8, N7, 1/4 2 200 1 PF2M721 New New Compatible The flow rate value and the device status can be figured out easily via the process data.
40-2 40R-1 40-1 Model Manifold type Single base/B mount 21R-1 P(SUP)/R(EXH) Common SUP/Common EXH Valve stations 2 to 20 stations A port porting specifications Location Valve Bottom Top Rc Base Direction 1(P), 3(R) port Side 1 8 Rc 1 8 Rc 1 8 M5 x 0.8 M5 x 0.8 M5 x 0.8, Rc 1/8, C4 (One-touch fitting for 4), C6 (One-touch fitting for 6) M5 x 0.8 M5 x 0.8 Port size 2(A) port 1 8 X port Note
C6 1/8 Note) The values are for individually operated 2 position type manifold bases.
Series VQC2000 Base Mounted Plug-in Unit How to Order Manifold VQC F P T B VV5QC 2 1 08 C6 FD1 Kit / / SQ L M / VQ0 VQ4 S Kit B VV5QC 2 1 08 C6 SDQ VQ5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Series Option VQZ 2 VQC2000 Nil None All stations with back pressure
Note 2) ( ): denotes without sub-plate. 1461 SYA3000/5000/7000 Series Dimensions/SYA3000 Series: Body Ported Foot bracket SYA3120-F1 C4, N3 C6, N7 2 position single SYA3120(-F2) C4, N3 C6, N7 One-touch fitting (A, B port) M5 x 0.8 (Pilot port) Manual override (Non-locking) Applicable tubing O.D.: 4, 1/4" 6, 5/32" 2 x 2.2 (For manifold mounting) 2 x 3.2 (For mounting) (2 x 3.2 for mounting
Note 2) ( ): Denotes without sub-plate. 5-2-6 5 5 Port Air Operated Valve Series SYA3000/5000/7000 Series SYA3000: Body Ported Foot bracket SYA3120-F1 C4, N3 C6, N7 2 position single SYA3120(-F2) C4, N3 C6, N7 One-touch fitting (A, B port) M5 x 8 (Pilot port) Applicable tubing O.D.: 4, 1/4" 6, 5/32" Manual override (Non-locking) SA VA 2 2.2 (For manifold mounting) SA 2 3.2 (For mounting
Note 2) ( ): denotes without sub-plate. 1731 Series SYA3000/5000/7000 Dimensions/Series SYA3000: Body Ported Foot bracket SYA3120-F1 C4, N3 C6, N7 2 position single SYA3120(-F2) C4, N3 C6, N7 One-touch fitting (A, B port) M5 x 0.8 (Pilot port) Applicable tubing O.D.: 4, 1/4" 6, 5/32" Manual override (Non-locking) 2 x 2.2 (For manifold mounting) 2 x 3.2 (For mounting) (2 x 3.2 for mounting
position single 2 position double 3 position 2 to 16 stations Location Direction Base Side C8 (8 One-touch fitting) C10 (10 One-touch fitting) C4 (4 One-touch fitting)/C6 (6 One-touch fitting) A, B port piping specifications Operating pressure range External pilot operating pressure range MPa SX3000 SX5000 SX3000 2 position single Pilot pressure range 2 position double P, R ports 0.25 to
(for M8 mounting) 3 port valve 2 port valve 64.9 50 8 10.5 Leakage detection port Pilot port C4: 4 One-touch fitting C6: 6 One-touch fitting G1/4 (RETURN port) G1/4 (IN port) 30 31 0.5 to 2 0.5 to 2 10 10 0.5 to 2 0.5 to 2 n-1 5 3 1 1 2 VNA 122.2 <124.2> 142.2 <144.2> VNB 22.6 100 120 80 25 75 SGC SGH VNC n 6 4 2 3 Gate valve Aluminum + hard anodized containing PTFE and POM are used for
Ports 2, 4 size (metric) Ports 2, 4 size (inch) Ports 2, 4 Symbol C3 C4 C6 C4 C6 C8 C6 C8 C10 M Ports 2, 4 Symbol N1 N3 N7 N3 N7 N9 N7 N9 N11 M Ports 1, 3, 5 Applicable series Ports 1, 3, 5 Applicable series 3.2 One-touch fitting 4 One-touch fitting 6 One-touch fitting 4 One-touch fitting 6 One-touch fitting 8 One-touch fitting 6 One-touch fitting 8 One-touch fitting 10 One-touch fitting
35 580 C4 (For 4) C6 (For 6) C8 (For 8) Note 2) Top 1 to 12 stations L.
VN VQ30 LVC LVA JIS Symbol LVH (A) 2 Characteristic Specifications LVD VQ20 VQ30 Series LVQ 1 (P) C8 C6 C10 C12 N.C.
L1 8 L2 4 x 9 (for M8 mounting) 2 port valve 3 port valve Cleaning valve + Gate valve < >: Pilot port is C6.
(Example) SS3YJ5-20-03 . 1 set (manifold base) SYJ512-5LZ-M5 . 2 sets (valve) SYJ500-10-1A . 1 set (blanking plate assembly) SS3YJ5-41R-03-C6 . 1 set (manifold base) SYJ514R-5G . 2 sets (valve) SYJ500-10-3A . 1 set (blanking plate assembly) The asterisk denotes the symbol for assembly.
) 39.5 P B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 25.5 1 21 44.5 63.5 P = 17.5 2n-C4,C6,C8 A, B port Dimensions Formulae L1 = 17.5n + 52 L2 = 17.5n + 74.5 n: Stations (max. 16 stations) L n 1 69.5 92 112.5 123 2 87 109.5 137.5 148 3 104.5 127 150 160.5 4 122 144.5 175 185.5 5 139.5 162 187.5 198 6 157 179.5 200 210.5 7 174.5 197 225 235.5 8 192 214.5 237.5 248 9 209.5 232 262.5 273 10 227 249.5 275
fitting Applicable tubing O.D.: 6 C6 2 stations are needed to mount control unit.
-59No.PF-OMJ0005CN-I PFM7-(N)01L/(N)02L/F01L 2 17 -60No.PF-OMJ0005CN-I PFM7S-(N)01/(N)02/F01 17 2 -61No.PF-OMJ0005CN-I PFM7S-(N)01L/(N)02L/F01L 2 17 -62No.PF-OMJ0005CN-I PFM7-F02 21 2 -63No.PF-OMJ0005CN-I PFM7-F02L 2 21 -64No.PF-OMJ0005CN-I PFM7S-F02 21 2 -65No.PF-OMJ0005CN-I PFM7S-F02L 2 21 -66No.PF-OMJ0005CN-I PFM7-C4/C6/C8/N7 2 -67No.PF-OMJ0005CN-I PFM7-C4L/C6L/C8L/N7L 2 -68No.PF-OMJ0005CN-I
.: 4 C4 Connector mounting position Symbol Applicable stations C6 Embedded type One-touch fitting Applicable tubing O.D.: 6 VP4 U D U side D side 2 to 8 2 to 8 9 to 16 D-sub connector cable assembly Symbol VZS B Both sides Passage Porting specifications 4(A), 2(B) Side 5(R1), 3(R2) 1(P) Common Common Stations Symbol VFS 02 2 stations 1 D side VS4 16 stations 16 Max. 16 stations.
-D-01 C6: MAX. 6 C8: MAX. 6.5 MAX. 10 2-One-touch fitting (A, B port) Applicable tubing model C6: T0604 C8: T0806 Applicable cable O.D. 3.5 to 7 3-3-57 Series VZ5000 2 Position Double VZ5220 Grommet (G), (H) VZ5220-01 G H Manual override (Non-locking) (Mounting hole for manifold) (Lead wire length) G: 300 mm H: 600 mm (Mounting hole) (PE port) (Piping port) L plug connector (L) VZ5220-L-01