ARM10/11

Torque recommended: (R 1/8: 7 to 14 Nm).

PFxx-OMJ0005CN

7 PFM (12) 2 (11) 10 0.210(5)L/min 1 25 0.525(12.5)L/min (11) 50 150(25)L/min 11 2100(50)L/min 1( )CO2 A 2 2 S () N 3 M SI4 3 (SI) 4L/min,L A NPN(2) B PNP(2) C NPN(1)+(15V) D NPN(1)+(420mA) E PNP(1)+(15V) F PNP(1)+(420mA) G NPN(1)+5 H PNP(1)+5 5 L 6INOUT () 10 25 50 11 01 Rc1/8 02 Rc1/4 N01 NPT1/8 N02 NPT1/4 F01 G1/8 F02 G1/4 C4 4(5/32") C6 6 C8 8(5/16") N7 1/4 -10No.PF-OMJ0005CN-I

Digital Pressure Switch

Internal circuit and wiring example Z/ISE40A(F)Output specification -S/-R (Analogue output mode) Switch output NPN open collector output type-2 output Max. 28 V, 80 mA Residual voltage 1 V or less R: Analogue output 1 to 5 V Output impedance 1 k S: Analogue output 4 to 20 mA Max. load impedance Power supply voltage 12 V: 300 Power supply voltage 24 V: 600 Min. load impedance 50 -S/-R (

For Dry Air, Pilot Operated Series VQ20/30 2 Port Solenoid Valve

Series P port/Thread VV2Q22-05 1 set Manifold part No. 2 3 VQ20 VQ30 Rc3/8 NPT3/8 NPTF3/8 G3/8 VQ21M1-5G-C6 00N 00T 00F 4 sets Valve part No. (Stations 1 to 4) Stations VQ21M1-5G-C8 1 set Valve part No.

2-Color Display High Precision

--F Panel mounting + Front protective cover 44.7 29.2 7.5 40 51.2 Panel thickness 1 to 5 38.6 11 Series ZSE40A(F)/ISE40A Dimensions ZSE40A(F)/ISE40A-C4-E ZSE40A(F)/ISE40A-C6-E Panel mounting 41.2 40 29.2 4 43.6 40 Panel thickness 1 to 5 38.6 ZSE40A(F)/ISE40A-C4-F ZSE40A(F)/ISE40A-C6-F Panel mounting + Front protective cover 44.7 40 7.5 29.2 51.2 Panel thickness 1 to 5 38.6 12 Series ZSE40A

PSxx-OMM0006CN

(M8(3 )11 ) 01 X M ISE40A 2 K ISE40A -0.11.000 MPa ZSE40A 0.0-101.3 kPa ZSE40AF -100.0100 kPa 1 01 R1/8 (M5) A A N01 NPT1/8 (M5) W1 Rc1/8 B B WF1 G1/81 D D M5 M5X0.8 () E C4 4 C6 6 F + 1IS0228-1 P10/1 X NPN2() Y PNP2() 1 R NPN2 +/ T PNP2 +/ M SI2 P (psi)1 S NPN2 +/ 1 2kPaMPa V PNP2 +/ -9No.PS-OMM0006CN-E /1 1 01 N01 W1 WF1 M5 C4 C6 A A ZS-24-A X X X B B ZS-24-B X X X X X D

Table of Contents

ZX1-R1-1 ZX1-R1-3 ZX1-R16 4 pcs. (Ordering example) ZZX106-R 1 pc. (Manifold base) ZX100-K15LZ-EC 5 pcs. (Vacuum single unit) ZX-BM1 1 pc.

Table of Contents

1 !2 !3 !4 !5 !6 !7 No. q w e r t y u i o !

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

1 !2 !3 !4 !5 !6 !7 No. q w e r t y u i o !

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

1 !2 !3 !4 !5 !6 !7 No. q w e r t y u i o !

CRB2/CRBU2/CRB1

Single vane type Double vane type 0 -5 +4 0 a r n n R e o 9 g o g t 0 0 n a i e 9 +4 0 a t t 0 i a o r 0 1 e t 1 n n o 8 g o R 0 e n r i a g a +4 0 t a n n r t g a n o e r o R n i 2 t o a 7 t i 0 t o a R t o +4 0 R For size 40 actuators, a parallel keyway will be used instead of chamfer.

VQ7-6/7-8

Wiring specification L side R side L R O-ring NBR 4 AXT502-19 Side Bottom A B O-ring NBR 2 AXT502-20 Cylinder port size Plate SPCC 1 AXT502-22-2 Rc1/4 Rc3/8 6 One-touch fitting 8 One-touch fitting 10 One-touch fitting 02 03 C6 Note 1) Gasket NBR 1 AXT502-31 Oval countersunk head screw SWRH3 2 M4 X 8 C8 Note 1) C10 Note 1) Note 1) Side ported only 31 Series VQ7-8 Manifold Exploded View D side

VK300

D LED R R NL (Built-in terminal) Marking AC, 12 VDC or less for DC For 24 V or more 1 2 + 1 2 1 2 NL: Neon bulb R: Resister LED: Light emitting diode R: Resister D: Protective diode LED: Light emitting diode R: Resister 1418 A

5 Port Air Operated Valve Series SYA3000/5000/7000 1

mounted P, R port thread type Series 3 SYA3000 5 SYA5000 Nil Rc G F 40 SYA 7 1 Base mounted N NPT NPTF T P, R port thread type Type of actuation Nil Rc 2 position single G F Port size 1 N NPT Symbol Applicable series Nil Port size Without sub-plate NPTF T 2 position double 1 8 01 SYA3000 Port size With sub-plate 2 Symbol Nil Port size Without sub-plate Without sub-plate (Pilot port: Expect

SYA3000/5000/7000

side bracket Series SYA5000 One-touch fitting for 6 One-touch fitting for 8 One-touch fitting for 8 One-touch fitting for 10 3 SYA3000 5 SYA5000 SYA7000 7 SYA7000 SYA 5 1 C6 20 Body ported 40 SYA 5 1 Base mounted P, R port thread type Series 3 SYA3000 5 SYA5000 Rc Nil G F 40 SYA 7 1 Base mounted N NPT NPTF T P, R port thread type Type of actuation Rc Nil 2 position single G F Port size 1

VK300

side of A port Nil 1 8 01 Rc VFN Nil Rc G NPT NPTF C4 4 cassette P port: Rc 1/8 R port: Rc 1/8 A port: Rc 1/8 F N T Same side of A port S C6 6 cassette Valve stations Type S42 (Solenoids on the same side of A port) 01 1 station 20 20 stations P port: Rc 1/8 R port: Rc 1/8 A port: Rc 1/8 Common SUP/Individual EXH How to Order Type 21: Body ported (A port top ported) Applicable solenoid valve

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: C6 (ø6 One-touch Fitting), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: N (None), Calibration Certificate: None, Connector: Lead Wire w/Connector (2 m), Option: T (Panel Mount Adapter for w/o Flow Adjustment Valve)

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: C6 (ø6 One-touch Fitting), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: A (w/Calibration Certificate), Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: R (Bracket for w/o

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: C6 (ø6 One-touch Fitting), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: N (None), Calibration Certificate: None, Connector: Z (w/o Lead Wire w/Connector)

Flow Rate Type: Standard, Operating Temperature Range(°C): -10～60, Operating Humidity Range(%): 35～85, Number of Inputs: 2, Number of Outputs: 1, Analog Voltage Output(V): [DC1-5V] 1-5V, Power Supply Type: DC, Power Supply Voltage(V): [24] 24±10%, Pipe Connection Direction: 2-way, Connecting Tube Diameter: 6, Liquid contact parts material: Resin + Metal, Mounting Hole: Presence, Display: