Vacuum Unit

Selectable option for manifold (Refer to i on pages 11 and 12, and y on page 13.)

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

NM M5T N9 N7 N3 N1 Symbol 1/8" 5/32" 1/4" 5/16" 10-32UNF (M5 thread) Mixed Applicable tubing O.D.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

NM M5T N9 N7 N3 N1 Symbol 1/8" 5/32" 1/4" 5/16" 10-32UNF (M5 thread) Mixed Applicable tubing O.D.

90

Note 8) For y (connector type) of the single unit, select L, L, or W.

VK300

Grommet (G) Rated voltage DIN terminal (D) Part no. symbol Standard: Y, V, W Continuous duty type (E) Standard: Y, V, W Continuous duty type (E) W/o indicator light With indicator light W/o indicator light With indicator light W/o indicator light With indicator light Varistor Varistor Diode Diode Coil Coil Coil Coil S AC Vacuum Spec.

VK300

Grommet (G) Rated voltage DIN terminal (D) Part no. symbol Standard: Y, V, W Continuous duty type (E) Standard: Y, V, W Continuous duty type (E) W/o indicator light With indicator light W/o indicator light With indicator light W/o indicator light With indicator light No.1 No.1 Varistor Varistor S Diode Diode Coil Coil Coil Coil No.2 No.2 (G, GS) (D, DS) AC Vacuum Spec.

E,R.L.

:llv thn alphabtic:lly (Ex.: 27N.40(40/,m), 2N R Body g Port orl.d.--64, r NNFT Construction./Parts List Main Parts Parts List 1 1074-58 1 1 1 1r 1 636 NC4otr r 1185 l t l Series NAF Air Filter Float Type Flow Characteristics NAF5OOO N.O tvpe/ NAD44 With no pressure inside the bo!

Clean Air Module

IDH Component Parts ID Threaded type Threaded type IDG Manual operation valve (with lever lock) IDK AMG Lead wire with L-type connector AFF With flow adjuster With differential pressure indicator AM PB AMD One-touch fitting One-touch fitting PA AMH AME u t q w e r y AMF No. Description Individual part no.

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

0 i y u q o !0 i y Component Parts No. Description Material Note 1 Body A PBT 2 Knob POM 3 Body B PBT 4 Needle PBT 5 Needle guide Stainless steel 6 U-seal HNBR 7 Spacer PBT1 Component Parts No.

Space Saving Vacuum Ejector Series ZQ [Option] Note) CE compliant: For DC only.

Pilot valve symbol 200 AC 110 AC 220 AC 12 DC 100 AC 24 DC q K1 K1 K2 J1 J1 J2 Q1 Q2 N1 N2 Nil Y w e Nil r Nil Y t y Nil u Nil i Nil o Nil !0 Nil Combinations q to !

Series MHZ2 11- ø10, ø16, ø20, ø25 22- Air Gripper

1 N1 1 N1 11221122112211222 N2 2 N2 2 N2 2 N2 MHZ2-10D MHZ2-16D MHZ2-20D MHZ2-25D 1 N1 MHZ2-10D MHZ2-16D MHZ2-20D MHZ2-25D Specifications and dimensions other than the above are the same as the basic type (including narrow type).

Rotary Actuator/Vane Type

Applicable shaft type: Y a1 1.5 L1 Y = Y = Applicable shaft type: J, K, T N1 Size: 10 to 30 Size: 40 [mm] Size CRB2, CRBU2 Y 10 1 to 14 15 1.5 to 18 20 1.5 to 20 30 2 to 22 40 18 to 30 [mm] Size CRB2, CRBU2 a1 L1 N1 20 2h9 0 -0.025 10 6.8 30 3h9 0 -0.025 14 9.2 Symbol: A48 Symbol: A52 The long shaft is shortened. The short shaft is shortened.

Rotary Actuator

$Applicable shaft type: J, K, T $Applicable shaft type: Y a1 1.5 L1 (mm) Y Size N1 10 1 to 14 Y = Y = 15 1.5 to 18 (mm) 20 a1 L1 N1 Size 1.5 to 20 Size 10 to 30 Size 40 0 -0.025 30 20 2h9 10 6.8 2 to 22 40 30 0 -0.025 3h9 14 9.2 18 to 30 Symbol: A48 The long shaft is shortened. Symbol: A52 The short shaft is shortened.

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

Applicable shaft types: Y CRB2 a1 1.5 L1 (mm) CRBU2 Y Size N1 10 1 to 14 CRB1 15 1.5 to 18 (mm) Y = Y = 20 N1 a1 L1 1.5 to 20 Size MSU Size: 10 to 30 Size: 40 0 -0.025 20 30 6.8 10 2h 2 to 22 CRJ 0 -0.025 30 40 9.2 14 3h 18 to 30 CRA1 Symbol: A48 Shorten the long shaft. Symbol: A52 Shorten the short shaft.

Rotary Actuator/Vane Style Series CRB2

Applicable shaft type: Y a1 1.5 L1 CRB2 (mm) Y Size N1 CRBU2 10 1 to 14 Y= Y= 15 1.5 to 18 (mm) CRB1 N1 L1 a1 20 1.5 to 20 Size Size: 10 to 30 Size: 40 0 -0.025 20 6.8 10 2h9 30 2 to 22 MSU 0 -0.025 30 9.2 14 3h9 40 18 to 30 CRJ Symbol: A48 Shorten the long shaft. Symbol: A52 Shorten the short shaft.

Digital Flow Switch ( compatible)

(page 88) 5 R/W 5th letter U8 0 Y 2420 0x0974 6 R/W 6th letter U8 0 Y 7 R/W 7th letter U8 0 Y 8 R/W 8th letter U8 0 Y 9 R/W 9th letter (right end) U8 0 Y 1 st dot (left end) U8 0 Y 1 R/W 2 R/W 2nd dot U8 0 Y 3 R/W 3rd dot U8 0 Y Line name dot 4 R/W 4th dot U8 0 Y 0: oFF (dot OFF) 1: on (dot ON) 5 R/W 5th dot U8 0 Y 2430 0x097E 6 R/W 6th dot U8 0 Y 7 R/W 7th dot U8 0 Y 8 R/W 8th dot U8 0 Y

Digital Flow Switch ( compatible)

(page 84) 5 R/W 5th letter U8 0 Y 2420 0x0974 6 R/W 6th letter U8 0 Y 7 R/W 7th letter U8 0 Y 8 R/W 8th letter U8 0 Y 9 R/W 9th letter (right end) U8 0 Y 1 st dot (left end) U8 0 Y 1 R/W 2 R/W 2nd dot U8 0 Y 3 R/W 3rd dot U8 0 Y Line name dot 4 R/W 4th dot U8 0 Y 0: oFF (dot OFF) 1: on (dot ON) 5 R/W 5th dot U8 0 Y 2430 0x097E 6 R/W 6th dot U8 0 Y 7 R/W 7th dot U8 0 Y 8 R/W 8th dot U8 0 Y

PFxx-OMX0002

Security code 1 R/W 2410 0x096A PinCode (Security code setting) Setting range 0x0 to 0x03E7 (0 to 999) 2 R/W U16 0 Y Line name 1st letter U8 0 Y 11 seg 1 R/W 2 R/W Line name 2nd letter U8 0 Y 7seg 3 R/W Line name 3rd letter U8 0 Y 7seg Lower level screen 4 R/W Line name 4th letter U8 0 Y 7seg Refer to "Line name: communication data".

MQQ

2 u y i o MQQ M RHC MK(2) Material Note Component Parts RS Q G No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !

0.

(Value in the initial state) Note 2) When IP65 compliant DIN terminals are selected: VQZ l2l-lYllW1-ll 2 3 Solenoid Specifications Grommet (G) L-type plug connector (L) M-type plug connector (M) DIN terminal (Y) Options Electrical entry G, L, M Y DC 24, 12 Coil rated voltage (V) 100, 110, 200, 220 High speed response type AC 50/60 Hz 10% of rated voltage High pressure type (Metal seal type