Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

R.

Series VQ Metal Seal/Rubber Seal Body Ported

VQ VQ4 Note) R block valve is mounted in the blocking position when ordering an individual EXH spacer incorporated with a manifold. When separately ordering an individual EXH spacer, separately order a R block valve. VQZ P R PR 1 2 0 1 P R PR Block valve VQD VQ 4 --Valve No.

SYJ300/500/700

R port.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

Back cover 8 2-Color Display Digital Flow Switch RoHS PF2M7 Series How to Order PF2M7 10 C6 A M Integrated display q r t y u i w e q Rated flow range e Port size Piping variations 01 0.01 to 1 L/min 02 0.02 to 2 L/min 05 0.05 to 5 L/min 10 0.1 to 10 L/min 25 0.2 to 25 L/min 50 0.5 to 50 L/min 11 1 to 100 L/min 21 2 to 200 L/min With One-touch fitting Female thread C4*2, C6, C8, N7 01, 02,

0.

(A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) q w e r q w e r N.O. N.O. (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) Component Parts No.

Rubber seal 5 Port Solenoid Valve Series SYJ5000

and exhaust air from both sides of R port.

3 Port Air Operated Valve Series SYJA300

R port.

2-Color Display Digital Flow Switch Series PFM

Dimensions PFM -C4/C6/C8/N7--X693 7 5 PFM -C4/C6/C8/N7--X694 7 5 10.2 10.2 1 43 A 43 1 IN OUT (34.2) 3 (34.2) 13 3 13 A 18 OUT 2 x 3.4 18 IN B B 48 20 48 20 2 x 3.4 One-touch fitting Applicable tube O.D.

SY3000/5000/7000/9000 Series (Pilot Valve:V100)

for5/32 VVQ1000-51A-N3 One-touch fitting for1/4 VVQ1000-51A-N7 SY5000 One-touch fitting for5/16 VVQ1000-51A-N9 Note 1)P and R ports cannot be changed.

Serial Transmission System Series EX250 Series EX500

Stations 1 station MADE IN JAPAN C US TYPE1 R EX500-IE1 (PNP) 1 24VDC/60mA/IP65 8-point integrated type, M8 connector, PNP specifications C US TYPE1 R EX500-IE1 (PNP) 24VDC/60mA/IP65 TYPE1 EEX500-IB1-M6 1 set EX500-IE1 4 sets EX500-IE3 2 sets 24VDC/60mA/IP65 MADE IN JAPAN C US TYPE1 R EX500-IE1 (PNP) MADE IN JAPAN C US TYPE1 8-point integrated type, M8 connector, NPN specifications R MADE

Rubber seal 5 Port Solenoid Valve Series SYJ7000

of R port.

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

R.

4/5 Port Air Operated Valve Series SYJA3000

both sides of R port.

smcmaintenancepartslist

Contents Bore size (mm) R: NBR V: FKM R: NBR V: FKM R: NBR V: FKM R: NBR V: FKM R: NBR R: NBR !0 Piston seal 20 25 32 40 50 63 80 100 CQ2B20R-PS CQ2B25R-PS CQ2B32R-PS CQ2B40R-PS CQ2B50R-PS CQ2B63R-PS CQ2B80R-PS CQ2B100R-PS CQ2B20V-PS CQ2B25V-PS CQ2B32V-PS CQ2B40V-PS CQ2B50V-PS CQ2B63V-PS CQ2B80V-PS CQ2B100V-PS !1 Rod seal Set of left nos. !0, !1, !2. !

7ND9071en

Remote Mount (option R) is only available for ND91_ (standard enclosure) variants.

modular-press-e

-MLA ISE35-N-65-M PNP output/Wiring top entry ISE35-R-65-MLA ISE35-R-65-M N.O.

Modular F.R.L. Pressure Control Equipment

-MLA ISE35-N-65-M PNP output/Wiring top entry ISE35-R-65-MLA ISE35-R-65-M N.O.

Series VQ Base Mounted Metal Seal/Rubber Seal

R port. 2.

VQC

Note 4) For external pilot option, -R, indicate the external pilot specification R for the applicable valves as well. Note 5) The built-in silencer type does not satisfy the IP67 standard.

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

R port.