Series VQ1000 Body Ported Plug Lead Unit: Cassette Type For details about certified products conforming to international standards, visit us at www.smcworld.com.

How to order manifold VV5Q17 1(P), 3(R) port size 1/4" 08FSO DN 00T How to order valves VQC VQ1170 5M N7 Cylinder port Example) VV5Q17-09FU0-D K S SQ Applicable tube O.D. (Inch) 1/8" 5/32" 1/4" N1 N3 N7 Symbol VQ0 Plug Connector Assembly Model VQ4 Others, option symbols: to be indicated alphabetically. Connector assembly will be required when the F, P, T, S kits add a valve.

XL-OMY0002

XL-OMY0002 . 1 S 12 ( SUS304 M 3 M SUSU316L 8 11 SUS304 2 7 A6063 6 9 6 9 10 9 5 SUS304 4 5 10 4 10 S O S O XLD-25 XLD-40,XLD-50,XLD-160 XLD-63,XLD-80,XLD-100 S 1 SUS304+ 4 1) S S O 2) S O FKM 5 O 6 S O 2 FKM 9 S SUS304 10 11 XL-OMY0002 6. 6-1.

Plug-in Unit

Side C12 (For 12) P: Rc 1/2 VQC400-5 S kit 1 to 12 stations: EX240, EX250 1 to 8 stations: EX500 1 to 8 stations: EX126 Rc 1/4 VQC4000 VV5QC41R: Rc 3/4 VQC401-5 Rc 3/8 Bottom Rc 1/4 Note 1) One-touch fittings in inch sizes are also available.

Digital Flow Switch (Integrated display type) ( compatible)

Digital filter 6 Select from 0.5 s/1.0 s/2.0 s/5.0 s/10.0 s/15.0 s/20.0 s/30.0 s Enclosure IP65 Operating temperature range 0 to 50 oC (No freezing and condensation) Environment Operating humidity range Operation, Storage: 35 to 85%R.H. (No condensation) Withstand voltage 7 1000 VAC, for 1 minute between the terminals and housing Insulation resistance 50 M min.

Digital Flow Switch (Integrated display type) ( compatible)

Digital filter 6 Select from 0.5 s/1.0 s/2.0 s/5.0 s/10.0 s/15.0 s/20.0 s/30.0 s Enclosure IP65 Operating temperature range 0 to 50 oC (No freezing and condensation) Environment Operating humidity range Operation, Storage: 35 to 85%R.H. (No condensation) Withstand voltage 7 1000 VAC, for 1 minute between the terminals and housing Insulation resistance 50 M min.

SZ3000

Station 1 14 14 Station 1 SOL.A SOL.A SOL.A 1 1 1 Light/Surge voltage suppressor Light/Surge voltage suppressor Light/Surge voltage suppressor The common polarity should be the same as the common specifications of the valve to be used.

48

Metric size*1 Inch size*1 Type 02 2*3 23 3.2*2 04 4 06 6 01 1/8" 03 5/32" 2 Elbow Control type*1 0 Meter-out 1 Meter-in *1 Metric size: Light gray Inch size: Orange *1 Meter-out and meter-in types can be visually identified by the color of the knob. Meter-out: Gray Meter-in: Light blue *2 Use 1/8" tubing. *3 Only polyurethane tubing is applicable for 2.

Base Mounted How to Order Manifold VQC1000 Series Plug-in Unit

Base Mounted Plug-in Unit How to Order Manifold VQC1000 Series kit F P VV5QC 1 1 08 FD1 C6 M L T VV5QC 1 1 08 SDQ C6 S kit Base mounted plug-in VQC1000 series Enter EX600-compliant S kit only. Enter EX250-compliant S kit only. Valve stations Input block specification (Enter EX250-compliant S kit only.)

4-channel Flow Monitor ( compatible)

Bit offset Item Notes 0 CH1: OUT1 output 0: OFF 1: ON 1 CH1: OUT2 output 0: OFF 1: ON 2 CH2: OUT1 output 0: OFF 1: ON 3 CH2: OUT2 output 0: OFF 1: ON 4 CH3: OUT1 output 0: OFF 1: ON 5 CH3: OUT2 output 0: OFF 1: ON 6 CH4: OUT1 output 0: OFF 1: ON 7 CH4: OUT2 output 0: OFF 1: ON 8 CH1: Diagnostics 0: OFF 1: ON Out of CH1 display range (When HHH and LLL are displayed). 9 CH2: Diagnostics 0:

Digital Pressure Switch ( compatible)

For OUT2, all "1" in the chart will be changed to "2".

Compact Guide Cylinder

Minimum Stroke for Auto Switch Mounting [mm] Auto switch model Number of auto switches Bore size 12 (10 x 2) 16 (12 x 2) 20 (16 x 2) 25 (20 x 2) 32 (25 x 2) 40 (32 x 2) 50 (40 x 2) 63 (45 x 2) 80 (56 x 2) 100 (71 x 2) D-M9V 1 5 2 5 D-M9 1 5 Note 1) 5 2 10 Note 1) 10 D-M9W 1 5 Note 2) 2 10 Note 2) 10 D-M9WV D-M9AV 1 5 Note 2) 2 10 D-M9A 1 5 Note 2) 2 10 Note 2) Note 1) Confirm that it is possible

Pneumatic Transfer System Series MF

6 7 X 244 to 254 262 to 279 Y Note 2) I 10 15 J 6 7 X 233 to 244 224 to 241 Y Note 2) J 6 7 X 240 to 251 236 to 253 Y Note 2) H 298 339 H 323 352 I 10 15 15 32 15 32 15 32 589 to 614 633 to 673 564 to 589 542 to 581 579 to 605 571 to 610 MF -90 15 32 A G D Note 1) F D Note 1) D Note 1) F F Y C C C Y Y B G A 90 B 90 B G A D Note 1) 90 G A H X X X D Note 1) D Note 1) B B B F E F F E A H A

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~:;:--l' VAC Vacuum load lock chamber Digital pressure switch Digital Pressure Switch Series ZSE6/ISE6 (For vacuum) (For positive pressure) Model 1~SV(S % F ,S, ) ".

Digital Pressure Switch

Connector pin numbers -19No.PS-OMU0003-D Internal circuit and wiring examples Z/ISE20A(F)---Output specification -S/-R (Analog output mode) Switch output NPN open collector output type-2 output Max. 28 V, 80 mA Residual voltage 1 V or less R: Analog output 1 to 5 V Output impedance 1 k S: Analog output 4 to 20 mA Max. load impedance Power supply voltage 12 V: 300 Power supply voltage 24

Digital Pressure Switch

Connector pin numbers -20No.PS-OMU0006-D Internal circuit and wiring examples Z/ISE20B(F)---Output specification -S/-R (Analog output mode) Switch output NPN open collector output type-2 output Max. 28 V, 80 mA Residual voltage 1 V or less R: Analog output 1 to 5 V Output impedance 1 k S: Analog output 4 to 20 mA Max. load impedance Power supply voltage 12 V: 300 Power supply voltage 24

Digital Pressure Switch

System error Not applicable 1 1 1 Not applicable 1 -73No.PS-OMX1005 Error Error displayed Description Measures Error output Press the and buttons simultaneously for 1 second or longer to clear the error. Then check the wiring and model before copying again. Copy function is operated incorrectly. Copy error Not applicable 1 1: The switch output will be OFF when an error is generated.

VQZ1000/2000/3000

Note 2) Except VQZ1000 VQD Cylinder port N1 N3 N7 N9 N11 M5 02 Symbol 1/8" 5/32" 1/4" 5/16" 3/8" 1/4 thread M5 thread Applicable tubing O.D.

PSxx-OMU0002CN

-100.0~100.0 kPa T 2 X NPN2 Y PNP2 R NPN2+1 T PNP2+1 A1 A S NPN2+1 V PNP2+1 1: A2 B M SI3 P psi2 2 3 kPaMpa B D + M5 M5 1 01 R1/8 N01 NPT1/8 C4H 4mm J (2m) C6H 6mm N7H 1/4 inch C4L 4mm C6L 6mm N7L 1/4 inch -8No.PS-OMU0002CN-D / A ZS-46-A1 38L(2 ) B ZS-46-A2 38L(2 ) ZS-46-B + ZS-46-D ZS-46-5L 5 2m ZS-27-01 R1/8 ZS-46-N1 NPT1/8 ZS-46-N2 4mm ZS-46-C4H 6mm ZS-46-C6H 1/4 inch

PSxx-OMU0005CN

-15No.PS-OMU0005CN-C (a)(a) (b) (ZS-46-B) +(ZS-46-D) 90 -16No.PS-OMU0005CN-C (-M5) 1/6~1/4 1~1.5Nm (ZS-46-N) -01-N01 23 3~5 Nm -C4L-C6L 1/61/4 1~1.5Nm -17No.PS-OMU0005CN-C -18No.PS-OMU0005CN-C () TU0425( 42.5) -19No.PS-OMU0005CN-C FG -20No.PS-OMU0005CN-C Z/ISE20B(F)-S/-R () NPN 2 Max.28 V80 mA 1 V R15 V 1 k S420 mA 12 V 300 24 V 600 50 -S/-R () NPN 2 Max.28 V80 mA 1 V -X () -S/-

S

With 5/32" one-touch fitting S Built-in silencer Metric Note 1) When two or more options are specified, indicate them alphabetically.