VQ7-6/7-8

Load factor: ((Load weight x 9.8)/Theoretical force) x 100% VS4 VQ7 EVS Conditions VFN Base mounted Series MB Series CS1 6A x 1 m AS4000-02 AN200-02 10A x 1 m AS420-03 AN300-03 6A x 1 m AS4000-02 AN200-02 10A x 1 m AS420-03 AN300-03 Base mounted Series MB Series CS1 10A x 1 m AS4000-03 AN300-03 15A x 1 m AS420-04 AN400-04 10A x 1 m AS4000-03 AN300-03 15A x 1 m AS420-04 AN400-04 SGP (Steel

VQ7-6/7-8

Load factor: ((Load weight x 9.8)/Theoretical force) x 100% VS4 VQ7 EVS Conditions VFN Base mounted Series MB Series CS1 6A x 1 m AS4000-02 AN200-02 10A x 1 m AS420-03 AN300-03 6A x 1 m AS4000-02 AN200-02 10A x 1 m AS420-03 AN300-03 Base mounted Series MB Series CS1 10A x 1 m AS4000-03 AN300-03 15A x 1 m AS420-04 AN400-04 10A x 1 m AS4000-03 AN300-03 15A x 1 m AS420-04 AN400-04 SGP (Steel

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

distance: AN200 to 500 1 m, AN600 to 700 2 m, AN800 to 900 3 m Tension bolt Sound absorbing material (PE sintered body) Sound absorbing material (PE sintered body) Cover Case Without silencer With silencer Body 130 Hexagonal flats 120 Port size Hexagonal flats 110 100 Port size 90 80 Note 1) About the display of products material POM: Polyacetal PE: Polyethylene SPCC: Carbon steel S20C:

125

B 12 x 1 m C VEX33 42-03 04 AS420-03 AN30-03 12 x 1 m D AS420-04 AN40-04 SGP15A x 1 m 1723 3 Port 3 Position Valve Body Ported VEX3 Series How to Order Air operated Pilot solenoid VEX3 B 12 0 01 1 Air operated VEX3 D B 5 1 12 2 01 Pilot solenoid Operation type Option 1 External pilot solenoid 2 Internal pilot solenoid Nil None Thread type Nil Rc F G N NPT T NPTF Body size Port size B Bracket

Silencer Series AN

Temperature 5~60C / 40~140F H O W T O O R D E R SERIES NAN SILENCER Model Port Size* NPT Effective Orifice mm2 (Cv) D I M E N S I O N S SERIES NAN SILENCER NAN200-N02 14 35 (1.9) NAN300-N03 38 60 (3.3) Dimensions (mm) Model NAN400-N04 12 90 (5.0) A B D NAN500-N06 34 160 (8.8 NAN200-N02 63 22 19 NAN600-N10 1 270 (15) NAN300-N03 84 25 22 NAN700-N12 114 440 (24) NAN400-N04 92 30 27 NAN800-N14

SX

M D U D side U side B 2 to 17 2 to 10 stations 2 to 10 stations D U D side U side B 2 to 8 2 to 8 2 to 8 One-touch fitting for 5/32" N3 One-touch fitting for 5/32" N3 One-touch fitting for 1/4" N7 One-touch fitting for 1/4" N7 Both sides M Special specifications SX5000 Both sides M Special specifications SX5000 One-touch fitting for 5/16" N9 One-touch fitting for 5/16" N9 Mixed M Mixed M

5 Port Solenoid Valve Series SV1000/2000/3000/4000

D D D D SV SS5V1-W10S4VWD-05B-C6 1 set (manifold part no.)

High Purity Chemical Valve

E (H1) (H2) 2 x P B C SMC A B E L J B 2 x P 2 x F K Body material: PFA N G A D L K 4 x M Non-locking type Locking type 60 (H1) (H2) C A B SMC E J B 2 x P (mm) Dimensions A B C D E F H1 G H2 J K L M N P Model Body material LVH20m LVH30m LVH40m LVH20m LVH30m LVH40m LVH20m LVH30m LVH40m M5 x 0.8 30 33 54.5 10 10 75 76.5 22 22 27 Rc 1/8, 1/4, NPT 1/8, 1/4 (SUS) Stainless steel 36 47 81 13

Air Cylinder Series CA2

MB MB1 CA2 CS1 Auto switch model Bore size (mm) 40 50 63 80 100 CS2 D-A9/A9V D-M9/M9V D-M9W/M9WV D-M9AL/M9AVL BA7-040 BA7-040 BA7-063 BA7-080 BA7-080 D-A5/A6 D-A59W D-F5/J5 D-F5W/J59W D-F59F/F5NTL BT-04 BT-04 BT-06 BT-08 BT-08 D-A3C/A44C D-G39C/K39C D-Z7/Z80 D-Y59/Y69 D-Y7P/Y7PV D-Y7W/Y7WV D-Y7BAL BA3-040 BA3-050 BA3-063 BA3-080 BA3-100 The figure shows how to mount D-A9(

30

21.4 24.9 M L Q A D D O N M M Note 1) D is maximum diameter.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type

A L6 D L5 M L3 L1 T L2 ASG32F-01 ASG42F-02 ASG52F-03 ASG62F-04 H (Width across flats) L4 Applicable tubing O.D. d L6 A D L5 M T L1 L3 L2 Max.

Modular Type Regulators Series AR

D U With Auto Drain S F W M 4 T BRACKET MOUNTING THREAD R C G J Q P K N 2 A H L E IN OUT Bracket (Optional) D NPT 1/4 5 Series AW20~40 Filter Regulator How To Order AW 30 N 03 D 8 Z X48 Filter Regulator With External Epoxy Coating, Stainless Fasteners Name Plate, Caution Plate On Bowl in psi, F Body Size Symbol 20 30 40 Size 1/8 3/8 1/2 Bowl Symbol 2 8 Applicable Body Size 20 30, 40 Description

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

Dimensions Applicable tubing O.D. d Inch Size Metric Size L3 (1) Model L3 Model Weight (g) Weight (g) M1 d M1 D1 D2 L2 L1 D2 D1 L2 L1 d Min. 24.9 25.5 Min. 24.9 25.5 26.6 27.6 28.7 30.2 31.5 Max. 27.7 28.5 Max. 27.7 28.5 29.8 32.6 33.7 35.2 36.5 6 7 8 9 12 18 21 24 26 31 3.2 4 6 4 6 6 8 6 7 8 12 13 26 31 AS1001FM-23 AS1001FM-04 AS1001FM-06 AS2001FM-04 AS2001FM-06 AS2051FM-06 AS2051FM-08 AS1001FM

VCC

PA PA PA PA PA IN IN PA IN RETURN IN RETURN IN RETURN IN 646 Valve for Water and Chemical Base Fluids VCC Series How to Order Manifold 02 VV CC1 G M 06 C4 04 With gate valve Passage number Gate valve and cleaning valve mountable number 2 port valve, Cleaning valve 2/3 port valves mixed mounting 2 M 02 04 06 Cleaning valve (2 port valve): 1 pc. + Gate valve: 1 pc.

AW

Valve r opens through the stem, and the outlet pressure is released to the inlet side (Figure 2). 372 Filter Regulator Series AW10 to AW60 Filter Regulator with Backflow Function Series AW20K to AW60K Dimensions AW60(K) AW10, AW20(K) Panel fitting dimension J T N D M J T M W Y F S U Bracket (Option) N D IN OUT R Z B C Q V U IN OUT K Plate thickness AW10, AW20(K): Max. 3.5 S OUT Bracket (Option

Fluoropolymer Piping Equipment

TLM TILM Dimensions TD TID Tubing extension union elbow: LQ1E-T TH TIH B side D M H B L3 L2 M C A side SMC 6 1 25 (E) C L1 H Class 6 Class 2 to 5 Metric Size Inch Size Model A side B side B C E H L1 L2 L3 M Min. port size Applicable tubing O.D. Tubing size (D) Model A side B side B C E H L1 L2 L3 M Min. port size Applicable tubing O.D.

Smooth Cylinder/Low Speed Cylinder

Dd9 Applicable d L L1 m t Part no.

5-Port Solenoid Valve

m * The P and E ports are only available on the U and D sides for the built-in silencer type. 3/5(E) port is plugged.

AC Servo Motor Driver (Pulse input type/Positioning type ）

H T E d W T D L Max.

Valve Single Unit

specifications Mixed M D D side In the case of mixed specifications (M), indicate separately on the manifold specification sheet.