PFxx-OMX0002

pulse converted value setting pulse converted value PLS1_L U8 0 Y 0: 100 (L/pulse) 1: 1000 (L/pulse) OUT2 accumulated 1520 0x05F0 0 R/W 3000/6000 L range 0: 1 (L/pulse) 1: 10 (L/pulse) 12000 L range 0: 10 (L/pulse) 1: 100 (L/pulse) 1530 0x05FA 0 R/W PLS1_Ft3 U8 0 Y 0: Add (Addition) 1: dEC1 AC (Setting of the accumulated flow output direction) Setting of the accumulated flow output direction

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

7.5 M5 x 0.8 (P, R port) 17.5 23 L plug connector (L): 10-SYJ34M-L-M5 M plug connector (M): 10-SYJ34M-M-M5 M8 connector (WO): 10-SYJ34M-WO-M5 Approx. 300 (Lead wire length) 41.5 [48.5] 26.1 46 M8 x 1 28.5 52.6 [59.6] Approx. 300 (Lead wire length) 58.5 [60.7] 48.7 [50.9] 57.6 50.2 43.7 R P R P R P 10 8.6 10 8.6 10 8.6 23 23 23 5 5 5 28.5 28.5 28.5 35.6 35.6 35.6 Refer to page 646 for dimensions

Mechanically Jointed Rodless Cylinder Series MY1

MY1B16 to 100 MY1M16 to 63 MY1C16 to 63 MY1H16 to 40 L L R L L L L R R R R R L R R L Note 2) Note 2) R R L L O-ring L R Slide table operating direction Piping tube Note 2) For bottom piping, refer to the figure above.

0.4

Note) Refer to page 425 for How to Order Pilot Valve Assembly. 423 Exploded View of Manifold VQ1000 Plug-in Unit: Exploded View (F/P/L/S kit) Manifold block assembly U-side end plate assembly Housing assembly, SI unit, D-side end plate assembly r S kit P kit F kit L kit q y r i !5 w o !0 r !4 25 pins (Top entry) (Integrated housing type) !1 !3 !

Title not found

Manual override Nil: Nonockins push type 'oltage suppressor wrh ---'l ,hl wth sfige voftageJUepresd B: Lock ng iype (s oned) lD tr]]i\ -r1.LrF-r }pos lDn qhausl cn1er . t_tr-r fll, r-itr'Lt lir. ,L]! gpos ton pressure center ]]-trr\i rt it, rN !fT.",d""d_l I nuonerseat IIE t i r ; \ 1 . 1 r q t l 6. r': 6) G) ( : . : 6 ?

Digital Flow Switch (Integrated display type) ( compatible)

L type) [00.50] 00.50 L/min (100 L type) [0.126] 0.126 L/min (250 L type) [ P_2] Set value (OUT2) Page 44 5% of maximum rated flow [00.20] 00.20 L/min (4 L type) [000.8] 000.8 L/min (16 L type) [002.0] 002.0 L/min (40 L type) [000.5] 000.5 L/min (100 L type) [00.12] 00.12 L/min (250 L type) [ H_2] Hysteresis (OUT2) Page 45 [ dtH2] Delay time setting at ON [ 0.00] 0.00 s Page 45 [ dtL2] Delay

TABLE OF CONTENTS

Body Brass Body Hydrolic Oil Non-Flammable NR NR NR NR Standard R R R R Hydrochloric Acid NR NR NR NR Hydrogen R R R R # Inert Gases R R R R JP4 JET Fuel V V V V JP5 JET Fuel V V V V Kerosene R R R R Ketones PP NR PP NR Lacquer PP PP PP PP Linseed Oil R R R R Lubrication R R R R Mercury R*** NR R*** NR Natural Gas R R R R Nitric Acid PP NR PP NR Nitrogen R R R R Oxalic Acid NR NR NR NR Oxygen

CATALOG VC10

Body Brass Body Hydrolic Oil Non-Flammable NR NR NR NR Standard R R R R Hydrochloric Acid NR NR NR NR Hydrogen R R R R # Inert Gases R R R R JP4 JET Fuel V V V V JP5 JET Fuel V V V V Kerosene R R R R Ketones PP NR PP NR Lacquer PP PP PP PP Linseed Oil R R R R Lubrication R R R R Mercury R*** NR R*** NR Natural Gas R R R R Nitric Acid PP NR PP NR Nitrogen R R R R Oxalic Acid NR NR NR NR Oxygen

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

Digital Flow Switch (Integrated display type) ( compatible)

min (4 L type) [008.0] 008.0 L/min (16 L type) [020.0] 020.0 L/min (40 L type) [00.50] 00.50 L/min (100 L type) [0.126] 0.126 L/min (250 L type) [ P_1] Set value (OUT1) Page 38 5% of maximum rated flow [00.20] 00.20 L/min (4 L type) [000.8] 000.8 L/min (16 L type) [002.0] 002.0 L/min (40 L type) [000.5] 000.5 L/min (100 L type) [00.12] 00.12 L/min (250 L type) [ H_1] Hysteresis (OUT1) Page

ZP

w r q ZPR 10 D N J 10 04 A10 y Connection thread (Male thread) R Width across flats G Buffer specification e H (Buffer body) A10 M10 x 1 A14 M14 x 1 J Rotating K Non-rotating Width across flats K J L L t Vacuum inlet (One-touch fitting) 04 4 06 6 08 8 Width across flats M Model A B C D E 2 F G H J K L M N P Vacuum inlet direction q Pad dia.

Digital Flow Switch ( compatible)

time at ON 10 ms increment Setting range 0 to 6000 7 R/W dtL2 (Delay time at OFF) S16 0 Y Setting of OUT2 delay time at OFF 10 ms increment AC2_L (Mantissa L) U16 0 Y Setting range 0 to 9 Setting of OUT2 mantissa Unit: when L is selected OUT2 accumulated flow 1 R/W 1500 0x05DC 2 R/W AC2_L (Index L) U16 0 Y Setting range 0 to 6 Setting of OUT2 index Unit: when L is selected setting 1 R/W

Digital Flow Switch ( compatible)

L) U16 0 Y Setting range 0 to 9 Setting of OUT1 mantissa Unit: when L is selected OUT1 accumulated flow 1 R/W 1300 5 0x0514 2 R/W AC1_L (Index L) U16 0 Y Setting range 0 to 6 Setting of OUT1 index Unit: when L is selected setting 1 R/W AC1_L (Mantissa Ft3) U16 0 Y Setting range 0 to 9 Setting of OUT1 mantissa Unit: when Ft is selected 1310 5 0x051E 2 R/W AC1_L (Index Ft3) U16 0 Y Setting

Digital Flow Switch (Integrated display type)

0x0708 0 R/W Digital filter U8 3 Y 0: inS (Instantaneous flow) Measurement mode display screen setting 2000 0x07D0 0 R/W Display mode U8 0 Y 1: AC (Accumulated flow) 2: ioL (IO-Link mode) Resolution setting: only for 1 L, 10 L and 100 L 2010 0x07DA 0 R/W Display resolution U8 0 Y 0: 1000 resolution 1: 100 resolution -81No.PF-OMW0007-E Product individual parameters (continued) Index Sub Access

AC Servo Motor Driver (Network card type ）

Zero speed detection ZSP ZSP turns on when the servo motor speed is zero speed (50 r/min) or less. Zero speed can be changed with [Pr. PC07]. OFF level 70 r/min 1) Forward rotation direction 3) 2) 20 r/min (Hysteresis width) ON level 50 r/min [Pr. PC07] Servo motor speed 0 r/min [Pr.

0.

plug connector (L) With light/surge voltage suppressor VQZ300 Non-locking push type (Tool required) (A) 2 2.4 3.0 + (Standard) 12 VDC 24 VDC (Option) 100 VAC 200 VAC 110 VAC 220 VAC 1 (P) 3 (R) L-type plug connector (L) N.C.

Electric Slide Tables

L (A) LES16 R L (A) LES25R L (A) LES8D(A) LES16D(A) LES25D Model 12 Series LES Construction: Basic Type/R Type, Symmetrical Type/L Type A-A !

0.55

Grommet (A) 2 1/8 1/4 4.2 1 (P) 3 (R) L-type plug connector Non-locking push type VP500 N.O. (A) 2 Base mounted Body ported 1/4 3/8 1 (P) 3 (R) P. 1 8.9 M-type plug connector External pilot N.C./N.O.

MY1

Data MY1B16 to 100 MY1M16 to 63 MY1C16 to 63 MY1H16 to 40 L L R L L L L R R R R R L R R L Note 2) Note 2) R R L L O-ring L R Slide table operating direction Piping tube Note 2) For bottom piping, refer to the figure above.

Refrigerated Air Dryers Series IDF/IDU

P AMG K 4 x 13 AFF AM B C D E F G K L M N P Q Dimensions (mm) A Port size Model IDFA22E IDFA37E AMD R 1 775 600 290 623 134 405 698 93 13 25 85 340 R 11/2 855 680 AMH AME IDFA55E, IDFA75E AMF A R B SF SFD Q E LLB D AD GD G F C M N L P K 4 x 13 R Dimensions (mm) A B C D E F G K L M N P Q Model IDFA55E IDFA75E Port size 800 (868) R 2 470 855 (128) (273) (110) 13 500 75 700 526 (110) 519 900