Air Cylinder Head flange 5 5 5 5 13 CM2 Mounting bracket weight CM3 Clevis pin 1 3 CG1 One-touch connecting pin for double clevis 2 4 Single knuckle joint 17 23 Double knuckle joint (including knuckle pin) 25 21 CG3 Accessories Double knuckle joint JMB (With one-touch connecting pin) 26 22 Rod end cap (Flat type) 1 1 1 1 2 MB Rod end cap (Round type) 1 1 1 1 2 Pivot Bracket (T-bracket) 32 50 MB1 :
FT1 1/4 FT4 1/4 FT5 1/4 FT6 1/4 FT3 1/4 FT8 1/4 FT2 1/2 17/16 15/16 29/32 15/16 31/32 / 6 3 11/8 11/16 Hex Typ. 111/16 29/32 13/8 13/16 19/32 Typ. 15/16 not shown 13/32 67 1/4 FT2 x 3 1/4 FT4 x 3 1/4 FT5 x 3 1/4 FT6 x 3 1/4 FT3 x 3 1/4 FT3 1/2 x 3 1/4 FT2 1/2 x 3 13/64 25/32 Bulkhead Fittings 25/32 10-32 10-32 5/16 1/4 1/4 1/4 1/4 57/64 10-32 1/4 Hex Typ. 57/64 10-32 5/16 Hex 1/4-28 68 10
4 1/4 44 16 32 10 85 15 26 54 10 10 8 M8 x 1.25 50 Up to 600 20 to 600 35 32 70 27 108 1/4 1/4 52 20 40 10 95 17 27 59 13 12 11 M8 x 1.25 63 Up to 600 20 to 600 35 32 86 27 115 1/4 1/4 64 20 40 10 102 17 26 67 18 15 11 M10 x 1.25 80 Up to 750 20 to 750 40 37 102 32 129 1/4 1/4 78 25 52 14 113 21 30 72 23 17 13 M12 x 1.75 100 Up to 750 20 to 750 40 37 116 41 140 1/4 1/4 92 30 52 14 124 21
Port size M5 x 0.8 SX3000 SX3000-39-1 A SX5000 SX5000-39-1 A SX7000 SX7000-39-20A Series Assembly part no. Port size M5 x 0.8 Rc Rc Round head combination screw SX3000 SX3000-38-1 A SX5000 SX5000-38-1 A SX7000 SX7000-38-20A 1 8 1 4 1 8 1 4 Note) The SUP port may be either on the lead wire side or on the end plate side.
Port size M5 x 0.8 SX3000 SX3000-39-1 A SX5000 SX5000-39-1 A SX7000 SX7000-39-20A Series Assembly part no. Port size M5 x 0.8 Rc Rc Round head combination screw SX3000 SX3000-38-1 A SX5000 SX5000-38-1 A SX7000 SX7000-38-20A 1 8 1 4 1 8 1 4 Note) The SUP port may be either on the lead wire side or on the end plate side.
(A contact) 1 2 1 pc. 2 pcs. 6 6 pcs.
B-1 A-1 B-2 A-2 B-3 A-3 B-4 A-4 Connector D terminal no. 12 13 7 6 9 8 11 10 3 Signal Cable color Shield Brown Black Red Black Orange Black Yellow Black Vcc GND A A B B Z Z Connector B terminal no.
Applicable shaft type: W CRA1 CRQ2 (mm) MSQ L2 Y L2 max Size (mm) E3 = E1 = Y = 10 L1 X L3 max Size 3 to 8 Y 1 5 (8 Y) to (Y 1) MRQ L2 = L4 = 10 15 3 to 14 X 1 3 to 9 Y 1.5 9 (14 X) to (X 1) 6 (9 Y) to (Y 1.5) L1= 15 20 3 to 18 X 1.5 3 to 10 Y 1.5 D10 (18 X) to (X 1.5) 7 (10 Y) to (Y 1.5) L3 = 20 30 3 to 20 X 1.5 5 to 13 Y 2 10 (20 X) to (X 1.5) 8 (13 Y) to (Y
8 17 13 36 15 M26 x 1.5 Rc 1/4 70 43 16 11 29 50 16 92 M6 x 1.0 x 10 21 13 46 19 M32 x 2.0 P TN S W X ZZ R T Model Nil TF REA25 REA32 REA40 Rc 1/8 NPT 1/8 111 50 30 137 8 17 Rc 1/8 G1/8 NPT 1/8 124 50 40 156 8 17 Rc 1/4 NPT 1/4 150 60 40 182 10 19 REA50/63 14 2 x P L NA 33 14 E(h8) E(h8) I X D REA REB 4 x TC Effective thread depth R 14 REC 8 x Q Effective thread depth R 14 22 23 25 K W
13 37.5 37.5 13 M6 x 1.0 3 16 3.5 40 16 f8 57 28.5 42.5 48.5 73 1/8 16 115 38 35 13 59.5 44.5 M6 x 1.0 3 16 4.5 50 20 f8 66 33 49 55.5 78 1/8 16 122 46.5 40 14 64 47 M8 x 1.25 4 16 4.5 63 20 f8 78 39 52.5 59.5 90 1/4 16 134 56.5 45 14 73 53 M8 x 1.25 4 16 5.5 80 25 f8 98 49 64.5 71.5 113 1/4 17 170 72 45 20 92 65 M10 x 1.5 5 17 7.5 100 30 f8 116 58 73.5 80.5 131 1/4 17 188 89 55 20 109
Nil None 1 1 station 9 9 stations Note 1) Without SI Unit, the symbol is nil.
Valves are numbered from the D side according up to the number of stations. 939 Series VQZ1000/2000/3000 Dimensions: VQZ3000-SA: EX510 Gateway System Serial Transmission System U side D side L4 L3 One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 3.2, 1/8" 4, 5/32" 6, 1/4" 65.5 11 L5 (For 1/4) Manual override Output no. 16.5 + + 11.5 13 11 + + 1/4 [4(A), 2(B) port] 9 7 1/4 [1(P)
l % M5 M6 i M8 Ye I M4 1MS M6 , M8. li ZPT02 2.5 3.5 ~~112.5 3.5 \ '(~i~ ~ ~ 1-\ ZPT08 (3.5) (3) H 1""'2., "2,'~) {:~~.:) zpno 10 12 171 (6) (13) ZPn3 10 12 10 12 10 12 ,'6.5) (6) : (13) (6.5) (6) ' :13) 1 1 6.5) (6) (13) II . 13 (7) (7) (13) ZPn6 I ZPT20 IS 26 15 26 15 15 15 16 .
A 13 CONTENTS 1. FUNCTIONS AND CONFIGURATION 1 1 to 1 -12 1.1 Introduction . 1 2 1.2 Function block diagram . 1 3 1.3 Driver standard specifications . 1 4 1.4 Function list . 1 5 1.5 Model code definition . 1 6 1.6 Combination with servo motor . 1 9 1.7 Structure . 1 -10 1.7.1 Parts identification . 1 -10 1.8 Configuration including auxiliary equipment. 1 -11 2.
1 0 1 2 3 4 5 6 10 7 8 9 10 11 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CY3R20 CY3R63 1000 200 Allowable driving force Fn (N) Allowable driving force Fn (N) 100 500 400 50 300 30 200 100 10 20 30 40 50 Usable range 5 Usable range 1 0 1 2 3 4 5 6 10 7 8 9 10 11 12 13 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
13 to 24 stations/Double wiring P/S kits for 2 to 24 stations/Single wiring L0 kit : Stations (1 to 8) L1 kit : Stations (1 to 8) L2 kit : Stations (1 to 8) !
5.6 114 53 90 9 M5 x 0.8 30 20 MY1H25 NE P NW 53 NH 39 40.5 Rc 1/8 140 11 6.6 19 30 68 16 M8 x 1.25 6.8 140 70 110 13 M6 x 1 37 25 MY1H32 49 64 50 Rc 1/8 170 14 8.5 23 36.5 84 15 M10 x 1.5 8.6 170 85 121 13 M6 x 1 45 30.5 MY1H40 63 Rc 1/4 61.5 75 P indicates cylinder supply ports.
x 12 2.5 9 13 NV M4 x 12 2.5 9 5.2 NU M4 x 12 2.5 11 13 NT M3 x 12 1.5 12 17.5 NM1 M4 x 5 1.5 6.35 5.1 NM2 M4 x 12 2.5 10 12 Hexagon socket head cap screw/set screw Hexagon socket head cap screw/set screw (for hub fixing)* 1 1 1 1 1 1 1 1 1 (for hub fixing)* 1 1 1 1 1 Ring spacer 1 1 1 1 Hexagon socket head cap screw (for motor flange fixing)* 2 2 * For screw sizes, refer to the hub
(R) 1 (P) Poppet VM200 2 port 3 port (A) 2 (A) 2 Side ported 1/4 Page 13 12 12 10 10 1 (P) 3 (R) 1 (P) VM400 3 port (OUT) 2 3 10 12 1 (N.C.)