42

: VQ430 -l 3-position exhaust center: VQ440 -l 3-position pressure center: VQ450 -l 3-position double check: VQ460 -l 0 1 0 1 0 1 0 1 0 1 179 106 90 73 50 2 11(12.5) 4(A) port 11(12.5) 2(B) port Indicator light Indicator light 165 179 106 90 2 59 73 50 2 4 48 38 24.6 11(12.5) 2(B) port 11(12.5) 4(A) port B A 14 12 1 5 3 4 2 45 30 38 24.6 A B Manual override 2 x 5.6 Mounting hole 48 B A 14

Modular F.R.L. Units

Example 1) When the pressure in the rear and the front of the cylinder differs: Example 2) When the air supply is cut off and releasing the inlet pressure to the atmosphere, the residual pressure release of the outlet side can be ensured for a safety purpose. 12 1 1 2 2 1 2 1 3 1 2 1 L 14 2 4 12 10 5 1 3 How to Order Refer to page 65 for size 10.

Electric Actuator

2 3 Cable color Circuit U V W Red White Black Connector D terminal no. 12 13 7 6 9 8 11 10 3 Connector A2 terminal no.

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

-SYJ5223-WO-M5 Approx. 300 (Lead wire length) Applicable cable O.D. 3.5 to 7 MAX.10 28.1[35.1] 60.9 53.4 12.7 M8 x 1 32.6 42.1 15.1 39.2[46.2] Approx. 300 (Lead wire length) Pg7 20 20 20 20 107[111.4] 3 3 3 3 87.4[91.8] 105.2 125.2 90.4 77.4 45.4 127 11 11 11 11 23 2-2.6 (For mounting) 2-2.6 (For mounting) 2-2.6 (For mounting) 23 23 23 27 2-2.6 (For mounting) Refer to page 563 for dimensions

MU

14 LD 5.5 6.6 9 11 13.5 LS 79 90 96 116 123 LX 11 12 15 18 22 X 12 16 18 21 24 Model MUL25 MUL32 MUL40 MUL50 MUL63 LH 29 37 46 57 67 LT 3.2 4.5 4.5 5 6 LZ 23 27 31 37 48 Axial foot MUL25SMU25, #2 (#1+#2+#11) MUL32SMU32, #2 (#1+#2+#11) MUL40SMU40, #2 (#1+#2+#11) MUL50SMU50, #2 (#1+#2+#11) MUL63SMU63, #2 (#1+#2+#11) CU CQS CQ2 MU (mm) ZZ 99 106 114 139 145 FZ 24 28 32 39 50 FY 66 82 102 126

Air Fittings & Tubing

elbow 37 1 2 11 3 8 1 2 13 Tl Union tee T Male branch tee Same dia. rod Same dia. tube 00 99 Tube 01 Tube 03 Accessory Y Male run tee 1 8 5 32 Tube 05 3 16 Tube 07 1 4 Tube 09 5 16 Tube 11 3 8 Tube 13 1 2 Union Y Description Plug (Orange) Symbol KQ2P, KQP U Plug-in Y Branch Y R Plug-in reducer Bulkhead connector E Bulkhead union With mark: With sealant style is available.

Table of Contents

Rc 1/2 Rc 11/2 Rc 2 3B flange Rc 11/4 Rc 1 32 67 78 Rc 1/2 Rc 1/2 Rc 3/4 Rc 3/4 Rc 1 Rc 3/4 Weight (kg) Coating color Drain valve (1 pc.) 9.7 11.5 59 95 High efficiency drain Drainage is efficiently removed by built-in drain separator. Visible outlet air temperature Outlet air temperature is easily checked by thermometer, resulting in easy maintenance.

XL

Orifice mm Differential pressure MPa Port A Pa Internal Fitting External XSA1-12 XSA1-22 XSA2-22 XSA2-32 XSA3-32 XSA3-43 2 3 0.8 VCR 0.3 3 6 Direct solenoid operation (N.C.) 10-11 1.0 1/4 10 -6 10 -9 10 -11 P.32 to P.34 2 0.3 SWJ 4.5 11 10 -10 0.8 0.3 6 3/8 19 Differential Pressure: Indicates the maximum operable pressure difference between port P and port A.

Parallel Style Air Gripper Series MHZ

1/4 1 1/4 to 1 1/2 1 3/4 to 2 2 to 2 1/4 MHS MHC MHT MHY Impact load Clearance MHW -X 3.

Programless Controller Series LECP1

Produced upon receipt of order (Robotic cable only) Connector A B1 (Terminal no.) 1 2 5 6 A1 (14) (18) (17.7) (10.2) A6 B1 B3 A1 A3 B6 (13.5) With lock and sensor 1 2 15 16 Connector B Connector D (30.7) L (11) (14.7) Cable type (10) Connector A terminal no. B-1 A-1 B-2 A-2 B-3 A-3 Connector C terminal no.

SV

With External Pilot Specifications Ground terminal 46.5 (Pitch) 23.5 21.3 P = 20.5 18 11 16.5 2-M12 17.7 11.6 13.5 SV 36.1 83.8 5 37.6 42.7 3 3 PWR 3 3 3 5 PWR T T 3 5 E E 3 5 E 3 5 4 A E 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 60.3 2 2 2 2 76.8 SZ 1 1 1 1 BUS 4632 BUS 4632 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 4632 4632 1 P 1 P 1 P 1 P One-touch fitting [1(P), 3/5(E) port] Applicable tubing

High Vacuum Angle Valve, XL Series

Orifice mm Differential pressure MPa Port A Pa Internal Fitting External XSA1-12 XSA1-22 XSA2-22 XSA2-32 XSA3-32 XSA3-43 2 3 0.8 VCR 0.3 3 6 Direct solenoid operation (N.C.) 10-11 1.0 1/4 10 -6 10 -9 10 -11 P.32 to P.34 2 0.3 SWJ 4.5 11 10 -10 0.8 0.3 6 3/8 19 Differential Pressure: Indicates the maximum operable pressure difference between port P and port A.

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

10.5 11.5 13 14 CB 19 19 26.5 28 31 A 54 57 70 79 93 B 54 62 74 92 112 NB 8h9 8h9 10h9 12h9 14h9 M 2 2 2 3 4 AD 24 26 31 37 46 AA 63 66 80 91 108 AC 3 3 3 4 5 K 9 9 10 11 12 Model MHSJ3-32D MHSJ3-40D MHSJ3-50D MHSJ3-63D MHSJ3-80D +0.025 0 +0.025 0 +0.030 0 +0.030 0 +0.036 0 0 -0.036 0 -0.036 0 -0.036 0 -0.043 0 -0.043 MRHQ MA DVA 4H9 4H9 5H9 6H9 6H9 Q 11 12 14 17 20 SC 7 7 8 8 8 WB 2 2 2

KJ

(inch) Applicable fitting size d (inch) M Min. port size Note) Weight (g) D1 D2 L1 L2 A Model Applicable tubing KQ2L01-03 KQ2L01-05 KQ2L03-05 KQ2L03-07 KQ2L05-07 KQ2L05-09 KQ2L07-09 KQ2L07-11 KQ2L09-11 KQ2L09-13 KQ2L11-13 5 32 3 16 3 16 1 4 1 4 5 16 5 16 3 8 3 8 1 2 1 2 9.6 7 10 10 8 3 7 6 3 8 11 12 17 17 30 25 17 17.5 25 13.5 2.2 2.5 3 2.5 15.5 1 8 21.5 22.5 14.5 15.5 23 24.5 23.5 33 33.5

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

[90.4] 300 (Lead wire length) 107 79.8 VS 45.4 45.4 11 VS7 11 A B A B 5 5 2-2.6 (Mounting holes for manifold) 10 10 (Lead wire length) 19 19 2-2.6 (Mounting holes for manifold) 300 26.6 26.6 40.6[47.1] 29.5[36] 23 23 17.1 10.5 10.5 10 2-2.6 (Mounting holes) 3 3 11 2-2.6 (Mounting holes) 10 11 15 77.4 15 77.4 [ ] for AC Other dimentions are the same as the grommet style

Sine Rodless Cylinder Series REA/REB

Horizontal Operation (Load, Lateral offset Lo) Bore size (mm) Allowable load mass WA (kg) 15 5 + 2 (1.95 + Lo) sin 45.5 6.5 + 2 (2.4 + Lo) sin 115 8 + 2 (2.8 + Lo) sin 180 9 + 2 (3.1 + Lo) sin 330 11 + 2 (3.95 + Lo) sin 624 13 + 2 (4.75 + Lo) sin Lo: Distance from mounting surface to load center of gravity (cm) 10 15 20 25 32 Lo: Distance from center of side block to load's center of gravity

Vacuum Pad

Dimensions: Pad Unit ZP2-B04MB ZP2-B06MB ZP2-B08MB 4.5 8 8 6 6 3 4 4 2 1.4 1.5 1 2 2 2 2 9 9 9.6 6 4 4 4.6 2.5 2.5 2.5 1.5 3.3 4.7 4.1 6 7 8 4.8 9 8.4 ZP2-B10MB ZP2-B15MB ZP2-B20MB 15 11 10.8 11 7.8 4.6 7.8 4.6 4.6 5.5 3.5 4.5 3.5 3 3.5 13 11 9.5 18 14.4 10.8 9.4 12 6.8 15 20 10 21 16 11 Adapter Mounting Dimensions If an adapter will be made by the customer, design the adapter with the dimensions

Vacuum Pad

Dimensions: Pad Unit ZP2-B04MB ZP2-B06MB ZP2-B08MB 4.5 8 8 6 6 3 4 4 2 1.4 1.5 1 2 2 2 2 9 9 9.6 6 4 4 4.6 2.5 2.5 2.5 1.5 3.3 4.7 4.1 6 7 8 4.8 9 8.4 ZP2-B10MB ZP2-B15MB ZP2-B20MB 15 11 10.8 11 7.8 4.6 7.8 4.6 4.6 5.5 3.5 4.5 3.5 3 3.5 13 11 9.5 18 14.4 10.8 9.4 12 6.8 15 20 10 21 16 11 Adapter Mounting Dimensions If an adapter will be made by the customer, design the adapter with the dimensions

Vacuum Pad

Dimensions: Pad Unit ZP2-B04MB ZP2-B06MB ZP2-B08MB 4.5 8 8 6 6 3 4 4 2 1.4 1.5 1 2 2 2 2 9 9 9.6 6 4 4 4.6 2.5 2.5 2.5 1.5 3.3 4.7 4.1 6 7 8 4.8 9 8.4 ZP2-B10MB ZP2-B15MB ZP2-B20MB 15 11 10.8 11 7.8 4.6 7.8 4.6 4.6 5.5 3.5 4.5 3.5 3 3.5 13 11 9.5 18 14.4 10.8 9.4 12 6.8 15 20 10 21 16 11 Adapter Mounting Dimensions If an adapter will be made by the customer, design the adapter with the dimensions

Vacuum Pad

Dimensions: Pad Unit ZP2-B04MB ZP2-B06MB ZP2-B08MB 4.5 8 8 6 6 3 4 4 2 1.4 1.5 1 2 2 2 2 9 9 9.6 6 4 4 4.6 2.5 2.5 2.5 1.5 3.3 4.7 4.1 6 7 8 4.8 9 8.4 ZP2-B10MB ZP2-B15MB ZP2-B20MB 15 11 10.8 11 7.8 4.6 7.8 4.6 4.6 5.5 3.5 4.5 3.5 3 3.5 13 11 9.5 18 14.4 10.8 9.4 12 6.8 15 20 10 21 16 11 Adapter Mounting Dimensions If an adapter will be made by the customer, design the adapter with the dimensions