New

10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 10 102 1.

OMR0031

An example is shown below. direction + direction direction + direction 0 5 10 [mm] 0 5 10 [mm] This example shows the Target Position set at 10 mm. The table of the Card Motor moves to 10 mm from the origin position. 11.5 Relative positioning The Target Position is determined based on the current position.

7

Low temperature operation 1) The valve can be used in an ambient temperature of between 10 to 20C.

MLU

MU-D02 MU-D03 MU-D04 MU-D05 +0.058 0 +0.058 0 +0.058 0 +0.058 0 +0.058 0 +0.058 0 +0.058 0 +0.070 0 8 10 10 14 8 10 10 14 Applicable pin no. CD-MU02 CD-MU03 CD-MU04 CD-MU05 DZ 8 10 10 14 CZ 8 10 10 14 DY 9 11 13 16 CX 9 11 13 16 DX 18 22 26 32 CT 9.5 11 14 17 DT 9.5 11 14 17 CR 5.3 6.4 8.4 10.5 DR 5.3 6.4 8.4 10.5 CL 26 42 54 64 DL 26 42 54 64 Part no.

Direct Operated

/N.O. 1/8 to 1/2 2 to 10 10 to 50 N.C.

Model Selection 1

) 0.6 0.7 Critical pressure 0.65 [658] (158) 0.5 0.6 0.55 Sonic [656] (151) 0.5 0.4 0.45 [654] (143) 0.4 0.3 0.35 0.3 [650] (133) 0.2 0.25 0.2 [646] (120) 0.15 0.1 0.1 0.05 2 2 2 2 3 2 3 2 3 2 03 04 VX211 VX22 VX23 VX2 4 VX2 50 VX2 60-02 VX2 602 10 15 5 3 5 10 15 20 25 30 4.5 10 15 20 30 40 50 60 3 2 6 30 60 8 25 35 10 20 40 10 35 Flow rate Q kg/h Figures inside [ ] indicate the saturated

Digital Flow Switch (Remote type monitor unit)

to 186 1.0 to 38.0 2 to 76 8 to 186 CFM x 10-2 CFM x 10-2 CFM x 10-1 CFM x 10-1 CFM x 10-1 flow Flow Min. setting/display unit 0.5 2.0 0.5 1.0 2.0 CFM x 10-2 CFM x 10-2 CFM x 10-1 CFM x 10-1 CFM x 10-1 Accumulated Setting/display flow range 0 to 9 ft3 x 10-2 0 to 9 ft3 x 10-1 flow Min. setting/display unit 1 ft3 x 10-3 1 ft3 x 10-1 Conversion of accumulated pulse 0.5 2.0 0.5 1.0 2.0 ft3 x

4-channel Flow Monitor (Remote type monitor unit)

1.0 to 38.0 2 to 76 8 to 186 CFM x 10-2 CFM x 10-2 CFM x 10-1 CFM x 10-1 CFM x 10-1 flow Flow Min. setting/display unit 0.5 2.0 0.5 1.0 2.0 CFM x 10-2 CFM x 10-2 CFM x 10-1 CFM x 10-1 CFM x 10-1 Accumulated Setting/display flow range 0 to 9 ft3 x 10-2 0 to 9 ft3 x 10-1 flow Min. setting/display unit 1 ft3 x 10-3 1 ft3 x 10-1 Conversion of accumulated pulse 0.5 2.0 0.5 1.0 2.0 ft3 x 10-2/

60

Name plate For VX21: VX021N-10 For VX22: VX022N-10 For VX23: VX023N-10 P Clip Part No. (For N.O.) For VX21: ETW-7 For VX22: ETW-8 For VX23: ETW-9 P Strainer Part No.

Angle Seat Valve

Orifice diameter [mm] Port size Valve type Orifice diameter [mm] Port size Valve type Orifice diameter [mm] Port size Valve type N.C. 1/4 to 1 10, 15, 20, 25 10, 15, 20, 25, 35, 40, 50 N.C./N.O. 1/4 to 50A 10 to 12 N.C.

Angle Seat Valve /

/N.O. 1/4 to 50A 10 to 12 N.C.

3

For a 10 orifice (VXS23/Port size 1/4), P 0.05 MPa The optimum size for a pressure differential of P 0.2 MPa and a flow of 50 L/min will be the VXS23 (10 orifice, port size 3/8). 500 400 VXS26 25 Cv = 12 300 VXS25 20 Cv = 9.2 200 VXS24 15 Cv = 5.3 Flow rate Q [L/min] 100 VXS23 Port size 3/8 10 Cv = 2.8 VXS23 Port size 1/4 10 Cv = 2.4 50 40 30 25 20 10 0.01 0.02 0.03 0.04 0.05 0.1 0.2 0.3

Direct Operated, 2 Port Solenoid Valve, For Water, Oil, Steam, Air, Series VX

) 0.6 0.7 Critical pressure 0.65 [658] (158) 0.5 0.6 0.55 Sonic [656] (151) 0.5 0.4 0.45 [654] (143) 0.4 0.3 0.35 0.3 [650] (133) 0.2 0.25 0.2 [646] (120) 0.15 0.1 0.1 0.05 2 2 2 2 3 2 3 2 3 2 03 04 VX211 VX22 VX23 VX2 4 VX2 50 VX2 60-02 VX2 602 10 15 5 3 5 10 15 20 25 30 4.5 10 15 20 30 40 50 60 3 2 6 30 60 8 25 35 10 20 40 10 35 Flow rate Q kg/h Figures inside [ ] indicate the saturated

Microspeed Cylinders CJ2X/CUX/CQSX/CQ2X/CM2X

speed (mm/s) 0.025 0.5 0.06 1 0.06 1 0.035 (0.025) 1 (0.5) 32, 40 32, 40 10, 16 10, 16 0.01 0.5 0.05 0.5 Figures in ( ) are for 11-CQ2X 20, 25, 32 50, 63, 80, 100 Air Cylinder Series CM2X Air Cylinder Series 10-/11-CM2X Compact Cylinder Series CQSX Compact Cylinder Series 10-/11-CQSX Bore sizes (mm) Min. operating pressure (MPa) Min. operating pressure (MPa) Min. piston speed (mm/s) Min.

-fl Seies

|VFR2200-OF 3 posiiion cloed center:NVFR230O-oF 3 position exhaust center:NVFR24oGOF 3 pooition pressure center:NVFB250GOF < ):26NPTF < >:/aNPTF Series NVFRz000:Base Mounted Tlpe Non Plug-in type 2 position single/Dilnerwions Grommet:NVFR21 10-OG -o ; 3 ; 6 )o.t 10-32 No.n (M5) lfu I ES.!! 10-32l.

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

|VFR2200-OF 3 posiiion cloed center:NVFR230O-oF 3 position exhaust center:NVFR24oGOF 3 pooition pressure center:NVFB250GOF < ):26NPTF < >:/aNPTF Series NVFRz000:Base Mounted Tlpe Non Plug-in type 2 position single/Dilnerwions Grommet:NVFR21 10-OG -o ; 3 ; 6 )o.t 10-32 No.n (M5) lfu I ES.!! 10-32l.

1

Note 3) Refer to the catalog, since the dimensions of standard stroke Series CQ2 and CQS are different from that of long stroke type. 6-18-1 2 SMC Actuators: Copper-free Air Cylinders 6, 8, 10, 12, 15, 16, 20, 25, 32, 40, 50, 63, 80, 100, 125, 140, 160 Air Cylinders 20-series has been added by design modification. (98.6.1) Series Application Bore size (mm) Standard Copper-free 6 8 12 (10

MHC2

Model Bore size mm Holding moment (effective value) (1) Opening/closing angle (both sides) Weight (2) Action Model g 39 91 180 311 10 16 20 25 0.10 0.39 0.70 1.36 MHC2-10D MHC2-16D MHC2-20D MHC2-25D 30 to 10 Double acting 0.070 0.31 0.54 1.08 10 16 20 25 39 92 183 316 MHC2-10S MHC2-16S MHC2-20S MHC2-25S MHC2-16S 30 to 10 Single acting MHC2-10D Note1) At pressure 0.5MPa.

MHQG2

Three-type dust cover variations for diversified applications Note 1) Note 2) Model Opening/Closing stroke (mm) Mass (g) Operating system Model Cylinder bore (mm) Gripping force (Effective value) N MHQJ2-10D 10 11 4 90 MHZ MHQJ2-16D 6 16 34 180 Double acting MHQJ2-20D 10 20 42 340 MHF MHQJ2-25D 14 25 63 640 MHQJ2-10S 4 10 7.8 90 MHL MHQJ2-16S 6 16 26 181 Normally open MHQJ2-20S 10 20 33 342

AS

Flow Rate and Sonic conductance AS1002F 3.2, 4, 6 1/8", 5/32" 1/4" 100 0.28 AS2002F 4 AS3002F AS2052F AS4002F 12 Series Metric size 8 1/4" 5/16" 460 1.3 6 6 2 10, 12 8 6 10 Flow Direction Symbol on Body Tube O.D.