5 Port Solenoid Valve Series SV

0.7 0.8 0.9 1.0 200 CM2 20 50% 70% 10% 30% 150 Stroke mm AS2201F -01-06 AS2200-01 70% 100 50 10% 30% 50% 0 200 CM2 25 150 Stroke mm AS2201F -01-06 AS2200-01 100 50 0 ANA1 -C08 T0604 200 CM2 32 150 Stroke mm AS2201F -01-06 AS2200-01 100 50 0 200 CM2 40 150 Stroke mm AS2201F -02-06 AS2200-02 100 50 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200

High Vacuum Angle Valve, XL Series

1200 1200 1000 1000 800 800 Smooth exhaust valve T msec 600 600 400 400 200 200 0 0 25 40 50 63 80 25 40 50 63 80 Size Size Response time when closed (including pneumatic valve) Operation time when closed (vacuum valve only) Response time when open (including pneumatic valve) Operation time when open (vacuum valve only) 35 Series XL High Vacuum Angle Valve 2 As a function of pilot pressure

RSH/RS1H

CE2 ML2B Graph (1) Graph (2) RSA50, 63, 80 Bore size 50, 63, 80/ = 0 Bore size 50, 63, 80/ = 0.1 C J G5-S 1.0 1300 1300 RSH80 RSA80 RSH63 RSA63 RSH50 RSH50 RSA50 80 0.9 Operating pressure P [MPa] 1200 1200 CV 0.8 1100 1100 0.7 MVGQ 1000 1000 0.6 900 900 0.5 CC 63 80 Load weight m [kg] Load weight m [kg] 800 800 0.4 50 0.3 RB 700 700 0.2 600 600 J 0.1 63 500 500 50 1000 2000 3000 4000 5000

VXP21/22/23

550 740 1200 12 23 31 49 23 31 49 215 415 560 880 415 560 880 3300 1 4 1 2 1.0 1.0 1.0 1.0 1.0 1.0 Water Air Oil 1.5 4200 5400 Steam 1.0 5900 32A 7300 40A 9200 50A Note) Weight of grommet type.

Interface Regulator for VQ4000 5 Port Solenoid Valve

1400 1600 1600 0 0 200 400 600 800 1000 1200 1400 Flow rate l/min (ANR) Flow rate l/min (ANR) ARBQ4000-00-P (PA) ARBQ4000-00-P (PB) 0.7 0.7 0.6 0.6 Downstream pressure MPa Downstream pressure MPa 0.5 0.5 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0 200 400 600 800 1000 1200 1400 1400 0 0 200 400 600 800 1000 1200 Flow rate l/min (ANR) Flow rate l/min (ANR) 1MPa = 145 psi Nl/min X 0.035 = SCFM Pressure

Series SV

0.7 0.8 0.9 1.0 200 CM2 20 50% 70% 10% 30% 150 Stroke mm AS2201F -01-06 AS2200-01 70% 100 50 10% 30% 50% 0 200 CM2 25 150 Stroke mm AS2201F -01-06 AS2200-01 100 50 0 ANA1 -C08 T0604 200 CM2 32 150 Stroke mm AS2201F -01-06 AS2200-01 100 50 0 200 CM2 40 150 Stroke mm AS2201F -02-06 AS2200-02 100 50 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200

XL

1200 1200 1000 1000 800 800 Smooth exhaust valve T msec 600 600 400 400 200 200 0 0 25 40 50 63 80 25 40 50 63 80 Size Size Response time when closed (including pneumatic valve) Operation time when closed (vacuum valve only) Response time when open (including pneumatic valve) Operation time when open (vacuum valve only) 35 Series XL High Vacuum Angle Valve 2 As a function of pilot pressure

Bearing Type: L (Ball bushing bearing), Bore Size: 16mm, Port Type: Bore 12-16: M5x0.8; Bore 20-100: Rc, Stroke: 250mm, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: Z (5m), Number: 3 pcs.

Bearing Type: M (Slide bearing), Bore Size: 12mm, Port Type: Bore 12-16: M5x0.8; Bore 20-100: Rc, Stroke: 30mm, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: Z (5m), Number: 3 pcs.

Magnet: D (Built-in), Mounting: B [Through Hole (Standard)], Type: Standard, Bore Size: 63mm, Port Thread Type: Rc: 32-100 Bore; M Thread 12 to 25 Bore, Stroke: 75mm, Body Option: C (Rubber Bumper), Auto Switch Groove: Z (Auto Switch Mounting Grooves), Mounting Bolt: None, Rod End Bracket: None, Auto Switch: M9B--Solid State , Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector

Magnet: Built-in, Mounting: Both Ends Tapped, Type: Standard, Bore Size: 12mm, Port Thread Type: Rc: 32-100 Bore; M Thread 12 to 25 Bore, Stroke: 15mm, Body Option: Rod End Male Thread, Auto Switch Groove: Auto Switch Mounting Grooves, Mounting Bolt: None, Rod End Bracket: None, Auto Switch: M9B--Solid State , Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: 5m, Number:

Magnet: Built-in, Mounting: B [Through Hole (Standard)], Type: Standard, Bore Size: 63mm, Port Thread Type: Rc: 32-100 Bore; M Thread 12 to 25 Bore, Stroke: 75mm, Body Option: Rubber Bumper, Auto Switch Groove: Auto Switch Mounting Grooves, Mounting Bolt: None, Rod End Bracket: None, Auto Switch: M9B--Solid State , Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: 5m, Number

Magnet: -, Mounting: -, Type: -, Bore Size: -, Port Thread: -, Stroke 1: -, +: -, Stroke 2: -, Body Option: -, Auto Switch Groove: -, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -, Stroke Options: -

With no external leakage, the CY series can be used in many diverse environments. Magnetically coupled cylinders have a wide range of applications, and save mounting space. Loads and moments are possible through the use of integrated guides. A variety of guides can be used to achieve the necessary accuracy or allowable moment needed for your application. CY is available in 9 bore sizes,

Cylinder (Tube) Inner Diameter(φ): 16, Stroke(mm): 250, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Guided, Additional Function: Standard / With rod detent function, Environment, Applications: Standard, Operating Temperature(°C): -10～60, Operating Pressure(MPa): -, Cushion: Rubber bumper at both ends, Port thread type: M5 x

Cylinder (Tube) Inner Diameter(φ): 12, Stroke(mm): 30, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Guided, Additional Function: Standard / With rod detent function, Environment, Applications: Standard, Operating Temperature(°C): -10～60, Operating Pressure(MPa): -, Cushion: Rubber bumper at both ends, Port thread type: M5 x

Magnet: Built-in, Rod Type: Standard, Mounting: Foot, Bore Size: 63mm, Stroke: 15mm, Body Option: Rod End Male Thread, Auto Switch Groove: Auto Switch Mounting Grooves, Auto Switch: M9B--Solid State , Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: 5m, Number: 3 pcs.

Magnet: D (Built-in), Mounting: B [Through Hole (Standard)], Bore Size: Ø40 mm, Port Thread: M Thread [ø12-ø25]; Rc [ø32-ø100], Stroke: 25 mm, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: Z (5 m), Number: 3 pcs.

Bore Size: 12mm, Port Thread Type: M Thread (ø6-ø16); Rc (ø20-ø25), Adjuster Position Set: Right Side, Stroke: 30mm, Adjuster: ASCT (AS + CT), Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, 0.5M, Lead Wire or Prewired Connector: Z (5m), Number: 3 pcs.

Bore Size: 25mm, Port Thread: TN (NPT), Piping: Standard, Stroke: 300mm, Stroke Adjustment Unit: H (Left: w/High Load Shock Absorber & Adjustment Bolt; Right: w/High Load Shock Absorber & Adjustment Bolt), Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: Z (5m), Number: 3 pcs.