ISO Standard Hydraulic Cylinder

16 3/8 107 58 29 50 25 to 800 65 9 86 105 59 M8 x 1 11 25 M20 x 1.5 46.5 58 8 139 167 28 65 50 28 42 15 50 24 34 16 3/8 108 65 28.5 63 25 to 800 77 9 98 118 74 M8 x 1 13 32 M27 x 2 46 66 12 153 189 36 77 58 36 50 19 56 30 31 18 1/2 115 69 33 80 25 to 800 96 11 119 143 80 M10 x 1.25 17 41 M33 x 2 57 74 15 168 213 45 96 75 45 60 13 70 41 42 17 1/2 133 77 32 100 25 to 1000 115 13.5 138 162 97

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

The length is 24 when any of the following auto switches are used: D-90/90A/S99(V)/T99(V)/S9P(V) The length is 30 when any of the following auto switches are used: D-97/93A 2. The angle is 60 when any of the following auto switches are used: D-90/90A/97/93A The angle is 69 when any of the following auto switches are used: D-S99(V)/T99(V)/S9P(V) 3.

REA/REB

[In the case of model D-97, the side without indicator is (+), and the black line side is ().] 1) If connections are reversed, a switch will operate, however, the light emitting diode will not light up. Also note that a current greater than that specified will damage a light emitting diode and it will no longer operate.

C76

Stroke CZ CW CH LT LT 4-AB 4-AB CO CO CR CT CE CE CR CU CG CG (mm) Rod/Head trunnion Rod foot (Flange) Rod clevis, Head clevis AB 7 9 Bore AB 7 9 AO AU 14 20 LS LT 4 5 NH 28 33 TF 28 30 TR 52 60 UR 49 58 US 66 80 W 34 40 XL 120 154 XS 48 60 12 0.032 0.059 NB TDe8 TZ 47.9 59.3 XB 47 57 XC CW 13 17 LT 4 5 CZ XB 47 57 XC CE CG 41 52 CH 35 40 CO 4 3 CR 24 30 CT 20 28 CU 0.025 0.047 10 32 40 97

CJ2

ND h8 T 5 to 15 st 16 to 30 st 31 to 45 st 46 to 60 st 61 to 75 st 76 to 100 st 101 to 125 st 126 to 150 st 5 to 15 st 16 to 30 st 31 to 45 st 46 to 60 st 61 to 75 st 76 to 100 st 101 to 125 st 126 to 150 st CA2 46.5 (51.5) 55.5 (60.5) 59.5 (64.5) 74.5 (79.5) 83.5 (88.5) 87.5 (92.5) 101.5 73.5 (78.5) 80 81 6 M3 x 0.5 M6 x 1.0 3 3 3 12 14 28 16 15 6 0 0.018 8 14.5 (106.5) 10 16 CS1 96 97

Rotary Table: High Precision Type

Max. load current Model Applicable load Load voltage Right Left and load current handed Perpendicular In-line handed range D-90 90 Relay 5, 12, 24 V AC/DC 50mA D-90A 90A PLC 5, 12, 24 V AC/DC 50mA IC circuit 100V AC/DC 20mA D-9 D-97 97 5, 12, 24 V AC/DC 50mA Relay D-93A 93A 24 VDC 5 to 40mA PLC 100 VAC 5 to 20mA D-R731 D-R732 R73 Relay 24 VDC 5 to 40mA PLC 100 VAC 5 to 20mA D-R73 D-R731C

AC Servo Motor Driver (Pulse input type/Positioning type ）

The Z-phase was not Rotate the direct drive motor to turn on the Zphase, and make home positioning warning during magnetic pole on after servo-on. turned on. position setting. detection Alarm No.: 97 Name: Positioning specification warning Alarm content How to specify a positioning is incorrect for the positioning function. Detail No.

CLK1

Ht BY IA 43 25 40 Max.Wc 36 35 13 D 30 Width across flats K Ws Width across flats 44 Clevis width CLK1A: 16.5 R15 0.050 0.093 +0.027 0 Shaft: 12d9 Hole: 12H8 F +0.3 0 +0.4 0 CLK1B: 19.5 Z + Stroke S + Stroke 1.5 27 2 40 57 97 ZZ + Stroke Approx.

CY1

[In the case of model D-97, the side without indicator is (+), and the black line side is ().] 1) If connections are reversed, a switch will operate, however, the light emitting diode will not light up. Also note that a current greater than that specified will damage a light emitting diode and it will no longer operate.

Electric Actuator with Integrated Guide

Use special adhesive for screws for locking. 93 97 Inquiry Sheet Fill out the form and contact the nearest SMC sales office or distributor. Company name Name of customer Contact person Dept. Telephone Contact telephone/ fax no.

Table of Contents

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 54 54 55 57 58 62 65 70 69 69 72 73 74 78 78 79 81 82 84 87 89 89 90 94 94 95 97 98 1 5 Port Pilot Operated Solenoid Valve Rubber Seal Series VFR Series Variations Sonic conductance C [dm3/(sbar)] Type of actuation Voltage Electrical entry With light/

Table of Contents

Specifications. 96 97 98 99 100 100 100 102 103 105 108 108 110 111 112 112 113 113 113 114 114 116 117 117 118 120 126 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 126 126 127 127 131 131 131 132 133 133 134 135 144 144 145 145 149 149 150 151 152 153 153 153

5 Port Solenoid Valve Series SY3000/5000/7000/9000

Series SY5000 Mass (g) Port size M8 Connector Valve model Type of actuation A, B Grommet L/M plug connector DIN terminal Single 90 69 71 67 2 position Double 136 102 91 94 SY5 60-01 1/8 Closed center 3 position Exhaust center 142 108 97 100 Pressure center 114 97 91 93 Single 2 position 158 124 113 116 Double C4 One-touch fitting for 4 ( ) Closed center SY5 60-C4 3 position 164 130 119 122

Metal Seal/Rubber Seal Series VQ Body Ported

3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread D side U side Stations 1 2 3 Dimensions Formula L1 = 11n + 20 n: Station (Maximum 24) 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread 1 2 3 4 5 6 7 8 9 10 11 12 42 62.5 73 n L L1 L2 L3 31 50 60.5 75 100 110.5 53 75 85.5 86 112.5 123 64 87.5 98 97

0.4

Dust-protected SI unit: L5 = 10.5n + 97, L6 = L3 + 25, L7 = L4 + 25 Formula L1 = 10.5n + 44.5, L2 = 10.5n + 72.5 n: Station (Maximum 16 stations) 2 L n Dimensions 3 4 5 6 7 8 9 10 11 12 13 14 15 16 L1 L2 (L3) (L4) 65.5 76 86.5 97 107.5 118 128.5 139 149.5 160 170.5 181 191.5 202 212.5 93.5 104 114.5 125 135.5 146 156.5 167 177.5 188 198.5 209 219.5 230 240.5 125 125 137.5 150 162.5 175 187.5

Base Mounted Metal Seal/Rubber Seal Series VQ

~ = 2 n 2 1 3 4 5 6 7 8 Stations D side U side 3(R) EXH port DIN rail clamp screw 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread 1(P) SUP port < >: AC < >: AC Dimensions Formula L1 = 10.5n + 44.5, L2 = 10.5n + 62.5 n: Station (Maximum 24 stastions) L n 2 65.5 83.5 112.5 123 3 76 94 125 135.5 4 86.5 104.5 125 135.5 5 97

Membrane Air Dryer

.: J (NPT threads: K inch) Purge air for Purge air for dehumidification dehumidification (Maintenance space 100 mm or more) Option: P Port size L A B C D E Model F G J H K IDG10, 10H IDG20, 20H Values inside [ ] are for NPT threads. 83 187 53 165 62 97 224 119 [126] 8 5/16 1/4, 3/8 113 212 54 190 82 114 249 147 [154] 10 3/8 12 Series IDG

Dual Rod Cylinder Series CXSJ/CXS

CXS20-20A CXS20-25A CXS20-30A CXS20-35A CXS20-40A CXS20-45A CXS20-50A CXS20-60A CXS20-70A CXS20-75A CXS20-80A CXS20-90A CXS20-100A 20 92 116 30 25 97 121 30 102 126 35 107 131 40 40 112 136 45 117 141 50 122 146 60 132 156 70 142 166 75 147 171 60 80 152 176 90 162 186 100 172 196 574 Series CXS Dual Rod Cylinder With Air Cushion Dimensions: 25 57.5 22 45.5 10 2 x cushion needle 2 x Rc 1/

24

102 140 20 12.5 17.5 55.5 40 97 102 140 20 6 11 49 50 106.5 118 161 25 9.5 21 64 63 106.5 118 161 25 4.5 16 59 25 st or less Over 25 st to 75 st Over 75 st to 175 st Over 175 st 25 st or less Over 25 st to 75 st Over 75 st to 175 st Over 175 st 32 84.5 98 118 140 16 0 13.5 33.5 55.5 40 91 98 118 140 16 0 7 27 49 50 97 114 134 161 20 0 17 37 64 63 102 114 134 161 20 0 12 32 59 End Lock Mechanism

Clamp Cylinder with Lock Series CLK1

Ht BY IA 43 25 Max.Wc 40 36 35 13 D 30 Width across flats K Ws Width across flats 44 R15 Clevis width CLK1A: 16.5 0.050 0.093 +0.027 0 Shaft: 12d9 Hole: 12H8 F +0.3 0 +0.4 0 CLK1B: 19.5 Z + Stroke S + Stroke 1.5 27 2 40 57 97 ZZ + Stroke Approx.