CL

ML1C 25 Bore size (mm) Auto switch model D20 20 25 32 40 32 20 D-B5/B64 D-G5/K5 BA-01 BA-02 BA-32 BA-04 25 20 -X 10 D-C7/C80 D-H7 BMA2-020 BMA2-025 BMA2-032 BMA2-040 20Mounting screws set made of stainless steel The following set of mounting screws made of stainless steel is also available. Use it in accordance with the operating environment.

CV/MVGQ

Note 10 16 BJ2-010 BJ2-016 Common for the types of D-C7/C8 and D-H7 Type Model Features Electrical entry D-A80 D-A80H D-A80C D-C80 D-C80C D-F7NTL Grommet Reed switch Connector Grommet Connector Grommet Without indicator light With timer Solid state switch With pre-wire connector is available for D-F7NTL type, too.

CV/MVGQ

D-C7/C80 50 50 + 45 (n 2) 10 15 15 + 45 ( n 2) (n = 2, 4, 6) 2 D-H7/H7W D-H7NF D60 + 45 (n 2) 60 15 10 D-C73C/C80C D-H7C 15 + 50 ( n 2) (n = 2, 4, 6) -X 2 65 + 50 (n 2) 65 15 10 4. One-touch fitting cannot be replaced. One-touch fitting is press-fit into the cover, thus cannot be replaced.

High Power Cylinder:

Lead wire length (m)* Load voltage Style Reed switch AC Auto switch model Electrical entry Indicator Wiring (Output) DC Special function Applicable load 0.5 () 3 (L) 5 (Z) (N) 3 wire (Equiv. to NPN) 5V C76 Q IC Q Yes 100V 12V 5V 12V C73 Q Q Q Relay PLC No C80 Q 100V IC Q Grommet PLC B53 Q Q Q 12V Yes 100V 200V 200V B54 Q Q Q 12V Relay PLC No 12V B64 Q Q 2 wire 24V C73C Q Yes 12V

MLGC

Electrical entry (Fetching direction) Grommet Connector Grommet Connector Applicable bore size (mm) Type Model Features D-B80 D-B80C D-C80 D-C80C D-B53 D-B64 D-G59 D-G5P D-K59 D-G59W D-G5PW D-K59W D-G5BAL D-G59F D-G5NTL Without indicator light Reed switch Grommet Without indicator light 20 to 40 Diagnostic indication (2-color indication) Grommet Solid state switch Water resistant (2-color

NCQ8

400 NCQ8B150-012 025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 NCQ8B200-012 025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 NCQ8B250-012 025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 NCQ8B300-012 025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 NCQ8B400-012 025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 #10-24UNC-1 1/8 1 1/4

NCQ8

Mounting bolt C D Mounting Bolt Size for NCQ8B056 to 250(Without Auto Switch) (Inch) Model C D Bolt size Model C D Bolt size NCQ8B056-012 025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 NCQ8B075-012 025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 NCQ8B106-012 025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 NCQ8B150-012 025 037 050 062 075 087 100 125 150

Compact Cylinder Series NCQ8

Mounting bolt C D Mounting Bolt Size for NCQ8B056 to 250(Without Auto Switch) (Inch) Model C D Bolt size Model C D Bolt size NCQ8B056-012 025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 NCQ8B075-012 025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 NCQ8B106-012 025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 NCQ8B150-012 025 037 050 062 075 087 100 125 150

MB

D-Z7/Z80 D-Y59/Y69 D-Y7P/Y7PV D-Y7W D-Y7WV D-Y7BAL BMB3T-040 BMB3T-040 BMB3T-050 BMB3T-050 BMB3T-080 BMB3T-080 BMB4-032 BMB4-032 BMB4-050 BMB4-050 BA4-063 BA4-063 [A set of stainless steel mounting screws] A set of following stainless steel mounting screws is attached.

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

0EX500-AC 050 DN 7 1 2 5 14.9 Cable length (L) 4 3 40.7 50 Socket connector pin assignment 010 1000 mm 050 5000 mm L Terminal no.

Aluminum High Vacuum Angle Valve

-XN1 AS568-050-XP1 AS568-050-XQ1 AS568-050-XR1 AS568-050-XR2 AS568-050-XR3 AS568-050-XS1 AS568-050-XT1 AS568-050-XU1 Symbol Component Parts No. 1 2 2-1 3 4 5 6 Description Material Remarks O-ring Part No.

High Vacuum Angle Valve

-XN1 AS568-050-XP1 AS568-050-XQ1 AS568-050-XR1 AS568-050-XR2 AS568-050-XR3 AS568-050-XS1 AS568-050-XT1 AS568-050-XU1 Symbol Component Parts No. 1 2 2-1 3 4 5 6 Description Material Remarks O-ring Part No.

0.4

Cable Assembly Electrical Wiring Specifications AXT100-DS25015 030 050 D-sub connector D-sub connector cable assembly can be ordered with manifolds. Refer to How to Order Manifold. As the standard electrical wiring specifications, double wiring (connected to SOL. A and SOL.

EX120/121/122

(l) 18 010 050 1000 [mm] 5000 [mm] 14.9 34 30 5 50 48 l Terminal no.

5 Port Solenoid Valve

Note SOL.A 9 Station 9 SOL.B 22 1.5 m 3 m 5 m AXT100-DS25-015 AXT100-DS25-030 AXT100-DS25-050 Cable 0.3 mm2 x 25 cores SOL.A 10 Station 10 SOL.B 23 SOL.A For other commercial connectors, use a 25pin type with female connector conforming to MIL-C-24308.

5 Port Solenoid Valve

Cable Assembly Electrical Wiring Specifications AXT100-DS25015 030 050 D-sub connector D-sub connector cable assemblies can be ordered with manifolds. Refer to manifold ordering. As the standard electrical wiring specification used is for 12 stations or less, double wiring (connected to SOL. A and SOL.

0.4

D-sub connector assembly wire colors 55 015 030 050 (AXT100-DS25) 1425 Terminal no. Polarity Terminal no.

SQ1000/2000

Configuration Maximum number of stations Series Port position Port size P, R A, B C8 C3, C4, C6, M5 12 stations (24 stations optional) SQ1000 Side, Top D-sub connector (25P) U side Cable assembly AXT100-DS25015 030 050 D-sub connector cable assemblies can be ordered with manifolds.

Thermo-chiller

/050 R1/2 2 For CH2 u Ball valve Stainless steel HRLE090/050 Rc1/2 1 For CH2 r e q [CH1 side] i Different diameter tee Stainless steel HRLE090/050 Rc1/2 x Rc3/8 1 For CH2 o Sealant tape PTFE HRLE090/050 1 23 A HRLE Series Cooling Capacity Calculation Required Cooling Capacity Calculation Example 1: When the heat generation amount in the customer equipment is known.

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

BMB4-050 BA4-063 BA4-063 BA4-080 D-G39/K39 D-A3m/A44 BMB2-032 BMB2-040 BMB1-050 BMB1-063 BMB1-080 BMB1-100 BS1-125 D-P4DW BMB3T-040 BMB3T-040 BMB3T-050 BMB3T-050 BMB3T-080 BMB3T-080 BAP2T-080 [Stainless Steel Mounting Screw] The following stainless steel mounting screw kit (including set screws) is available.