Mounting: MP2, Detachable Rear Clevis, Bore Size: 2", Stroke: 24", Option: Both Ends (Air Cushion), X Option: XB6 [Heat Resistant Cylinder, up to 300°F (150°C)]

Mounting: MF1, Front Flange, Bore Size: 2", Stroke: 24", Option: Both Ends (Air Cushion), X Option: XB6 [Heat Resistant Cylinder, up to 300°F (150°C)]

Mounting: MF1, Front Flange, Bore Size: 3 1/4", Stroke: 24", Option: Both Ends (Air Cushion), X Option: XB6 [Heat Resistant Cylinder, up to 300°F (150°C)]

Mounting: MS1, Foot, Bore Size: 2", Stroke: 24", Option: Both Ends (Air Cushion), X Option: XB6 [Heat Resistant Cylinder, up to 300°F (150°C)]

Mounting: MS1, Foot, Bore Size: 1 1/2", Stroke: 24", Option: Both Ends (Air Cushion), X Option: XB6 [Heat Resistant Cylinder, up to 300°F (150°C)]

Mounting: MX0, Basic, Bore Size: 1 1/2", Stroke: 24", Option: Both Ends (Air Cushion), X Option: XB6 [Heat Resistant Cylinder, up to 300°F (150°C)]

Cylinder (Tube) Inner Diameter(φ): 3 1/4", Stroke(mm): 24", Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: -, Environment, Applications: Standard, Auto Switches: Without auto switch, Lead Wire Length(m): N/A, The number of the switches: N/A, Type of Auto Switch Mounting: N/A, Custom-made Specifications

Cylinder (Tube) Inner Diameter(φ): 3 1/4", Stroke(mm): 24", Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: -, Environment, Applications: Standard, Auto Switches: Without auto switch, Lead Wire Length(m): N/A, The number of the switches: N/A, Type of Auto Switch Mounting: N/A, Custom-made Specifications

(Or None in the Case of No Switch), X Option: XB6 [Heat Resistant Cylinder, up to 300°F (150°C)]

(Or None in the Case of No Switch), X Option: XB6 [Heat Resistant Cylinder, up to 300°F (150°C)]

(Or None in the Case of No Switch), X Option: XB6 [Heat Resistant Cylinder, up to 300°F (150°C)]

(Or None in the Case of No Switch), X Option: XB6 [Heat Resistant Cylinder, up to 300°F (150°C)]

(Or None in the Case of No Switch), X Option: XB6 [Heat Resistant Cylinder, up to 300°F (150°C)]

(Or None in the Case of No Switch), X Option: XB6 [Heat Resistant Cylinder, up to 300°F (150°C)]

(Or None in the Case of No Switch), X Option: XB6 [Heat Resistant Cylinder, up to 300°F (150°C)]

HRX-OM-W002

R410A(HFC) Quantity of refrigerant Kg 0.36 0.36 0.38 0.38 0.47 0.47 Control method PID control Ambient temperature andhumidity and altitude 1 Temperature:5 to 40,Humidity:30 to 70%,Altitude: Less than 3000m Circulating fluid2 Tap water, Ethylene glycol aqueous solution 15% Operating temperature range1 5 to 3520 Cooling capacity(50/60Hz) 3 W 1000/1200 1600/1800 1000/1200 1600/1800 2000/2400

A-HEC-OM-J004

-232C SG 6-9 Unused Unused Communication connector D-sub 9 pin (female) 7.3 Specifications of Connectors 7-7 A_HEC-OM-J004-4 Chapter 7 Appendix 7.4 Communication 7.4.1 Specifications Table 7-2 Communication Communication type HEBC002-WA10 HEBC002-WB10 Protocol RS-485 RS-232C Circuit type Half duplex Half duplex Communication type Asynchronous Asynchronous Communication speed (BPS) 1200/2400

High Vacuum L Type Valve

H5 Initial power / Power consumption (W) 100 VAC 200/40 400/70 400/80 600/130 800/180 200 VAC 800/40 1600/80 1600/80 2400/130 3200/180 Note 1) Initial power and power consumption are nominal values. Note 2) Heaters are not available for size 16.

XL-OMY0001

/150 XL1A25-60S-3 XL1A25-60S-2 1 2 H5 AC100V 600/130 800/180 / AC200V 2400/130 3200/180 1[W] 216 PTC 200V PTC 200 150 100V PTC 0 5 10 15 20 25 30 ( 30 10 XL-OMY0001 5 5-1 1 , SUS304 8 4 SUS304 10 , SUS316L 7 5 A6063 2 1 6 SUS304 3 2 9 2 SUS304 SUS304 11 XL-OMY0001 5-2 C E E E KF K Fd Fn C D H B A G A mm A B C D E Fn Fd G H XLA-16-2 40 108 38 20 30 17

High Vacuum L Type Valve

H5 Initial power / 100 VAC 200/40 400/70 400/80 600/130 800/180 Power 200 VAC 800/40 1600/80 1600/80 2400/130 3200/180 consumption (W) Note 1) Initial power and power consumption are nominal values. Note 2) Heaters are not available for size 16.