REA/REB

N (mm) HP HO HI HG HB HA H GP G FB FA EB EA d D C B Model A REAL15 REAL20 REAL25 REAL32 REAL40 39 38 14 16 4 6.5 40 65 6.5 6 3 13 6 12 16.6 5 9.5 7.5 45 44 16 18 10 9 46 80 8.5 16 21.6 5 9.5 9.5 53 52 21 23 18 9 54 90 8.5 7 4 14 8 16 26.4 6.5 11 9.5 64 26.5 24.5 64 26.5 110 66 12 9.5 16 5 7 8 8 33.6 20 14 10.5 76 74 28.5 12 35 30.5 78 10 10.5 130 5 25 10 20 41.6 11.5 14 8 PA N PB PW M JK

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

R R ot ot at at R io io ot n n at ra ra A io n gl e n n n a g dj g ra us e e ti A ng A n of n g ng of gl e di e le k re of k a e ad dj ct e y ke us io ju y n st gr ti y gr n in g o gr g o o di oo di o v re re v e ve ct e ct io 9 io 9 18 n 0 n 0 0 Angle adjusting screw The rotation range under the adjustment of an angle at 120 is indicated below.

MXQ

-75 MXQ8-75 MXQ8-75 0.04 MXQ8-20 MXQ8-40 MXQ8-20 MXQ8-20 MXQ8-40 MXQ8-40 MXQ8-10 MXQ8-10 MXQ8-10 MXQ8-30 0.005 MXQ8-30 MXQ8-30 MXQ8-50 MXQ8-50 MXQ8-50 MXQ8-50 0.01 MXQ8-50 MXQ8-50 MXQ8-10 0.02 MXQ8-10 MXQ8-10 0 40 80 120 0 0 20 40 60 20 40 60 Load (N) Load (N) Load (N) 12 12 12 Lr = 90 mm MXQ12-30 MXQ12-30 MXQ12-20 MXQ12-20 MXQ12-10 MXQ12-10 MXQ12-100 MXQ12-75 MXQ12-50 MXQ12-40 MXQ12-30 MXQ12

CL

, #8 (#1+#8+#12) CLM2T25SCLM225, #8 (#1+#8+#12) CLM2T32SCLM232, #8 (#1+#8+#12) Fine Lock Cylinder/Double Acting Single Rod Series CLG1 20, 25, 32, 40 How to Order CL MLGC CLG1 100 L E N 25 Standard CNA CDLG1 With auto switch 100 L E N 25 C73 CB CV/MVG Auto switch fine lock cylinder Number of auto switches CXW 2 1 n S n Auto switch CXS Mounting B L F G U T D Without auto switch (Built-in

7.5

14.5 17 13.5 16 12 14.5 17 13.5 16 12 14.5 n L 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 L1 L2 L3 L4 335.5 348 348 360.5 360.5 373 273 273 285.5 285.5 298 310.5 310.5 323 323 262.5 262.5 275 275 287.5 300 300 312.5 312.5 325 337.5 337.5 350 350 362.5 238.7 246.2 253.7 261.2 268.7 276.2 283.7 291.2 298.7 306.2 313.7 321.2 328.7 336.2 343.7 17 13.5 16 12 14.5 17 13.5 16 12 14.5 17 13.5

15

M4 x 12 2.5 9 5.2 NW M4 x 12 2.5 9 12.5 NV M4 x 12 2.5 9 5.2 NU M4 x 12 2.5 11 12.5 NT M3 x 12 1.5 12 17.5 NM1 M4 x 5 1.5 6.35 4.5 NM2 M4 x 12 2.5 10 12 Motor type MM TT PD FP NZ M3 x 12 1.5 14 17.5 NY M3 x 12 1.5 14 17.5 NX M4 x 12 2.5 9 5.2 NW M4 x 12 2.5 9 13 NV M4 x 12 2.5 9 5.2 NU M4 x 12 2.5 11 13 NT M3 x 12 1.5 12 17.5 NM1 M4 x 5 1.5 6.35 5 NM2 M4 x 12 2.5 10 12 Included Parts List

Air Slide Table Series MXS

Load (N) Load (N) 8 8 8 Lr=50 mm 0.020 0.04 0.05 MXS8-75 MXS8-50 MXS8-20 MXS8-10 MXS8-30 MXS8-40 MXS8-50 0.04 0.015 0.03 MXS8-40 MXS8-30 MXS8-40 MXS8-50 0.03 MXS8-75 MXS8-75 MXS8-30 MXS8-20 0.010 0.02 MXS8-20 MXS8-10 0.02 MXS8-10 0.005 0.01 0.01 20 40 60 80 20 40 60 0 0 0 20 40 60 80 Load (N) Load (N) Load (N) 12 12 12 Lr=65 mm 0.035 0.10 0.04 Table displacement amount (mm) 0.030 0.08 MXS12

MXS Series Air Slide Table

0.04 0.05 MXS8-75 MXS8-50 MXS8-20 MXS8-10 MXS8-30 MXS8-40 MXS8-50 0.04 0.015 0.03 MXS8-40 Table deflection mm Table deflection mm Table deflection mm MXS8-30 MXS8-40 MXS8-50 0.03 MXS8-75 MXS8-75 MXS8-30 MXS8-20 0.010 0.02 MXS8-20 0.02 MXS8-10 MXS8-10 0.005 0.01 0.01 20 40 60 80 20 40 60 0 0 0 20 40 60 80 Load N 1N = 0.2248 lbf Load N 1N = 0.2248 lbf Load N 1N = 0.2248 lbf 12 12 12 Lr=65mm

MY1

Applicable cylinder MY1B20 MY1B25 MY1B32 MY1B40 W 53 60 74 94 TT 6 (max. 12) 5 (max. 16.5) 8 (max. 20) 9 (max. 25) T 6 7 12 12 S 40.8 46.7 67.3 67.3 h 3.2 3.5 4.5 4.5 FW 46 56 56 FH 12 16 16 FC 13 13 17 17 FB 33 43 43 F 4 6 6 6 EY 45.6 53.5 67 81.5 EC 5.8 6.5 8.5 9.5 EB 43 49 61 76 E 19 20 25 31 EA 9 10 12 15 RB1412 TT High load shock absorber + Adjusting bolt MY1B Bore size h Stroke

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

x 5.5 LEC 6 60 LEC S LEC SS-T 200 5 15 B D x 200 (= E) LEC Y LEC Y Motorless Motor option: With lock LAT (1.4) 96 LZ Dimensions [mm] Stroke L A B n D E 300 590 306 430 6 2 400 400 690 406 530 6 2 400 500 790 506 630 8 3 600 600 890 606 730 8 3 600 700 990 706 830 10 4 800 800 1090 806 930 10 4 800 900 1190 906 1030 12 5 1000 1000 1290 1006 1130 12 5 1000 1100 1390 1106 1230 14 6 1200 1200

Air Slide Table Series MXQ

"# An (n = 1 to 6) E Emax Ln (n = 1 to 3) M (Mp, My, Mr) Ma (Map, May, Mar) Me (Mep, Mey) Mea (Meap, Meay) Mmax (Mpmax, Mymax, Mrmax) V > 8 7 7 7 7 Va W Wa We Wmax K D-X Individual -X 4 -& Air Slide Table Series MXQ 6, 8, 12, 16, 20, 25 How to Order MXQ 12 50 M9BW AS FR Number of auto switches 2 pcs. 1 pc. n pcs.

MXS

MXS8-10 MXS8-30 MXS8-40 MXS8-50 0.04 0.015 Table deflection (mm) Table deflection (mm) Table deflection (mm) 0.03 MXS8-40 MXS8-30 MXS8-40 MXS8-50 0.03 MXS8-75 MXS8-30 MXS8-75 MXS8-20 0.010 0.02 MXS8-20 0.02 MXS8-10 MXS8-10 0.005 0.01 0.01 20 40 60 80 20 40 60 0 0 0 20 40 60 80 Load (N) Load (N) Load (N) 12 12 12 Lr=65mm 0.035 0.10 0.04 0.030 0.08 MXS12-100 MXS12-75 MXS12-50 MXS12-75 Table

CRB2/CRBU2/CRB1

Single vane type Double vane type 90 180 270 90 r a n n o n a g r e g ti n 2 e a o n r a o n 7 ti t g ti 1 a o 0 e a t 8 o r 9 t +4 0 r 0 o 0 y y r e +4 0 +4 0 e Key y K K e K Key Key +4 0 (45) 0 Standard Optional Key 9 e g n ra n o ti a t o r (90) y e K (45) (45) A port A port A port A port B port B port B port B port 100 190 280 100 a r n n g a r n n o g e io e ti at r n a 1 o a n 1

CV/MVGQ

, 12, 16 90 + 55 (n 4) 2 15 + 55 (n 2) 2 n = 4, 8, 12, 16 100 + 55 (n 4) 2 n = 4, 8, 12, 16 110 + 55 (n 4) 2 120 + 55 (n 4) 2 n = 4, 8, 12, 16 n (Same side) n = 2, 4, 6, 8 2 (Different sides, Same side) 90 100 110 120 20 n = 2, 4, 6, 8 n = 4, 8, 12, 16 90 + 55 (n 4) 2 20 + 55 (n 2) 2 n = 4, 8, 12, 16 100 + 55 (n 4) 2 n = 4, 8, 12, 16 110 + 55 (n 4) 2 120 + 55 (n 4) 2 n = 4, 8, 12

Fieldbus System

(5.5) (35) 14 14 14 14 14 14 14 14 106 8 90 62 4 72 (51.8) (39) 12 12 12 12 12 5 Valve plate FE terminal SI Unit Communication connector 2 x M4 Mounting hole 4 x M4 Mounting hole Digital Output Unit Connector for Handheld Terminal L3 L5 End plate Output connector Digital Input Unit Input connector C8, N9: 3(R) port C8: 8 One-touch fitting N9: 5/16" One-touch fitting 4 1 2 3 5 6 7 8 n U side

CJ2

Nil S N 2 pcs. 1 pc. n pcs. N Non-locking type C95 Manual release CP95 NCM Applicable Auto Switch/Refer to page 6-16-1 for further information on auto switches.

Secondary Batteries

2 pcs. 1 pc. n pcs.

CV/MVGQ

8, 12, 16 n -X n = 4, 8, 12, 16 2 (Different sides, Same side), 1 75 80 90 10 65 20D-Y69/Y7PV D-Y7WV (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 2) 2 n 90 + 30 80 + 30 n = 4, 8, 12, 16 75 + 30 n = 4, 8, 12, 16 65 + 30 n = 4, 8, 12, 16 15 + 30 n = 2, 4, 6, 8 n = 4, 8, 12, 16 Data 10-15-77

5 Port Solenoid Valve Series VQZ1000/2000/3000

(43) 2.5 (22.5) 0.5 VQZ 2n x M5 x 0.8 2n x one-touch fitting assembly (A, B port) Applicable tubing O.D.: 3.2, 4, 6 2n x M5 x 0.8 2n x one-touch fitting assembly (A, B port) Applicable tubing O.D.: 3.2, 4, 6 45.5 2.5 SQ 10.5 (5) Formula L1 = 11n + 20 n: Station (Maximum 24 stations) 21.5 Dimensions VFS L n 1 7.5 2 3 4 5 6 7 8 11 9 10 12 29 L1 L2 L3 18 31 42 53 64 75 86 97 108 141 119 130

Series VQ Base Mounted Metal Seal/Rubber Seal

] (mm) Equation L1=10.5n+72 n: Station (Max. 16) L n 1 82.5 137.5 148 11 187.5 237.5 248 10 177 225 235.5 16 240 287.5 298 15 229.5 287.5 298 14 219 275 285.5 13 208.5 262.5 273 12 198 250 260.5 9 166.5 225 235.5 8 156 212.5 223 7 145.5 200 210.5 6 135 187.5 198 5 124.5 175 185.5 4 114 162.5 173 3 103.5 150 160.5 2 93 150 160.5 L1 L2 L3 Dimensions/Side entry connector [-PS] (mm) L n 11 262.5