DOC1023126

4.68 4.97 5.25 5.54 EQY25 (Motor mounting position: In-line) Series Additional mass Stroke[mm] 30 50 100 150 200 250 300 350 400 w ith lock 0.31 Product weight[kg] 1.60 1.67 1.84 2.10 2.28 2.45 2.63 2.80 2.98 EQY32 (Motor mounting position: In-line) Series Additional mass Stroke[mm] 30 50 100 150 200 250 300 350 400 450 500 w ith lock 0.58 Product weight[kg] 2.55 2.66 2.95 3.23 3.63 3.92

Industrial Filters

FGDE Seal kit w, r, y, !3, !6: 1 pc. each FGDT FGDF u, o, !1, !2, !3, !4, !5, !6, !7 : 1 pc. each Note) Only the FGD-CA003 and CA005 includes !8 element guide in the set.

Electric Actuator / Slider type 《 Battery-less absolute encoder type (Step motor 24VDC) 》

Weight Series Stroke[mm] 50 100 150 200 250 300 350 400 450 500 LEKFS16 Product weight[kg] 0.9 1 1.1 1.2 1.3 1.4 1.5 1.5 1.6 1.7 0.12 Additional weight with lock[kg] LEKFS25 Series Stroke[mm] 50 100 150 200 250 300 350 400 450 500 600 700 800 Product weight[kg] 1.7 1.8 1.9 2.1 2.3 2.4 2.5 2.6 2.8 2.9 3.2 3.4 3.7 0.26 Additional weight with lock[kg] LEKFS32 Series Stroke[mm] 50 100 150 200

CG5-S

GA GB 2-P Bore size A AL B1 H H1 MM ZZ W 10 M BM H1 20 14 12.7 11.0 25.4 4.0 1/4-28 108.4 25 14 12.7 12.6 28.4 4.8 5/16-24 111.4 Max.

Electric Actuator / Slider Type 《 AC Servo Motor 》

Motor type T7 3.31 3.51 3.71 3.91 4.11 4.31 4.51 4.71 4.91 5.11 5.31 5.51 5.71 5.91 6.11 6.31 6.51 6.71 6.91 7.11 Additional weight for lock[kg] S3:0.4/S7:0.7/T7:0.5 Series LEFS40 Stroke[mm] 150 200 250 300 350 400 450 500 550 600 650 700 750 800 850 900 950 1000 1100 1200 S4 5.82 6.10 6.38 6.65 6.95 7.25 7.51 7.80 8.07 8.25 8.63 8.90 9.20 9.45 9.76 10.05 10.32 10.60 11.16 11.72 S8 5.92

Base Mounted Metal Seal/Rubber Seal Series VQ

to 6 t t Pilot valve assembly Double/3 position Pilot valve assembly Double/3 position Note) (H): 1.5 W, (Y): 0.5 W Note) (H): 1.5 W, (Y): 0.5 W 2-4-223 Series VQ Construction: VQ0/Plug Lead Unit Metal seal Rubber seal type Component Parts Component Parts Note q w e Note q w e Material Material No.

HRX-OM-W002

9-11 HRR Series HRX-OM-W002 Contents 9.4.2 HRR018-A/W-10/20. 9-11 9.4.3 HRR024-A/W-20. 9-12 9.4.4 HRR030-A/W-20. 9-12 9.5 Heating capacity . 9-13 9.5.1 HRR012-A/W-10-,HRR018-A/W-10-. 9-13 9.5.2 HRR012-A/W-20,HRR018-A/W-20 . 9-13 9.5.3 HRR024-A/W-20,HRR030-A/W-20 . 9-13 9.6 Pump capacity. 9-14 9.6.1 HRR012/018/024/030-A/W. 9-14 9.6.2 HRR012/018-A/W-10-T/MT . 9-14 9.6.3 HRR012/018/024/030-A

42

Figure shows VV5Q41-08C12SQ-W.

Modular Design with Uniform Body Style

1 q r e w t i y u o !0 !

0.4

5 Port Solenoid Valve Metal Seal / Rubber Seal [Option] RoHS compliant Power saving Power saving Standard: 0.4 W Standard: 0.4 W (Reduced by 60% compared to existing model) compared to existing model) (Reduced by 60% compared to existing model) High-pressure (1 MPa, Metal seal): 0.95 W High-pressure (1 MPa, Metal seal): 0.95 W CAT.ES11-100A Series VQ1000/2000 5 Port Solenoid Valve Series

AC Servo Motor Driver (CC-Link Type ）

W 11 3 11.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note) Refer to page 568 for How to Order Pilot Valve Assembly. 564 VQ1000/2000 10211021-VQ2000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w 1021-VQ2101 (B) 2 (A) 4 1021-VQ2100 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e q w 1021-VQ2200 1021-VQ2201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w 1021-VQ2300

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note) Refer to page 568 for How to Order Pilot Valve Assembly. 564 VQ1000/2000 10211021-VQ2000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w 1021-VQ2101 (B) 2 (A) 4 1021-VQ2100 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e q w 1021-VQ2200 1021-VQ2201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w 1021-VQ2300

1.1

j Model HRG001-A HRG001-W HRG002-A HRG002-W HRG005-A HRG005-W HRG010-A HRG010-W HRG015-A HRG015-W 61 61 94.5 334 105 330 480 640 265.5 315.5 480 61 94.5 105 330 480 640 265.5 315.5 480 61 94.5 334 105 330 480 640 265.5 315.5 480 153 298 398.5 451.5 135 625 741 153 298 398.5 451.5 135 325 625 741 242 342 402 452 115 230 400 560 242 342 402 452 115 230 400 560 850 1100 242 342 402 452

10

Body material: AIuminum, C37, Stainless steel Body material: Resin q q w w e e r r t t y y IN OUT IN OUT u u Component Parts Component Parts No. Description No.

1

MY1M(W) MB 8 Mechanically jointed rodless cylinder MY1 Cam follower guide type With cover (W) is also available.

Slider Type/Ball Bushing Bearing

D 1.6 x P 0.1 x Wcos + Wsin D 5.0 x P 0.1 x W + W D 5.0 x P W W > Wv P > Pv Determination of allowable load mass & pressure Inclined operation (For vertical operation, refer to page 1515.)

New

Manufacturers Association) Body Series VXN material Air Air Medium vacuum Medium vacuum Oil Water C37 (Brass), Stainless steel Power consumption 4.5 W (Size 1) 7 W (Size 2) 20 W (Size 3) (DC) C37 (Brass) body Stainless steel body Body Series VX2 material Air Air Aluminum, Resin Power consumption 4.5 W (Size 1) 7 W (Size 2) 10.5 W (Size 3) (DC) Aluminum body Resin body CAT.ES70-48A Series

Series AK1000

Refer to gauge guide (P.94,95). t t r Sample Order Number Port w w w q q q t AK1002S e q 4 4 4 4 4 w 4 4 4 4 4 r 2P 3P 4P 4PL 5PC 2P 3P 4P Pressure gauge unit 2) MPA MPA MPA MPA V3 V3 V3 V3 t r t 1 Unit psig/bar MPa Code 0 0 No code MPA 1 w w q q 2) Pressure gauge unit MPa or psig/bar selectable.

7ND9071en

Output: Ui 28 V, Ii 120 mA, Pi 1 W, Ci 22 nF, Li 53 H.