SZ3000

L n 2 5 6 7 8 9 10 4 3 Internal Pilot Manifold L Dimension n: Stations L n 2 5 6 7 8 9 10 4 3 External Pilot Manifold L Dimension n: Stations L1 L2 L3 L4 L1 L2 L3 L4 98 87.5 70 14 110.5 100 80.5 15 123 112.5 91 16 135.5 125 101.5 17 135.5 125 112 12 148 137.5 122.5 13 160.5 150 133 14 173 162.5 143.5 15 185.5 175 154 16 110.5 100 80.5 15 123 112.5 91 16 135.5 125 101.5 17 135.5 125 112 12

Compressed Air Cleaning Filter Series

(Element life check) Max. contact capacity: 10 VA AC, 10 W DC Rated contact voltage (max. operating current): 125 V AC (0.08 A), 30 V DC (0.33 A) Max. contact capacity: 10 W DC Rated contact voltage (max. operating current): 30 V DC (0.33 A) Pressure drop 0.1 MPa Symbol V: Degreasing wash, white vaseline Reed switch Reed switch Body/housing is degreasing washed.

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

5 w !9 !0 !7 u !7 w @1 !9 !3 @3 !2 !0 o @0 i A A MX MTS MY CY !4 !3 y e !2 q r t o !6 @0 !4 !1 q !6 i t y e !5 r u !

CG5-S

(G) T0403 Color symbol -20 T1075 Color symbol -100 Black (B) Black (B) Clear (C) Clear (C) 10 7.5 3 White (W) White (W) Orange (YR) Orange (YR) T1209 Color symbol -100 Black (B) Black (B) Black (B) Black (B) 12 9 White (W) White (W) White (W) White (W) T1613 Color symbol -100 Red (R) T0604 Black (B) Red (R) Red (R) 16 13 4 TU0604 TU0604 Blue (BU) Color symbol -20 White (W) Blue (BU) Blue

CG5-S

(G) T0403 Colour symbol -20 T1075 Colour symbol -100 Black (B) Black (B) Clear (C) Clear (C) 10 7.5 3 White (W) White (W) Orange (YR) Orange (YR) T1209 Colour symbol -100 Black (B) Black (B) Black (B) Black (B) 12 9 White (W) White (W) White (W) White (W) T1613 Colour symbol -100 Red (R) T0604 Black (B) Red (R) Red (R) 16 13 4 TU0604 TU0604 Blue (BU) Colour symbol -20 White (W) Blue (BU)

0.4

5 Port Solenoid Valve VQ1000/2000 Series Metal Seal Rubber Seal SV [Option] Power saving Power saving SYJ Standard: 0.4 W Standard: 0.4 W SZ (Reduced by 60% compared to current model) (Reduced by 60% compared to current model) VF VP4 High-pressure (1 MPa, Metal seal): 0.95 W High-pressure (1 MPa, Metal seal): 0.95 W VQ 1/2 VQ 1/2 VQ 4/5 VQC 1/2 VQC 4/5 VQZ SQ VFS VFR VQ7 365 5 Port Solenoid

CXS

CXS15 CXS20 CXS25 CXS32 Model 120 150 200 175 150 125 120 110 200 175 150 125 120 110 200 175 150 125 120 110 125 120 110 150 125 110 100 90 80 Stroke SS ZZ Z 175 210 282 257 232 207 202 192 272 247 222 197 192 182 270 245 220 195 190 180 185 180 170 205 180 165 155 145 135 Symbol Made to Order 192 229 312 287 262 237 232 222 296 271 246 221 216 206 294 269 244 219 214 204 204 199 189 222

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

Internal Pilot Manifold L Dimension n: Stations External Pilot Manifold L Dimension n: Stations L n 2 98 87.5 70 14 L n 2 110.5 100 80.5 15 3 110.5 100 80.5 15 4 123 112.5 91 16 5 135.5 125 101.5 17 6 135.5 125 112 12 7 148 137.5 122.5 13 8 160.5 150 133 14 9 173 162.5 143.5 15 10 185.5 175 154 16 3 123 112.5 91 16 4 135.5 125 101.5 17 5 135.5 125 112 12 6 148 137.5 122.5 13 7 160.5 150 133

Cylinder with Lock Series CNS

(mm) Bore size Auto switch model Bore size (mm) Auto switch model 125 140 160 125 140 160 D-A9/A9V D-A9/A9V D-M9/M9V D-M9W/M9WV D-M9AL/M9AVL 12 12.5 11.5 D-M9/M9V D-M9W/M9WV D-M9AL/M9AVL BS5-125 BS5-125 BS5-160 7 6.5 6.5 D-A5/A6/A59W D-F5/J5/F5NTL D-F5W/J59W D-F5BAL/F59F D-Z7/Z80 CLJ2 14 14.5 13 BT-12 BT-12 BT-16 D-A3/A44 D-A5/A6 10 10 10 CLM2 D-A3/A44 D-G39/K39 D-A59W 17 17 17 BS1-125 BS1

AC Servo Motor Driver (Network card type ）

(U/V/W).

ZP

Form w 1 Material e Buffer spec.

Series AP3500

q e r q e r q e r q e r w w w w 125 Process Gas Equipment / Diaphragm Valve Specific Product Precautions Be sure to read before handling.

Clamp Cylinder Series CK1

-125/CKP150-125 CKG163-125/CKP163-125 Auto Switch Mounting Bracket Assembly / Part No.

CP95

, 160, 200, 250, 320, 400, 500 40 800 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 Refer to page 6-13-20 for Minimum Stroke for Auto Switch Mounting. 50 1200 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 63 1200 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 80 1400 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 100 1500 25, 50, 80, 100, 125, 160

CP95

, 160, 200, 250, 320, 400, 500 40 800 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 Refer to page 6-13-20 for Minimum Stroke for Auto Switch Mounting. 50 1200 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 63 1200 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 80 1400 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 100 1500 25, 50, 80, 100, 125, 160

24

Standard Strokes Bore size [mm] Standard stroke [mm] 12, 16 10, 20, 30, 40, 50, 75, 100, 125, 150, 175, 200, 250 20, 25 20, 30, 40, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400 32 to 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400 Made to Order: Individual Specifications (For details, refer to page 491.)

SQ1000/2000

1 Port plugs> CP VVQZ3000 w e r t

Environment

PB H thread depth C Vent hole Note 3) J PC EV Z T M U D K Note 2) L R 4 x O1 thread depth R W A + Stroke B + Stroke S EH M 6 x MO thread depth MR XA H9 depth XA MH Section XX details MA ML + Stroke MC MD Section XX XB XA H9 XA [mm] Incremental encoder Absolute encoder B C D EH EV Without lock With lock Without lock With lock A W Z A W Z A W Z A W Z Size Stroke range [mm] 25 15 to 100 238

Compact Cylinder with Lock Series CLQ

65 -15D -15D x 80 L x 95 L x 120 L x 70 L 80 95 120 70 CLS -20D -20D x 85 L x 100 L x 125 L x 75 L 85 100 125 75 -25D -25D x 90 L x 105 L x 130 L x 80 L 90 105 130 80 8.5 CLQ -30D -30D x 95 L x 110 L x 135 L x 85 L 95 110 135 85 -35D -35D 8.5 15.5 16.5 x 100 L x 115 L x 140 L x 90 L 100 115 140 90 RLQ -40D -40D x 105 L x 120 L x 145 L x 95 L 105 120 145 95 -45D -45D x 110 L x 125 L x 150

ISO Standard Hydraulic Cylinder

1 w !